Membership
Tour
Register
Log in
Chemical etching
Follow
Industry
CPC
H01L21/30604
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/30604
Chemical etching
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Electronic structure having two field effect transistors
Patent number
11,978,744
Issue date
May 7, 2024
Pragmatic Printing Ltd
Richard Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composition, its use and a process for selectively etching silicon-...
Patent number
11,970,647
Issue date
Apr 30, 2024
BASF SE
Francisco Javier Lopez Villanueva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned barrier for metal vias
Patent number
11,972,974
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Sung-Li Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,972,982
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF devices with nanotube particles for enhanced performance and met...
Patent number
11,961,781
Issue date
Apr 16, 2024
Qorvo US, Inc.
Julio C. Costa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wet anisotropic etching of silicon
Patent number
11,959,004
Issue date
Apr 16, 2024
Texas Instruments Incorporated
Simon Joshua Jacobs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device and manufacturing method thereof
Patent number
11,963,344
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Jaybok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,955,550
Issue date
Apr 9, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Fei Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a multi-gate device
Patent number
11,955,554
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Huan-Sheng Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching solution and method for selectively removing silicon nitrid...
Patent number
11,955,341
Issue date
Apr 9, 2024
VERSUM MATERIALS US, LLC
Jhih Kuei Ge
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Memory device and method for forming the same
Patent number
11,956,948
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Wen Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and method of manufacturing thereof
Patent number
11,956,961
Issue date
Apr 9, 2024
Kioxia Corporation
Shinichi Sotome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,955,428
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Hsin-Hung Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of barrier layer
Patent number
11,948,834
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Yen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned backside source contact structure
Patent number
11,948,987
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Lung-Kun Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,948,804
Issue date
Apr 2, 2024
Tokyo Electron Limited
Takumi Honda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Gate-all-around device with protective dielectric layer and method...
Patent number
11,948,989
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Cheng-Ting Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,949,002
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
I-Hsieh Wong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical integrated circuit structure including edge coupling protec...
Patent number
11,940,659
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chen-Hao Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method of fabricating the semiconductor...
Patent number
11,942,513
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Guan-Lin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface modification layer for conductive feature formation
Patent number
11,942,362
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jian-Jou Lian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit package and method
Patent number
11,942,403
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Chien Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro-sensor for detecting chemical species and associated manufact...
Patent number
11,940,407
Issue date
Mar 26, 2024
Soitec
Bruno Ghyselen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Quantum dot devices with overlapping gates
Patent number
11,942,516
Issue date
Mar 26, 2024
Intel Corporation
Nicole K. Thomas
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Three-dimensional memory devices and fabrication methods thereof
Patent number
11,943,923
Issue date
Mar 26, 2024
Yangtze Memory Technologies Co., Ltd.
Li Hong Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of forming the same
Patent number
11,942,523
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Sai-Hooi Yeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,935,739
Issue date
Mar 19, 2024
Tokyo Electron Limited
Akira Fujita
B08 - CLEANING
Information
Patent Grant
Pitch reduction technology using alternating spacer depositions dur...
Patent number
11,935,756
Issue date
Mar 19, 2024
Baosuo Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory and method of manufacturing the same
Patent number
11,937,437
Issue date
Mar 19, 2024
Kioxia Corporation
Masahiro Kiyotoshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit structure with backside dielectric layer having...
Patent number
11,935,781
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Che-Lun Chang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Embedded Flash Memory Device with Floating Gate Embedded in a Subst...
Publication number
20240147716
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei Cheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL SEMICONDUCTOR COMPONENT ON THE BASIS OF GALLIUM NITRIDE...
Publication number
20240136407
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Kevin Dannecker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING SUBSTRATE, AND METHOD FOR MANUFACTURING SILIC...
Publication number
20240112917
Publication date
Apr 4, 2024
Tokuyama Corporation
Yoshiki SEIKE
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
INTEGRATED CIRCUIT PACKAGES AND METHODS
Publication number
20240112924
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsu-Hsien Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INNER SPACER STRUCTURE AND METHODS OF FORMING SUCH
Publication number
20240105814
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Che-Lun Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS TO PROVIDE UNIFORM WET ETCHING OF MATERIAL WITHIN HIGH ASPE...
Publication number
20240105455
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Shan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING SYS...
Publication number
20240105456
Publication date
Mar 28, 2024
SEMES CO., LTD.
Hanglim LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20240105519
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Ka-Hing FUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING CONTROL SYSTEM AND ETCHING CONTROL METHOD
Publication number
20240096657
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLEXIBLE MERGE SCHEME FOR SOURCE/DRAIN EPITAXY REGIONS
Publication number
20240098959
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Hsuan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS METHOD FOR FABRICATING A THREE-DIMENSIONAL SOURCE CONTACT S...
Publication number
20240097018
Publication date
Mar 21, 2024
National Yang Ming Chiao Tung University
Bing-Yue Tsui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-PLANAR METAL-INSULATOR-METAL STRUCTURE
Publication number
20240096793
Publication date
Mar 21, 2024
International Business Machines Corporation
Nicholas Anthony Lanzillo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING A STRAINED STRUCTURE AND STRUCTURE FORMED
Publication number
20240097034
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung-Lin LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMULATIONS TO SELECTIVELY ETCH SILICON-GERMANIUM RELATIVE TO SILICON
Publication number
20240096635
Publication date
Mar 21, 2024
Entegris, Inc.
Steven M. Bilodeau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS TO PREVENT SURFACE CHARGE INDUCED CD-DEPENDENT ETCHING OF M...
Publication number
20240096638
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Shan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET ETCH PROCESS AND METHOD TO PROVIDE UNIFORM ETCHING OF MATERIAL...
Publication number
20240087908
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Shan Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TREATING TRANSITION METAL SEMICONDUCTOR, AND REDUCING AG...
Publication number
20240087911
Publication date
Mar 14, 2024
Tokuyama Corporation
Kohei SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TRANSFER CARRIER AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20240087931
Publication date
Mar 14, 2024
KIOXIA Corporation
Satoshi NAKAOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES SEMICONDUCTOR DEVICES
Publication number
20240071775
Publication date
Feb 29, 2024
Semiconductor Components Industries, LLC
David LYSACEK
C30 - CRYSTAL GROWTH
Information
Patent Application
SILICON ETCHING SOLUTION AND METHOD FOR PRODUCING SILICON ETCHING S...
Publication number
20240067878
Publication date
Feb 29, 2024
Tokuyama Corporation
Tatsuya HITOMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D ISOLATION OF A SEGMENTATED 3D NANOSHEET CHANNEL REGION
Publication number
20240063261
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Mark I. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BACKSIDE POWER RAIL STRUCTURE AND METHODS OF FORMING SAME
Publication number
20240063125
Publication date
Feb 22, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuo-Cheng Chiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FIELD STOP IGBT WITH GROWN INJECTION REGION
Publication number
20240055484
Publication date
Feb 15, 2024
IPOWER SEMICONDUCTOR
HAMZA YILMAZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FINFET DEVICES
Publication number
20240038594
Publication date
Feb 1, 2024
TESSERA LLC
Veeraraghavan S. Basker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT ARCHITECTURE FOR CAPACITANCE REDUCTION AND SATISFACTORY CON...
Publication number
20240038857
Publication date
Feb 1, 2024
Intel Corporation
Rishabh MEHANDRU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHANT COMPOSITION, AND METHOD OF FORMING PATTERN USING THE SAME,...
Publication number
20240034932
Publication date
Feb 1, 2024
DONGWOO FINE-CHEM CO., LTD
Jin-Kyu Roh
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
DONOR SUBSTRATE FOR THE TRANSFER OF A THIN LAYER AND ASSOCIATED TRA...
Publication number
20240030061
Publication date
Jan 25, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Larry Vincent
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BY-SITE-COMENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJ...
Publication number
20240021430
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming Chyi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Structure with Features of D-mode and E-mode GaN Devi...
Publication number
20240014306
Publication date
Jan 11, 2024
UNITED MICROELECTRONICS CORP.
Chih-Tung Yeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dopant Concentration Boost in Epitaxially Formed Material
Publication number
20240014321
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Yu Ma
H01 - BASIC ELECTRIC ELEMENTS