TREA

Characterising MEMS devices

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Industry

  • CPC
  • B81C99/003
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/003Characterising MEMS devices
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