characterised by the method used for heating the substrate

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CPC
C23C16/46

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/46characterised by the method used for heating the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, reaction container, method of manuf...
- Patent number 12,163,226
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Kazuki Nonomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for cleaning reaction vessel for processing su...
- Patent number 12,139,787
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Shinya Ebata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,136,545
- Issue date Nov 5, 2024
- Kokusai Electric Corporation
- Takashi Yahata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Toposelective vapor deposition using an inhibitor
- Patent number 12,136,552
- Issue date Nov 5, 2024
- ASM IP Holding B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
- Patent number 12,136,549
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Byung Seok Kwon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal reactor for generating reactive species for chemical vapor...
- Patent number 12,129,550
- Issue date Oct 29, 2024
- Pyxis Innovations Inc.
- Atul Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for flowable gap-fill
- Patent number 12,129,546
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Shinya Yoshimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, method for manufacturing semiconductor device,...
- Patent number 12,119,219
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for efficiently eliminating graphene wrinkles formed by chem...
- Patent number 12,116,281
- Issue date Oct 15, 2024
- Nanjing University
- Libo Gao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer chucking on a susceptor for ALD
- Patent number 12,112,969
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating substrate support
- Patent number 12,106,944
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with integrated carrier cleaning modules
- Patent number 12,104,242
- Issue date Oct 1, 2024
- Veeco Instruments Inc.
- Alexander I. Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method for dechucking wafer in the...
- Patent number 12,106,942
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Yi Rop Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making graphene structures and devices
- Patent number 12,084,758
- Issue date Sep 10, 2024
- Paragraf Limited
- Hugh Glass
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
In-situ film growth rate monitoring apparatus, systems, and methods...
- Patent number 12,077,880
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Connector for substrate support with embedded temperature sensors
- Patent number 12,077,862
- Issue date Sep 3, 2024
- Lam Research Corporation
- Siyuan Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trim and deposition profile control with multi-zone heated substrat...
- Patent number 12,071,689
- Issue date Aug 27, 2024
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,065,741
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Roller for transporting a flexible substrate, vacuum processing app...
- Patent number 12,060,634
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and methods for calibrating a se...
- Patent number 12,040,200
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Shiva Rajavelu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a laminate film by cyclical plasma-enhanced dep...
- Patent number 12,040,177
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL VAPOR DEPOSITION OF DIBORIDE ALLOY COATINGS
- Publication number 20240417849
- Publication date Dec 19, 2024
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Kinsey CANOVA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MAKING A VAPOR OF PRECISE CONCENTRATION BY...
- Publication number 20240417850
- Publication date Dec 19, 2024
- CeeVee Tech, LLC
- Egbert G. WOELK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...
- Publication number 20240392443
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...
- Publication number 20240395548
- Publication date Nov 28, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING APPARATUS AND METHOD
- Publication number 20240392438
- Publication date Nov 28, 2024
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- Xinyuan WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
- Publication number 20240392439
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20240384406
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR THE GROWTH OF A GRAPHENE LAYER STRUCTURE ON A SUBSTRATE...
- Publication number 20240383757
- Publication date Nov 21, 2024
- Paragraf Limited
- Sebastian Dixon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...
- Publication number 20240387299
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chan LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240376603
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Masato KADOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
- Publication number 20240379400
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240376604
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Hyunjoong Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF TEMPERATURE MEASURING, AN...
- Publication number 20240368765
- Publication date Nov 7, 2024
- Jusung Engineering Co., Ltd.
- Oh Hyeon KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
JIG FOR ALIGNMENT IN RELATION TO A PROCESS CHAMBER, AND RELATED APP...
- Publication number 20240360560
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Kalaivanan MOHANADASS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...
- Publication number 20240360587
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS
- Publication number 20240363327
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
PROCESS CHAMBER
- Publication number 20240352579
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES
- Publication number 20240355688
- Publication date Oct 24, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic Chuck and Method of Operation for Plasma Processing
- Publication number 20240355593
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...
- Publication number 20240337011
- Publication date Oct 10, 2024
- BETONE TECHNOLOGY SHANGHAI, INC.
- Yongjun FENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
- Publication number 20240337019
- Publication date Oct 10, 2024
- BENEQ OY
- Olli-Pekka SUHONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20240337022
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS, APPARATUS, AND METHODS FOR MONITORING PLATE TEMPERATURE FO...
- Publication number 20240337537
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20240331984
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for synthesis of graphene and other carbon nanomaterials on...
- Publication number 20240327974
- Publication date Oct 3, 2024
- Viesturs Kalnins
- C01 - INORGANIC CHEMISTRY

characterised by the method used for heating the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, reaction container, method of manuf...

Multi zone spot heating in EPI

Thermal atomic layer deposition of silicon-containing films

Substrate processing system and temperature control method

Apparatus and method for cleaning reaction vessel for processing su...

Method of manufacturing semiconductor device, substrate processing...

Toposelective vapor deposition using an inhibitor

Plasma-enhanced chemical vapor deposition of carbon hard-mask

Thermal reactor for generating reactive species for chemical vapor...

Methods and apparatuses for flowable gap-fill

Film forming method, method for manufacturing semiconductor device,...

Method for efficiently eliminating graphene wrinkles formed by chem...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Apparatus and methods for wafer chucking on a susceptor for ALD

Susceptor arrangement of a CVD reactor

Rotating substrate support

Plasma processing apparatus and method of manufacturing semiconduct...

Deposition system with integrated carrier cleaning modules

Plasma processing apparatus and method for dechucking wafer in the...

Method for epitaxially depositing a material on a substrate by flow...

Method of making graphene structures and devices

In-situ film growth rate monitoring apparatus, systems, and methods...

Connector for substrate support with embedded temperature sensors

Atomic layer deposition part coating chamber

Trim and deposition profile control with multi-zone heated substrat...

Substrate processing apparatus and method of manufacturing semicond...

Roller for transporting a flexible substrate, vacuum processing app...

Chamber architecture for epitaxial deposition and advanced epitaxia...

Semiconductor processing apparatus and methods for calibrating a se...

Methods for forming a laminate film by cyclical plasma-enhanced dep...

Patents Applicationslast 30 patents

CHEMICAL VAPOR DEPOSITION OF DIBORIDE ALLOY COATINGS

METHOD AND APPARATUS FOR MAKING A VAPOR OF PRECISE CONCENTRATION BY...

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS

ROTATING SUBSTRATE SUPPORT

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

TRIM AND DEPOSITION PROFILE CONTROL WITH MULTI-ZONE HEATED SUBSTRAT...

FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...

SUBSTRATE TREATING APPARATUS AND METHOD

REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

METHODS FOR THE GROWTH OF A GRAPHENE LAYER STRUCTURE ON A SUBSTRATE...

METHOD AND SYSTEM FOR ADJUSTING THE GAP BETWEEN A WAFER AND A TOP P...

SUBSTRATE PROCESSING APPARATUS

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF TEMPERATURE MEASURING, AN...

JIG FOR ALIGNMENT IN RELATION TO A PROCESS CHAMBER, AND RELATED APP...

Batch Mode Silicon Carbide Epitaxial Reactor

MOVABLE CENTRAL REFLECTORS OF SEMICONDUCTOR PROCESSING EQUIPMENT, A...

EPI THERMAL PROFILE TUNING WITH LAMP RADIATION SHIELDS

PROCESS CHAMBER

SYSTEMS AND METHODS FOR DEPOSITING MATERIAL LAYERS ONTO SUBSTRATES

Electrostatic Chuck and Method of Operation for Plasma Processing

MULTIFUNCTIONAL WAFER PRETREATMENT CHAMBER AND CHEMICAL VAPOR DEPOS...

AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT

FILM FORMING APPARATUS AND FILM FORMING METHOD

SYSTEMS, APPARATUS, AND METHODS FOR MONITORING PLATE TEMPERATURE FO...

PLASMA ENHANCED EPITAXIAL CHEMICAL VAPOR DEPOSITION SYSTEM

Method for synthesis of graphene and other carbon nanomaterials on...