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B81C1/0015

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/0015Cantilevers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Piezoelectric sensor with increased sensitivity and devices having...
- Patent number 12,329,033
- Issue date Jun 10, 2025
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS environmental sensor and preparation method therefor
- Patent number 12,319,565
- Issue date Jun 3, 2025
- MultiDimension Technology Co., Ltd.
- Insik Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane support for dual backplate transducers
- Patent number 12,297,102
- Issue date May 13, 2025
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer component, manufacturing method thereof, and transducer
- Patent number 12,281,006
- Issue date Apr 22, 2025
- BOE Technology Group Co., Ltd.
- Yongchun Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
- Patent number 12,269,061
- Issue date Apr 8, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having microelectromechanical systems devices...
- Patent number 12,257,602
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer comprising a lobe...
- Patent number 12,251,729
- Issue date Mar 18, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, assembly comprising the MEMS device, and methods for o...
- Patent number 12,240,749
- Issue date Mar 4, 2025
- Bert Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 12,221,339
- Issue date Feb 11, 2025
- Amkor Technology Singapore Holding Pte Ltd.
- Ki Yeul Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with enhanced membrane structure and method of forming...
- Patent number 12,219,320
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer having a polymeri...
- Patent number 12,195,327
- Issue date Jan 14, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sound producing cell
- Patent number 12,192,722
- Issue date Jan 7, 2025
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical microsystem
- Patent number 12,162,748
- Issue date Dec 10, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Mollard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 12,148,580
- Issue date Nov 19, 2024
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 12,070,773
- Issue date Aug 27, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device structure with movable membrane
- Patent number 12,043,538
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and preparation method therefor
- Patent number 12,022,270
- Issue date Jun 25, 2024
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,012,326
- Issue date Jun 18, 2024
- TDK ELECTRONICS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical microsystem
- Patent number 11,999,613
- Issue date Jun 4, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Laurent Mollard
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...
- Publication number 20250171298
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20250162860
- Publication date May 22, 2025
- The University of British Columbia
- Chang Ge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20250153999
- Publication date May 15, 2025
- Amkor Technology Singapore Holding Pte. Ltd.
- Ki Yeul YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20250128937
- Publication date Apr 24, 2025
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...
- Publication number 20250126415
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method For Manufacturing Vibration Device
- Publication number 20250109014
- Publication date Apr 3, 2025
- SEIKO EPSON CORPORATION
- Yusuke MATSUZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...
- Publication number 20250109013
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...
- Publication number 20250030987
- Publication date Jan 23, 2025
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE
- Publication number 20250016509
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PRESSURE DIAPHRAGMS
- Publication number 20240417243
- Publication date Dec 19, 2024
- Edwards Lifesciences Corporation
- Alexander H. Siemons
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...
- Publication number 20240375938
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20240381034
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...
- Publication number 20240359970
- Publication date Oct 31, 2024
- MITSUMI ELECTRIC CO., LTD.
- Hisanori AGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVE MATRIX PROGRAMMABLE MIRROR
- Publication number 20240359974
- Publication date Oct 31, 2024
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE
- Publication number 20240343551
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERPOSER FOR DAMPING MEMS MICROPHONES
- Publication number 20240279049
- Publication date Aug 22, 2024
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
- Publication number 20240253976
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240190700
- Publication date Jun 13, 2024
- Amkor Technology Singapore Holding Pte. Ltd.
- Ki Yeul YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER
- Publication number 20240174513
- Publication date May 30, 2024
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Qiang Dan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20240174514
- Publication date May 30, 2024
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
- Publication number 20240158224
- Publication date May 16, 2024
- INFINEON TECHNOLOGIES AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
- Publication number 20240109770
- Publication date Apr 4, 2024
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
- Publication number 20240100565
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SOUND PRODUCING CELL
- Publication number 20240031740
- Publication date Jan 25, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
- Publication number 20240024917
- Publication date Jan 25, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
- Publication number 20240022859
- Publication date Jan 18, 2024
- xMEMS Labs, Inc.
- Chiung C. Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Cantilevers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezoelectric sensor with increased sensitivity and devices having...

MEMS environmental sensor and preparation method therefor

Signal processing circuit for triple-membrane MEMS device

Membrane support for dual backplate transducers

Transducer component, manufacturing method thereof, and transducer

Bottom electrode via structures for micromachined ultrasonic transd...

Microelectromechanical microphone with membrane trench reinforcemen...

Semiconductor device having microelectromechanical systems devices...

Piezoelectric micromachined ultrasonic transducer comprising a lobe...

MEMS device, assembly comprising the MEMS device, and methods for o...

Top notch slit profile for MEMS device

Semiconductor device and method of manufacturing semiconductor device

MEMS device with enhanced membrane structure and method of forming...

Arched membrane structure for MEMS device

Piezoelectric micromachined ultrasonic transducer having a polymeri...

Sound producing cell

Electromechanical microsystem

MEMS device built on substrate with ruthenium based contact surface...

CMUT transducer with motion-stopping structure and CMUT transducer...

Pressure sensor with high stability

Arched membrane structure for MEMS device

Device for sensing a motion of a deflective surface

Microstructure and method of producing a microstructure

Adaptive cavity thickness control for micromachined ultrasonic tran...

Semiconductor device structure with movable membrane

On-chip integrated silicon carbide pressure and temperature sensors

Method of manufacturing a microelectromechanical systems (MEMS) device

MEMS microphone and preparation method therefor

Microelectromechanical microphone with membrane trench reinforcemen...

Electromechanical microsystem

Patents Applicationslast 30 patents

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Membrane Device Fabrication

MEMS RESONATOR

MEMS DEVICE WITH ENHANCED MEMBRANE STRUCTURE AND METHOD OF FORMING...

Method For Manufacturing Vibration Device

CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

INTEGRATED PRESSURE DIAPHRAGMS

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...

ACTIVE MATRIX PROGRAMMABLE MIRROR

SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE

MICROMECHANICAL DIAPHRAGM SYSTEM

INTERPOSER FOR DAMPING MEMS MICROPHONES

MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER

SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE

MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS

Spring Supported and Sealed MEMS Diaphragm Assembly

CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS

SOUND PRODUCING CELL

BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...

PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF