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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2203/00
Basic micro-electromechanical structures
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B81B2203/0118
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS microphone
Patent number
12,187,597
Issue date
Jan 7, 2025
AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
Kaijie Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device and method for manufacturing same
Patent number
12,180,063
Issue date
Dec 31, 2024
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
12,180,064
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonator and resonance device including same
Patent number
12,170,514
Issue date
Dec 17, 2024
Murata Manufacturing Co., Ltd.
Yoshihisa Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuator package architecture
Patent number
12,132,420
Issue date
Oct 29, 2024
MEMS DRIVE (NANJING) CO., LTD.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multiaxial strain engineering of defect doped materials
Patent number
12,077,428
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Subra Suresh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor integrated device with electrical contacts between st...
Patent number
12,024,422
Issue date
Jul 2, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light-based tactile sensing with directional sensitivity
Patent number
12,018,990
Issue date
Jun 25, 2024
The Regents of the University of Michigan
Pei-Cheng Ku
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-device structures with etch holes
Patent number
12,006,205
Issue date
Jun 11, 2024
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
11,978,690
Issue date
May 7, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
Patent number
11,953,813
Issue date
Apr 9, 2024
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
Patent number
11,932,531
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system acoustic sensor, micro-electro-mech...
Patent number
11,905,164
Issue date
Feb 20, 2024
UPBEAT TECHNOLOGY CO., LTD
Hsien-Lung Ho
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electro mechanical system and manufacturing method thereof
Patent number
11,889,765
Issue date
Jan 30, 2024
STMicroelectronics S.r.l.
Gianluca Longoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and manufacturing method of resonance device
Patent number
11,881,838
Issue date
Jan 23, 2024
Murata Manufacturing Co., Ltd.
Kentarou Dehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
Patent number
11,855,604
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Federico Vercesi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Patent number
11,851,320
Issue date
Dec 26, 2023
The Johns Hopkins University
Gi-Dong Sim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic devices with edge corrugation
Patent number
11,818,540
Issue date
Nov 14, 2023
Skyworks Global Pte. Ltd.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical membrane transducer with active damper
Patent number
11,807,519
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
Patent number
11,788,912
Issue date
Oct 17, 2023
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
No-gel pressure sensor package
Patent number
11,760,623
Issue date
Sep 19, 2023
NXP USA, INC.
Stephen Ryan Hooper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system
Patent number
11,750,973
Issue date
Sep 5, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Anup Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device
Patent number
11,733,509
Issue date
Aug 22, 2023
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS process power
Patent number
11,716,906
Issue date
Aug 1, 2023
QUALCOMM Technologies, Inc.
Robert J. Littrell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical device
Patent number
11,703,679
Issue date
Jul 18, 2023
Hamamatsu Photonics K.K.
Tatsuya Sugimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS transducer
Patent number
11,697,582
Issue date
Jul 11, 2023
Soundskrit Inc.
Stephane Leahy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical microsystem and associated manufacturing method
Patent number
11,679,974
Issue date
Jun 20, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Thierry Hilt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure forming method and device
Patent number
11,679,976
Issue date
Jun 20, 2023
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
Patent number
11,656,539
Issue date
May 23, 2023
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
VIBRATION DETECTOR, WEARABLE DEVICE, AND PIPING INSPECTION APPARATUS
Publication number
20250048038
Publication date
Feb 6, 2025
Masayuki FUJISHIMA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
Publication number
20250042717
Publication date
Feb 6, 2025
X-CELEPRINT LIMITED
António José Marques Trindade
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
Publication number
20250026629
Publication date
Jan 23, 2025
NXP USA, Inc.
Jun Tang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING MEMS DEVICE
Publication number
20250019226
Publication date
Jan 16, 2025
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20250019225
Publication date
Jan 16, 2025
Rohm Co., Ltd.
Daisuke Nishinohara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL MEMS DEVICE INTEGRATING A WAKE-UP ELEMENT, INERTIAL MEMS S...
Publication number
20240425352
Publication date
Dec 26, 2024
STMicroelectronics International N.V.
Luca SEGHIZZI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC SENSOR DEVICE WITH MULTI-SIDED ANCHOR
Publication number
20240425353
Publication date
Dec 26, 2024
Soundskrit Inc.
Stephane Leahy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
Publication number
20240400374
Publication date
Dec 5, 2024
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PROBE MODULE STRUCTURE
Publication number
20240377434
Publication date
Nov 14, 2024
TAIWAN MASK CORPORATION
SHANG-KUANG WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
Publication number
20240375937
Publication date
Nov 14, 2024
NXP USA, Inc.
Lianjun Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20240351862
Publication date
Oct 24, 2024
Frore Systems Inc.
Suryaprakash Ganti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOORBELL CAMERA HAVING ACTIVE COOLING
Publication number
20240336475
Publication date
Oct 10, 2024
Frore Systems Inc.
Prabhu Sathyamurthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SOUND TRANSDUCER
Publication number
20240340597
Publication date
Oct 10, 2024
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Fabian STOPPEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MINI PC HAVING ACTIVE COOLING
Publication number
20240338062
Publication date
Oct 10, 2024
Frore Systems Inc.
Prabhu Sathyamurthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240317574
Publication date
Sep 26, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM SWITCH AND COMMUNICATION DEVICE
Publication number
20240312730
Publication date
Sep 19, 2024
BOE TECHNOLOGY GROUP CO., LTD.
Yingli SHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIGHT-BASED TACTILE SENSING WITH DIRECTIONAL SENSITIVITY
Publication number
20240310226
Publication date
Sep 19, 2024
The Regents of the University of Michigan
Pei-Cheng Ku
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
Publication number
20240300808
Publication date
Sep 12, 2024
Analog Devices, Inc.
Kemiao Jia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE
Publication number
20240284122
Publication date
Aug 22, 2024
Soundskrit Inc.
Stephane Leahy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTIPLEXED ANTIGEN-BASED DETECTION OF SARS-COV-2 AND OTHER DISEASE...
Publication number
20240277252
Publication date
Aug 22, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20240270566
Publication date
Aug 15, 2024
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Hao YAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
Publication number
20240262678
Publication date
Aug 8, 2024
Beijing BOE Technology Development Co., Ltd.
Jingwen GUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20240243035
Publication date
Jul 18, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
Publication number
20240208805
Publication date
Jun 27, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CANTILEVER STRUCTURE WITH INTERMEDIATE SUBSTRATE CONNECTION
Publication number
20240199410
Publication date
Jun 20, 2024
xMEMS Labs, Inc.
Jye Ren
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
Publication number
20240190694
Publication date
Jun 13, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
Publication number
20240182292
Publication date
Jun 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
Publication number
20240182291
Publication date
Jun 6, 2024
Hitachi, Ltd
Shun Kumano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device for Interaction with Fluids
Publication number
20240158221
Publication date
May 16, 2024
ROBERT BOSCH GmbH
Christoph Schelling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device for Interaction with Fluids
Publication number
20240158222
Publication date
May 16, 2024
ROBERT BOSCH GmbH
Christoph Schelling
B81 - MICRO-STRUCTURAL TECHNOLOGY