characterised by material of construction or surface finish of the means for supporting the substrate

Industry

CPC
C23C16/4581

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4581characterised by material of construction or surface finish of the means for supporting the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma polymerization coating with uniformity control
- Patent number 12,065,740
- Issue date Aug 20, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 12,040,217
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer holding body
- Patent number 12,033,880
- Issue date Jul 9, 2024
- Sumitomo Electric Industries, Ltd.
- Koichi Kimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and a method for processing a su...
- Patent number 12,018,365
- Issue date Jun 25, 2024
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus having improved temperature control
- Patent number 12,009,185
- Issue date Jun 11, 2024
- Applied Materials, Inc.
- Jun Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 11,981,998
- Issue date May 14, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for conditioning a processing reactor
- Patent number 11,926,892
- Issue date Mar 12, 2024
- GlobalWafers Co., Ltd.
- Gang Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
- Patent number 11,920,239
- Issue date Mar 5, 2024
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma boat for receiving wafers with regulated plasma deposition
- Patent number 11,873,559
- Issue date Jan 16, 2024
- Nippon Kornmeyer Carbon Group GmbH
- Torsten Kornmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vapor deposition device and method for manufacturing epitaxial sili...
- Patent number 11,846,039
- Issue date Dec 19, 2023
- Sumco Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic showerheads with conductive electrodes
- Patent number 11,834,744
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and process for determining the distance between a glass...
- Patent number 11,827,983
- Issue date Nov 28, 2023
- Pilkington Group Limited
- David Rimmer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for holding and releasing a substrate
- Patent number 11,814,721
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Simon Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multiple temperature range susceptor, assembly, reactor and system...
- Patent number 11,795,545
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- John Kevin Shugrue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mobile support assembly for holding and transporting a container
- Patent number 11,781,713
- Issue date Oct 10, 2023
- Praxair Technology, Inc.
- Mayank Pareek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma erosion resistant thin film coating for high temperature app...
- Patent number 11,773,479
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Vahid Firouzdor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adjustable thermal break in a substrate support
- Patent number 11,764,041
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pre-coating method and film forming method
- Patent number 11,718,910
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Takeshi Itatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer level uniformity control in remote plasma film deposition
- Patent number 11,702,748
- Issue date Jul 18, 2023
- Lam Research Corporation
- Geoffrey Hohn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate pedestal including backside gas-delivery tube
- Patent number 11,634,817
- Issue date Apr 25, 2023
- Lam Research Corporation
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic showerheads with conductive electrodes
- Patent number 11,591,693
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate lift mechanism and reactor including same
- Patent number 11,587,821
- Issue date Feb 21, 2023
- ASM IP Holding B.V.
- Eric Hill
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for enhancing a diffusion limited CVI/CVD process
- Patent number 11,584,987
- Issue date Feb 21, 2023
- Goodrich Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant ground shield of processing chamber
- Patent number 11,562,890
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enhanced lift pin design to eliminate local thickness non-uniformit...
- Patent number 11,508,611
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Kalyanjit Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supports including metal-ceramic interfaces
- Patent number 11,499,229
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Chidambara A. Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Deposition Systems with Rotating Electrostatic Chuck and Methods Th...
- Publication number 20240376602
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET
- Publication number 20240352585
- Publication date Oct 24, 2024
- KNJ CO.,LTD
- Bun-hei KOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20240229240
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...
- Publication number 20240218509
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...
- Publication number 20240222187
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Aniket Chitale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240203784
- Publication date Jun 20, 2024
- NGK Insulators, Ltd.
- Hiroya SUGIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20240167162
- Publication date May 23, 2024
- Samsung Electronics Co., Ltd.
- Jihyeong LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRAY AND SUBSTRATE FIXING DEVICE
- Publication number 20240158916
- Publication date May 16, 2024
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...
- Publication number 20240141492
- Publication date May 2, 2024
- Applied Materials, Inc.
- Prasanth Narayanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...
- Publication number 20240141495
- Publication date May 2, 2024
- Aniketnitin PATIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE PIECE OR TWO PIECE SUSCEPTOR
- Publication number 20240141493
- Publication date May 2, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS
- Publication number 20240128062
- Publication date Apr 18, 2024
- LAM RESEARCH CORPORATION
- Joel HOLLINGSWORTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT-REDUCING COATING METHOD
- Publication number 20240093364
- Publication date Mar 21, 2024
- MSSCORPS CO., LTD.
- CHI-LUN LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...
- Publication number 20240068100
- Publication date Feb 29, 2024
- United Semiconductor Japan Co., Ltd.
- Satoshi Inagaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240060181
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING PARTS USING SOLID-STATE ADDITIVE MANUFACTURING
- Publication number 20240062997
- Publication date Feb 22, 2024
- Lam Research Corporaton
- Pankaj Jyoti Hazarika
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...
- Publication number 20240063051
- Publication date Feb 22, 2024
- Evatec AG
- Florian Hagmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES
- Publication number 20240044003
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Handling System, Method, and Apparatus
- Publication number 20240044002
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS
- Publication number 20240035160
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A CHAMBER COMPONENT
- Publication number 20240026530
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Kirk Allen FISHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING...
- Publication number 20230392252
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Simon LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
- Publication number 20230392255
- Publication date Dec 7, 2023
- PLASMABILITY, LLC
- William Holber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH...
- Publication number 20230357930
- Publication date Nov 9, 2023
- SEMCO SMARTECH FRANCE
- Bachir SEMMACHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
- Publication number 20230304156
- Publication date Sep 28, 2023
- LAM RESEARCH CORPORATION
- Geoffrey HOHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20230257904
- Publication date Aug 17, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE
- Publication number 20230253193
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SAMPLE HOLDER
- Publication number 20230245918
- Publication date Aug 3, 2023
- KYOCERA CORPORATION
- Yoshinori NARAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
- Publication number 20230220549
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- H01 - BASIC ELECTRIC ELEMENTS

characterised by material of construction or surface finish of the means for supporting the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrostatic chuck with seal surface

Plasma polymerization coating with uniformity control

Substrate lift mechanism and reactor including same

Wafer holding body

Semiconductor processing apparatus and a method for processing a su...

Semiconductor processing apparatus having improved temperature control

Integrated showerhead with thermal control for delivering radical a...

Systems and methods for substrate support temperature control

Methods for conditioning a processing reactor

Minimizing radical recombination using ALD silicon oxide surface co...

Plasma boat for receiving wafers with regulated plasma deposition

Substrate support cover for high-temperature corrosive environment

Vapor deposition device and method for manufacturing epitaxial sili...

Ceramic showerheads with conductive electrodes

Apparatus and process for determining the distance between a glass...

Method for holding and releasing a substrate

Multiple temperature range susceptor, assembly, reactor and system...

Mobile support assembly for holding and transporting a container

Plasma erosion resistant thin film coating for high temperature app...

Adjustable thermal break in a substrate support

Pre-coating method and film forming method

Wafer level uniformity control in remote plasma film deposition

Substrate pedestal including backside gas-delivery tube

Integrated showerhead with thermal control for delivering radical a...

Ceramic showerheads with conductive electrodes

Substrate lift mechanism and reactor including same

System and method for enhancing a diffusion limited CVI/CVD process

Corrosion resistant ground shield of processing chamber

Enhanced lift pin design to eliminate local thickness non-uniformit...

Substrate supports including metal-ceramic interfaces

Patents Applicationslast 30 patents

Deposition Systems with Rotating Electrostatic Chuck and Methods Th...

SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

MINIMIZING RADICAL RECOMBINATION USING ALD SILICON OXIDE SURFACE CO...

SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE STAGE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

TRAY AND SUBSTRATE FIXING DEVICE

SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...

CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...

SINGLE PIECE OR TWO PIECE SUSCEPTOR

MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS

DEFECT-REDUCING COATING METHOD

WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...

SUBSTRATE PROCESSING APPARATUS

PROCESSING PARTS USING SOLID-STATE ADDITIVE MANUFACTURING

SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...

WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES

Substrate Handling System, Method, and Apparatus

SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS

METHOD OF COATING A CHAMBER COMPONENT

HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING...

Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...

SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH...

WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION

VAPOR PHASE GROWTH APPARATUS

SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE

SAMPLE HOLDER

SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE