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C23C16/4409
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C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
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C23C16/4409
characterised by sealing means
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Patents Grants
last 30 patents
Information
Patent Grant
Atomic layer deposition reactor arrangement and a method for operat...
Patent number
12,116,668
Issue date
Oct 15, 2024
Beneq Oy
Jonas Andersson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method
Patent number
12,112,927
Issue date
Oct 8, 2024
Picosun Oy
Väinö Kilpi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
Patent number
12,074,049
Issue date
Aug 27, 2024
Lam Research Corporation
Eric A. Pape
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single process volume to perform high-pressure and low-pressure pro...
Patent number
12,012,652
Issue date
Jun 18, 2024
Applied Materials, Inc.
Kelvin Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
Patent number
11,965,262
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Yong Min Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Powder atomic layer deposition equipment with quick release function
Patent number
11,952,662
Issue date
Apr 9, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
Patent number
11,946,142
Issue date
Apr 2, 2024
Lam Research Corporation
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sealing article comprising metal coating, method of making and meth...
Patent number
11,920,238
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Peng-Cheng Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System for backside deposition of a substrate
Patent number
11,908,728
Issue date
Feb 20, 2024
Tokyo Electron Limited
Ronald Nasman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for a treatment to deposit a barrier coating
Patent number
11,898,241
Issue date
Feb 13, 2024
INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
Nasser Beldi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Single wafer processing environments with spatial separation
Patent number
11,894,257
Issue date
Feb 6, 2024
Applied Materials, Inc.
Michael Rice
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sealing article comprising metal coating, method of making and meth...
Patent number
11,851,754
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Peng-Cheng Hong
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Rotating shaft sealing device and processing apparatus for semicond...
Patent number
11,764,102
Issue date
Sep 19, 2023
Sealink Corp.
Hee Jang Rhee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Closure element for closing a loading opening of an inner housing o...
Patent number
11,702,740
Issue date
Jul 18, 2023
Aixtron SE
Marcel Kollberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component, method of manufacturing the component, and method of cle...
Patent number
11,694,879
Issue date
Jul 4, 2023
Applied Materials, Inc.
Ian Widlow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for the plasma processing of containers
Patent number
11,660,361
Issue date
May 30, 2023
KHS GmbH
Juergen Franz Vorwerk
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for monitoring carbon nanotube growth
Patent number
11,578,405
Issue date
Feb 14, 2023
King Fahd University of Petroleum & Minerals
Khaled Mezghani
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Semiconductor processing apparatus and semiconductor processing system
Patent number
11,527,427
Issue date
Dec 13, 2022
Samsung Electronics Co., Ltd.
Hyun Ho Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reactor manifolds
Patent number
11,492,701
Issue date
Nov 8, 2022
ASM IP Holding B.V.
Dinkar Nandwana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and furnace opening cover
Patent number
11,377,730
Issue date
Jul 5, 2022
Kokusai Electric Corporation
Kosuke Takagi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma process apparatus with low particle contamination and method...
Patent number
11,371,141
Issue date
Jun 28, 2022
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Tuqiang Ni
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Homogeneous and transparent protective coatings for precious metals...
Patent number
11,365,481
Issue date
Jun 21, 2022
City University of Hong Kong
Kwok Yan Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Protecting an interior of a gas container with an ALD coating
Patent number
11,326,254
Issue date
May 10, 2022
Picosun Oy
Väino Sammelselg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
11,208,721
Issue date
Dec 28, 2021
Tokyo Electron Limited
Kohei Fukushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment chamber for a chemical vapour deposition (CVD) reactor an...
Patent number
11,193,207
Issue date
Dec 7, 2021
Patrice Nal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for depositing atomic layers on a substrate
Patent number
11,149,352
Issue date
Oct 19, 2021
Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
Raymond Jacobus Wilhelmus Knaapen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming apparatus and film forming method
Patent number
11,098,405
Issue date
Aug 24, 2021
TOSHIBA MEMORY CORPORATION
Hideaki Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and recording medium
Patent number
11,085,113
Issue date
Aug 10, 2021
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Elastomeric seal
Patent number
11,041,567
Issue date
Jun 22, 2021
PRECISION POLYMER ENGINEERING LTD.
Murat Gulcur
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing device
Patent number
10,985,034
Issue date
Apr 20, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Longchao Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
Publication number
20240419090
Publication date
Dec 19, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
Publication number
20240371672
Publication date
Nov 7, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yongfei WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION
Publication number
20240337318
Publication date
Oct 10, 2024
Applied Materials, Inc.
Muhannad Mustafa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EM...
Publication number
20240327977
Publication date
Oct 3, 2024
Canon Kabushiki Kaisha
RYUJI ISHII
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE
Publication number
20240194516
Publication date
Jun 13, 2024
TOKYO ELECTRON LIMITED
Ronald Nasman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...
Publication number
20240178019
Publication date
May 30, 2024
ASM IP HOLDING B.V.
Mandar Deshpande
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
Publication number
20240167161
Publication date
May 23, 2024
LAM RESEARCH CORPORATION
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
Publication number
20240162019
Publication date
May 16, 2024
Picosun Oy
Väinö KILPI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
Publication number
20240158942
Publication date
May 16, 2024
ASM IP HOLDING B.V.
Yong Min Yoo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES
Publication number
20240150891
Publication date
May 9, 2024
AIXTRON SE
Alexandre JOUVRAY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
Publication number
20240096688
Publication date
Mar 21, 2024
Applied Materials, Inc.
Michael Robert Rice
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...
Publication number
20240084447
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Peng-Cheng Hong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...
Publication number
20240043998
Publication date
Feb 8, 2024
BENEQ OY
Jonas ANDERSSON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PEDESTAL INCLUDING SEAL
Publication number
20230416918
Publication date
Dec 28, 2023
Christopher GAGE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
Publication number
20230392278
Publication date
Dec 7, 2023
ASM IP HOLDING B.V.
SungBae Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING DEVICE
Publication number
20230374662
Publication date
Nov 23, 2023
Jusung Engineering Co., Ltd.
Dae Soo JANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROBUST ASHABLE HARD MASK
Publication number
20230360922
Publication date
Nov 9, 2023
LAM RESEARCH CORPORATION
Matthew Scott WEIMER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZATION SYSTEM
Publication number
20230134421
Publication date
May 4, 2023
HORIBA STEC, CO., LTD.
Akihiro TAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
POWDER ATOMIC LAYER DEPOSITION EQUIPMENT WITH QUICK RELEASE FUNCTION
Publication number
20230120393
Publication date
Apr 20, 2023
SKY TECH INC.
JING-CHENG LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION
Publication number
20230091524
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
Gordon PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230082659
Publication date
Mar 16, 2023
KIOXIA Corporation
Masaki SAWADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...
Publication number
20220356571
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Peng-Cheng HONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
Publication number
20220298632
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM DEPOSITION APPARATUS MOUNTABLE WITH ANALYSIS SYSTEM
Publication number
20220154339
Publication date
May 19, 2022
Korea Institute of Science and Technology
In Soo KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TREATMENT METHOD AND DEVICE FOR DEPOSITING A BARRIER-EFFECT COATING
Publication number
20220112595
Publication date
Apr 14, 2022
INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
Nasser BELDI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ROTATING SHAFT SEALING DEVICE AND PROCESSING APPARATUS FOR SEMICOND...
Publication number
20210398844
Publication date
Dec 23, 2021
SEALINK CORP.
Hee Jang Rhee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS CHAMBER GUIDE, PROCESS CHAMBER, AND METHOD FOR GUIDING A SU...
Publication number
20210363632
Publication date
Nov 25, 2021
NexWafe GmbH
Stefan Reber
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
Publication number
20210054519
Publication date
Feb 25, 2021
ASM IP Holding B.V.
Yong Min Yoo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR MONITORING CARBON NANOTUBE GROWTH
Publication number
20200339422
Publication date
Oct 29, 2020
KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
Khaled Mezghani
B82 - NANO-TECHNOLOGY
Information
Patent Application
CLOSURE ELEMENT FOR CLOSING A LOADING OPENING OF AN INNER HOUSING O...
Publication number
20200318235
Publication date
Oct 8, 2020
AIXTRON SE
Marcel KOLLBERG
H01 - BASIC ELECTRIC ELEMENTS