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G01B2290/15
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PHYSICS
G01
Measuring instruments
G01B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B2290/00
Aspects of interferometers not specifically covered by any group under G01B9/02
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G01B2290/15
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Patents Grants
last 30 patents
Information
Patent Grant
Spatial accuracy correction method and apparatus
Patent number
11,366,447
Issue date
Jun 21, 2022
Mitutoyo Corporation
Shinichiro Yanaka
G05 - CONTROLLING REGULATING
Information
Patent Grant
Interferometric position sensor
Patent number
10,928,192
Issue date
Feb 23, 2021
MBDA UK Limited
Ross Matthew Williams
G01 - MEASURING TESTING
Information
Patent Grant
Gradiometer and method of changing an optical path length to direct...
Patent number
9,547,103
Issue date
Jan 17, 2017
Micro-g Lacoste, Inc.
Timothy M. Niebauer
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric heterodyne optical encoder system
Patent number
9,140,537
Issue date
Sep 22, 2015
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Method and arrangement for robust interferometry for detecting a fe...
Patent number
8,934,104
Issue date
Jan 13, 2015
Universitaet Stuttgart
Klaus Koerner
G01 - MEASURING TESTING
Information
Patent Grant
Interferometric heterodyne optical encoder system
Patent number
8,885,172
Issue date
Nov 11, 2014
Zygo Corporation
Peter J. de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer and distance calculation method therefor
Patent number
8,724,114
Issue date
May 13, 2014
Canon Kabushiki Kaisha
Yoshiyuki Kuramoto
G01 - MEASURING TESTING
Information
Patent Grant
Optical system, in particular in a microlithographic projection exp...
Patent number
8,654,345
Issue date
Feb 18, 2014
Carl Zeiss SMT GmbH
Albrecht Hof
G01 - MEASURING TESTING
Information
Patent Grant
Method of measuring a shape of an optical surface based on computat...
Patent number
8,593,642
Issue date
Nov 26, 2013
Carl Zeiss SMT GmbH
Rolf Freimann
G01 - MEASURING TESTING
Information
Patent Grant
Optical distance-measuring device
Patent number
8,537,340
Issue date
Sep 17, 2013
Dr. Johannes Heidenhain GmbH
Wolfgang Holzapfel
G01 - MEASURING TESTING
Information
Patent Grant
Laser interferometer system for measuring roll angle
Patent number
8,325,348
Issue date
Dec 4, 2012
University of Shanghai for Science and Technology
Wenmei Hou
G01 - MEASURING TESTING
Information
Patent Grant
Surface deformation measuring system with a retro-reflective surfac...
Patent number
8,269,982
Issue date
Sep 18, 2012
Exelis, Inc.
Gene Olczak
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer
Patent number
8,253,943
Issue date
Aug 28, 2012
The University of Birmingham
Clive C. Speake
G01 - MEASURING TESTING
Information
Patent Grant
Tilting mirror controlled using null-based interferometric sensing
Patent number
8,174,705
Issue date
May 8, 2012
SA Photonics, Inc.
James F. Coward
G01 - MEASURING TESTING
Information
Patent Grant
Displacement measuring instrument and displacement measuring method
Patent number
8,081,315
Issue date
Dec 20, 2011
Mitutoyo Corporation
Kaoru Miyata
G01 - MEASURING TESTING
Information
Patent Grant
Optical coherence tomography implementation apparatus and method of...
Patent number
7,929,148
Issue date
Apr 19, 2011
Volcano Corporation
Nathaniel J. Kemp
G01 - MEASURING TESTING
Information
Patent Grant
Method for estimating distance between tracking type laser interfer...
Patent number
7,920,273
Issue date
Apr 5, 2011
Mitutoyo Corporation
Shinichi Hara
G01 - MEASURING TESTING
Information
Patent Grant
Method and assembly for confocal, chromatic, interferometric and sp...
Patent number
7,876,446
Issue date
Jan 25, 2011
Universitat Stuttgart
Klaus Körner
G11 - INFORMATION STORAGE
Information
Patent Grant
Tracking type laser interferometer and method for resetting the same
Patent number
7,872,733
Issue date
Jan 18, 2011
Mitutoyo Corporation
Naoyuki Taketomi
G01 - MEASURING TESTING
Information
Patent Grant
Homodyne laser interferometer probe and displacement measurement sy...
Patent number
7,847,953
Issue date
Dec 7, 2010
Japan Science and Technology Agency
Hideki Kawakatsu
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Interferometer system for monitoring an object
Patent number
7,826,064
Issue date
Nov 2, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing an optical element
Patent number
7,738,117
Issue date
Jun 15, 2010
Carl Zeiss SMT AG
Michael Altenberger
G01 - MEASURING TESTING
Information
Patent Grant
Position-measuring device for determining the position of two objec...
Patent number
7,639,366
Issue date
Dec 29, 2009
Dr. Johannes Heidenhain GmbH
Erwin Spanner
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer system for monitoring an object
Patent number
7,639,367
Issue date
Dec 29, 2009
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer system for monitoring an object
Patent number
7,636,166
Issue date
Dec 22, 2009
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Grant
Measurement method and measurement apparatus using tracking type la...
Patent number
7,583,374
Issue date
Sep 1, 2009
Mitutoyo Corporation
Masayuki Nara
G01 - MEASURING TESTING
Information
Patent Grant
Interferometer using integrated retarders to reduce physical volume
Patent number
7,561,278
Issue date
Jul 14, 2009
Zygo Corporation
Andrew Eric Carlson
G01 - MEASURING TESTING
Information
Patent Grant
Displacement measurement sensor head and system having measurement...
Patent number
7,561,280
Issue date
Jul 14, 2009
Agilent Technologies, Inc.
William Clay Schluchter
G01 - MEASURING TESTING
Information
Patent Grant
Multi-axis interferometers and methods and systems using multi-axis...
Patent number
7,548,322
Issue date
Jun 16, 2009
Zygo Corporation
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Grant
Measuring apparatus sensitive to rotational but not translational o...
Patent number
7,460,243
Issue date
Dec 2, 2008
Claude R. Phipps
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Relative intensity noise Cat's-eye swept source laser for OCT and s...
Publication number
20240418497
Publication date
Dec 19, 2024
KineoLabs, Inc.
Walid A. Atia
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE BASED ON COMPUTAT...
Publication number
20140078513
Publication date
Mar 20, 2014
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY
Publication number
20120307258
Publication date
Dec 6, 2012
UNIVERSITAET STUTTGART
Klaus Koerner
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF MEASURING A SHAPE OF AN OPTICAL SURFACE AND INTERFEROMETR...
Publication number
20120229814
Publication date
Sep 13, 2012
Carl Zeiss SMT GMBH
Rolf FREIMANN
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD OF MEASURING SHAPE
Publication number
20120212747
Publication date
Aug 23, 2012
Canon Kabushiki Kaisha
Hiroyuki Yuki
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETRIC HETERODYNE OPTICAL ENCODER SYSTEM
Publication number
20120194824
Publication date
Aug 2, 2012
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXP...
Publication number
20120140241
Publication date
Jun 7, 2012
Carl Zeiss SMT GMBH
Albrecht Hof
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER AND DISTANCE CALCULATION METHOD THEREFOR
Publication number
20120127477
Publication date
May 24, 2012
Canon Kabushiki Kaisha
Yoshiyuki Kuramoto
G01 - MEASURING TESTING
Information
Patent Application
Optical Distance-Measuring Device
Publication number
20120002188
Publication date
Jan 5, 2012
Wolfgang Holzapfel
G01 - MEASURING TESTING
Information
Patent Application
Rotary Interferometer
Publication number
20110157595
Publication date
Jun 30, 2011
William S. Yerazunis
G01 - MEASURING TESTING
Information
Patent Application
Interferometer
Publication number
20100238456
Publication date
Sep 23, 2010
Clive Christopher Speake
G01 - MEASURING TESTING
Information
Patent Application
LASER INTERFEROMETER SYSTEM FOR MEASURING ROLL ANGLE
Publication number
20100141957
Publication date
Jun 10, 2010
University of Shanghai for Science and Technology
Wenmei HOU
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT
Publication number
20100091296
Publication date
Apr 15, 2010
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING
Information
Patent Application
Displacement measuring instrument and displacement measuring method
Publication number
20100027026
Publication date
Feb 4, 2010
Mitutoyo Corporation
Kaoru Miyata
G01 - MEASURING TESTING
Information
Patent Application
Optical member, interferometer system, stage apparatus, exposure ap...
Publication number
20090310105
Publication date
Dec 17, 2009
Nikon Corporation
Yosuke Kuriyama
G02 - OPTICS
Information
Patent Application
Method for estimating distance between tracking type laser interfer...
Publication number
20090237674
Publication date
Sep 24, 2009
Mitutoyo Corporation
Shinichi Hara
G01 - MEASURING TESTING
Information
Patent Application
Interferometric Gravity Sensor
Publication number
20090219546
Publication date
Sep 3, 2009
Lockheed Martin Corporation
Vincent P. Benischek
G01 - MEASURING TESTING
Information
Patent Application
Systems and Methods for Reducing Nonlinearity in an Interferometer
Publication number
20090135430
Publication date
May 28, 2009
Miao Zhu
G01 - MEASURING TESTING
Information
Patent Application
HOMODYNE LASER INTERFEROMETER PROBE AND DISPLACEMENT MEASUREMENT SY...
Publication number
20090079990
Publication date
Mar 26, 2009
Japan Science and Technology Agency
Hideki Kawakatsu
G01 - MEASURING TESTING
Information
Patent Application
TRACKING TYPE LASER INTERFEROMETER AND METHOD FOR RESETTING THE SAME
Publication number
20080316497
Publication date
Dec 25, 2008
Mitutoyo Corporation
Naoyuki Taketomi
G01 - MEASURING TESTING
Information
Patent Application
DISPLACEMENT MEASUREMENT SENSOR HEAD AND SYSTEM HAVING MEASUREMENT...
Publication number
20080304079
Publication date
Dec 11, 2008
William Clay Schluchter
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT METHOD AND MEASUREMENT APPARATUS USING TRACKING TYPE LA...
Publication number
20080259311
Publication date
Oct 23, 2008
Mitutoyo Corporation
Masayuki Nara
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL COHERENCE TOMOGRAPHY IMPLEMENTATION
Publication number
20080180683
Publication date
Jul 31, 2008
Volcano Corporation
Nathaniel J. Kemp
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER SYSTEM FOR MONITORING AN OBJECT
Publication number
20080165347
Publication date
Jul 10, 2008
Zygo Corporation
Peter de Groot
G01 - MEASURING TESTING
Information
Patent Application
Method and Assembly for Confocal, Chromatic, Interferometric and Sp...
Publication number
20080151253
Publication date
Jun 26, 2008
Universitat Stuttgart
Klaus Korner
G02 - OPTICS
Information
Patent Application
Method of manufacturing an optical element
Publication number
20080117436
Publication date
May 22, 2008
Carl Zeiss SMT AG
Michael Altenberger
G01 - MEASURING TESTING
Information
Patent Application
Multi-Axis Interferometers and Methods and Systems Using Multi-Axis...
Publication number
20080117428
Publication date
May 22, 2008
Zygo Corporation
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Application
Precise rotational motion sensor
Publication number
20080062433
Publication date
Mar 13, 2008
Photonic Associates
Claude R. Phipps
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL-AXIS DEFLECTION TYPE LASER INTERFEROMETER, CALIBRATION METH...
Publication number
20080049211
Publication date
Feb 28, 2008
Mitutoyo Corporation
Yasushi Ueshima
G01 - MEASURING TESTING
Information
Patent Application
Interferometer system for monitoring an object
Publication number
20070171425
Publication date
Jul 26, 2007
Zygo Corporation
Peter De Groot
G01 - MEASURING TESTING