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H01L21/3086
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/3086
characterised by the process involved to create the mask
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last 30 patents
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Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,972,953
Issue date
Apr 30, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zhen Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor super-junction device
Patent number
11,973,107
Issue date
Apr 30, 2024
SUZHOU ORIENTAL SEMICONDUCTOR CO., LTD.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple-stack three-dimensional memory device and fabrication meth...
Patent number
11,968,832
Issue date
Apr 23, 2024
Yangtze Memory Technologies Co., Ltd.
Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for integrating gate dielectric layers of diff...
Patent number
11,961,740
Issue date
Apr 16, 2024
Shanghai Huali Integrated Circuit Corporation
Lian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device and manufacturing method thereof
Patent number
11,963,344
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Jaybok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional deposition for semiconductor fabrication
Patent number
11,955,338
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chun Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,955,550
Issue date
Apr 9, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Fei Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor, display device, and thin film transistor manu...
Patent number
11,955,559
Issue date
Apr 9, 2024
SAKAI DISPLAY PRODUCTS CORPORATION
Yoshiaki Matsushima
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making photolithography mask plate
Patent number
11,947,255
Issue date
Apr 2, 2024
Tsinghua University
Mo Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,948,844
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Yong-Ho Jeon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
11,948,997
Issue date
Apr 2, 2024
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Gate-all-around field-effect transistor device
Patent number
11,948,973
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kuo-Cheng Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern formation through mask stress management and resulting stru...
Patent number
11,935,746
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Yi Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pitch reduction technology using alternating spacer depositions dur...
Patent number
11,935,756
Issue date
Mar 19, 2024
Baosuo Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon carbide oxide hard mask for reducing dishing effects
Patent number
11,935,942
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Lun Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having gate isolation layer
Patent number
11,929,367
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seung Seok Ha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor patterning and resulting structures
Patent number
11,929,254
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of high-density pattern forming
Patent number
11,929,255
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chen En Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
11,929,424
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices
Patent number
11,923,456
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Jung-Gil Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit (IC) device
Patent number
11,923,362
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Myung-gil Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing a pre-etch protective layer
Patent number
11,915,940
Issue date
Feb 27, 2024
Applied Materials, Inc.
Zhi Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Photomask having recessed region
Patent number
11,914,288
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Yu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques to engineer nanoscale patterned features using ions
Patent number
11,908,691
Issue date
Feb 20, 2024
Applied Materials, Inc.
Simon Ruffell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure with lining layer
Patent number
11,908,693
Issue date
Feb 20, 2024
NANYA TECHNOLOGY CORPORATION
Ping Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Finfet device and a method for fabricating the same
Patent number
11,901,365
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wang-Chun Huang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PATTERNING UNDERLYING STRUCTURE
Publication number
20240145244
Publication date
May 2, 2024
Powerchip Semiconductor Manufacturing Corporation
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANTI-DISHING STRUCTURE FOR EMBEDDED MEMORY
Publication number
20240147718
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Different Isolation Liners for Different Type FinFETs and Associate...
Publication number
20240136222
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Tzung-Yi Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO SELECTIVELY ETCH SILICON NITRIDE TO SILICON OXIDE USING W...
Publication number
20240128089
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yu-Hao Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGES AND METHOD FOR FABRICATING THE SAME
Publication number
20240128145
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
HYEONSEOK LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVCE
Publication number
20240128126
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Uei Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR NON-RESIST NANOLITHOGRAPHY
Publication number
20240120409
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Miin-Jang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED ETCHING TECHNOLOGIES FOR STRAIGHT, TALL AND UNIFORM FINS A...
Publication number
20240120206
Publication date
Apr 11, 2024
Intel Corporation
Muralidhar S. AMBATI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low-Temperature Etch
Publication number
20240112919
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE
Publication number
20240105518
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chin-Ta CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABR...
Publication number
20240105520
Publication date
Mar 28, 2024
Intel Corporation
Anthony ST. AMOUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer Edge Protection Film Forming Method, Patterning Process, And...
Publication number
20240087905
Publication date
Mar 14, 2024
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING SEMICONDUCTOR DEVICES USING METAL HARDMASKS
Publication number
20240079246
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Alec Dorfner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TWO-COLOR SELF-ALIGNED DOUBLE PATTERNING (SADP) TO YIELD STATIC RAN...
Publication number
20240079247
Publication date
Mar 7, 2024
TESSERA LLC
Fee Li Lie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Memory Circuitry And Method Used In Forming Memory Circuitry
Publication number
20240074202
Publication date
Feb 29, 2024
Micron Technology, Inc.
John D. Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE WITH IMPROVED ETCHI...
Publication number
20240071769
Publication date
Feb 29, 2024
NANYA TECHNOLOGY CORPORATION
Zhi-Yi HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE WITH IMPROVED ETCHI...
Publication number
20240071770
Publication date
Feb 29, 2024
NANYA TECHNOLOGY CORPORATION
Zhi-Yi HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
Publication number
20240071771
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Youngwoo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING PROCESS
Publication number
20240063023
Publication date
Feb 22, 2024
United Microelectronics Corp.
Teng Yao Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF CUTTING A FINE PATTERN, METHODS OF FORMING ACTIVE PATTER...
Publication number
20240063024
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Sanggyo Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cyclic Method for Reactive Development of Photoresists
Publication number
20240053684
Publication date
Feb 15, 2024
TOKYO ELECTRON LIMITED
Hamed Hajibabaeinajafabadi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20240055432
Publication date
Feb 15, 2024
Samsung Electronics Co., Ltd.
Joong Gun OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT DEVICE
Publication number
20240047219
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Meng-Han LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRIC...
Publication number
20240047217
Publication date
Feb 8, 2024
NANYA TECHNOLOGY CORPORATION
HUAN-YUNG YEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THEREOF
Publication number
20240047462
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HETEROGENEOUS METAL LINE COMPOSITIONS FOR ADVANCED INTEGRATED CIRCU...
Publication number
20240047556
Publication date
Feb 8, 2024
Intel Corporation
Andrew W. YEOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FIN SELECTION FOR IMPROVED PERFORMANCE IN SEMICONDUCTOR D...
Publication number
20240046021
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shellin Liu
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
CONTINUOUS GATE AND FIN SPACER FOR ADVANCED INTEGRATED CIRCUIT STRU...
Publication number
20240038578
Publication date
Feb 1, 2024
Intel Corporation
Heidi M. MEYER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR AUTO-ALIGNED MANUFACTURING OF A VDMOS TRANSISTOR, AND AU...
Publication number
20240030300
Publication date
Jan 25, 2024
STMicroelectronics S.r.l.
Vincenzo ENEA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
Publication number
20240030036
Publication date
Jan 25, 2024
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS