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characterised by antireflection means or light filtering or absorbing means
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G03F7/091
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Parent Industries
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/091
characterised by antireflection means or light filtering or absorbing means
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor devices and methods of manufacturing
Patent number
11,977,333
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for creating highly-functional meta-materials...
Patent number
11,971,616
Issue date
Apr 30, 2024
PIXELDISPLAY INC.
David Wyatt
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Photoresist composition, coated substrate including the photoresist...
Patent number
11,960,206
Issue date
Apr 16, 2024
Rohm and Hass Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photosensitive element, resin composition for forming barrier layer...
Patent number
11,960,208
Issue date
Apr 16, 2024
Resonac Corporation
Masakazu Kume
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,940,732
Issue date
Mar 26, 2024
Rohm and Haas Electronic Materials LLC
Sheng Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Monomers, polymers and lithographic compositions comprising same
Patent number
11,932,713
Issue date
Mar 19, 2024
Rohm and Haas Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Thermosetting iodine- and silicon-containing material, composition...
Patent number
11,914,295
Issue date
Feb 27, 2024
Shin-Etsu Chemical Co., Ltd.
Tsutomu Ogihara
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition, pattern-forming method, and compound-producing method
Patent number
11,880,138
Issue date
Jan 23, 2024
JSR Corporation
Shin-ya Nakafuji
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Prepolymer composition intended to form a contrast layer and method...
Patent number
11,868,044
Issue date
Jan 9, 2024
Arkema France
Xavier Chevalier
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Material for forming organic film, patterning process, and polymer
Patent number
11,851,530
Issue date
Dec 26, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Patterning method and structures resulting therefrom
Patent number
11,848,239
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing
Patent number
11,842,896
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layer photo etching mask including organic and inorganic mate...
Patent number
11,830,736
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating compositions for use with an overcoated photoresist
Patent number
11,822,248
Issue date
Nov 21, 2023
Rohm and Haas Electronic Materials Korea Ltd.
Eui-Hyun Ryu
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Composition for forming silicon-containing resist underlayer film r...
Patent number
11,815,815
Issue date
Nov 14, 2023
Nissan Chemical Industries, Ltd.
Hiroyuki Wakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating compositions and methods of forming electronic devices
Patent number
11,817,316
Issue date
Nov 14, 2023
Rohm and Haas Electronic Materials LLC
Sheng Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photosensitive resin structure for printing plate, and method for p...
Patent number
11,796,914
Issue date
Oct 24, 2023
Asahi Kasei Kabushiki Kaisha
Shusaku Tabata
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Underlayer material for photoresist
Patent number
11,796,918
Issue date
Oct 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bottom antireflective coating materials
Patent number
11,782,345
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Chih Chen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method of patterning a substrate using a sidewall spacer etch mask
Patent number
11,782,346
Issue date
Oct 10, 2023
Tokyo Electron Limited
Jodi Grzeskowiak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composition for forming organic film, patterning process, and polymer
Patent number
11,782,347
Issue date
Oct 10, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke Kori
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Anti-reflection coating composition and use thereof
Patent number
11,767,435
Issue date
Sep 26, 2023
PhiChem Corporation
Yun Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating composition for photoresist underlayer
Patent number
11,762,294
Issue date
Sep 19, 2023
Rohm and Haas Electronic Materials LLC
Joshua Kaitz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography process method for defining sidewall morphology of lith...
Patent number
11,726,400
Issue date
Aug 15, 2023
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
Hui Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Curable composition, cured product, color filter, method for produc...
Patent number
11,718,695
Issue date
Aug 8, 2023
FUJIFILM Corporation
Junichi Ito
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Gray-tone lithography for precise control of grating etch depth
Patent number
11,709,422
Issue date
Jul 25, 2023
Meta Platforms Technologies, LLC
Elliott Franke
G02 - OPTICS
Information
Patent Grant
Resist underlayer composition, and method of forming patterns using...
Patent number
11,698,587
Issue date
Jul 11, 2023
Samsung SDI Co., Ltd.
Shinhyo Bae
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Tuning threshold voltage through meta stable plasma treatment
Patent number
11,688,606
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photocurable coating composition for forming low refractive layer
Patent number
11,680,172
Issue date
Jun 20, 2023
LG Chem, Ltd.
Jin Seok Byun
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Curable composition, cured product, color filter, method for produc...
Patent number
11,680,125
Issue date
Jun 20, 2023
FUJIFILM Corporation
Junichi Ito
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Patents Applications
last 30 patents
Information
Patent Application
COMPOSITION FOR PREPARING TOP ANTIREFLECTION FILM, TOP ANTIREFLECTI...
Publication number
20240134282
Publication date
Apr 25, 2024
GANSU HUALONG SEMICONDUCTOR MATERIAL TECHNOLOGY CO., LTD.
Yongbin LI
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096625
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096624
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING
Publication number
20240079235
Publication date
Mar 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING METHOD AND STRUCTURES RESULTING THEREFROM
Publication number
20240063060
Publication date
Feb 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK
Publication number
20240053685
Publication date
Feb 15, 2024
SEMES CO., LTD.
Youngdae Chung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK AND METHOD OF MANUFACTURING DISPLAY PANEL USING THE SAME
Publication number
20240045339
Publication date
Feb 8, 2024
SAMSUNG DISPLAY CO., LTD.
Soon-Hwan So
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20240027921
Publication date
Jan 25, 2024
Canon Kabushiki Kaisha
TOSHIKI IWAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING A LIFT-OFF MASK STRUCTURE
Publication number
20240012327
Publication date
Jan 11, 2024
ams-Osram AG
Patrik Pertl
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PROCESSING A SUBSTRATE
Publication number
20240004300
Publication date
Jan 4, 2024
NANYA TECHNOLOGY CORPORATION
CHIH-YING TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST
Publication number
20230418161
Publication date
Dec 28, 2023
Rohm and Haas Electronic Materials Korea Ltd.
Eui-Hyun Ryu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
METALLIC PHOTORESIST PATTERNING AND DEFECT IMPROVEMENT
Publication number
20230393475
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor manufacturing method
Publication number
20230384678
Publication date
Nov 30, 2023
United Semiconductor (Xiamen) Co., Ltd.
Chien-Chung Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Anti-reflective hard mask composition
Publication number
20230375929
Publication date
Nov 23, 2023
CHEMPOLE CO., LTD.
Sangjun CHOI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF PATTERNING A SUBSTRATE USING A SIDEWALL SPACER ETCH MASK
Publication number
20230367217
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Jodi GRZESKOWIAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOTTOM ANTIREFLECTIVE COATING MATERIALS
Publication number
20230367216
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Chih Chen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
THERMOSETTING IODINE- AND SILICON-CONTAINING MATERIAL, COMPOSITION...
Publication number
20230333472
Publication date
Oct 19, 2023
Shin-Etsu Chemical Co., Ltd.
Tsutomu OGIHARA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLEXOGRAPHIC PRINTING PLATE PRECURSOR AND MANUFACTURING METHOD OF F...
Publication number
20230324800
Publication date
Oct 12, 2023
FUJIFILM CORPORATION
Kazuki WATANABE
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Application
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, METHOD FO...
Publication number
20230288802
Publication date
Sep 14, 2023
Showa Denko Materials Co., Ltd.
Akiko TAKEDA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Tuning Threshold Voltage Through Meta Stable Plasma Treatment
Publication number
20230282484
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shao-Jyun Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND
Publication number
20230280655
Publication date
Sep 7, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke KORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PLANARIZING AGENT FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING...
Publication number
20230274936
Publication date
Aug 31, 2023
Shin-Etsu Chemical Co., Ltd.
Yasuyuki YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLYMER AND COMPOSITION FOR FORMING AN ANTI-REFLECTIVE FILM AND MET...
Publication number
20230244146
Publication date
Aug 3, 2023
Samsung Electronics Co., Ltd.
Miyeong KANG
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Lithographic Photopolymer Printing Plate Precursor with Improved Da...
Publication number
20230211599
Publication date
Jul 6, 2023
AGFA Offset BV
Katleen Himschoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ANTI-REFLECTION COATING COMPOSITION AND USE THEREOF
Publication number
20230203319
Publication date
Jun 29, 2023
PhiChem Corporation
Yun ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PHOTORESIST PATTERN, AND PHOTORESIST STRUCTURE
Publication number
20230185193
Publication date
Jun 15, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Kanyu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION
Publication number
20230161246
Publication date
May 25, 2023
NISSAN CHEMICAL CORPORATION
Hikaru TOKUNAGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD TO ACHIEVE POSITIVE TONE DRY DEVELOP BY A HERM...
Publication number
20230152701
Publication date
May 18, 2023
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTOCHEMICAL AND THERMAL RELEASE LAYER PROCESSES AND USES IN DEVIC...
Publication number
20230144598
Publication date
May 11, 2023
Terecircuits Corporation
Jayna Sheats
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GRAY-TONE RESISTS AND PROCESSES
Publication number
20230130753
Publication date
Apr 27, 2023
Meta Platforms Technologies, LLC
Keren ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY