characterised by the method used for heating the substrate

Industry

CPC
C23C16/46

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/46characterised by the method used for heating the substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Heater and stage having the heater
- Patent number 12,284,731
- Issue date Apr 22, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-temperature/beol-compatible highly scalable graphene synthesis...
- Patent number 12,281,388
- Issue date Apr 22, 2025
- DESTINATION 2D INC.
- Kaustav Banerjee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method, method of manufacturing semiconductor device, pr...
- Patent number 12,283,478
- Issue date Apr 22, 2025
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing graphene
- Patent number 12,275,640
- Issue date Apr 15, 2025
- Paragraph Limited
- Sebastian Dixon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,276,025
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Kwang Ryul Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate and method of manufacturing semicond...
- Patent number 12,278,103
- Issue date Apr 15, 2025
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
- Patent number 12,272,575
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for adjusting the gap between a wafer and a top p...
- Patent number 12,266,579
- Issue date Apr 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chan Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for heating substrate and method thereof
- Patent number 12,256,471
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Takahisa Mase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor wafer with wafer chuck havin...
- Patent number 12,249,493
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming method and raw material solution
- Patent number 12,247,285
- Issue date Mar 11, 2025
- Shin-Etsu Chemical Co., Ltd.
- Takahiro Sakatsume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and ceiling heater
- Patent number 12,241,159
- Issue date Mar 4, 2025
- Kokusai Electric Corporation
- Tetsuya Kosugi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform thin film deposition for poly-p-xylylene
- Patent number 12,233,433
- Issue date Feb 25, 2025
- Raytheon Company
- Amanda Rickman
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor processing apparatus and methods for monitoring and c...
- Patent number 12,234,552
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Mohith Verghese
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with varying depths of areas between mesas and co...
- Patent number 12,227,840
- Issue date Feb 18, 2025
- Lam Research Corporation
- Keith Gaff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for semiconductor processing
- Patent number 12,230,530
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD system with flange assembly for facilitating uniform and lamina...
- Patent number 12,221,695
- Issue date Feb 11, 2025
- Mellanox Technologies, Ltd.
- Elad Mentovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature manifold assembly for substrate processing systems
- Patent number 12,224,161
- Issue date Feb 11, 2025
- Lam Research Corporation
- Gabriel De Jesus Soto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower head structure and plasma processing apparatus using the same
- Patent number 12,215,422
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Huan-Chieh Chen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,203,169
- Issue date Jan 21, 2025
- Kokusai Electric Corporation
- Akira Horii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch curing chamber with gas distribution and individual pumping
- Patent number 12,203,171
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...
- Publication number 20250137134
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137132
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR TREATMENT OF HIGH-K MATERIALS TO REDUCE LEAKAGE CURRENT...
- Publication number 20250132147
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Jae Young PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
- Publication number 20250122623
- Publication date Apr 17, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- HUAN-CHIEH CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250122625
- Publication date Apr 17, 2025
- TOKYO ELECTRON LIMITED
- Motoi YAMAGATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME
- Publication number 20250125184
- Publication date Apr 17, 2025
- MiCo Ceramics Ltd.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER
- Publication number 20250116003
- Publication date Apr 10, 2025
- Sumitomo Electric Industries, Ltd.
- Daisuke SHIMAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105000
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE
- Publication number 20250101591
- Publication date Mar 27, 2025
- NIPPON LIGHT METAL COMPANY, LTD.
- Masanori ENDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250105001
- Publication date Mar 27, 2025
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...
- Publication number 20250092522
- Publication date Mar 20, 2025
- Samsung Electronics Co., Ltd.
- Jinbum Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A REACTOR
- Publication number 20250092523
- Publication date Mar 20, 2025
- TOBB EKONOMI VE TEKNOLOJI UNIVERSITESI
- Zarife Goknur BUKE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...
- Publication number 20250092512
- Publication date Mar 20, 2025
- GOODRICH CORPORATION
- STEVEN POTEET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR REMOVING COLLATERAL DEPOSITIONS FROM WITHIN...
- Publication number 20250075317
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250069891
- Publication date Feb 27, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...
- Publication number 20250059644
- Publication date Feb 20, 2025
- ASM IP HOLDING B.V.
- Dieter Pierreux
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY
- Publication number 20250051910
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Shinichi OKI
- B08 - CLEANING
Information Patent Application
MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER
- Publication number 20250051921
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...
- Publication number 20250051959
- Publication date Feb 13, 2025
- SUMCO CORPORATION
- Masayuki TSUJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250051922
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Hisashi INOUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM
- Publication number 20250043419
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Jerome Innocent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250046658
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Hiroyuki KARASAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...
- Publication number 20250034714
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Wentao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...
- Publication number 20250027202
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS
- Publication number 20250019832
- Publication date Jan 16, 2025
- CVD Equipment Corporation
- William S. Linss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...
- Publication number 20250022694
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pranav Vijay Gadre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022705
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takashi YAHATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK
- Publication number 20250022709
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for heating the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Heater and stage having the heater

Low-temperature/beol-compatible highly scalable graphene synthesis...

Processing method, method of manufacturing semiconductor device, pr...

Method for manufacturing graphene

Substrate processing apparatus and substrate processing method

Method of processing substrate and method of manufacturing semicond...

Wafer chuck structure with holes in upper surface to improve temper...

Substrate retaining apparatus, system including the apparatus, and...

Advanced temperature control for wafer carrier in plasma processing...

Method and system for adjusting the gap between a wafer and a top p...

Methods and systems for depositing a layer

Apparatus for heating substrate and method thereof

Method for manufacturing semiconductor wafer with wafer chuck havin...

Film-forming method and raw material solution

Apparatus for performing film forming process on substrate and meth...

Apparatus and method for manufacturing hexagonal crystals

Substrate processing apparatus and ceiling heater

Semiconductor processing system including temperature controller

Uniform thin film deposition for poly-p-xylylene

Semiconductor processing apparatus and methods for monitoring and c...

Substrate support with varying depths of areas between mesas and co...

Apparatus and methods for semiconductor processing

CVD system with flange assembly for facilitating uniform and lamina...

Low temperature manifold assembly for substrate processing systems

Shower head structure and plasma processing apparatus using the same

Stage, film-forming apparatus, and film-processing apparatus

Temperature control of a multi-zone pedestal

Substrate processing apparatus, method of processing substrate, met...

Batch curing chamber with gas distribution and individual pumping

Method of manufacturing semiconductor device, substrate processing...

Patents Applicationslast 30 patents

CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

METHODS FOR TREATMENT OF HIGH-K MATERIALS TO REDUCE LEAKAGE CURRENT...

SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME

SUBSTRATE PROCESSING APPARATUS

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME

HEATER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFAC...

A REACTOR

METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...

SYSTEMS AND METHODS FOR REMOVING COLLATERAL DEPOSITIONS FROM WITHIN...

MULTI ZONE SPOT HEATING IN EPI

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR PROCESSING SYSTEM, A SEMICONDUCTOR PRECURSOR STORAGE...

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER

EPITAXIAL WAFER MANUFACTURING METHOD AND EPITAXIAL WAFER MANUFACTUR...

TEMPERATURE CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS

FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

METHODS OF ADJUSTING UNIFORMITY, AND RELATED APPARATUS AND SYSTEMS,...

IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS

HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF CARBON HARD-MASK

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...