Specific applications of micro-electromechanical systems

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS

B81B2201/00Specific applications of micro-electromechanical systems

B81B2201/01Switches B81B2201/012characterised by the shape B81B2201/014having a cantilever fixed on one side connected to one or more dimples B81B2201/016having a bridge fixed on two ends and connected to one or more dimples B81B2201/018Switches not provided for in B81B2201/014 - B81B2201/016 B81B2201/02Sensors B81B2201/0207Bolometers B81B2201/0214Biosensors Chemical sensors B81B2201/0221Variable capacitors B81B2201/0228Inertial sensors B81B2201/0235Accelerometers B81B2201/0242Gyroscopes B81B2201/025Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242 B81B2201/0257Microphones or microspeakers B81B2201/0264Pressure sensors B81B2201/0271Resonators ultrasonic resonators B81B2201/0278Temperature sensors B81B2201/0285Vibration sensors B81B2201/0292Sensors not provided for in B81B2201/0207 - B81B2201/0285 B81B2201/03Micro-engines and actuators B81B2201/031Thermal actuators B81B2201/032Bimorph and unimorph actuators B81B2201/033Comb drives B81B2201/034Electrical rotating micro-machines B81B2201/035Micro-gears B81B2201/036Micro-pumps B81B2201/037Micro-transmissions B81B2201/038Micro-engines and actuators not provided for in B81B2201/031 - B81B2201/037 B81B2201/04Optical MEMS B81B2201/042Micro-mirrors, not used as optical switches B81B2201/045Optical switches B81B2201/047Optical MEMS not provided for in B81B2201/042 - B81B2201/045 B81B2201/05Micro-fluidics B81B2201/051Micro-mixers, micro-reactors B81B2201/052Ink-jet print cartridges B81B2201/054Micro-valves B81B2201/055Micro-needles B81B2201/057Micropipets, dropformers B81B2201/058Micro-fluidics not provided for in B81B2201/051 - B81B2201/054 B81B2201/06Bio-MEMS B81B2201/07Data storage devices, static or dynamic memories B81B2201/10Micro-filters B81B2201/11Read heads, write heads or micro-positioners for hard- or optical disks B81B2201/12STM or AFM micro-tips B81B2201/13Mechanical connectors