by reactive sputtering

Industry

CPC
C30B25/06

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

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C30B25/06by reactive sputtering

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming monocrystalline nickel-titanium films on single c...
- Patent number 12,116,271
- Issue date Oct 15, 2024
- Arizona Board of Regents on behalf of Arizona State University
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing nitride catalyst
- Patent number 12,077,873
- Issue date Sep 3, 2024
- Industrial Technology Research Institute
- Kuo-Hsin Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Nanocomposite-seeded epitaxial growth of single-domain lithium niob...
- Patent number 11,746,437
- Issue date Sep 5, 2023
- Purdue Research Foundation
- Haiyan Wang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Controlled homo-epitaxial growth of hybrid perovskites
- Patent number 11,572,635
- Issue date Feb 7, 2023
- The Regents of the University of California
- Sheng Xu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Electron beam heating and atomic surface restructuring of sapphire...
- Patent number 11,299,820
- Issue date Apr 12, 2022
- UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF NASA.
- Sang H. Choi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Composite nitride-based film structure and method for manufacturing...
- Patent number 11,280,027
- Issue date Mar 22, 2022
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Takahide Hirasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lift pin, and epitaxial growth apparatus and method of producing si...
- Patent number 11,264,265
- Issue date Mar 1, 2022
- Sumco Corporation
- Masaya Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitride catalyst and method for manufacturing the same
- Patent number 10,900,133
- Issue date Jan 26, 2021
- Industrial Technology Research Institute
- Kuo-Hsin Lin
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Single-crystal perovskite solid solutions with indifferent points f...
- Patent number 10,844,516
- Issue date Nov 24, 2020
- Quest Integrated, LLC
- Vincent Fratello
- C30 - CRYSTAL GROWTH
Information Patent Grant
Epitaxial film forming method, sputtering apparatus, manufacturing...
- Patent number 10,844,470
- Issue date Nov 24, 2020
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radical generator and molecular beam epitaxy apparatus
- Patent number 10,577,719
- Issue date Mar 3, 2020
- National University Corporation Nagoya University
- Masaru Hori
- C30 - CRYSTAL GROWTH
Information Patent Grant
Acoustic resonator structure with inclined C-axis piezoelectric bul...
- Patent number 10,574,204
- Issue date Feb 25, 2020
- QORVO BIOTECHNOLOGIES, LLC
- Kevin McCarron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for fabricating acoustic structure with inclined c-axis pie...
- Patent number 10,541,662
- Issue date Jan 21, 2020
- Qorvo US, Inc.
- Kevin McCarron
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-stage deposition system for growth of inclined c-axis piezoel...
- Patent number 10,541,663
- Issue date Jan 21, 2020
- Qorvo US, Inc.
- Kevin McCarron
- C30 - CRYSTAL GROWTH
Information Patent Grant
Single-crystal perovskite solid solutions with indifferent points f...
- Patent number 10,378,123
- Issue date Aug 13, 2019
- Quest Integrated, LLC
- Vincent Fratello
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,262,872
- Issue date Apr 16, 2019
- Kokusai Electric Corporation
- Takahiro Miyakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for producing piezoelectric bulk and crystalline seed layer...
- Patent number 10,063,210
- Issue date Aug 28, 2018
- Qorvo US, Inc.
- Kevin McCarron
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for producing a composite body having at least one functiona...
- Patent number 9,951,442
- Issue date Apr 24, 2018
- AIXATECH GMBH
- Yilmaz Dikme
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal nitride material for thermistor, method for producing same, a...
- Patent number 9,905,341
- Issue date Feb 27, 2018
- Mitsubishi Materials Corporation
- Toshiaki Fujita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Radiation detector, scintillator panel, and method for manufacturin...
- Patent number 9,897,705
- Issue date Feb 20, 2018
- Toshiba Electron Tubes & Devices Co., Ltd.
- Hiroshi Horiuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic integrated lattice mismatched crystal template and prepa...
- Patent number 9,890,472
- Issue date Feb 13, 2018
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Shumin Wang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Depositing calcium fluoride template layers for solar cells
- Patent number 9,873,938
- Issue date Jan 23, 2018
- The Board of Trustees of the Leland Stanford Junior University
- Bruce M. Clemens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal nitride material for thermistor, method for producing same, a...
- Patent number 9,831,019
- Issue date Nov 28, 2017
- Mitsubishi Materials Corporation
- Toshiaki Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of freestanding nitride veneers in semiconductor devices
- Patent number 9,816,201
- Issue date Nov 14, 2017
- Goldeneye, Inc.
- Scott M. Zimmerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Metal nitride material for thermistor, method for producing same, a...
- Patent number 9,625,326
- Issue date Apr 18, 2017
- Mitsubishi Materials Corporation
- Toshiaki Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing an aluminium nitride layer
- Patent number 9,607,831
- Issue date Mar 28, 2017
- EVATEC AG
- Lorenzo Castaldi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Atomic layer epitaxy of hematite on indium tin oxide for applicatio...
- Patent number 9,388,499
- Issue date Jul 12, 2016
- UChicago Argonne, LLC
- Alex B. Martinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial film forming method, sputtering apparatus, manufacturing...
- Patent number 9,379,279
- Issue date Jun 28, 2016
- Canon Anelva Corporation
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of growing diamond thin film
- Patent number 9,217,207
- Issue date Dec 22, 2015
- National Chiao Tung University
- Li Chang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Base material for growing single crystal diamond and method for pro...
- Patent number 9,200,379
- Issue date Dec 1, 2015
- SHIN-ETSU CHEMICAL CO., LTD.
- Hitoshi Noguchi
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
PIEZOELECTRIC FILM, METHOD OF PRODUCING PIEZOELECTRIC FILM, PIEZOEL...
- Publication number 20240172564
- Publication date May 23, 2024
- NITTO DENKO CORPORATION
- Gaku TSUBURAOKA
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME
- Publication number 20240158954
- Publication date May 16, 2024
- TOSOH CORPORATION
- Yuya TSUCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, ALGORITHMS AND SYSTEMS FOR SUB-NANOSECOND DIGITAL SIGNAL P...
- Publication number 20240093404
- Publication date Mar 21, 2024
- Purdue Research Foundation
- Haiyan Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSPENSION PLASMA SPRAY COLUMNAR GROWTH CONTROL METHODS AND ARTICLE...
- Publication number 20230313409
- Publication date Oct 5, 2023
- Raytheon Technologies Corporation
- Sergei F. Burlatsky
- C30 - CRYSTAL GROWTH
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20230052052
- Publication date Feb 16, 2023
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Forming Nanotwinned Regions in a Ceramic Coating at a Tunable Volum...
- Publication number 20230015174
- Publication date Jan 19, 2023
- UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING
- Xiaolu Pang
- C01 - INORGANIC CHEMISTRY
Information Patent Application
NANOCOMPOSITE-SEEDED EPITAXIAL GROWTH OF SINGLE-DOMAIN LITHIUM NIOB...
- Publication number 20220364265
- Publication date Nov 17, 2022
- Purdue Research Foundation
- Haiyan Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR MANUFACTURING NITRIDE CATALYST
- Publication number 20210095383
- Publication date Apr 1, 2021
- Industrial Technology Research Institute
- Kuo-Hsin Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CONTROLLED HOMO-EPITAXIAL GROWTH OF HYBRID PEROVSKITES
- Publication number 20200299861
- Publication date Sep 24, 2020
- The Regents of the University of California
- Sheng Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE NITRIDE-BASED FILM STRUCTURE AND METHOD FOR MANUFACTURING...
- Publication number 20200255977
- Publication date Aug 13, 2020
- Panasonic Intellectual Property Management Co., Ltd.
- TAKAHIDE HIRASAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SINGLE-CRYSTAL GROUP-III NITRIDE
- Publication number 20200232119
- Publication date Jul 23, 2020
- Chung Yuan Christian University
- Jie-He CHEN
- C30 - CRYSTAL GROWTH
Information Patent Application
NITRIDE CATALYST AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20200173043
- Publication date Jun 4, 2020
- Industrial Technology Research Institute
- Kuo-Hsin Lin
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
LIFT PIN, AND EPITAXIAL GROWTH APPARATUS AND METHOD OF PRODUCING SI...
- Publication number 20190355612
- Publication date Nov 21, 2019
- SUMCO CORPORATION
- Masaya SAKURAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE-CRYSTAL PEROVSKITE SOLID SOLUTIONS WITH INDIFFERENT POINTS F...
- Publication number 20190345634
- Publication date Nov 14, 2019
- Quest Integrated, LLC
- Vincent Fratello
- C30 - CRYSTAL GROWTH
Information Patent Application
Single-Crystal Perovskite Solid Solutions With Indifferent Points f...
- Publication number 20190003077
- Publication date Jan 3, 2019
- Vincent Fratello
- C30 - CRYSTAL GROWTH
Information Patent Application
ANATASE-TYPE NIOBIUM OXYNITRIDE, METHOD FOR PRODUCING SAME, AND SEM...
- Publication number 20180209065
- Publication date Jul 26, 2018
- PANASONIC CORPORATION
- Ryosuke KIKUCHI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...
- Publication number 20170309480
- Publication date Oct 26, 2017
- Canon ANELVA Corporation
- Yoshiaki Daigo
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR FABRICATING ACOUSTIC STRUCTURE WITH INCLINED C-AXIS PIE...
- Publication number 20170111021
- Publication date Apr 20, 2017
- Qorvo US, Inc.
- Kevin McCarron
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR PRODUCING PIEZOELECTRIC BULK AND CRYSTALLINE SEED LAYER...
- Publication number 20170111023
- Publication date Apr 20, 2017
- Qorvo US, Inc.
- Kevin McCarron
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR GROWING NIOBIUM OXYNITRIDE LAYER
- Publication number 20170088975
- Publication date Mar 30, 2017
- Panasonic Intellectual Property Management Co., Ltd.
- RYOSUKE KIKUCHI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for producing a composite body having at least one functiona...
- Publication number 20160298261
- Publication date Oct 13, 2016
- AIXATECH GMBH
- Yilmaz Dikme
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FABRICATING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM A...
- Publication number 20160201218
- Publication date Jul 14, 2016
- Panasonic Intellectual Property Management Co., Ltd.
- RYOSUKE KIKUCHI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
RADIATION DETECTOR, SCINTILLATOR PANEL, AND METHOD FOR MANUFACTURIN...
- Publication number 20160116607
- Publication date Apr 28, 2016
- KABUSHIKI KAISHA TOSHIBA
- Hiroshi Horiuchi
- C30 - CRYSTAL GROWTH
Information Patent Application
USE OF FREESTANDING NITRIDE VENEERS IN SEMICONDUCTOR DEVICES
- Publication number 20150329988
- Publication date Nov 19, 2015
- Goldeneye, Inc.
- Scott M. Zimmerman
- C30 - CRYSTAL GROWTH
Information Patent Application
METAL-NITRIDE THERMISTOR MATERIAL, MANUFACTURING METHOD THEREFOR, A...
- Publication number 20150332817
- Publication date Nov 19, 2015
- Mitsubishi Materials Corporation
- Toshiaki Fujita
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING FREE-STANDING NET-SHAPE SAPPHIRE
- Publication number 20150308013
- Publication date Oct 29, 2015
- RUBICON TECHNOLOGY, INC.
- John P. CIRALDO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR DEPOSITING AN ALUMINIUM NITRIDE LAYER
- Publication number 20150179430
- Publication date Jun 25, 2015
- Oerlikon Advanced Technologies AG
- Lorenzo Castaldi
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate Structures and Methods
- Publication number 20150167198
- Publication date Jun 18, 2015
- Tivra Corporation
- Francisco Machuca
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR FORMING OXIDE SEMICONDUCTOR FILM
- Publication number 20150107988
- Publication date Apr 23, 2015
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C30 - CRYSTAL GROWTH
Information Patent Application
Epitaxial growth of compound semiconductors using lattice-tuned dom...
- Publication number 20150090180
- Publication date Apr 2, 2015
- Ultratech, Inc.
- Andrew M. Hawryluk
- C30 - CRYSTAL GROWTH

