TREA

characterised by material of construction or surface finish of the means for supporting the substrate

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Industry

  • CPC
  • C23C16/4581
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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4581characterised by material of construction or surface finish of the means for supporting the substrate
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SEMICONDUCTOR MANUFACTURING SUSCEPTOR POCKET EDGE FOR PROCESS IMPRO...
    • Publication number 20240141492
    • Publication date May 2, 2024
    • Applied Materials, Inc.
    • Prasanth Narayanan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CASSETTE STRUCTURES AND RELATED METHODS FOR BATCH PROCESSING IN EPI...
    • Publication number 20240141495
    • Publication date May 2, 2024
    • Aniketnitin PATIL
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SINGLE PIECE OR TWO PIECE SUSCEPTOR
    • Publication number 20240141493
    • Publication date May 2, 2024
    • Applied Materials, Inc.
    • Vishwas Kumar PANDEY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS
    • Publication number 20240128062
    • Publication date Apr 18, 2024
    • LAM RESEARCH CORPORATION
    • Joel HOLLINGSWORTH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEFECT-REDUCING COATING METHOD
    • Publication number 20240093364
    • Publication date Mar 21, 2024
    • MSSCORPS CO., LTD.
    • CHI-LUN LIU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLU...
    • Publication number 20240068100
    • Publication date Feb 29, 2024
    • United Semiconductor Japan Co., Ltd.
    • Satoshi Inagaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240060181
    • Publication date Feb 22, 2024
    • TOKYO ELECTRON LIMITED
    • Manabu HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING PARTS USING SOLID-STATE ADDITIVE MANUFACTURING
    • Publication number 20240062997
    • Publication date Feb 22, 2024
    • Lam Research Corporaton
    • Pankaj Jyoti Hazarika
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...
    • Publication number 20240063051
    • Publication date Feb 22, 2024
    • Evatec AG
    • Florian Hagmann
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER BOAT AND A METHOD FOR FORMING LAYER ON A PLURALITY OF SUBSTRATES
    • Publication number 20240044003
    • Publication date Feb 8, 2024
    • ASM IP HOLDING B.V.
    • Dieter Pierreux
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Handling System, Method, and Apparatus
    • Publication number 20240044002
    • Publication date Feb 8, 2024
    • Applied Materials, Inc.
    • Abhishek CHOWDHURY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUSCEPTOR SUPPORT ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION CHAMBERS
    • Publication number 20240035160
    • Publication date Feb 1, 2024
    • Applied Materials, Inc.
    • Tetsuya ISHIKAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF COATING A CHAMBER COMPONENT
    • Publication number 20240026530
    • Publication date Jan 25, 2024
    • Applied Materials, Inc.
    • Kirk Allen FISHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING...
    • Publication number 20230392252
    • Publication date Dec 7, 2023
    • Applied Materials, Inc.
    • Simon LAU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Multiple Chamber System for Plasma Chemical Vapor Deposition of Dia...
    • Publication number 20230392255
    • Publication date Dec 7, 2023
    • PLASMABILITY, LLC
    • William Holber
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH...
    • Publication number 20230357930
    • Publication date Nov 9, 2023
    • SEMCO SMARTECH FRANCE
    • Bachir SEMMACHE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER LEVEL UNIFORMITY CONTROL IN REMOTE PLASMA FILM DEPOSITION
    • Publication number 20230304156
    • Publication date Sep 28, 2023
    • LAM RESEARCH CORPORATION
    • Geoffrey HOHN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR PHASE GROWTH APPARATUS
    • Publication number 20230257904
    • Publication date Aug 17, 2023
    • NUFLARE TECHNOLOGY, INC.
    • Yoshiaki DAIGO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT WITH UNIFORM TEMPERATURE ACROSS A SUBSTRATE
    • Publication number 20230253193
    • Publication date Aug 10, 2023
    • LAM RESEARCH CORPORATION
    • Jeremy George SMITH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SAMPLE HOLDER
    • Publication number 20230245918
    • Publication date Aug 3, 2023
    • KYOCERA CORPORATION
    • Yoshinori NARAZAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PEDESTAL INCLUDING BACKSIDE GAS-DELIVERY TUBE
    • Publication number 20230220549
    • Publication date Jul 13, 2023
    • LAM RESEARCH CORPORATION
    • Troy Alan Gomm
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CERAMIC SHOWERHEADS WITH CONDUCTIVE ELECTRODES
    • Publication number 20230203657
    • Publication date Jun 29, 2023
    • Applied Materials, Inc.
    • Laksheswar Kalita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
    • Publication number 20230163019
    • Publication date May 25, 2023
    • ASM IP HOLDING B.V.
    • Eric Hill
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COOLED EDGE RING WITH INTEGRATED SEALS
    • Publication number 20230133798
    • Publication date May 4, 2023
    • LAM RESEARCH CORPORATION
    • Adam Christopher MACE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
    • Publication number 20230140283
    • Publication date May 4, 2023
    • ASM IP HOLDING B.V.
    • Theodorus G.M. Oosterlaken
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CORROSION RESISTANT GROUND SHIELD OF PROCESSING CHAMBER
    • Publication number 20230122695
    • Publication date Apr 20, 2023
    • Applied Materials, Inc.
    • Dmitry Lubomirsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT
    • Publication number 20230114751
    • Publication date Apr 13, 2023
    • Applied Materials, Inc.
    • Zhepeng CONG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER SUSCEPTOR
    • Publication number 20230105081
    • Publication date Apr 6, 2023
    • ENKRIS SEMICONDUCTOR, INC.
    • Kai CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER SUSCEPTOR
    • Publication number 20230098865
    • Publication date Mar 30, 2023
    • ENKRIS SEMICONDUCTOR, INC.
    • Kai CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Holding Device for Holding a Magnetizable Substrate during Processi...
    • Publication number 20230042478
    • Publication date Feb 9, 2023
    • OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
    • Dieter Mueller
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...