Cathode assembly for sputtering apparatus

Industry

CPC
C23C14/3407

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3407Cathode assembly for sputtering apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sputtering target
- Patent number 12,312,674
- Issue date May 27, 2025
- JX Advanced Metals Corporation
- Masayoshi Shimizu
- G11 - INFORMATION STORAGE
Information Patent Grant
Cathode unit for magnetron sputtering apparatus and magnetron sputt...
- Patent number 12,293,905
- Issue date May 6, 2025
- ULVAC, Inc.
- Toshiya Aoyagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multifocal magnetron design for physical vapor deposition processin...
- Patent number 12,283,470
- Issue date Apr 22, 2025
- Intevac, Inc.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport device and method
- Patent number 12,276,019
- Issue date Apr 15, 2025
- VON ARDENNE Asset GmbH & Co. KG
- Christoph Kaiser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing package of sputtering target, and method for t...
- Patent number 12,258,164
- Issue date Mar 25, 2025
- JX Advanced Metals Corporation
- Shin-ichi Ogino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) system and method of processing target
- Patent number 12,252,777
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer film structure and method for producing same
- Patent number 12,247,297
- Issue date Mar 11, 2025
- Tosoh Corporation
- Yuya Tsuchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam sputtering apparatus and method
- Patent number 12,243,715
- Issue date Mar 4, 2025
- Institute of Geological and Nuclear Sciences Limited
- Richard John Futter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 12,242,163
- Issue date Mar 4, 2025
- View, Inc.
- Mark Kozlowski
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Slit diaphragm
- Patent number 12,243,730
- Issue date Mar 4, 2025
- Singulus Technologies AG
- Peter Weipert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Polymer composite material and preparation method thereof
- Patent number 12,234,541
- Issue date Feb 25, 2025
- CITY UNIVERSITY OF HONG KONG SHENZHEN FUTIAN RESEARCH INSTITUTE
- Jian Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for preparing bismuth oxide nanowire films by heating in ups...
- Patent number 12,234,543
- Issue date Feb 25, 2025
- Institute of Analysis. Guangdong Academy of Sciences (China National Analytic...
- Fuxian Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus, deposition target structure, and method
- Patent number 12,237,159
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering target for magnetic recording medium
- Patent number 12,230,485
- Issue date Feb 18, 2025
- Tanaka Kikinzoku Kogyo K.K.
- Tomonari Kamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond-like carbon materials and methods of making diamond-like ca...
- Patent number 12,221,685
- Issue date Feb 11, 2025
- COULOMBIC, INC.
- David Andrew Sopchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target and sputtering apparatus including the same
- Patent number 12,221,686
- Issue date Feb 11, 2025
- Samsung Display Co., Ltd.
- Hyuneok Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnesium oxide sputtering target
- Patent number 12,224,166
- Issue date Feb 11, 2025
- JX Advanced Metals Corporation
- Hiroki Kajita
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Profiled sputtering target and method of making the same
- Patent number 12,217,951
- Issue date Feb 4, 2025
- Honeywell International Inc.
- Shih-Yao Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target, method of bonding target material and backing pl...
- Patent number 12,217,948
- Issue date Feb 4, 2025
- Sumitomo Chemical Company, Limited
- Masahiro Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter electrode for electrochromic devices
- Patent number 12,209,048
- Issue date Jan 28, 2025
- View, Inc.
- Dane Thomas Gillaspie
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vacuum system and method to deposit a compound layer
- Patent number 12,209,302
- Issue date Jan 28, 2025
- EVATEC AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon sputtering target with special surface treatment and good p...
- Patent number 12,205,804
- Issue date Jan 21, 2025
- Tosoh SMD, Inc.
- Yongwen Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component for plasma processing apparatus and plasma processing app...
- Patent number 12,203,161
- Issue date Jan 21, 2025
- Kyocera Corporation
- Kazuhiro Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus, film formation method, and method for manufac...
- Patent number 12,205,805
- Issue date Jan 21, 2025
- Canon Kabushiki Kaisha
- Kazuya Demura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system and method
- Patent number 12,198,927
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Free-standing lithium phosphorus oxynitride think films and methods...
- Patent number 12,188,116
- Issue date Jan 7, 2025
- The Regents of the University of California
- Ying Shirley Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for physical vapor deposition and method for forming a layer
- Patent number 12,191,127
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PVD target design and semiconductor devices formed using the same
- Patent number 12,180,576
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target
- Patent number 12,173,397
- Issue date Dec 24, 2024
- CemeCon AG
- Oliver Lemmer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,163,215
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Koji Maeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM SPUTTERING APPARATUS AND METHOD
- Publication number 20250183003
- Publication date Jun 5, 2025
- Institute Of Geological And Nuclear Sciences Limited
- Richard John Futter Futter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS
- Publication number 20250163584
- Publication date May 22, 2025
- KALARK NANOSTRUCTRE SCIENCES INC.
- Alain E. KALOYEROS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND DISPLAY DEVICE USING THE SAME
- Publication number 20250160191
- Publication date May 15, 2025
- SAMSUNG DISPLAY CO., LTD.
- Min Jae JEONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250146127
- Publication date May 8, 2025
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...
- Publication number 20250149303
- Publication date May 8, 2025
- Tosoh SMD, Inc.
- Joseph BUCKFELLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED SUBSTRATE
- Publication number 20250145520
- Publication date May 8, 2025
- SCHOTT AG
- Christian Henn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY CATHODE END BLOCK
- Publication number 20250137115
- Publication date May 1, 2025
- CSNW VACUUM TECHNOLOGY(HEFEI)CO., LTD.
- Jinshan YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Temperature Deposition of Hydrogen-Free Diamond-Like Carbon Films
- Publication number 20250140543
- Publication date May 1, 2025
- Intel Corporation
- Ilya KARPOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD TARGET STRUCTURE AND METHOD FOR PREPARING THE SAME
- Publication number 20250129467
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIA-HSI WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APP...
- Publication number 20250129465
- Publication date Apr 24, 2025
- Kyocera Corporation
- Kazuhiro ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SYSTEM AND METHOD
- Publication number 20250132148
- Publication date Apr 24, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD OF BONDING TARGET MATERIAL AND BACKING PL...
- Publication number 20250125131
- Publication date Apr 17, 2025
- Sumitomo Chemical Company, Limited
- Masahiro FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET DESIGN AND SEMICONDUCTOR DEVICES FORMED USING THE SAME
- Publication number 20250092508
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SURFACE COATING ACCORDING TO THE SPUTTERING PRINCIPLE
- Publication number 20250084526
- Publication date Mar 13, 2025
- ELTRO GmbH
- Marc STRÄMKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...
- Publication number 20250066901
- Publication date Feb 27, 2025
- Japan Display Inc.
- Masanobu IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION
- Publication number 20250066899
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Yen LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250059640
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES
- Publication number 20250029820
- Publication date Jan 23, 2025
- INTEVAC, INC.
- Patrick Morse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING
- Publication number 20240429036
- Publication date Dec 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Solvent Free Perovskite Deposition
- Publication number 20240425968
- Publication date Dec 26, 2024
- CubicPV Inc.
- Michael D. Irwin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT PART AND METHOD FOR MAKING THE SAME
- Publication number 20240420951
- Publication date Dec 19, 2024
- FENG CHIA UNIVERSITY
- Chang-Ho YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET
- Publication number 20240376592
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Sheng-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAZOR BLADE AND MANUFACTURING METHOD THEREOF
- Publication number 20240375304
- Publication date Nov 14, 2024
- DORCO CO., LTD
- Min Joo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TARGET FOR MRAM
- Publication number 20240381787
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
- Publication number 20240360543
- Publication date Oct 31, 2024
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IGZO SPUTTERING TARGET
- Publication number 20240344193
- Publication date Oct 17, 2024
- JX Metals Corporation
- Kazutaka Murai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET
- Publication number 20240337008
- Publication date Oct 10, 2024
- Plansee Shanghai High Performance Material Ltd.
- Chao Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
- Publication number 20240301546
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Werner Zilbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING EQUIPMENT AND COATING METHOD THEREOF
- Publication number 20240287670
- Publication date Aug 29, 2024
- Zhejiang Shintown Industry Co., Ltd
- Mingwei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cathode assembly for sputtering apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sputtering target

Cathode unit for magnetron sputtering apparatus and magnetron sputt...

Multifocal magnetron design for physical vapor deposition processin...

Transport device and method

Method for preparing package of sputtering target, and method for t...

Physical vapor deposition (PVD) system and method of processing target

Multilayer film structure and method for producing same

Ion beam sputtering apparatus and method

Fabrication of low defectivity electrochromic devices

Slit diaphragm

Polymer composite material and preparation method thereof

Method for preparing bismuth oxide nanowire films by heating in ups...

Deposition apparatus, deposition target structure, and method

Sputtering target for magnetic recording medium

Diamond-like carbon materials and methods of making diamond-like ca...

Sputtering target and sputtering apparatus including the same

Magnesium oxide sputtering target

Profiled sputtering target and method of making the same

Sputtering target, method of bonding target material and backing pl...

Counter electrode for electrochromic devices

Vacuum system and method to deposit a compound layer

Silicon sputtering target with special surface treatment and good p...

Component for plasma processing apparatus and plasma processing app...

Sputtering apparatus, film formation method, and method for manufac...

Deposition system and method

Free-standing lithium phosphorus oxynitride think films and methods...

Apparatus for physical vapor deposition and method for forming a layer

PVD target design and semiconductor devices formed using the same

Sputtering target

Film forming apparatus and film forming method

Patents Applicationslast 30 patents

ION BEAM SPUTTERING APPARATUS AND METHOD

METHODS AND SYSTEMS FOR PRODUCING CONFORMAL THIN FILMS

SPUTTERING APPARATUS AND DISPLAY DEVICE USING THE SAME

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

DYNAMIC VACUUM SEAL SYSTEM FOR PHYSICAL VAPOR DEPOSITION SPUTTER AP...

COATED SUBSTRATE

ROTARY CATHODE END BLOCK

Low Temperature Deposition of Hydrogen-Free Diamond-Like Carbon Films

PVD TARGET STRUCTURE AND METHOD FOR PREPARING THE SAME

COMPONENT FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APP...

DEPOSITION SYSTEM AND METHOD

SPUTTERING TARGET, METHOD OF BONDING TARGET MATERIAL AND BACKING PL...

PVD TARGET DESIGN AND SEMICONDUCTOR DEVICES FORMED USING THE SAME

METHOD FOR SURFACE COATING ACCORDING TO THE SPUTTERING PRINCIPLE

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRI...

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

FILM FORMING APPARATUS AND FILM FORMING METHOD

ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES

PHYSICAL VAPOR DEPOSITION (PVD) WITH TARGET EROSION PROFILE MONITORING

Method for Solvent Free Perovskite Deposition

SEMICONDUCTOR PROCESSING EQUIPMENT PART AND METHOD FOR MAKING THE SAME

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

RAZOR BLADE AND MANUFACTURING METHOD THEREOF

TARGET FOR MRAM

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

IGZO SPUTTERING TARGET

SPUTTERING TARGET

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...

COATING EQUIPMENT AND COATING METHOD THEREOF