characterised by a plurality of individual support members

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CPC
H01L21/6875

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6875characterised by a plurality of individual support members

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for processing substrate
- Patent number 12,170,221
- Issue date Dec 17, 2024
- Jusung Engineering Co., Ltd.
- Won Woo Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 12,165,887
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement table
- Patent number 12,150,215
- Issue date Nov 19, 2024
- NGK Insulators, Ltd.
- Seiya Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck design and method for wafer
- Patent number 12,148,651
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz susceptor for accurate non-contact temperature measurement
- Patent number 12,134,835
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Kim Ramkumar Vellore
- C30 - CRYSTAL GROWTH
Information Patent Grant
Superstrate and method of making it
- Patent number 12,136,564
- Issue date Nov 5, 2024
- Canon Kabushiki Kaisha
- Fen Wan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing equipment with high temperature resistant...
- Patent number 12,128,494
- Issue date Oct 29, 2024
- Watlow Electric Manufacturing Company
- Brent Elliot
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment and transport of substrate and focus ring
- Patent number 12,131,936
- Issue date Oct 29, 2024
- Keisuke Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and method for manufacturing electrostatic chuck
- Patent number 12,125,731
- Issue date Oct 22, 2024
- Kyocera Corporation
- Hiroshi Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminate and method for producing same
- Patent number 12,116,671
- Issue date Oct 15, 2024
- Resonac Corporation
- Akira Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoupled XY parallel micro-positioning stage
- Patent number 12,106,999
- Issue date Oct 1, 2024
- GUANGDONG UNIVERSITY OF TECHNOLOGY
- Jian Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,106,994
- Issue date Oct 1, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,097,541
- Issue date Sep 24, 2024
- Shibaura Mechatronics Corporation
- Kensuke Demura
- B08 - CLEANING
Information Patent Grant
Wafer placement table and method of manufacturing the same
- Patent number 12,087,613
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Hiroshi Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructure control of conducting materials through surface coat...
- Patent number 12,084,763
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Marc Shull
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer placement table
- Patent number 12,087,609
- Issue date Sep 10, 2024
- NGK Insulators, Ltd.
- Tatsuya Kuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support plate for localized heating in thermal processing systems
- Patent number 12,080,568
- Issue date Sep 3, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 12,077,392
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hitoshi Hashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
- Patent number 12,055,862
- Issue date Aug 6, 2024
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamping jig and cleaning device
- Patent number 12,057,328
- Issue date Aug 6, 2024
- Kyocera Corporation
- Hiroshi Hamashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar electrostatic chuck to limit DC discharge
- Patent number 12,057,339
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
- Patent number 12,057,352
- Issue date Aug 6, 2024
- SCREEN Holdings Co., Ltd.
- Takahiro Kitazawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT
- Publication number 20240420932
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Yogananda Sarode Vishwanath
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...
- Publication number 20240420971
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
- Publication number 20240412989
- Publication date Dec 12, 2024
- SEMES CO., LTD.
- Young Eun JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chuck Design and Method for Wafer
- Publication number 20240395595
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TOOL AND METHOD
- Publication number 20240395537
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-hsiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240393703
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...
- Publication number 20240385535
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...
- Publication number 20240387234
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- JUNHYUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER BORE HOLE PLUG
- Publication number 20240387236
- Publication date Nov 21, 2024
- SCHUNK XYCARB TECHNOLOGY B.V.
- Moritz WIPPERLING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
- Publication number 20240387205
- Publication date Nov 21, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLET FOR PICKUP A SEMICONDUCTOR CHIP
- Publication number 20240387231
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Jungho PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD AND TOOL OF MANUFACTURE
- Publication number 20240387227
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...
- Publication number 20240376595
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Marc Shull
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
- Publication number 20240379394
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Huang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
- Publication number 20240379328
- Publication date Nov 14, 2024
- Timothy M. Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240355664
- Publication date Oct 24, 2024
- Mitsubishi Electric Corporation
- Kinya YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR
- Publication number 20240347372
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Balakrishnam R. JAMPANA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...
- Publication number 20240347371
- Publication date Oct 17, 2024
- NHK Spring Co., Ltd.
- Yusuke OTSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK, FOCUS RING, SUPPORT BASE, PLASMA PROCESSING AP...
- Publication number 20240347322
- Publication date Oct 17, 2024
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME
- Publication number 20240321625
- Publication date Sep 26, 2024
- KYOCERA CORPORATION
- Masahiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Pedestal Shaft with Heated/Cooled Gas Tube
- Publication number 20240304491
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIFFERENTIAL SUBSTRATE BACKSIDE COOLING
- Publication number 20240304486
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Yogananda SARODE VISHWANATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20240304492
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Hui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND TOOL FOR RESTRICTING SUBSTRATE A SUPPORT BEAD INSIDE AN...
- Publication number 20240297066
- Publication date Sep 5, 2024
- Applied Materials, Inc.
- Liurui LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
- Publication number 20240282556
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- B08 - CLEANING

