Cathode assembly for sputtering apparatus

Industry

CPC
C23C14/3407

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/3407Cathode assembly for sputtering apparatus

Industries

Patents Grantslast 30 patents

Information Patent Grant
Counter electrode for electrochromic devices
- Patent number 11,966,140
- Issue date Apr 23, 2024
- View, Inc.
- Dane Gillaspie
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Tilted PVD source with rotating pedestal
- Patent number 11,948,784
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Harish Penmethsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chalcogenide sputtering target and method of making the same
- Patent number 11,946,132
- Issue date Apr 2, 2024
- Honeywell International Inc.
- Michael R. Pinter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,947,232
- Issue date Apr 2, 2024
- View, Inc.
- Sridhar Karthik Kailasam
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hydrophilic metal thin film and sputtering method for depositing th...
- Patent number 11,932,931
- Issue date Mar 19, 2024
- National Taiwan University of Science and Technology
- Pak-Man Yiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,923,178
- Issue date Mar 5, 2024
- ULVAC, Inc.
- Koji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for homogeneously coating 3D substrates
- Patent number 11,913,108
- Issue date Feb 27, 2024
- FHR Anlagenbau GmbH
- Sven Häberlein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering apparatus and magnetron sputtering method
- Patent number 11,901,166
- Issue date Feb 13, 2024
- Tokyo Electron Limited
- Tetsuya Miyashita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and method for reducing arcing
- Patent number 11,885,008
- Issue date Jan 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Wei Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making thin films
- Patent number 11,885,009
- Issue date Jan 30, 2024
- UChicago Argonne, LLC
- Tomas Polakovic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film of metal oxide, organic electroluminescent device includi...
- Patent number 11,871,590
- Issue date Jan 9, 2024
- Japan Science and Technology Agency
- Hideo Hosono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering target
- Patent number 11,862,443
- Issue date Jan 2, 2024
- Sumitomo Chemical Company, Limited
- Toshiaki Kuroda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD directional deposition for encapsulation
- Patent number 11,851,740
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Internally divisible process chamber using a shutter disk assembly
- Patent number 11,830,710
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- John Joseph Mazzocco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High efficiency rotatable sputter target
- Patent number 11,830,712
- Issue date Nov 28, 2023
- SCI ENGINEERED MATERIALS, INC.
- Ian Ravary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus, deposition target structure, and method
- Patent number 11,823,878
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target structure and film forming apparatus
- Patent number 11,823,880
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Einstein Noel Abarra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Laminate and method for producing laminate
- Patent number 11,817,328
- Issue date Nov 14, 2023
- AGC Inc.
- Hirofumi Yamamoto
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
In-plane magnetized film, in-plane magnetized film multilayer struc...
- Patent number 11,810,700
- Issue date Nov 7, 2023
- Tanaka Kikinzoku Kogyo K.K.
- Kim Kong Tham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Irradiation-resistant and anti-wear hydrogen-free carbon film on po...
- Patent number 11,788,182
- Issue date Oct 17, 2023
- Lanzhou Institute of Chemical Physics Chinese Academy of Sciences
- Peng Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for machining sputtering target, apparatus for machining spu...
- Patent number 11,766,726
- Issue date Sep 26, 2023
- Sumitomo Chemical Company, Limited
- Masahiro Fujita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,761,078
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Mengxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum containing targets
- Patent number 11,753,702
- Issue date Sep 12, 2023
- H.C. Starck Solutions Euclid, LLC
- Gary Alan Rozak
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
PVD target design and semiconductor devices formed using the same
- Patent number 11,725,270
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
DC magnetron sputtering
- Patent number 11,718,908
- Issue date Aug 8, 2023
- SPTS Technologies Limited
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EM source for enhanced plasma control
- Patent number 11,692,262
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition apparatus and method thereof
- Patent number 11,688,591
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator ring clamp and physical vapor deposition chamber incorpora...
- Patent number 11,670,493
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with a multi-cathode
- Patent number 11,668,003
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic-inorganic hybrid membrane
- Patent number 11,655,347
- Issue date May 23, 2023
- HYOMEN KAIMEN KOBO CORPORATION
- Yasunori Taga
- B60 - VEHICLES IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING A TARGET MATERIAL
- Publication number 20240141476
- Publication date May 2, 2024
- TAIWAN STEEL GROUP AEROSPACE ADDITIVE MANUFACTURING CORPORATION
- William HSIEH
- B22 - CASTING POWDER METALLURGY
Information Patent Application
DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER
- Publication number 20240133025
- Publication date Apr 25, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING TARGET
- Publication number 20240133022
- Publication date Apr 25, 2024
- CemeCon AG
- Oliver LEMMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET AND METHOD FOR FORMING CESIUM TUNGSTEN OXIDE FILM
- Publication number 20240117485
- Publication date Apr 11, 2024
- SUMITOMO METAL MINING Co., Ltd.,
- Hideharu OKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Of Piezoelectric Films
- Publication number 20240114800
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Vijay Bhan Sharma
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SPUTTERING TARGET AND SPUTTERING APPARATUS INCLUDING THE SAME
- Publication number 20240084441
- Publication date Mar 14, 2024
- SAMSUNG DISPLAY CO., LTD.
- HYUNEOK SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD DIRECTIONAL DEPOSITION FOR ENCAPSULATION
- Publication number 20240084435
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Ludovic GODET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL MATERIAL AND METHOD FOR PRODUCING THE SAME
- Publication number 20240076773
- Publication date Mar 7, 2024
- City University of Hong Kong Shenzhen Futian Research Institute
- Sida Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERAT...
- Publication number 20240062995
- Publication date Feb 22, 2024
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Henrik Flaske
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYMER COMPOSITE MATERIAL AND PREPARATION METHOD THEREOF
- Publication number 20240035147
- Publication date Feb 1, 2024
- City University of Hong Kong Shenzhen Futian Research Institute
- Jian LU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR REDUCING MISALIGNMENT BETWEEN SPUTTERING TARGET AND SHIELD
- Publication number 20240021422
- Publication date Jan 18, 2024
- Honeywell International Inc.
- Bo Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...
- Publication number 20240021423
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Yasuhiko KOJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS, DEPOSITION TARGET STRUCTURE, AND METHOD
- Publication number 20240014019
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT DEVICE AND METHOD
- Publication number 20240011149
- Publication date Jan 11, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Christoph KAISER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET
- Publication number 20240002997
- Publication date Jan 4, 2024
- NGK Insulators, Ltd.
- Kentaro NONAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AL-RICH ALTIN COATING LAYERS PRODUCED BY PVD FROM METALLIC TARGETS
- Publication number 20230399733
- Publication date Dec 14, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Siegfried KRASSNITZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF GALLIUM NITRIDE FILM
- Publication number 20230374649
- Publication date Nov 23, 2023
- Japan Display Inc.
- Masanobu IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU AND TUNABLE DEPOSITION OF A FILM
- Publication number 20230374654
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD TARGET DESIGN AND SEMICONDUCTOR DEVICES FORMED USING THE SAME
- Publication number 20230366079
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE
- Publication number 20230313364
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Kevin KASHEFI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FREE-STANDING LITHIUM PHOSPHORUS OXYNITRIDE THINK FILMS AND METHODS...
- Publication number 20230313362
- Publication date Oct 5, 2023
- The Regents of the University of California
- Ying Shirley Meng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF
- Publication number 20230307218
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hsi WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET MATERIAL AND OXIDE SEMICONDUCTOR
- Publication number 20230307549
- Publication date Sep 28, 2023
- Mitsui Mining and Smelting Co., Ltd.
- Kyosuke TERAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON MATERIALS AND METHODS OF MAKING DIAMOND-LIKE CA...
- Publication number 20230295792
- Publication date Sep 21, 2023
- Coulombic, Inc.
- David Andrew Sopchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND MET...
- Publication number 20230287555
- Publication date Sep 14, 2023
- Abdulilah Mayet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SLIT DIAPHRAGM
- Publication number 20230274922
- Publication date Aug 31, 2023
- SINGULUS TECHNOLOGIES AG
- Peter WEIPERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING TARGET, METHOD OF BONDING TARGET MATERIAL AND BACKING PL...
- Publication number 20230274921
- Publication date Aug 31, 2023
- Sumitomo Chemical Company, Limited
- Masahiro FUJITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20230253190
- Publication date Aug 10, 2023
- SAMSUNG DISPLAY CO., LTD.
- Kwan Yong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION METHOD OF NIOBIUM DISELENIDE FILM WITH ULTRA-LOW FRICTI...
- Publication number 20230227963
- Publication date Jul 20, 2023
- LANZHOU INSTITUTE OF CHEMICAL PHYSICS CAS
- Li JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND CVD MASK COATING METHOD USING THE SAME
- Publication number 20230220533
- Publication date Jul 13, 2023
- SAMSUNG DISPLAY CO., LTD.
- SUNGMIN HUR
- H01 - BASIC ELECTRIC ELEMENTS

Cathode assembly for sputtering apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Counter electrode for electrochromic devices

Tilted PVD source with rotating pedestal

Chalcogenide sputtering target and method of making the same

Fabrication of low defectivity electrochromic devices

Hydrophilic metal thin film and sputtering method for depositing th...

Vacuum processing apparatus

Method and device for homogeneously coating 3D substrates

Magnetron sputtering apparatus and magnetron sputtering method

Film forming apparatus and method for reducing arcing

Method of making thin films

Thin film of metal oxide, organic electroluminescent device includi...

Sputtering target

PVD directional deposition for encapsulation

Internally divisible process chamber using a shutter disk assembly

High efficiency rotatable sputter target

Deposition apparatus, deposition target structure, and method

Target structure and film forming apparatus

Laminate and method for producing laminate

In-plane magnetized film, in-plane magnetized film multilayer struc...

Irradiation-resistant and anti-wear hydrogen-free carbon film on po...

Method for machining sputtering target, apparatus for machining spu...

Methods and apparatus for processing a substrate

Molybdenum containing targets

PVD target design and semiconductor devices formed using the same

DC magnetron sputtering

EM source for enhanced plasma control

Physical vapor deposition apparatus and method thereof

Isolator ring clamp and physical vapor deposition chamber incorpora...

Deposition system with a multi-cathode

Organic-inorganic hybrid membrane

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING A TARGET MATERIAL

DEPOSITION OF NON-STOICHIOMETRIC METAL COMPOUND LAYER

SPUTTERING TARGET

SPUTTERING TARGET AND METHOD FOR FORMING CESIUM TUNGSTEN OXIDE FILM

Deposition Of Piezoelectric Films

SPUTTERING TARGET AND SPUTTERING APPARATUS INCLUDING THE SAME

PVD DIRECTIONAL DEPOSITION FOR ENCAPSULATION

METAL MATERIAL AND METHOD FOR PRODUCING THE SAME

HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERAT...

POLYMER COMPOSITE MATERIAL AND PREPARATION METHOD THEREOF

DEVICE FOR REDUCING MISALIGNMENT BETWEEN SPUTTERING TARGET AND SHIELD

FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPAR...

DEPOSITION APPARATUS, DEPOSITION TARGET STRUCTURE, AND METHOD

TRANSPORT DEVICE AND METHOD

SPUTTERING TARGET

AL-RICH ALTIN COATING LAYERS PRODUCED BY PVD FROM METALLIC TARGETS

MANUFACTURING METHOD OF GALLIUM NITRIDE FILM

IN SITU AND TUNABLE DEPOSITION OF A FILM

PVD TARGET DESIGN AND SEMICONDUCTOR DEVICES FORMED USING THE SAME

ELECTROMAGNET PULSING EFFECT ON PVD STEP COVERAGE

FREE-STANDING LITHIUM PHOSPHORUS OXYNITRIDE THINK FILMS AND METHODS...

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD THEREOF

SPUTTERING TARGET MATERIAL AND OXIDE SEMICONDUCTOR

DIAMOND-LIKE CARBON MATERIALS AND METHODS OF MAKING DIAMOND-LIKE CA...

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED INERTIAL SENSOR AND MET...

SLIT DIAPHRAGM

SPUTTERING TARGET, METHOD OF BONDING TARGET MATERIAL AND BACKING PL...

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

PREPARATION METHOD OF NIOBIUM DISELENIDE FILM WITH ULTRA-LOW FRICTI...

SPUTTERING APPARATUS AND CVD MASK COATING METHOD USING THE SAME