Chemical etching

Industry

CPC
H01L21/30604

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/30604Chemical etching

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods to prevent surface charge induced cd-dependent etching of m...
- Patent number 12,148,625
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate-all-around structure and methods of forming the same
- Patent number 12,148,836
- Issue date Nov 19, 2024
- Parabellum Strategic Opportunities Fund LLC
- Pei-Hsun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate all-around semiconductor device
- Patent number 12,142,635
- Issue date Nov 12, 2024
- Parabellum Strategic Opportunities Fund LLC
- Ka-Hing Fung
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods of manufacturing electronic structures
- Patent number 12,136,632
- Issue date Nov 5, 2024
- Pragmatic Printing Ltd
- Richard Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for fabricating FinFETs having different fin numbers and co...
- Patent number 12,136,571
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhon Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming recesses in source/drain regions and devices fo...
- Patent number 12,132,089
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Lien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective etchant compositions and methods
- Patent number 12,129,418
- Issue date Oct 29, 2024
- Entegris, Inc.
- Hsing-Chen Wu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Multi-gate transistors with backside power rail and reduced gate-dr...
- Patent number 12,125,852
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Huan-Chieh Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for etching silicon oxide
- Patent number 12,125,709
- Issue date Oct 22, 2024
- Central Glass Company, Limited
- Shoi Suzuki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Hybrid source drain regions formed based on same fin and methods fo...
- Patent number 12,119,270
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pei-Hsun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 12,119,244
- Issue date Oct 15, 2024
- Mitsubishi Electric Corporation
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and a semiconductor...
- Patent number 12,119,394
- Issue date Oct 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shahaji B. More
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etching method and wet etching system
- Patent number 12,119,230
- Issue date Oct 15, 2024
- Disco Corporation
- Kazuma Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with tunable epitaxy structures and method of...
- Patent number 12,112,989
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Hao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional memory devices
- Patent number 12,114,498
- Issue date Oct 8, 2024
- Yangtze Memory Technologies Co., Ltd.
- Linchun Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Injection metal assisted catalytic etching
- Patent number 12,106,968
- Issue date Oct 1, 2024
- Ram Nanotech, Incorporated
- Kurt W. Kolasinski
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Semiconductor devices
- Patent number 12,100,735
- Issue date Sep 24, 2024
- Samsung Electronics Co., Ltd.
- Namkyu Edward Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etch process and method to provide uniform etching of material...
- Patent number 12,100,599
- Issue date Sep 24, 2024
- Tokyo Electron Limited
- Shan Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertically stacked finFETs and shared gate patterning
- Patent number 12,100,623
- Issue date Sep 24, 2024
- Intel Corporation
- Aaron Lilak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etching control system, wet etching machine and wet etching con...
- Patent number 12,094,734
- Issue date Sep 17, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Hsin-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Staircase structures for electrically connecting multiple horizonta...
- Patent number 12,096,630
- Issue date Sep 17, 2024
- SUNRISE MEMORY CORPORATION
- Raul Adrian Cernea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process to manufacture novel inhibited hydrofluoric acid composition
- Patent number 12,091,601
- Issue date Sep 17, 2024
- Dorf Ketal Chemicals FZE
- Clay Purdy
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Substrate treatment apparatus
- Patent number 12,094,733
- Issue date Sep 17, 2024
- Semes Co., Ltd.
- Young Dae Chung
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Protective wafer grooving structure for wafer thinning and methods...
- Patent number 12,087,756
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kuo-Ming Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor structure with fins using a multil...
- Patent number 12,087,641
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Ting Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,087,588
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Hirotoshi Mori
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing gate spacers with stepped sidewalls by remo...
- Patent number 12,087,841
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Lun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for FinFET device with source/drain modulation
- Patent number 12,080,607
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ta-Chun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,080,712
- Issue date Sep 3, 2024
- Samsung Electronics Co., Ltd.
- Byounghoon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching compositions
- Patent number 12,074,020
- Issue date Aug 27, 2024
- Fujifilm Electronic Materials U.S.A., Inc.
- Mick Bjelopavlic
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEMI...
- Publication number 20240384169
- Publication date Nov 21, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Kazuya Tajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR MEMBER
- Publication number 20240387181
- Publication date Nov 21, 2024
- Sumitomo Chemical Company, Limited
- Hajime FUJIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEMI...
- Publication number 20240384170
- Publication date Nov 21, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Choitsu Go
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE WITH ALTERNATE COMPLEMENTARY CHANNELS AND FABRICATION METHOD...
- Publication number 20240387545
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Ya LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20240387242
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- MIN-YING TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE POWER RAIL AND METHODS OF FORMING THE SAME
- Publication number 20240387534
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Huan-Chieh Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240387182
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Ling Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...
- Publication number 20240387185
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming Chyi Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE-ALL-AROUND STRUCTURE AND METHODS OF FORMING THE SAME
- Publication number 20240379857
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Pei-Hsun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240379674
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER RECEIVER, ELECTROCHEMICAL POROSIFICATION APPARATUS AND METHOD...
- Publication number 20240376629
- Publication date Nov 14, 2024
- Socpra Sciences et Genie s.e.c.
- Philippe-Olivier PROVOST
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Methods for Fabricating FinFETs Having Different Fin Numbers and Co...
- Publication number 20240379445
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Jhon Jhy Liaw
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device and Fabricating Method Thereof
- Publication number 20240379660
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20240371982
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shahaji B. MORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID...
- Publication number 20240367116
- Publication date Nov 7, 2024
- Entegris, Inc.
- James HAMZIK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHIP STACK AND FABRICATION METHOD
- Publication number 20240363489
- Publication date Oct 31, 2024
- Yibu Semiconductor Co., Ltd.
- Ming Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240363436
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Ting KO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES
- Publication number 20240363355
- Publication date Oct 31, 2024
- LAM RESEARCH CORPORATION
- Ji ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SOURCE DRAIN REGIONS FORMED BASED ON SAME FIN AND METHODS FO...
- Publication number 20240363440
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Pei-Hsun Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE WAFER GROOVING STRUCTURE FOR WAFER THINNING AND METHODS...
- Publication number 20240363613
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kuo-Ming WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD FOR FINFET DEVICE WITH SOURCE/DRAIN MODULATION
- Publication number 20240363435
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ta-Chun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR REDUCING LINE-END SPACING
- Publication number 20240355633
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Yen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INCREASING SOURCE/DRAIN DOPANT CONCENTRATION TO REDUCED RESISTANCE
- Publication number 20240355910
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Jing Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING GATE-ALL-AROUND (GAA) DEVICES
- Publication number 20240355896
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shien-Yang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355647
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Takashi UNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED STRAIN HETEROEPITAXY ASSEMBLY FOR THREE-DIMENSIONAL DEVICE...
- Publication number 20240347602
- Publication date Oct 17, 2024
- Applied Materials, Inc.
- Fredrick FISHBURN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES
- Publication number 20240347339
- Publication date Oct 17, 2024
- Syrnatec, Inc.
- Yash Suresh Mirchandani
- B24 - GRINDING POLISHING
Information Patent Application
AIR-GAP TRACES AND AIR-GAP EMBEDDED BRIDGE INTEGRATED IN GLASS INTE...
- Publication number 20240339381
- Publication date Oct 10, 2024
- Intel Corporation
- Hiroki TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A NANO-FET SEMICONDUCTOR DEVICE
- Publication number 20240332401
- Publication date Oct 3, 2024
- Tawan Semiconductor Manufacturing Co., Ltd.
- Li-Chi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20240334671
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ta-Chun LIN
- H01 - BASIC ELECTRIC ELEMENTS

Chemical etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods to prevent surface charge induced cd-dependent etching of m...

Gate-all-around structure and methods of forming the same

Gate all-around semiconductor device

Methods of manufacturing electronic structures

Methods for fabricating FinFETs having different fin numbers and co...

Methods for forming recesses in source/drain regions and devices fo...

Selective etchant compositions and methods

Multi-gate transistors with backside power rail and reduced gate-dr...

Method and device for etching silicon oxide

Hybrid source drain regions formed based on same fin and methods fo...

Semiconductor manufacturing apparatus

Method of manufacturing a semiconductor device and a semiconductor...

Wet etching method and wet etching system

Semiconductor device with tunable epitaxy structures and method of...

Three-dimensional memory devices

Injection metal assisted catalytic etching

Semiconductor devices

Wet etch process and method to provide uniform etching of material...

Vertically stacked finFETs and shared gate patterning

Wet etching control system, wet etching machine and wet etching con...

Staircase structures for electrically connecting multiple horizonta...

Process to manufacture novel inhibited hydrofluoric acid composition

Substrate treatment apparatus

Protective wafer grooving structure for wafer thinning and methods...

Method for forming semiconductor structure with fins using a multil...

Substrate processing apparatus and substrate processing method

Method of manufacturing gate spacers with stepped sidewalls by remo...

Structure and method for FinFET device with source/drain modulation

Semiconductor device

Etching compositions

Patents Applicationslast 30 patents

ETCHING SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEMI...

METHOD FOR MANUFACTURING SEMICONDUCTOR MEMBER

ETCHING SOLUTION, ETCHING METHOD, AND METHOD FOR MANUFACTURING SEMI...

DEVICE WITH ALTERNATE COMPLEMENTARY CHANNELS AND FABRICATION METHOD...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

BACKSIDE POWER RAIL AND METHODS OF FORMING THE SAME

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...

GATE-ALL-AROUND STRUCTURE AND METHODS OF FORMING THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

WAFER RECEIVER, ELECTROCHEMICAL POROSIFICATION APPARATUS AND METHOD...

Methods for Fabricating FinFETs Having Different Fin Numbers and Co...

Semiconductor Device and Fabricating Method Thereof

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID...

CHIP STACK AND FABRICATION METHOD

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

EFFICIENT CLEANING AND ETCHING OF HIGH ASPECT RATIO STRUCTURES

HYBRID SOURCE DRAIN REGIONS FORMED BASED ON SAME FIN AND METHODS FO...

PROTECTIVE WAFER GROOVING STRUCTURE FOR WAFER THINNING AND METHODS...

STRUCTURE AND METHOD FOR FINFET DEVICE WITH SOURCE/DRAIN MODULATION

PROCESSES FOR REDUCING LINE-END SPACING

INCREASING SOURCE/DRAIN DOPANT CONCENTRATION TO REDUCED RESISTANCE

METHODS OF FORMING GATE-ALL-AROUND (GAA) DEVICES

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

REDUCED STRAIN HETEROEPITAXY ASSEMBLY FOR THREE-DIMENSIONAL DEVICE...

COMPOSITE SUBSTRATE FOR FABRICATION OF BETA GALLIUM OXIDE DEVICES

AIR-GAP TRACES AND AIR-GAP EMBEDDED BRIDGE INTEGRATED IN GLASS INTE...

METHOD OF FORMING A NANO-FET SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE STRUCTURE