characterised by a plurality of individual support members

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for processing substrate

Multi zone spot heating in EPI

Wafer cleaning apparatus and method

Wafer placement table

Chuck design and method for wafer

Electrostatic chuck with seal surface

Vacuum apparatus

Quartz susceptor for accurate non-contact temperature measurement

Superstrate and method of making it

Semiconductor processing equipment with high temperature resistant...

Alignment and transport of substrate and focus ring

Electrostatic chuck and method for manufacturing electrostatic chuck

Multi-zone pedestal heater without vias

Laminate and method for producing same

Method to manufacture nano ridges in hard ceramic coatings

Substrate handling device and processing chamber

Susceptor arrangement of a CVD reactor

Decoupled XY parallel micro-positioning stage

Electrostatic chuck

Substrate processing apparatus

Wafer placement table and method of manufacturing the same

Microstructure control of conducting materials through surface coat...

Wafer placement table

Support plate for localized heating in thermal processing systems

Substrate transfer apparatus and substrate transfer method

Permanent secondary erosion containment for electrostatic chuck bonds

Substrate holder, lithographic apparatus, device manufacturing meth...

Clamping jig and cleaning device

Bipolar electrostatic chuck to limit DC discharge

Heat treatment method and heat treatment apparatus of light irradia...

Patents Applicationslast 30 patents

SUBSTRATE SUPPORT

VERTICLE FURNACE FOR PROCESSING A PLURALITY OF SUBSTRATES AND METHO...

THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

Chuck Design and Method for Wafer

PROCESSING TOOL AND METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...

SUBSTRATE SUPPORT APPARATUS AND SUBSTRATE PROCESSING APPARATUS HAVI...

SUBSTRATE CARRIER BORE HOLE PLUG

Support Plate for Localized Heating in Thermal Processing Systems

COLLET FOR PICKUP A SEMICONDUCTOR CHIP

SEMICONDUCTOR DEVICE, METHOD AND TOOL OF MANUFACTURE

MICROSTRUCTURE CONTROL OF CONDUCTING MATERIALS THROUGH SURFACE COAT...

SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME

PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

SEMICONDUCTOR MANUFACTURING APPARATUS

SUSCEPTOR

LAMINATE STRUCTURE, STAGE, SEMICONDUCTOR MANUFACTURING DEVICE, AND...

ELECTROSTATIC CHUCK, FOCUS RING, SUPPORT BASE, PLASMA PROCESSING AP...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

ADSORPTION MEMBER AND METHOD FOR PRODUCING SAME

Ceramic Pedestal Shaft with Heated/Cooled Gas Tube

DIFFERENTIAL SUBSTRATE BACKSIDE COOLING

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

Preheat Processes for Millisecond Anneal System

METHOD AND TOOL FOR RESTRICTING SUBSTRATE A SUPPORT BEAD INSIDE AN...

FAST RESPONSE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN