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B81B2203/0315
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2203/00
Basic micro-electromechanical structures
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B81B2203/0315
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Patents Grants
last 30 patents
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
11,978,690
Issue date
May 7, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with a structure tiltable by piezoele...
Patent number
11,953,813
Issue date
Apr 9, 2024
STMicroelectronics S.r.l.
Nicolo' Boni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device and corresponding manufacturing method
Patent number
11,952,263
Issue date
Apr 9, 2024
Robert Bosch GmbH
Mike Schwarz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a device comprising a membrane extending o...
Patent number
11,939,214
Issue date
Mar 26, 2024
Soitec
Bruno Ghyselen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and package with integrated passive acoustic filter...
Patent number
11,910,154
Issue date
Feb 20, 2024
Infineon Technologies AG
Daniel Neumaier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for a micromechanical component
Patent number
11,905,166
Issue date
Feb 20, 2024
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Acoustic transduction unit, manufacturing method thereof and acoust...
Patent number
11,905,169
Issue date
Feb 20, 2024
BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
Jingwen Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS acoustic sensor
Patent number
11,910,160
Issue date
Feb 20, 2024
SHINSUNG SOUNDMOTION CO., LTD.
Sangwoo Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic transducer, manufacturing method thereof, and ultrasonic...
Patent number
11,904,356
Issue date
Feb 20, 2024
Hitachi, Ltd.
Taiichi Takezaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,897,760
Issue date
Feb 13, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
Patent number
11,902,741
Issue date
Feb 13, 2024
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
Patent number
11,883,845
Issue date
Jan 30, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,884,537
Issue date
Jan 30, 2024
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
Patent number
11,855,604
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Federico Vercesi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for sealing entries in a MEMS element
Patent number
11,851,324
Issue date
Dec 26, 2023
Robert Bosch GmbH
Christoph Hermes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and method for making the same
Patent number
11,851,318
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device comprising different types of microelectromech...
Patent number
11,851,323
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hsiang-Fu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
High-range semiconductor load sensor device
Patent number
11,851,319
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Anna Angela Pomarico
B60 - VEHICLES IN GENERAL
Information
Patent Grant
MEMS encapsulation employing lower pressure and higher pressure dep...
Patent number
11,834,331
Issue date
Dec 5, 2023
Texas Instruments Incorporated
Scott Robert Summerfelt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS ultrasonic transducers and related apparatus and methods
Patent number
11,833,542
Issue date
Dec 5, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enclosed cavity structures
Patent number
11,834,330
Issue date
Dec 5, 2023
X-CELEPRINT LIMITED
Ronald S. Cok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
11,838,725
Issue date
Dec 5, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhengyu Shi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
11,838,724
Issue date
Dec 5, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Jinyang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional features formed in molded panel
Patent number
11,807,523
Issue date
Nov 7, 2023
Hewlett-Packard Development Company, L.P.
Chien-Hua Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device comprising a membrane and an actuator
Patent number
11,807,517
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Dario Paci
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS chip
Patent number
11,805,372
Issue date
Oct 31, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhuanzhuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS chip
Patent number
11,805,373
Issue date
Oct 31, 2023
AAC Acoustic Technologies (Shenzhen) Co., Ltd.
Zhuanzhuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mass flow control based on micro-electromechanical devices
Patent number
11,772,958
Issue date
Oct 3, 2023
Applied Materials, Inc.
Nir Merry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
Publication number
20240154599
Publication date
May 9, 2024
STMicroelectronics S.r.l.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
Publication number
20240137711
Publication date
Apr 25, 2024
Innogrity Pte Ltd
KATHIRGAMASUNDARAM SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE COMPRISING A HYDROGEN DRAINAGE LAYER
Publication number
20240124296
Publication date
Apr 18, 2024
ROBERT BOSCH GmbH
Johannes Boy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CARTRIDGE INTERFERENCE
Publication number
20240124297
Publication date
Apr 18, 2024
VueReal Inc.
Gholamreza CHAJI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PIEZOELECTRIC SPEAKER
Publication number
20240114795
Publication date
Apr 4, 2024
AAC Kaitai Technologies (Wuhan) CO., LTD
Yu Shen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20240100566
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND METHODS
Publication number
20240100565
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS OPTICAL MICROPHONE
Publication number
20240101410
Publication date
Mar 28, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Taimoor Ali
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS OPTICAL MICROPHONE
Publication number
20240101411
Publication date
Mar 28, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Taimoor Ali
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240092632
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20240092631
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Yoshiyuki INUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
Publication number
20240067520
Publication date
Feb 29, 2024
INFINEON TECHNOLOGIES AG
Fabian Streb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH AN IMPROVED CAP AND RELATED MANUFACTURING PROCESS
Publication number
20240043265
Publication date
Feb 8, 2024
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...
Publication number
20240010489
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Manuel RIANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...
Publication number
20240002216
Publication date
Jan 4, 2024
TEXAS INSTRUMENTS INCORPORATED
Hakhamanesh MANSOORZARE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical Acoustic Pressure-Generating Device with Imp...
Publication number
20230416076
Publication date
Dec 28, 2023
ROBERT BOSCH GmbH
Holger Conrad
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE
Publication number
20230416079
Publication date
Dec 28, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...
Publication number
20230406695
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiang-Fu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
Publication number
20230406692
Publication date
Dec 21, 2023
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMBRANE TRANSFER METHOD
Publication number
20230406696
Publication date
Dec 21, 2023
SOITEC
François-Xavier Darras
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
Publication number
20230406698
Publication date
Dec 21, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
Publication number
20230382715
Publication date
Nov 30, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230382714
Publication date
Nov 30, 2023
DB HITEK CO., LTD.
Min Hyun JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
Publication number
20230382717
Publication date
Nov 30, 2023
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
Publication number
20230365396
Publication date
Nov 16, 2023
TDK Corporation
Toyotaka KOBAYASHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
Publication number
20230357001
Publication date
Nov 9, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
Publication number
20230348258
Publication date
Nov 2, 2023
STMicroelectronics S.r.l.
Mikel AZPEITIA URQUIA
B81 - MICRO-STRUCTURAL TECHNOLOGY