Chemical-mechanical polishing [CMP]

Industry

CPC
B81C2201/0104

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0104Chemical-mechanical polishing [CMP]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate for sensing, a method of fabricating the substrate, and a...
- Patent number 12,000,735
- Issue date Jun 4, 2024
- Samsung Electronics Co., Ltd.
- Daejong Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Damascene interconnect structure, actuator device, and method of ma...
- Patent number 11,987,493
- Issue date May 21, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
- Patent number 11,656,128
- Issue date May 23, 2023
- Industrial Technology Research Institute
- Chin-Jou Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,572,271
- Issue date Feb 7, 2023
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,535,512
- Issue date Dec 27, 2022
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved micromachined ultrasonic transducer membranes
- Patent number 11,383,269
- Issue date Jul 12, 2022
- BFLY OPERATIONS, INC.
- Gerard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate for sensing, a method of fabricating the substrate, and a...
- Patent number 11,125,620
- Issue date Sep 21, 2021
- Samsung Electronics Co., Ltd.
- Daejong Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for forming inkjet nozzle devices
- Patent number 10,822,228
- Issue date Nov 3, 2020
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing planar thin packages
- Patent number 10,752,499
- Issue date Aug 25, 2020
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christof Landesberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for filling etched holes using first and second polymers
- Patent number 10,597,290
- Issue date Mar 24, 2020
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,991
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,992
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,549,987
- Issue date Feb 4, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
- Patent number 10,508,020
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for filling etched holes using photoimageable thermoplastic...
- Patent number 10,329,146
- Issue date Jun 25, 2019
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Batch-processing method for super-high aspect ratio diffractive optics
- Patent number 10,183,375
- Issue date Jan 22, 2019
- Alcorix Co.
- Nicolaie A. Moldovan
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing slurry for silicon, method of polishing polysilicon and m...
- Patent number 9,982,165
- Issue date May 29, 2018
- Samsung Display Co., Ltd.
- Byoung-Kwon Choo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-Electro-Mechanical System (MEMS) structures and design struct...
- Patent number 9,981,842
- Issue date May 29, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) beam stru...
- Patent number 9,969,613
- Issue date May 15, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,938,137
- Issue date Apr 10, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 9,932,222
- Issue date Apr 3, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanogap structure for micro/nanofluidic systems formed by sacrifici...
- Patent number 9,914,118
- Issue date Mar 13, 2018
- International Business Machines Corporation
- Yann A. Astier
- B24 - GRINDING POLISHING
Information Patent Grant
Ultrasonic transducer, method of producing same, and ultrasonic pro...
- Patent number 9,873,137
- Issue date Jan 23, 2018
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chip structure
- Patent number 9,862,600
- Issue date Jan 9, 2018
- ams International AG
- Roel Daamen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanogap structure for micro/nanofluidic systems formed by sacrifici...
- Patent number 9,782,773
- Issue date Oct 10, 2017
- International Business Machines Corporation
- Yann A. Astier
- B24 - GRINDING POLISHING
Information Patent Grant
Method of increasing MEMS enclosure pressure using outgassing material
- Patent number 9,731,963
- Issue date Aug 15, 2017
- Invensense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 9,714,473
- Issue date Jul 25, 2017
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved RF electrode for improved Cmax
- Patent number 9,711,290
- Issue date Jul 18, 2017
- Cavendish Kinetics, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
- Publication number 20230382715
- Publication date Nov 30, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMUT-on-CMOS Ultrasonic Transducer by Bonding Active Wafers and Man...
- Publication number 20230302495
- Publication date Sep 28, 2023
- Feng Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...
- Publication number 20230040320
- Publication date Feb 9, 2023
- Industrial Technology Research Institute
- Chin-Jou KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20210387852
- Publication date Dec 16, 2021
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE FOR SENSING, A METHOD OF FABRICATING THE SUBSTRATE, AND A...
- Publication number 20210381895
- Publication date Dec 9, 2021
- Samsung Electronics Co., Ltd.
- Daejong Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR BONDED SUBSTRATE
- Publication number 20210375628
- Publication date Dec 2, 2021
- Murata Manufacturing Co., Ltd.
- Ryunosuke Hino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN ETCH STOP LAYER AND MEMS SENSOR COMPRIS...
- Publication number 20210214216
- Publication date Jul 15, 2021
- ams AG
- Alessandro FAES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED MICROMACHINED ULTRASONIC TRANSDUCER MEMBRANES
- Publication number 20200384503
- Publication date Dec 10, 2020
- Butterfly Network, Inc.
- Gerard Schmid
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
PROCESS FOR FORMING INKJET NOZZLE DEVICES
- Publication number 20200180949
- Publication date Jun 11, 2020
- MEMJET TECHNOLOGY LIMITED
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131033
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS
- Publication number 20190263657
- Publication date Aug 29, 2019
- MEMJET TECHNOLOGY LIMITED
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Planar Thin Packages for Semiconductor Dev...
- Publication number 20190135618
- Publication date May 9, 2019
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Christof LANDESBERGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201503
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201502
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180179052
- Publication date Jun 28, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...
- Publication number 20170349431
- Publication date Dec 7, 2017
- Memjet Technology Ltd.
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSDUCER ELEMENT AND METHOD OF MANUFACTURING A TRANSDUCER ELEMENT
- Publication number 20170156008
- Publication date Jun 1, 2017
- EPCOS AG
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...
- Publication number 20170129767
- Publication date May 11, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOGAP STRUCTURE FOR MICRO/NANOFLUIDIC SYSTEMS FORMED BY SACRIFICI...
- Publication number 20170043339
- Publication date Feb 16, 2017
- International Business Machines Corporation
- Yann A. Astier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF INCREASING MEMS ENCLOSURE PRESSURE USING OUTGASSING MATERIAL
- Publication number 20170001861
- Publication date Jan 5, 2017
- InvenSense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Hollow Structure
- Publication number 20160280536
- Publication date Sep 29, 2016
- TOKYO ELECTRON LIMITED
- Kippei SUGITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20160264405
- Publication date Sep 15, 2016
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED RF ELECTRODE FOR IMPROVED CMAX
- Publication number 20160240320
- Publication date Aug 18, 2016
- CAVENDISH KINETICS, INC.
- Mickael RENAULT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FILLING ETCHED HOLES
- Publication number 20160236930
- Publication date Aug 18, 2016
- Memjet Technology Ltd.
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO IMPROVE CANTILEVER PROCESS PERFORMANCE
- Publication number 20160090292
- Publication date Mar 31, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- LIANG NI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE HAVING ELEMENT ELECTRODE CONNECTED TO PENETRATING WIRE, AND...
- Publication number 20150263647
- Publication date Sep 17, 2015
- Canon Kabushiki Kaisha
- Shinichiro Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20140231263
- Publication date Aug 21, 2014
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS-COATED MEMORY DISKS
- Publication number 20130313226
- Publication date Nov 28, 2013
- Cabot Microelectronics Corporation
- Selvaraj Palanisamy Chinnathambi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Chemical-mechanical polishing [CMP]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate for sensing, a method of fabricating the substrate, and a...

Damascene interconnect structure, actuator device, and method of ma...

Microelectromechanical infrared sensing device and fabrication meth...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Curved micromachined ultrasonic transducer membranes

Micro-electro-mechanical system (MEMS) structures and design struct...

Substrate for sensing, a method of fabricating the substrate, and a...

Actuator layer patterning with topography

Process for forming inkjet nozzle devices

Method for manufacturing planar thin packages

Process for filling etched holes using first and second polymers

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Substrate structure, semiconductor structure and method for fabrica...

Process for filling etched holes using photoimageable thermoplastic...

Batch-processing method for super-high aspect ratio diffractive optics

Polishing slurry for silicon, method of polishing polysilicon and m...

Micro-Electro-Mechanical System (MEMS) structures and design struct...

Method for forming micro-electro-mechanical system (MEMS) beam stru...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Nanogap structure for micro/nanofluidic systems formed by sacrifici...

Ultrasonic transducer, method of producing same, and ultrasonic pro...

Chip structure

Nanogap structure for micro/nanofluidic systems formed by sacrifici...

Method of increasing MEMS enclosure pressure using outgassing material

Method and apparatus for maintaining parallelism of layers and/or a...

Curved RF electrode for improved Cmax

Patents Applicationslast 30 patents

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...

CMUT-on-CMOS Ultrasonic Transducer by Bonding Active Wafers and Man...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

SUBSTRATE FOR SENSING, A METHOD OF FABRICATING THE SUBSTRATE, AND A...

MANUFACTURING METHOD FOR BONDED SUBSTRATE

METHOD FOR MANUFACTURING AN ETCH STOP LAYER AND MEMS SENSOR COMPRIS...

CURVED MICROMACHINED ULTRASONIC TRANSDUCER MEMBRANES

PROCESS FOR FORMING INKJET NOZZLE DEVICES

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS

Method for Manufacturing Planar Thin Packages for Semiconductor Dev...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...

TRANSDUCER ELEMENT AND METHOD OF MANUFACTURING A TRANSDUCER ELEMENT

SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...

NANOGAP STRUCTURE FOR MICRO/NANOFLUIDIC SYSTEMS FORMED BY SACRIFICI...

METHOD OF INCREASING MEMS ENCLOSURE PRESSURE USING OUTGASSING MATERIAL

Method for Manufacturing Hollow Structure

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...

CURVED RF ELECTRODE FOR IMPROVED CMAX

PROCESS FOR FILLING ETCHED HOLES

METHOD TO IMPROVE CANTILEVER PROCESS PERFORMANCE

DEVICE HAVING ELEMENT ELECTRODE CONNECTED TO PENETRATING WIRE, AND...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

POLISHING COMPOSITION FOR NICKEL-PHOSPHOROUS-COATED MEMORY DISKS