characterised by the composition or properties of the plate materials

Industry

CPC
B24B37/14

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B37/00Lapping machines or devices Accessories

Current Industry

B24B37/14characterised by the composition or properties of the plate materials

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Process for making anti-reflective optical glass and product thereof
- Patent number 12,043,568
- Issue date Jul 23, 2024
- TACHI METAL MATERIAL TECHNOLOGY CO., LTD.
- Kuan-Wei Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing control system, substrate processing control m...
- Patent number 12,036,634
- Issue date Jul 16, 2024
- Ebara Corporation
- Koichi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization methods for packaging substrates
- Patent number 11,931,855
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Han-Wen Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing system with platen for substrate edge control
- Patent number 11,890,717
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for coating a lapping plate platen, and related methods o...
- Patent number 11,123,758
- Issue date Sep 21, 2021
- Seagate Technology LLC
- Nicholas Blum
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Grinding wheel
- Patent number 10,919,127
- Issue date Feb 16, 2021
- Matuschek Messtechnik GmbH
- Christoph Pierednik
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer chuck featuring reduced friction support surface
- Patent number 10,790,181
- Issue date Sep 29, 2020
- M Cubed Technologies, Inc.
- Edward J. Gratrix
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing of electrostatic substrate support geometries
- Patent number 10,654,147
- Issue date May 19, 2020
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
One or more charging members used in the manufacture of a lapping p...
- Patent number 10,654,146
- Issue date May 19, 2020
- Seagate Technology LLC
- Mihaela Ruxandra Baurceanu
- B24 - GRINDING POLISHING
Information Patent Grant
Polyurethane CMP pads having a high modulus ratio
- Patent number 10,562,149
- Issue date Feb 18, 2020
- Cabot Microelectronics Corporation
- Lin Fu
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer pin chuck fabrication and repair
- Patent number 10,242,905
- Issue date Mar 26, 2019
- M Cubed Technologies, Inc.
- Edward J. Gratrix
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Disc containing copper for sapphire polishing, and method for prepa...
- Patent number 10,220,486
- Issue date Mar 5, 2019
- Lens Technology Co., Ltd.
- Qunfei Zhou
- B24 - GRINDING POLISHING
Information Patent Grant
Lapping plate and method of making
- Patent number 10,105,813
- Issue date Oct 23, 2018
- Seagate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Grant
Lapping plate and method of making
- Patent number 10,010,996
- Issue date Jul 3, 2018
- Seagate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer pin chuck fabrication and repair
- Patent number 9,941,148
- Issue date Apr 10, 2018
- M Cubed Technologies, Inc.
- Edward Gratrix
- B24 - GRINDING POLISHING
Information Patent Grant
Resin lapping plate and lapping method using the same
- Patent number 9,370,853
- Issue date Jun 21, 2016
- Fujibo Holdings, Inc.
- Kouki Itoyama
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing systems
- Patent number 9,272,388
- Issue date Mar 1, 2016
- NexPlanar Corporation
- Sudhanshu Misra
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing systems
- Patent number 8,383,003
- Issue date Feb 26, 2013
- NexPlanar Corporation
- Sudhanshu Misra
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for reducing removal forces for CMP pads
- Patent number 8,308,528
- Issue date Nov 13, 2012
- Round Rock Research, LLC
- Trent T. Ward
- B24 - GRINDING POLISHING
Information Patent Grant
High speed flat lapping platen
- Patent number 8,062,098
- Issue date Nov 22, 2011
- Wayne O. Duescher
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for reducing removal forces for CMP pads
- Patent number 7,585,425
- Issue date Sep 8, 2009
- Micron Technology, Inc.
- Trent T. Ward
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method
- Patent number 7,513,819
- Issue date Apr 7, 2009
- Shin-Eisu Handotai Co., Ltd
- Etsuo Kiuchi
- B24 - GRINDING POLISHING
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 7,207,878
- Issue date Apr 24, 2007
- Applied Materials, Inc.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Table of wafer polishing apparatus, method for polishing semiconduc...
- Patent number 7,040,963
- Issue date May 9, 2006
- Ibiden Co., Ltd.
- Yuji Okuda
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for releasably attaching a polishing pad to a...
- Patent number 7,001,251
- Issue date Feb 21, 2006
- Micron Technology, Inc.
- Trung Tri Doan
- B24 - GRINDING POLISHING
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 6,991,528
- Issue date Jan 31, 2006
- Applied Materials, Inc.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for reducing removal forces for CMP pads
- Patent number 6,991,740
- Issue date Jan 31, 2006
- Micron Technology, Inc.
- Trent T. Ward
- B24 - GRINDING POLISHING
Information Patent Grant
Conductive polishing article for electrochemical mechanical polishing
- Patent number 6,979,248
- Issue date Dec 27, 2005
- Applied Materials, Inc.
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Porous material air bearing platen for chemical mechanical planariz...
- Patent number 6,939,212
- Issue date Sep 6, 2005
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
System and apparatus for achieving very high crown-to-camber ratios...
- Patent number 6,913,515
- Issue date Jul 5, 2005
- Hitachi Global Storage Technologies Netherlands B.V.
- Jacey Robert Beaucage
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20240316720
