Characterising MEMS devices

Industry

CPC
B81C99/003

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/003Characterising MEMS devices

Industries

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 12,078,653
- Issue date Sep 3, 2024
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and a system for characterising structures through a substrate
- Patent number 12,079,979
- Issue date Sep 3, 2024
- UNITY SEMICONDUCTOR
- Wolfgang Alexander Iff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 11,703,522
- Issue date Jul 18, 2023
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for evaluating electrostatic or nonlinear devices
- Patent number 11,192,779
- Issue date Dec 7, 2021
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical or/and nanoelectromechanical device with out...
- Patent number 11,156,459
- Issue date Oct 26, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Federico Maspero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical test structure and method for monitoring deep trench imp...
- Patent number 11,119,137
- Issue date Sep 14, 2021
- Texas Instruments Incorporated
- Thomas Edward Lillibridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems sensor testing device, system and me...
- Patent number 11,001,496
- Issue date May 11, 2021
- STMicroelectronics S.r.l.
- Federico Iaccarino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer system and associated methods
- Patent number 10,972,848
- Issue date Apr 6, 2021
- Cirrus Logic, Inc.
- Jean Pierre Lasseuguette
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Torsional and lateral stiffness measurement
- Patent number 10,900,878
- Issue date Jan 26, 2021
- University Court of the University of St Andrews
- Georg Haehner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device with integrated calibration system and calibration me...
- Patent number 10,794,738
- Issue date Oct 6, 2020
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,766,764
- Issue date Sep 8, 2020
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for determining the quality factor of an oscillator
- Patent number 10,578,661
- Issue date Mar 3, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Antoine Nowodzinski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer system and associated methods
- Patent number 10,511,923
- Issue date Dec 17, 2019
- Cirrus Logic, Inc.
- Jean Pierre Lasseuguette
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-tuning microelectromechanical impedance matching circuits and...
- Patent number 10,491,159
- Issue date Nov 26, 2019
- Michael J. Dueweke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 10,429,409
- Issue date Oct 1, 2019
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,421,659
- Issue date Sep 24, 2019
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Environmental sensor
- Patent number 10,416,007
- Issue date Sep 17, 2019
- Omron Corporation
- Takanobu Yamauchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical component
- Patent number 10,336,610
- Issue date Jul 2, 2019
- Robert Bosch GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuitry and method for generating a discrete-time high voltage
- Patent number 10,323,957
- Issue date Jun 18, 2019
- Murata Manufacturing Co., Ltd.
- Lasse Aaltonen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to test the quality factor of a MEMS gyroscope at chip probe
- Patent number 10,267,636
- Issue date Apr 23, 2019
- MCube, Inc.
- Sudheer S. Sridharamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electric device, in particular a microphone having re-adjustable se...
- Patent number 10,237,638
- Issue date Mar 19, 2019
- TDK Corporation
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trimming method for microresonators and microresonators made thereby
- Patent number 10,148,244
- Issue date Dec 4, 2018
- National Technology & Engineering Solutions of Sandia, LLC
- Michael David Henry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device with integrated calibration system and calibration me...
- Patent number 10,054,471
- Issue date Aug 21, 2018
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Internally generated DFT stepped hysteresis sweep for electrostatic...
- Patent number 10,029,914
- Issue date Jul 24, 2018
- Cavendish Kinetics, Inc.
- James Douglas Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitance measurement
- Patent number 9,939,476
- Issue date Apr 10, 2018
- Analog Devices Global
- Christian Steffen Birk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabrication of polymeric nano-...
- Patent number 9,902,932
- Issue date Feb 27, 2018
- Carnegie Mellon University
- Amrinder Singh Nain
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Inertial angular sensor of balanced MEMS type and method for balanc...
- Patent number 9,869,551
- Issue date Jan 16, 2018
- Sagem Defense Securite
- Alain Jeanroy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compensation and calibration for MEMS devices
- Patent number 9,834,438
- Issue date Dec 5, 2017
- NXP USA, INC.
- Tehmoor M. Dar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for characterization of nano- and micromechanical...
- Patent number 9,829,427
- Issue date Nov 28, 2017
- Consejo Superior de Investigaciones Cientificas (CSIC)
- Francisco Javier Tamayo De Miguel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for sensor calibration
- Patent number 9,804,007
- Issue date Oct 31, 2017
- Invensense, Inc.
- Wesley James Emmanouel Teskey
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND A SYSTEM FOR CHARACTERISING STRUCTURES THROUGH A SUBSTRATE
- Publication number 20240281955
- Publication date Aug 22, 2024
