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Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
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H01J37/24
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ELECTRICITY
H01
Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/24
Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
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Patents Grants
last 30 patents
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Patent Grant
Multi-electron beam inspection apparatus, multipole array control m...
Patent number
12,308,202
Issue date
May 20, 2025
NuFlare Technology, Inc.
Yuichi Maekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of determining aberrations of a charged particle beam, and...
Patent number
12,308,203
Issue date
May 20, 2025
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dominik Ehberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam current adjustment for charged-particle inspection system
Patent number
12,308,205
Issue date
May 20, 2025
ASML Netherlands B.V.
Wei Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power adjustment method of upper electrode power supply and semicon...
Patent number
12,300,460
Issue date
May 13, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jing Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real-time dosimetry
Patent number
12,298,447
Issue date
May 13, 2025
Reveam, Inc.
Chip Starns
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Patent Grant
Method for positioning objects in a particle beam microscope with t...
Patent number
12,300,459
Issue date
May 13, 2025
Carl Zeiss Microscopy GmbH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam device, method for operating the particle beam device...
Patent number
12,300,461
Issue date
May 13, 2025
Carl Zeiss Microscopy GmbH
Björn Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam device having a deflection unit
Patent number
12,288,664
Issue date
Apr 29, 2025
Carl Zeiss Microscopy GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam image acquisition method, multiple electron...
Patent number
12,288,666
Issue date
Apr 29, 2025
NuFlare Technology, Inc.
Koichi Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Live-assisted image acquisition method and system with charged part...
Patent number
12,288,667
Issue date
Apr 29, 2025
FEI Company
Pavel Potocek
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Charged particle source module
Patent number
12,288,663
Issue date
Apr 29, 2025
ASML Netherlands B.V.
Laura Dinu-Gurtler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,283,458
Issue date
Apr 22, 2025
HITACHI HIGH-TECH CORPORATION
Mai Yoshihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for filtering radio frequencies from a signal o...
Patent number
12,283,451
Issue date
Apr 22, 2025
Lam Research Corporation
Vince Burkhart
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Charged particle beam apparatus
Patent number
12,283,452
Issue date
Apr 22, 2025
HITACHI HIGH-TECH CORPORATION
Hiroshi Morita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Hybrid scanning electron microscopy and acousto-optic based metrology
Patent number
12,278,085
Issue date
Apr 15, 2025
Applied Materials Israel Ltd.
Guy Shwartz
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
12,278,087
Issue date
Apr 15, 2025
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Inspection apparatus
Patent number
12,265,043
Issue date
Apr 1, 2025
NuFlare Technology, Inc.
Riki Ogawa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron beam inspection apparatus
Patent number
12,261,015
Issue date
Mar 25, 2025
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron detection device and scanning electron microscope
Patent number
12,261,016
Issue date
Mar 25, 2025
CIQTEK CO., LTD.
Da Yin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Scanning electron microscope and image generation method using scan...
Patent number
12,255,043
Issue date
Mar 18, 2025
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron microscope and method of correcting aberration
Patent number
12,255,041
Issue date
Mar 18, 2025
Jeol Ltd.
Keito Aibara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device, manufacturing method thereof, and detecting m...
Patent number
12,249,662
Issue date
Mar 11, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ya-Chin King
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and inspection device
Patent number
12,237,145
Issue date
Feb 25, 2025
HITACHI HIGH-TECH CORPORATION
Atsuko Shintani
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods for determining the virtual source location of a liquid met...
Patent number
12,237,142
Issue date
Feb 25, 2025
FEI Company
Sean M. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determining a depth of a hidden structural element background
Patent number
12,237,146
Issue date
Feb 25, 2025
Applied Materials Israel Ltd.
Lior Akerman
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
12,237,147
Issue date
Feb 25, 2025
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Ultra-precision timing clock method
Patent number
12,226,246
Issue date
Feb 18, 2025
Weng-Dah Ken
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
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Patent Grant
Ion milling device
Patent number
12,230,471
Issue date
Feb 18, 2025
HITACHI HIGH-TECH CORPORATION
Shota Aida
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Charged particle detector with gain element
Patent number
12,230,470
Issue date
Feb 18, 2025
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron microscope
Patent number
12,224,153
Issue date
Feb 11, 2025
Focus-eBeam Technology (Beijing) Co., Ltd.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and System for Imaging a Sample
Publication number
20250166963
Publication date
May 22, 2025
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
E-BEAM EXPOSURE METHOD AND MASK MANUFACTURING METHOD COMPRISING THE...
Publication number
20250157789
Publication date
May 15, 2025
Samsung Electronics Co., Ltd.
Jungwook SHON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...
Publication number
20250157785
Publication date
May 15, 2025
HITACHI HIGH-TECH CORPORATION
Hidenori MACHIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
Publication number
20250157780
Publication date
May 15, 2025
FEI Company
Sean M. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PR...
Publication number
20250157782
Publication date
May 15, 2025
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND END POINT DETECTION METHOD
Publication number
20250157787
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Masakazu HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RATING SUBSTRATE SUPPORT ASSEMBLIES BASED ON IMPEDANCE CIRCUIT ELEC...
Publication number
20250157788
Publication date
May 15, 2025
Applied Materials, Inc.
Arvind Shankar Raman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Ion Milling Device, and Inspection System
Publication number
20250149288
Publication date
May 8, 2025
Hitachi High-Tech Corporation
Naohiro FUJITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE-BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE-BEAM IMAGE A...
Publication number
20250149290
Publication date
May 8, 2025
NuFlare Technology, Inc.
Koichi ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING MACHINE AND LOWER ELECTRODE STRUCTURE THEREOF
Publication number
20250140512
Publication date
May 1, 2025
JIANGSU LEUVEN INSTRUMENTS CO., LTD.
Huaidong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
X-RAY IMAGING SYSTEM FOR RADIATION THERAPY
Publication number
20250140515
Publication date
May 1, 2025
Shanghai United Imaging Healthcare Co., Ltd.
Buliang SUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CHARACTERIZING A DETECTION PATH OF A CHARGED PARTICLE BEA...
Publication number
20250140511
Publication date
May 1, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PARAMETER IMPLANTATION FOR MANAGING WAFER DISTORTION
Publication number
20250140567
Publication date
May 1, 2025
Applied Materials, Inc.
Stanislav S. TODOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DOPING TWO-DIMENSIONAL MATERIAL BASED ON CLUSTER ION IMP...
Publication number
20250132126
Publication date
Apr 24, 2025
Jiangsu Jichuang Atomic Cluster Technology Research Institute Co., Ltd.
Fengqi SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING DETECTION DATA IN ELECTRON BEAM APPLICATION DEV...
Publication number
20250132117
Publication date
Apr 24, 2025
PHOTO ELECTRON SOUL INC.
Tomohiro NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A CHARGED PARTICLE BEAM APPARATUS, AND CHARGED...
Publication number
20250132121
Publication date
Apr 24, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Stanislav Bardy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SC...
Publication number
20250132125
Publication date
Apr 24, 2025
University of Connecticut
Joseph Favata
G01 - MEASURING TESTING
Information
Patent Application
DETECTOR DEVICE, ELECTRON BEAM APPARATUS, AND METHOD FOR INSPECTING...
Publication number
20250125118
Publication date
Apr 17, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Birgit Schabinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH VOLTAGE POWER SUPPLIES FOR FAST VOLTAGE CHANGES
Publication number
20250125117
Publication date
Apr 17, 2025
Advanced Energy Industries, Inc.
Arthur Flatt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE WITH CONDUCTIVE RINGS
Publication number
20250126929
Publication date
Apr 17, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ya-Chin KING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE
Publication number
20250116587
Publication date
Apr 10, 2025
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS OF ELECTRON DIFFRACTION
Publication number
20250112022
Publication date
Apr 3, 2025
FEI Company
Jakub HOLZER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
Publication number
20250104966
Publication date
Mar 27, 2025
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
Publication number
20250095133
Publication date
Mar 20, 2025
ASML NETHERLANDS B.V.
Vincent Sylvester KUIPER
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
Publication number
20250095952
Publication date
Mar 20, 2025
Applied Materials, Inc.
Ori Noked
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
Publication number
20250095953
Publication date
Mar 20, 2025
FEI Company
Adam STOKES
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
High-Frequency Power Supply, Plasma Processing Device, and Matching...
Publication number
20250095954
Publication date
Mar 20, 2025
TOKYO ELECTRON LIMITED
Taro IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
Publication number
20250095958
Publication date
Mar 20, 2025
Applied Materials, Inc.
Frank SINCLAIR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
Publication number
20250095955
Publication date
Mar 20, 2025
APPLIED MATERIALS ISRAEL LTD.
Konstantin Chirko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM APPARATUS, FOIL OR GRID LENS, AND METHOD OF OPERATING...
Publication number
20250087442
Publication date
Mar 13, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Pieter Kruit
H01 - BASIC ELECTRIC ELEMENTS