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING SYSTEM WITH PLATEN FOR SUBSTRATE EDGE CONTROL
- Publication number 20240100646
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240091900
- Publication date Mar 21, 2024
- Disco Corporation
- Shun NAKAGAWA
- B24 - GRINDING POLISHING
Information Patent Application
GRINDING DISC AND SUBSTRATE CLEANING DEVICE
- Publication number 20240042572
- Publication date Feb 8, 2024
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Zehao MA
- B24 - GRINDING POLISHING
Information Patent Application
PAD CONDITIONER WITH POLYMER BACKING PLATE
- Publication number 20230094483
- Publication date Mar 30, 2023
- Entegris, Inc.
- Doruk YENER
- B24 - GRINDING POLISHING
Information Patent Application
FLUORINATED POLYUREA COPOLYMER PAD
- Publication number 20230082181
- Publication date Mar 16, 2023
- Rohm and Haas Electronic Materials CMP Holdings, INC.
- Matthew R. Gadinski
- B24 - GRINDING POLISHING
Information Patent Application
MULTIPLE POLISHING HEADS WITH CROSS-ZONE PRESSURE ELEMENT DISTRIBUT...
- Publication number 20220362903
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yung-Lung Lin
- B24 - GRINDING POLISHING
Information Patent Application
Process for Making Anti-reflective Optical Glass and Product Thereof
- Publication number 20220250974
- Publication date Aug 11, 2022
- Kuan-Wei Chen
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PLATE FOR POLISHING DEVICE, AND POLISHING DEVICE AND POLISH...
- Publication number 20220063052
- Publication date Mar 3, 2022
- MARUISHI SANGYO CO., LTD.
- MATSUO IIDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS FOR COATING A LAPPING PLATE PLATEN, AND RELATED METHODS O...
- Publication number 20210379613
- Publication date Dec 9, 2021
- SEAGATE TECHNOLOGY LLC
- Nicholas Blum
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TOOL FOR MODIFYING A SUPPORT SURFACE
- Publication number 20210263418
- Publication date Aug 26, 2021
- ASML NETHERLANDS B.V.
- Bert Dirk SCHOLTEN
- B24 - GRINDING POLISHING
Information Patent Application
PLANARIZATION METHODS FOR PACKAGING SUBSTRATES
- Publication number 20200391343
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Han-Wen CHEN
- B24 - GRINDING POLISHING
Information Patent Application
Polishing System with Platen for Substrate Edge Control
- Publication number 20200206866
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- Jay Gurusamy
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR COATING A LAPPING PLATE PLATEN, AND RELATED METHODS O...
- Publication number 20200061644
- Publication date Feb 27, 2020
- SEAGATE TECHNOLOGY LLC
- Nicholas Blum
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20190240799
- Publication date Aug 8, 2019
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ONE OR MORE CHARGING MEMBERS USED IN THE MANUFACTURE OF A LAPPING P...
- Publication number 20190224806
- Publication date Jul 25, 2019
- SEAGATE TECHNOLOGY LLC
- Mihaela Ruxandra Baurceanu
- B24 - GRINDING POLISHING
Information Patent Application
CMP SOFT POLISHING OF ELECTROSTATIC SUBSTRATE SUPPORT GEOMETRIES
- Publication number 20190111541
- Publication date Apr 18, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- B24 - GRINDING POLISHING
Information Patent Application
SURFACE PLATE FOR FINISH POLISHING, FINISH POLISHING DEVICE, AND PO...
- Publication number 20190047111
- Publication date Feb 14, 2019
- JAPAN AGENCY FOR MARINE-EARTH SCIENCE AND TECHNOLOGY
- Kenji Shimizu
- B24 - GRINDING POLISHING
Information Patent Application
Wafer pin chuck fabrication and repair
- Publication number 20180182657
- Publication date Jun 28, 2018
- M Cubed Technologies, Inc.
- Edward J. Gratrix
- B24 - GRINDING POLISHING
Information Patent Application
WAFER CHUCK FEATURING REDUCED FRICTION SUPPORT SURFACE
- Publication number 20180122684
- Publication date May 3, 2018
- M Cubed Technologies, Inc.
- Edward J. Gratrix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Abrasive Articles with Removable Abrasive Member and Methods of Sep...
- Publication number 20180001441
- Publication date Jan 4, 2018
- 3M Innovative Properties Company
- Kelvin Sze Wei Ang
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
LAPPING PLATE AND METHOD OF MAKING
- Publication number 20170304988
- Publication date Oct 26, 2017
- Segate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Application
LAPPING PLATE AND METHOD OF MAKING
- Publication number 20170304989
- Publication date Oct 26, 2017
- Seagate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Application
Copper Disc for Sapphire Polishing, and Method of Repairing Double-...
- Publication number 20170129071
- Publication date May 11, 2017
- LENS TECHNOLOGY CO., LTD
- Qunfei Zhou
- B24 - GRINDING POLISHING
Information Patent Application
Wafer pin chuck fabrication and repair
- Publication number 20160276203
- Publication date Sep 22, 2016
- M Cubed Technologies, Inc.
- Edward Gratrix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Mechanical Polishing Slurry for Reducing Corrosion and Met...
- Publication number 20160122590
- Publication date May 5, 2016
- Air Products and Chemicals, Inc.
- Blake J. Lew
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Resin Lapping Plate and Lapping Method Using the Same
- Publication number 20150165586
- Publication date Jun 18, 2015
- FUJIBO HOLDINGS, INC.
- Kouki ITOYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRA FINE LAPPING SUBSTRATE THROUGH USE OF HARD COATED MATERIAL ON...
- Publication number 20140295740
- Publication date Oct 2, 2014
- HGST NETHERLANDS B.V.
- Luis David G. Aguirre
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING SYSTEMS
- Publication number 20130149945
- Publication date Jun 13, 2013
- Sudhanshu Misra
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

characterised by the composition or properties of the plate materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process for making anti-reflective optical glass and product thereof

Substrate processing control system, substrate processing control m...

Planarization methods for packaging substrates

Polishing system with platen for substrate edge control

Apparatus for coating a lapping plate platen, and related methods o...

Grinding wheel

Wafer chuck featuring reduced friction support surface

Polishing of electrostatic substrate support geometries

One or more charging members used in the manufacture of a lapping p...

Polyurethane CMP pads having a high modulus ratio

Wafer pin chuck fabrication and repair

Disc containing copper for sapphire polishing, and method for prepa...

Lapping plate and method of making

Lapping plate and method of making

Wafer pin chuck fabrication and repair

Resin lapping plate and lapping method using the same

Polishing systems

Polishing systems

Apparatus and method for reducing removal forces for CMP pads

High speed flat lapping platen

Apparatus and method for reducing removal forces for CMP pads

Polishing apparatus and method

Conductive polishing article for electrochemical mechanical polishing

Table of wafer polishing apparatus, method for polishing semiconduc...

Method and apparatus for releasably attaching a polishing pad to a...

Conductive polishing article for electrochemical mechanical polishing

Method for reducing removal forces for CMP pads

Conductive polishing article for electrochemical mechanical polishing

Porous material air bearing platen for chemical mechanical planariz...

System and apparatus for achieving very high crown-to-camber ratios...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

POLISHING SYSTEM WITH PLATEN FOR SUBSTRATE EDGE CONTROL

POLISHING APPARATUS AND POLISHING METHOD

GRINDING DISC AND SUBSTRATE CLEANING DEVICE

PAD CONDITIONER WITH POLYMER BACKING PLATE

FLUORINATED POLYUREA COPOLYMER PAD

MULTIPLE POLISHING HEADS WITH CROSS-ZONE PRESSURE ELEMENT DISTRIBUT...

Process for Making Anti-reflective Optical Glass and Product Thereof

SURFACE PLATE FOR POLISHING DEVICE, AND POLISHING DEVICE AND POLISH...

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

APPARATUS FOR COATING A LAPPING PLATE PLATEN, AND RELATED METHODS O...

TOOL FOR MODIFYING A SUPPORT SURFACE

PLANARIZATION METHODS FOR PACKAGING SUBSTRATES

Polishing System with Platen for Substrate Edge Control

APPARATUS FOR COATING A LAPPING PLATE PLATEN, AND RELATED METHODS O...

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

ONE OR MORE CHARGING MEMBERS USED IN THE MANUFACTURE OF A LAPPING P...

CMP SOFT POLISHING OF ELECTROSTATIC SUBSTRATE SUPPORT GEOMETRIES

SURFACE PLATE FOR FINISH POLISHING, FINISH POLISHING DEVICE, AND PO...

Wafer pin chuck fabrication and repair

WAFER CHUCK FEATURING REDUCED FRICTION SUPPORT SURFACE

Abrasive Articles with Removable Abrasive Member and Methods of Sep...

LAPPING PLATE AND METHOD OF MAKING

LAPPING PLATE AND METHOD OF MAKING

Copper Disc for Sapphire Polishing, and Method of Repairing Double-...

Wafer pin chuck fabrication and repair

Chemical Mechanical Polishing Slurry for Reducing Corrosion and Met...

Resin Lapping Plate and Lapping Method Using the Same

ULTRA FINE LAPPING SUBSTRATE THROUGH USE OF HARD COATED MATERIAL ON...

POLISHING SYSTEMS