- Unity Semiconductor
- Wolfgang Alexander IFF
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR ASCERTAINING DYNAMIC PARAMETERS OF A MEMS APP...
- Publication number 20240166500
- Publication date May 23, 2024
- ROBERT BOSCH GmbH
- Juergen Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...
- Publication number 20240017990
- Publication date Jan 18, 2024
- Microfabrica Inc.
- Duy P. Le
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND A SYSTEM FOR CHARACTERISING STRUCTURES THROUGH A SUBSTRATE
- Publication number 20230377121
- Publication date Nov 23, 2023
- Unity Semiconductor
- Wolfgang Alexander IFF
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION
- Publication number 20230358781
- Publication date Nov 9, 2023
- SZ DJI Technology Co., Ltd.
- Guoxiu PAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES
- Publication number 20220089432
- Publication date Mar 24, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL TEST STRUCTURE AND METHOD FOR MONITORING DEEP TRENCH IMP...
- Publication number 20210208187
- Publication date Jul 8, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Thomas Edward Lillibridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS SENSOR TESTING DEVICE, SYSTEM AND ME...
- Publication number 20200048083
- Publication date Feb 13, 2020
- STMicroelectronics S.r.l.
- Federico IACCARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER SYSTEM AND ASSOCIATED METHODS
- Publication number 20200045485
- Publication date Feb 6, 2020
- Cirrus Logic International Semiconductor Ltd.
- Jean Pierre LASSEUGUETTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT
- Publication number 20190359479
- Publication date Nov 28, 2019
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES
- Publication number 20190241427
- Publication date Aug 8, 2019
- The Board of Trustees of the Leland Stanford Junior University
- Sandra Manosalvas-Kjono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT
- Publication number 20190144264
- Publication date May 16, 2019
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE WITH INTEGRATED CALIBRATION SYSTEM AND CALIBRATION ME...
- Publication number 20180335326
- Publication date Nov 22, 2018
- STMicroelectronics S.r.l.
- Dario PACI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENVIRONMENTAL SENSOR
- Publication number 20180259376
- Publication date Sep 13, 2018
- Omron Corporation
- Takanobu YAMAUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT
- Publication number 20180111828
- Publication date Apr 26, 2018
- ROBERT BOSCH GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-Tuning Microelectromechanical Impedance Matching Circuits and...
- Publication number 20180069507
- Publication date Mar 8, 2018
- Michael J. DUEWEKE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROLLED PULSE GENERATION METHODS AND APPARATUSES FOR EVALUATING...
- Publication number 20170370799
- Publication date Dec 28, 2017
- Freescale Semiconductor Inc.
- PETER T. JONES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL OR/AND NANOELECTROMECHANICAL DEVICE WITH OUT...
- Publication number 20170363424
- Publication date Dec 21, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Federico MASPERO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CIRCUITRY AND METHOD FOR GENERATING A DISCRETE-TIME HIGH VOLTAGE
- Publication number 20170146364
- Publication date May 25, 2017
- Murata Manufacturing Co., Ltd.
- Lasse AALTONEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRIC DEVICE, IN PARTICULAR A MICROPHONE HAVING RE-ADJUSTABLE SE...
- Publication number 20170099535
- Publication date Apr 6, 2017
- EPCOS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERNALLY GENERATED DFT STEPPED HYSTERESIS SWEEP FOR ELECTROSTATIC...
- Publication number 20160297677
- Publication date Oct 13, 2016
- CAVENDISH KINETICS, INC.
- James Douglas HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR FORMING THE SAME
- Publication number 20160241965
- Publication date Aug 18, 2016
- MEMSEN ELECTRONICS INC
- MANHING CHAU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20160236931
- Publication date Aug 18, 2016
- MEMSEN ELECTRONICS INC
- MANHING CHAU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPENSATION AND CALIBRATION FOR MEMS DEVICES
- Publication number 20160167961
- Publication date Jun 16, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Tehmoor M. Dar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
- Publication number 20160152466
- Publication date Jun 2, 2016
- ROBERT BOSCH GmbH
- Julian GONSKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and method for detecting damaging of a semicon...
- Publication number 20150253375
- Publication date Sep 10, 2015
- INFINEON TECHNOLOGIES AG
- DIRK MEINHOLD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANC...
- Publication number 20140299947
- Publication date Oct 9, 2014
- Sagem Defense Securite
- Alain Jeanroy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPENSATION AND CALIBRATION FOR MEMS DEVICES
- Publication number 20140260508
- Publication date Sep 18, 2014
- FREESCALE SEMICONDUCTOR, INC.
- Tehmoor M. Dar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL COMPONENT, MECHANICAL SYSTEM, AND METHOD FOR OPERATING A...
- Publication number 20140117888
- Publication date May 1, 2014
- ROBERT BOSCH GmbH
- Mohamad IYAD AL DIBS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALIBRATION OF MEMS SENSOR
- Publication number 20140083164
- Publication date Mar 27, 2014
- Brian Homeijer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Characterising MEMS devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for thermally regulating sensor operation

Method and a system for characterising structures through a substrate

Systems and methods for thermally regulating sensor operation

Method and apparatus for evaluating electrostatic or nonlinear devices

Microelectromechanical or/and nanoelectromechanical device with out...

Electrical test structure and method for monitoring deep trench imp...

Microelectromechanical systems sensor testing device, system and me...

MEMS transducer system and associated methods

Torsional and lateral stiffness measurement

Sensor device with integrated calibration system and calibration me...

MEMS sensor compensation for off-axis movement

Method for determining the quality factor of an oscillator

MEMS transducer system and associated methods

Self-tuning microelectromechanical impedance matching circuits and...

Systems and methods for thermally regulating sensor operation

MEMS sensor compensation for off-axis movement

Environmental sensor

Method for producing a micromechanical component

Circuitry and method for generating a discrete-time high voltage

Method to test the quality factor of a MEMS gyroscope at chip probe

Electric device, in particular a microphone having re-adjustable se...

Trimming method for microresonators and microresonators made thereby

Sensor device with integrated calibration system and calibration me...

Internally generated DFT stepped hysteresis sweep for electrostatic...

Capacitance measurement

Methods, apparatus, and systems for fabrication of polymeric nano-...

Inertial angular sensor of balanced MEMS type and method for balanc...

Compensation and calibration for MEMS devices

Method and system for characterization of nano- and micromechanical...

Device and method for sensor calibration

Patents Applicationslast 30 patents

METHOD AND A SYSTEM FOR CHARACTERISING STRUCTURES THROUGH A SUBSTRATE

METHOD AND DEVICE FOR ASCERTAINING DYNAMIC PARAMETERS OF A MEMS APP...

METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...

METHOD AND A SYSTEM FOR CHARACTERISING STRUCTURES THROUGH A SUBSTRATE

SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

ELECTRICAL TEST STRUCTURE AND METHOD FOR MONITORING DEEP TRENCH IMP...

MICROELECTROMECHANICAL SYSTEMS SENSOR TESTING DEVICE, SYSTEM AND ME...

MEMS TRANSDUCER SYSTEM AND ASSOCIATED METHODS

MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT

METHOD AND APPARATUS FOR EVALUATING ELECTROSTATIC OR NONLINEAR DEVICES

MEMS SENSOR COMPENSATION FOR OFF-AXIS MOVEMENT

SENSOR DEVICE WITH INTEGRATED CALIBRATION SYSTEM AND CALIBRATION ME...

ENVIRONMENTAL SENSOR

METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT

Self-Tuning Microelectromechanical Impedance Matching Circuits and...

CONTROLLED PULSE GENERATION METHODS AND APPARATUSES FOR EVALUATING...

MICROELECTROMECHANICAL OR/AND NANOELECTROMECHANICAL DEVICE WITH OUT...

CIRCUITRY AND METHOD FOR GENERATING A DISCRETE-TIME HIGH VOLTAGE

ELECTRIC DEVICE, IN PARTICULAR A MICROPHONE HAVING RE-ADJUSTABLE SE...

INTERNALLY GENERATED DFT STEPPED HYSTERESIS SWEEP FOR ELECTROSTATIC...

MEMS MICROPHONE AND METHOD FOR FORMING THE SAME

MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME

COMPENSATION AND CALIBRATION FOR MEMS DEVICES

MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD

Semiconductor device and method for detecting damaging of a semicon...

INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANC...

COMPENSATION AND CALIBRATION FOR MEMS DEVICES

MECHANICAL COMPONENT, MECHANICAL SYSTEM, AND METHOD FOR OPERATING A...

CALIBRATION OF MEMS SENSOR