characterised by sealing means

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CPC
C23C16/4409

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4409characterised by sealing means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for depositing carbon-containing structures
- Patent number 12,325,912
- Issue date Jun 10, 2025
- Aixtron SE
- Alexandre Jouvray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction chamber with stop-gapped vacuum seal
- Patent number 12,242,205
- Issue date Mar 4, 2025
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 12,227,839
- Issue date Feb 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition reactor arrangement and a method for operat...
- Patent number 12,116,668
- Issue date Oct 15, 2024
- Beneq Oy
- Jonas Andersson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,112,927
- Issue date Oct 8, 2024
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single process volume to perform high-pressure and low-pressure pro...
- Patent number 12,012,652
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Kelvin Chan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Powder atomic layer deposition equipment with quick release function
- Patent number 11,952,662
- Issue date Apr 9, 2024
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 11,946,142
- Issue date Apr 2, 2024
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 11,920,238
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for backside deposition of a substrate
- Patent number 11,908,728
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for a treatment to deposit a barrier coating
- Patent number 11,898,241
- Issue date Feb 13, 2024
- INNOVATIVE SYSTEMS ET TECHNOLOGIES (ISYTECH)
- Nasser Beldi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sealing article comprising metal coating, method of making and meth...
- Patent number 11,851,754
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peng-Cheng Hong
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Rotating shaft sealing device and processing apparatus for semicond...
- Patent number 11,764,102
- Issue date Sep 19, 2023
- Sealink Corp.
- Hee Jang Rhee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closure element for closing a loading opening of an inner housing o...
- Patent number 11,702,740
- Issue date Jul 18, 2023
- Aixtron SE
- Marcel Kollberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component, method of manufacturing the component, and method of cle...
- Patent number 11,694,879
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Ian Widlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for the plasma processing of containers
- Patent number 11,660,361
- Issue date May 30, 2023
- KHS GmbH
- Juergen Franz Vorwerk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for monitoring carbon nanotube growth
- Patent number 11,578,405
- Issue date Feb 14, 2023
- King Fahd University of Petroleum & Minerals
- Khaled Mezghani
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing system
- Patent number 11,527,427
- Issue date Dec 13, 2022
- Samsung Electronics Co., Ltd.
- Hyun Ho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor manifolds
- Patent number 11,492,701
- Issue date Nov 8, 2022
- ASM IP Holding B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and furnace opening cover
- Patent number 11,377,730
- Issue date Jul 5, 2022
- Kokusai Electric Corporation
- Kosuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process apparatus with low particle contamination and method...
- Patent number 11,371,141
- Issue date Jun 28, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Tuqiang Ni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homogeneous and transparent protective coatings for precious metals...
- Patent number 11,365,481
- Issue date Jun 21, 2022
- City University of Hong Kong
- Kwok Yan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protecting an interior of a gas container with an ALD coating
- Patent number 11,326,254
- Issue date May 10, 2022
- Picosun Oy
- Väino Sammelselg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,721
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kohei Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment chamber for a chemical vapour deposition (CVD) reactor an...
- Patent number 11,193,207
- Issue date Dec 7, 2021
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...
- Publication number 20250109497
- Publication date Apr 3, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu CHAMPAGNE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE
- Publication number 20250101582
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Seung Jin YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A REACTOR
- Publication number 20250092523
- Publication date Mar 20, 2025
- TOBB EKONOMI VE TEKNOLOJI UNIVERSITESI
- Zarife Goknur BUKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS WITH FLOW CONTROL RING AND METHOD OF...
- Publication number 20250092516
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Nirmal Gokuldas Waykole
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONNECTOR WITH PRESSURIZED SEALING CHAMBER FOR PROCESS TUBE OF A PR...
- Publication number 20250075796
- Publication date Mar 6, 2025
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Didier ARL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAINTENANCE SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20250066908
- Publication date Feb 27, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20250066909
- Publication date Feb 27, 2025
- TOKYO ELECTRON LIMITED
- Tsutomu HIROKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
- Publication number 20240419090
- Publication date Dec 19, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION
- Publication number 20240337318
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Muhannad Mustafa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EM...
- Publication number 20240327977
- Publication date Oct 3, 2024
- Canon Kabushiki Kaisha
- RYUJI ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE
- Publication number 20240194516
- Publication date Jun 13, 2024
- TOKYO ELECTRON LIMITED
- Ronald Nasman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...
- Publication number 20240178019
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Mandar Deshpande
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20240167161
- Publication date May 23, 2024
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20240158942
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20240162019
- Publication date May 16, 2024
- Picosun Oy
- Väinö KILPI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES
- Publication number 20240150891
- Publication date May 9, 2024
- AIXTRON SE
- Alexandre JOUVRAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...
- Publication number 20240084447
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Peng-Cheng Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...
- Publication number 20240043998
- Publication date Feb 8, 2024
- BENEQ OY
- Jonas ANDERSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL INCLUDING SEAL
- Publication number 20230416918
- Publication date Dec 28, 2023
- Christopher GAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...
- Publication number 20230392278
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- SungBae Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20230374662
- Publication date Nov 23, 2023
- Jusung Engineering Co., Ltd.
- Dae Soo JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBUST ASHABLE HARD MASK
- Publication number 20230360922
- Publication date Nov 9, 2023
- LAM RESEARCH CORPORATION
- Matthew Scott WEIMER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZATION SYSTEM
- Publication number 20230134421
- Publication date May 4, 2023
- HORIBA STEC, CO., LTD.
- Akihiro TAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWDER ATOMIC LAYER DEPOSITION EQUIPMENT WITH QUICK RELEASE FUNCTION
- Publication number 20230120393
- Publication date Apr 20, 2023
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION
- Publication number 20230091524
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Gordon PENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230082659
- Publication date Mar 16, 2023
- KIOXIA Corporation
- Masaki SAWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...
- Publication number 20220356571
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Peng-Cheng HONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...
- Publication number 20220298632
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by sealing means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for depositing carbon-containing structures