by reactive sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming monocrystalline nickel-titanium films on single c...

Method for manufacturing nitride catalyst

Nanocomposite-seeded epitaxial growth of single-domain lithium niob...

Controlled homo-epitaxial growth of hybrid perovskites

Electron beam heating and atomic surface restructuring of sapphire...

Composite nitride-based film structure and method for manufacturing...

Lift pin, and epitaxial growth apparatus and method of producing si...

Nitride catalyst and method for manufacturing the same

Single-crystal perovskite solid solutions with indifferent points f...

Epitaxial film forming method, sputtering apparatus, manufacturing...

Radical generator and molecular beam epitaxy apparatus

Acoustic resonator structure with inclined C-axis piezoelectric bul...

Methods for fabricating acoustic structure with inclined c-axis pie...

Multi-stage deposition system for growth of inclined c-axis piezoel...

Single-crystal perovskite solid solutions with indifferent points f...

Method of manufacturing semiconductor device, substrate processing...

Methods for producing piezoelectric bulk and crystalline seed layer...

Method for producing a composite body having at least one functiona...

Metal nitride material for thermistor, method for producing same, a...

Radiation detector, scintillator panel, and method for manufacturin...

Monolithic integrated lattice mismatched crystal template and prepa...

Depositing calcium fluoride template layers for solar cells

Metal nitride material for thermistor, method for producing same, a...

Use of freestanding nitride veneers in semiconductor devices

Metal nitride material for thermistor, method for producing same, a...

Method for depositing an aluminium nitride layer

Atomic layer epitaxy of hematite on indium tin oxide for applicatio...

Epitaxial film forming method, sputtering apparatus, manufacturing...

Method of growing diamond thin film

Base material for growing single crystal diamond and method for pro...

Patents Applicationslast 30 patents

PIEZOELECTRIC FILM, METHOD OF PRODUCING PIEZOELECTRIC FILM, PIEZOEL...

MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME

METHODS, ALGORITHMS AND SYSTEMS FOR SUB-NANOSECOND DIGITAL SIGNAL P...

SUSPENSION PLASMA SPRAY COLUMNAR GROWTH CONTROL METHODS AND ARTICLE...

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

Forming Nanotwinned Regions in a Ceramic Coating at a Tunable Volum...

NANOCOMPOSITE-SEEDED EPITAXIAL GROWTH OF SINGLE-DOMAIN LITHIUM NIOB...

METHOD FOR MANUFACTURING NITRIDE CATALYST

CONTROLLED HOMO-EPITAXIAL GROWTH OF HYBRID PEROVSKITES

COMPOSITE NITRIDE-BASED FILM STRUCTURE AND METHOD FOR MANUFACTURING...

METHOD OF FORMING SINGLE-CRYSTAL GROUP-III NITRIDE

NITRIDE CATALYST AND METHOD FOR MANUFACTURING THE SAME

LIFT PIN, AND EPITAXIAL GROWTH APPARATUS AND METHOD OF PRODUCING SI...

SINGLE-CRYSTAL PEROVSKITE SOLID SOLUTIONS WITH INDIFFERENT POINTS F...

Single-Crystal Perovskite Solid Solutions With Indifferent Points f...

ANATASE-TYPE NIOBIUM OXYNITRIDE, METHOD FOR PRODUCING SAME, AND SEM...

EPITAXIAL FILM FORMING METHOD, SPUTTERING APPARATUS, MANUFACTURING...

METHODS FOR FABRICATING ACOUSTIC STRUCTURE WITH INCLINED C-AXIS PIE...

METHODS FOR PRODUCING PIEZOELECTRIC BULK AND CRYSTALLINE SEED LAYER...

METHOD FOR GROWING NIOBIUM OXYNITRIDE LAYER

Method for producing a composite body having at least one functiona...

METHOD FOR FABRICATING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM A...

RADIATION DETECTOR, SCINTILLATOR PANEL, AND METHOD FOR MANUFACTURIN...

USE OF FREESTANDING NITRIDE VENEERS IN SEMICONDUCTOR DEVICES

METAL-NITRIDE THERMISTOR MATERIAL, MANUFACTURING METHOD THEREFOR, A...

METHOD OF PRODUCING FREE-STANDING NET-SHAPE SAPPHIRE

METHOD FOR DEPOSITING AN ALUMINIUM NITRIDE LAYER

Substrate Structures and Methods

METHOD FOR FORMING OXIDE SEMICONDUCTOR FILM

Epitaxial growth of compound semiconductors using lattice-tuned dom...