characterised by a plurality of individual support members

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CPC
H01L21/6875

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6875characterised by a plurality of individual support members

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Stage and substrate processing apparatus
- Patent number 12,288,676
- Issue date Apr 29, 2025
- Tokyo Electron Limited
- Takayuki Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample holder
- Patent number 12,288,714
- Issue date Apr 29, 2025
- Kyocera Corporation
- Seiya Saisho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 12,278,135
- Issue date Apr 15, 2025
- SCREEN Holdings Co., Ltd.
- Hirofumi Tonai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Friction stir welding in semiconductor manufacturing applications
- Patent number 12,272,591
- Issue date Apr 8, 2025
- Lam Research Corporation
- Nick Ray Linebarger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding device and method of manufacturing holding device
- Patent number 12,273,965
- Issue date Apr 8, 2025
- NITERRA CO., LTD.
- Ryunosuke Sakamaki
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Apparatus for treating substrate and method of coupling support unit
- Patent number 12,266,561
- Issue date Apr 1, 2025
- Semes Co., Ltd.
- Sang Min Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,266,562
- Issue date Apr 1, 2025
- Tokyo Electron Limited
- Hajime Naito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder for use in a lithographic apparatus
- Patent number 12,249,535
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Niek Jacobus Johannes Roset
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,247,288
- Issue date Mar 11, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate fixing device and electrostatic chuck
- Patent number 12,243,763
- Issue date Mar 4, 2025
- Shinko Electric Industries Co., Ltd.
- Masakuni Miyazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support, lithographic apparatus, method for manipulating...
- Patent number 12,242,204
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving fusion bonding
- Patent number 12,243,848
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hong-Ta Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder for use in a lithographic apparatus and a device m...
- Patent number 12,243,768
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Johannes Josephus Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic susceptor and method of manufacturing same
- Patent number 12,237,204
- Issue date Feb 25, 2025
- MiCo Ceramics Ltd.
- So Young Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage devices configured to measure physical properties of...
- Patent number 12,237,189
- Issue date Feb 25, 2025
- Micron Technology, Inc.
- Nagasubramaniyan Chandrasekaran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly for substrate treatment apparatus
- Patent number 12,237,205
- Issue date Feb 25, 2025
- Deviceeng Co. Ltd
- Taek Youb Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanosecond pulser ADC system
- Patent number 12,230,477
- Issue date Feb 18, 2025
- Eagle Harbor Technologies, Inc.
- Kenneth Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light irradiation type heat treatment apparatus
- Patent number 12,230,518
- Issue date Feb 18, 2025
- SCREEN Holdings Co., Ltd.
- Nobuhiko Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with mesas
- Patent number 12,224,198
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled substrate carrier and polishing components
- Patent number 12,217,979
- Issue date Feb 4, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,204,256
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber
- Patent number 12,198,972
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yancheng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated aerosol deposition coating for aluminum components for pl...
- Patent number 12,198,902
- Issue date Jan 14, 2025
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Four-point tilt alignment wafer chuck
- Patent number 12,172,257
- Issue date Dec 24, 2024
- Warren C. Oliver
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF WAFER STAGE...
- Publication number 20250140532
- Publication date May 1, 2025
- Hitachi High-Tech Corporation
- Shintaro NAKATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR AND MANUFACTURING METHOD THEREOF
- Publication number 20250136515
- Publication date May 1, 2025
- KSM COMPONENT CO., LTD.
- Yun Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20250140596
- Publication date May 1, 2025
- ASML NETHERLANDS B.V
- Niek Jacobus Johannes ROSET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...
- Publication number 20250125169
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250118586
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ANNEAL CHAMBER
- Publication number 20250118572
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Paul R. McHugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT
- Publication number 20250118592
- Publication date Apr 10, 2025
- LAM RESEARCH CORPORATION
- Nick Ray Linebarger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-MATERIAL CHUCK
- Publication number 20250112083
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Christopher NETZBAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL HEATER
- Publication number 20250105034
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Justin GAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT PIN
- Publication number 20250105048
- Publication date Mar 27, 2025
- TOKAI CARBON CO., LTD.
- Takeshi Tokunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20250105051
- Publication date Mar 27, 2025
- Applied Materials, Inc.
- Arvinder Manmohan Singh Chadha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK PIN AND SUBSTRATE HOLDING DEVICE
- Publication number 20250105050
- Publication date Mar 27, 2025
- SCREEN Holdings Co., Ltd.
- Kazuma FUNAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALLOY COMPOSITION FOR CORROSION RESISTANCE
- Publication number 20250092491
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Chien-Min Liao
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Support Structure for Thermal Processing Systems
- Publication number 20250096032
- Publication date Mar 20, 2025
- Mattson Technology, Inc.
- Manuel Sohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND HEATING UNIT
- Publication number 20250096028
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Ju Mi LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME
- Publication number 20250079230
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Ikuhisa MORIOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250079233
- Publication date Mar 6, 2025
- MICO CERAMICS LTD.
- Mina CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20250079229
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SUPPORT TABLE AND RF ROD
- Publication number 20250079235
- Publication date Mar 6, 2025
- NGK Insulators, Ltd.
- Tomohiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Wafer Chuck With Solid Diamond Pins
- Publication number 20250079226
- Publication date Mar 6, 2025
- II-VI Delaware, Inc.
- Jonathan Coppola
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME
- Publication number 20250069941
- Publication date Feb 27, 2025
- MICO CERAMICS LTD.
- So Young Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF QUARTZ MEMBER, AND METHOD FOR SPRAY COATING...
- Publication number 20250066614
- Publication date Feb 27, 2025
- MITSUBISHI CHEMICAL CORPORATION
- Masami MUNEHIRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT
- Publication number 20250069942
- Publication date Feb 27, 2025
- FERROTEC MATERIAL TECHNOLOGIES CORPORATION
- Wataru YAMAGISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SHAFT ASSEMBLY FOR THERMAL CONTROL IN HEATED SEMICONDUCTOR P...
- Publication number 20250069943
- Publication date Feb 27, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Michael PARKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20250062150
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20250062140
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES
- Publication number 20250062143
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Deepak Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH SELF-SEALING GAS CONDUITS AND/OR REDUCED...
- Publication number 20250062149
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Kadthala R. NARENDRNATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM
- Publication number 20250054784
- Publication date Feb 13, 2025
- KELK LTD.
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

characterised by a plurality of individual support members

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Stage and substrate processing apparatus

Sample holder

Substrate treating apparatus

Substrate supporting plate, thin film deposition apparatus includin...

Friction stir welding in semiconductor manufacturing applications

Substrate retaining apparatus, system including the apparatus, and...

Holding device and method of manufacturing holding device

Apparatus for treating substrate and method of coupling support unit

Substrate processing method and substrate processing apparatus

Semiconductor processing apparatus and method utilizing electrostat...

Substrate holder for use in a lithographic apparatus

Substrate processing apparatus and method

Substrate fixing device and electrostatic chuck

Substrate support, lithographic apparatus, method for manipulating...

Methods and systems for improving fusion bonding

Substrate holder for use in a lithographic apparatus and a device m...

Ceramic susceptor and method of manufacturing same

Wafer storage devices configured to measure physical properties of...

Substrate support assembly for substrate treatment apparatus

Nanosecond pulser ADC system

Substrate support with varying depths of areas between mesas and co...

Light irradiation type heat treatment apparatus

Electrostatic chuck with mesas

Temperature controlled substrate carrier and polishing components

Wafer placement correction in indexed multi-station processing cham...

Stage, film-forming apparatus, and film-processing apparatus

Substrate processing apparatus

Process chamber

Laminated aerosol deposition coating for aluminum components for pl...

Four-point tilt alignment wafer chuck

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD OF WAFER STAGE...

CERAMIC SUSCEPTOR AND MANUFACTURING METHOD THEREOF

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...

ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY

ANNEAL CHAMBER

APPARATUSES FOR BACKSIDE WAFER PROCESSING WITH EDGE-ONLY WAFER CONTACT

MULTI-MATERIAL CHUCK

PEDESTAL HEATER

WAFER LIFT PIN

MODULAR SUBSTRATE SUPPORT ASSEMBLY

CHUCK PIN AND SUBSTRATE HOLDING DEVICE

ALLOY COMPOSITION FOR CORROSION RESISTANCE

Support Structure for Thermal Processing Systems

SUBSTRATE TREATING APPARATUS AND HEATING UNIT

WAFER PLACEMENT TABLE AND METHOD OF USING THE SAME

CERAMIC SUSCEPTOR

WAFER PLACEMENT TABLE

WAFER SUPPORT TABLE AND RF ROD

Vacuum Wafer Chuck With Solid Diamond Pins

MULTI ZONE SPOT HEATING IN EPI

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME

MANUFACTURING METHOD OF QUARTZ MEMBER, AND METHOD FOR SPRAY COATING...

WAFER SUPPORT

HYBRID SHAFT ASSEMBLY FOR THERMAL CONTROL IN HEATED SEMICONDUCTOR P...

ELECTROSTATIC CHUCK WITH SEAL SURFACE

WAFER CLEANING APPARATUS AND METHOD

SUBSTRATE SUPPORT DEVICE WITH DIAGNOSTIC CAPABILITIES

ELECTROSTATIC CHUCKS WITH SELF-SEALING GAS CONDUITS AND/OR REDUCED...

TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM