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B81B2201/012
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
Current Industry
B81B2201/012
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Patents Grants
last 30 patents
Information
Patent Grant
Micro-electromechanical system devices and methods
Patent number
11,527,376
Issue date
Dec 13, 2022
Kionix, Inc.
Scott A. Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microphone device with integrated pressure sensor
Patent number
10,405,078
Issue date
Sep 3, 2019
Knowles Electronics, LLC
Venkataraman Chandrasekaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for MEMS-based cross-point electrical switching
Patent number
10,239,749
Issue date
Mar 26, 2019
Ciena Corporation
Michael Y. Frankel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMs switch
Patent number
10,173,888
Issue date
Jan 8, 2019
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer are MEMS switch
Patent number
10,160,634
Issue date
Dec 25, 2018
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microphone device with integrated pressure sensor
Patent number
10,149,031
Issue date
Dec 4, 2018
Knowles Electronics, LLC
Venkataraman Chandrasekaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual substrate electrostatic MEMS switch with multiple hinges and m...
Patent number
9,953,787
Issue date
Apr 24, 2018
Innovative Micro Technology
Christopher S. Gudeman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for MEMS-based cross-point electrical switching
Patent number
9,868,631
Issue date
Jan 16, 2018
Ciena Corporation
Michael Y. Frankel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Small wafer area MEMS switch
Patent number
9,758,366
Issue date
Sep 12, 2017
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS
Publication number
20210027965
Publication date
Jan 28, 2021
Kionix, Inc.
Scott A. MILLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROPHONE DEVICE WITH INTEGRATED PRESSURE SENSOR
Publication number
20190104351
Publication date
Apr 4, 2019
KNOWLES ELECTRONICS, LLC
Venkataraman Chandrasekaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR MEMS-BASED CROSS-POINT ELECTRICAL SWITCHING
Publication number
20180111825
Publication date
Apr 26, 2018
CIENA CORPORATION
Michael Y. FRANKEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170341931
Publication date
Nov 30, 2017
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170341930
Publication date
Nov 30, 2017
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SMALL WAFER AREA MEMS SWITCH
Publication number
20170166438
Publication date
Jun 15, 2017
International Business Machines Corporation
Bucknell C. Webb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL SUBSTRATE ELECTROSTATIC MEMS SWITCH WITH MULTIPLE HINGES AND M...
Publication number
20160268084
Publication date
Sep 15, 2016
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR MEMS-BASED CROSS-POINT ELECTRICAL SWITCHING
Publication number
20150076923
Publication date
Mar 19, 2015
CIENA CORPORATION
Michael Y. Frankel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Composite beam microelectromechanical system switch
Publication number
20050248424
Publication date
Nov 10, 2005
Tsung-Kuan Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY