characterised by the method used for heating the substrate

Industry

CPC
C23C16/46

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/46characterised by the method used for heating the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vacuum modulated two phase cooling loop performance enhancement
- Patent number 11,976,671
- Issue date May 7, 2024
- Intel Corporation
- Paul Diglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a transition metal nitride film on a substra...
- Patent number 11,976,361
- Issue date May 7, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptors for induction heating with thermal uniformity
- Patent number 11,979,965
- Issue date May 7, 2024
- King Abdullah University of Science and Technology
- Xiaohang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal chamber with improved thermal uniformity
- Patent number 11,978,646
- Issue date May 7, 2024
- Applied Materials, Inc.
- Dongming Iu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sequential infiltration synthesis apparatus
- Patent number 11,970,766
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Ivo Johannes Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for making a vapor of precise concentration by...
- Patent number 11,965,243
- Issue date Apr 23, 2024
- CeeVee Tech, LLC
- Egbert G. Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,961,746
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Sho Kumakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware to prevent bottom purge incursion in application volume an...
- Patent number 11,952,663
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Nitin Pathak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-zone heater
- Patent number 11,956,863
- Issue date Apr 9, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power electrostatic chuck design with radio frequency coupling
- Patent number 11,948,826
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, cleaning method, and...
- Patent number 11,942,333
- Issue date Mar 26, 2024
- Kokusai Electric Corporation
- Tomihiro Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature methods for depositing inorganic particles on a met...
- Patent number 11,939,670
- Issue date Mar 26, 2024
- Corning Incorporated
- Hoon Kim
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
- Patent number 11,939,675
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for synthesizing multiwall carbon nanotubes f...
- Patent number 11,932,541
- Issue date Mar 19, 2024
- Ngee Ann Polytechnic
- Sundaramurthy Jayaraman
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,935,762
- Issue date Mar 19, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coated product and production method
- Patent number 11,932,937
- Issue date Mar 19, 2024
- Schunk Kohlenstofftechnik GmbH
- Karl Brennfleck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,935,742
- Issue date Mar 19, 2024
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load assemblies for loading parts in a furnace
- Patent number 11,932,941
- Issue date Mar 19, 2024
- Rolls-Royce High Temperature Composites, Inc.
- Jeffrey Crutchfield
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for depositing a coating on a continuous fibre
- Patent number 11,932,942
- Issue date Mar 19, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Temperature control method and plasma processing apparatus
- Patent number 11,920,242
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Yuya Minoura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Paired dynamic parallel plate capacitively coupled plasmas
- Patent number 11,923,172
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Hari Ponnekanti
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Providing multifunctional shutter disk above the workpiece in the m...
- Patent number 11,920,237
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-function wafer backside pressure control and edge purge
- Patent number 11,923,233
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, state determination method and comp...
- Patent number 11,920,240
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Ryo Araki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Rounded vertical wafer vessel rods
- Patent number 11,908,719
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Wen Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus and film deposition method
- Patent number 11,905,595
- Issue date Feb 20, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-stack susceptor reactor for high-throughput superconductor ma...
- Patent number 11,910,726
- Issue date Feb 20, 2024
- MetOx International, Inc.
- Shahab Khandan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD process
- Patent number 11,898,249
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Nagarajan Rajagopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS
- Publication number 20240145240
- Publication date May 2, 2024
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
- Publication number 20240145301
- Publication date May 2, 2024
- Soulbrain Co., LTD
- Chang Bong YEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE PIECE OR TWO PIECE SUSCEPTOR
- Publication number 20240141493
- Publication date May 2, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE WAFER MANUFACTURING APPARATUS
- Publication number 20240141550
- Publication date May 2, 2024
- DENSO CORPORATION
- HIROAKI FUJIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE RETAINING APPARATUS, SYSTEM INCLUDING THE APPARATUS, AND...
- Publication number 20240133035
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- SHIVA K.T. RAJAVELU MURALIDHAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...
- Publication number 20240136179
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES
- Publication number 20240136192
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Lawrence Schloss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COLD THERMAL CHEMICAL VAPOR DEPOSITION
- Publication number 20240117495
- Publication date Apr 11, 2024
- SILCOTEK CORP.
- Geoffrey K. WHITE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION
- Publication number 20240120197
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...
- Publication number 20240120220
- Publication date Apr 11, 2024
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES
- Publication number 20240110279
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Nitin KADAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOADLOCK ASSEMBLY INCLUDING CHILLER UNIT
- Publication number 20240110282
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Hideki Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...
- Publication number 20240112930
- Publication date Apr 4, 2024
- ASM IP HOLDING, B.V.
- Fan Gao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240093369
- Publication date Mar 21, 2024
- SAMSUNG DISPLAY CO., LTD.
- GIYUL HAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240093408
- Publication date Mar 21, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
- Publication number 20240096605
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Arun Kumar Kotrappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
- Publication number 20240084450
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- HUAN-CHIEH CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20240071750
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...
- Publication number 20240068103
- Publication date Feb 29, 2024
- ASM IP HOLDING, B.V.
- Yanfu Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Apparatus and Methods for Sequential Coating
- Publication number 20240068102
- Publication date Feb 29, 2024
- RTX Corporation
- James W. Neal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...
- Publication number 20240071752
- Publication date Feb 29, 2024
- Kokusai Electric Corporation
- Takayuki WASEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS
- Publication number 20240060184
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Yoshitaka MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...
- Publication number 20240052481
- Publication date Feb 15, 2024
- City University of Hong Kong
- Thuc Hue LY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING...
- Publication number 20240047246
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Fernando M. Silveira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240044045
- Publication date Feb 8, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20240044004
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240047194
- Publication date Feb 8, 2024
- Tokyo Electron Limited
- Kenichi KOTE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING
- Publication number 20240038568
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Troy Alan Gomm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT
- Publication number 20240035162
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the method used for heating the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vacuum modulated two phase cooling loop performance enhancement

Methods for depositing a transition metal nitride film on a substra...

Susceptors for induction heating with thermal uniformity

Thermal chamber with improved thermal uniformity

Sequential infiltration synthesis apparatus

Method and apparatus for making a vapor of precise concentration by...

Substrate processing method and substrate processing apparatus

Hardware to prevent bottom purge incursion in application volume an...

Multi-zone heater

High power electrostatic chuck design with radio frequency coupling

Apparatus for growing a semiconductor wafer and associated manufact...

Method of manufacturing semiconductor device, cleaning method, and...

Low temperature methods for depositing inorganic particles on a met...

Apparatus and methods for improving thermal chemical vapor depositi...

Process and apparatus for synthesizing multiwall carbon nanotubes f...

Substrate processing apparatus, method of manufacturing semiconduct...

Coated product and production method

Method of processing substrate, method of manufacturing semiconduct...

Load assemblies for loading parts in a furnace

Method and device for depositing a coating on a continuous fibre

Temperature control method and plasma processing apparatus

Paired dynamic parallel plate capacitively coupled plasmas

Providing multifunctional shutter disk above the workpiece in the m...

Dual-function wafer backside pressure control and edge purge

Substrate processing apparatus, state determination method and comp...

Rounded vertical wafer vessel rods

Film deposition apparatus and film deposition method

Multi-stack susceptor reactor for high-throughput superconductor ma...

PECVD process

Single wafer processing environments with spatial separation

Patents Applicationslast 30 patents

LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...

SINGLE PIECE OR TWO PIECE SUSCEPTOR

SILICON CARBIDE WAFER MANUFACTURING APPARATUS

SUBSTRATE RETAINING APPARATUS, SYSTEM INCLUDING THE APPARATUS, AND...

OXIDE SEMICONDUCTOR FILM AND FILM-FORMING METHOD THE SAME, SEMICOND...

NON-METAL INCORPORATION IN MOLYBDENUM ON DIELECTRIC SURFACES

COLD THERMAL CHEMICAL VAPOR DEPOSITION

GROWTH MONITOR SYSTEM AND METHODS FOR FILM DEPOSITION

LOAD LOCK CHAMBERS AND RELATED METHODS AND STRUCTURES FOR BATCH COO...

ATOMIC LAYER DEPOSITION WITH MULTIPLE UNIFORMLY HEATED CHARGE VOLUMES

LOADLOCK ASSEMBLY INCLUDING CHILLER UNIT

CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING S...

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

DEPOSITION APPARATUS

Method and Device for Producing a SiC Solid Material

BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

CHAMBER ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING CHAMB...

Deposition Apparatus and Methods for Sequential Coating

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, MET...

HEAT TREATMENT APPARATUS

METHOD FOR DIRECT FORMATION OF ORIGAMI 3D GRAPHENE ON COPPER FOIL U...

ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING...

Method and Device for Producing a SiC Solid Material

MULTI ZONE SPOT HEATING IN EPI

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING

SYSTEM AND METHOD FOR AUTO CORRECTION OF SUBSTRATE MISALIGNMENT