Substrate supporting plate, thin film deposition apparatus includin...

Chemical vapor infiltration densification method using single-pile...

Reaction chamber with stop-gapped vacuum seal

Sealing article comprising metal coating, method of making and meth...

Atomic layer deposition reactor arrangement and a method for operat...

Substrate processing apparatus and method

Permanent secondary erosion containment for electrostatic chuck bonds

Single process volume to perform high-pressure and low-pressure pro...

Substrate supporting plate, thin film deposition apparatus includin...

Powder atomic layer deposition equipment with quick release function

Spatially tunable deposition to compensate within wafer differentia...

Sealing article comprising metal coating, method of making and meth...

System for backside deposition of a substrate

Method for a treatment to deposit a barrier coating

Single wafer processing environments with spatial separation

Sealing article comprising metal coating, method of making and meth...

Rotating shaft sealing device and processing apparatus for semicond...

Closure element for closing a loading opening of an inner housing o...

Component, method of manufacturing the component, and method of cle...

Method and device for the plasma processing of containers

Apparatus for monitoring carbon nanotube growth

Semiconductor processing apparatus and semiconductor processing system

Reactor manifolds

Substrate processing apparatus and furnace opening cover

Plasma process apparatus with low particle contamination and method...

Homogeneous and transparent protective coatings for precious metals...

Protecting an interior of a gas container with an ALD coating

Substrate processing apparatus

Treatment chamber for a chemical vapour deposition (CVD) reactor an...

Patents Applicationslast 30 patents

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...

APPARATUS FOR TREATING SUBSTRATE

A REACTOR

SUBSTRATE PROCESSING APPARATUS WITH FLOW CONTROL RING AND METHOD OF...

CONNECTOR WITH PRESSURIZED SEALING CHAMBER FOR PROCESS TUBE OF A PR...

MAINTENANCE SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

SEAL STRUCTURE, CHAMBER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

HIGH TEMPERATURE METAL SEALS FOR VACUUM SEGREGATION

FILM FORMING APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EM...

SYSTEM AND METHOD FOR BACKSIDE DEPOSITION OF A SUBSTRATE

EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

SUBSTRATE PROCESSING APPARATUS AND METHOD

APPARATUS AND METHOD FOR DEPOSITING CARBON-CONTAINING STRUCTURES

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...

ATOMIC LAYER DEPOSITION REACTOR ARRANGEMENT AND A METHOD FOR OPERAT...

PEDESTAL INCLUDING SEAL

SUBSTRATE SUPPORTING PLATE, APPARATUS INCLUDING THE SUBSTRATE SUPPO...

SUBSTRATE PROCESSING DEVICE

ROBUST ASHABLE HARD MASK

VAPORIZATION SYSTEM

POWDER ATOMIC LAYER DEPOSITION EQUIPMENT WITH QUICK RELEASE FUNCTION

MULTIZONE GAS DISTRIBUTION PLATE FOR TRENCH PROFILE OPTIMIZATION

SUBSTRATE PROCESSING APPARATUS

SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METH...

SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIA...