characterised by a plurality of individual support members

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CPC
H01L21/6875

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6875characterised by a plurality of individual support members

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with mesas
- Patent number 12,224,198
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled substrate carrier and polishing components
- Patent number 12,217,979
- Issue date Feb 4, 2025
- Axus Technology, LLC
- Daniel Ray Trojan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 12,204,256
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Kouichi Mizunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber
- Patent number 12,198,972
- Issue date Jan 14, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yancheng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated aerosol deposition coating for aluminum components for pl...
- Patent number 12,198,902
- Issue date Jan 14, 2025
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Four-point tilt alignment wafer chuck
- Patent number 12,172,257
- Issue date Dec 24, 2024
- Warren C. Oliver
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heating treatment device for photovoltaic module recycling
- Patent number 12,176,455
- Issue date Dec 24, 2024
- Changzhou Institute of Technology
- Pin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and electrostatic clamp designs
- Patent number 12,174,552
- Issue date Dec 24, 2024
- ASML Holding N.V.
- Victor Antonio Perez-Falcon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support structure for thermal processing systems
- Patent number 12,176,241
- Issue date Dec 24, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Manuel Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate
- Patent number 12,170,221
- Issue date Dec 17, 2024
- Jusung Engineering Co., Ltd.
- Won Woo Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 12,165,887
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer placement table
- Patent number 12,150,215
- Issue date Nov 19, 2024
- NGK Insulators, Ltd.
- Seiya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck design and method for wafer
- Patent number 12,148,651
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Superstrate and method of making it
- Patent number 12,136,564
- Issue date Nov 5, 2024
- Canon Kabushiki Kaisha
- Fen Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment and transport of substrate and focus ring
- Patent number 12,131,936
- Issue date Oct 29, 2024
- Keisuke Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method for manufacturing electrostatic chuck
- Patent number 12,125,731
- Issue date Oct 22, 2024
- Kyocera Corporation
- Hiroshi Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminate and method for producing same
- Patent number 12,116,671
- Issue date Oct 15, 2024
- Resonac Corporation
- Akira Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoupled XY parallel micro-positioning stage
- Patent number 12,106,999
- Issue date Oct 1, 2024
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Jian Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,106,994
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...
- Publication number 20250053100
- Publication date Feb 13, 2025
- GUDENG PRECISION INDUSTRIAL CO,. LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM
- Publication number 20250054784
- Publication date Feb 13, 2025
- KELK LTD.
- Atsushi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20250054806
- Publication date Feb 13, 2025
- Mitsubishi Electric Corporation
- Misato HISANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...
- Publication number 20250050439
- Publication date Feb 13, 2025
- WATLOW ELECTRIC MANUFACTURING COMPANY
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
- Publication number 20250054772
- Publication date Feb 13, 2025
- SCREEN Holdings Co., Ltd.
- Hideaki TANIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS
- Publication number 20250054738
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Dan MAROHL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING
- Publication number 20250046635
- Publication date Feb 6, 2025
- Samsung Electronics Co., Ltd.
- Sangchul Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250038041
- Publication date Jan 30, 2025
- NGK Insulators, Ltd.
- Yutaka UNNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...
- Publication number 20250038040
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT PINS, LIFT PIN ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS,...
- Publication number 20250038039
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Ion Hong Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BONDING CHUCK WITH DISCRETE ACTUATORS
- Publication number 20250029866
- Publication date Jan 23, 2025
- Micron Technology, Inc.
- Craig A. Hickman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIDE-COVERAGE EDGE RING FOR ENHANCED SHIELDING IN SUBSTRATE PROCESS...
- Publication number 20250022691
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Shang-I CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...
- Publication number 20250019829
- Publication date Jan 16, 2025
- PlayNitride Display Co., Ltd.
- Yen-Lin LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE
- Publication number 20250014934
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250014939
- Publication date Jan 9, 2025
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USING PLASMA ENHANCED PROCESS TO DO PERIODIC MAINTENANCE
- Publication number 20250014876
- Publication date Jan 9, 2025
- SKY TECH INC.
- JUNG-HUA CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER
- Publication number 20250006546
- Publication date Jan 2, 2025
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yancheng LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20240420932
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
- Publication number 20240412989
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chuck Design and Method for Wafer
- Publication number 20240395595
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240393703
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...
- Publication number 20240385535
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...
- Publication number 20240387234
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- JUNHYUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER BORE HOLE PLUG
- Publication number 20240387236
- Publication date Nov 21, 2024
- SCHUNK XYCARB TECHNOLOGY B.V.
- Moritz WIPPERLING
- H01 - BASIC ELECTRIC ELEMENTS

characterised by a plurality of individual support members

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrostatic chuck with mesas

Temperature controlled substrate carrier and polishing components

Wafer placement correction in indexed multi-station processing cham...

Stage, film-forming apparatus, and film-processing apparatus

Substrate processing apparatus

Process chamber

Laminated aerosol deposition coating for aluminum components for pl...

Four-point tilt alignment wafer chuck

Heating treatment device for photovoltaic module recycling

Lithographic apparatus and electrostatic clamp designs

Support structure for thermal processing systems

Apparatus for processing substrate

Wafer cleaning apparatus and method

Multi zone spot heating in EPI

Wafer placement table

Chuck design and method for wafer

Electrostatic chuck with seal surface

Vacuum apparatus

Quartz susceptor for accurate non-contact temperature measurement

Superstrate and method of making it

Semiconductor processing equipment with high temperature resistant...

Alignment and transport of substrate and focus ring

Electrostatic chuck and method for manufacturing electrostatic chuck

Multi-zone pedestal heater without vias

Laminate and method for producing same

Method to manufacture nano ridges in hard ceramic coatings

Substrate handling device and processing chamber

Susceptor arrangement of a CVD reactor

Decoupled XY parallel micro-positioning stage

Electrostatic chuck

Patents Applicationslast 30 patents

RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...

TEMPERATURE CONTROL DEVICE AND WAFER PROCESSING SYSTEM

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SEMICONDUCTOR PROCESSING EQUIPMENT WITH HIGH TEMPERATURE RESISTANT...

HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

TUNABLE ESC FOR RAPID ALTERNATING PROCESS APPLICATIONS

SUBSTRATE PROCESSING

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

CERAMIC SUSCEPTOR

LIFT FRAMES FOR CENTRAL HEATING, AND RELATED PROCESSING CHAMBERS AN...

LIFT PINS, LIFT PIN ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS,...

WAFER BONDING CHUCK WITH DISCRETE ACTUATORS

WIDE-COVERAGE EDGE RING FOR ENHANCED SHIELDING IN SUBSTRATE PROCESS...

SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...

BIPOLAR ELECTROSTATIC CHUCK TO LIMIT DC DISCHARGE

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

USING PLASMA ENHANCED PROCESS TO DO PERIODIC MAINTENANCE

PROCESS CHAMBER

SUBSTRATE SUPPORT

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

Chuck Design and Method for Wafer

PROCESSING TOOL AND METHOD

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...

SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...

SUBSTRATE CARRIER BORE HOLE PLUG