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Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
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H01J37/24
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/24
Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
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Patents Grants
last 30 patents
Information
Patent Grant
Observation method by means of scanning transmission electron micro...
Patent number
12,154,758
Issue date
Nov 26, 2024
The University of Tokyo
Naoya Shibata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam device
Patent number
12,148,593
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Shinichi Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and image acquiring method
Patent number
12,148,594
Issue date
Nov 19, 2024
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,142,457
Issue date
Nov 12, 2024
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus
Patent number
12,142,453
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Weiming Ren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus with multiple detectors and methods...
Patent number
12,142,455
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual speed acquisition for drift corrected, fast, low dose, adaptiv...
Patent number
12,136,532
Issue date
Nov 5, 2024
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power supply module and charged particle beam device
Patent number
12,132,411
Issue date
Oct 29, 2024
HITACHI HIGH-TECH CORPORATION
Ryo Kadoi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and specimen contamination prevention method
Patent number
12,131,881
Issue date
Oct 29, 2024
Jeol Ltd.
Takeshi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,131,882
Issue date
Oct 29, 2024
HITACHI HIGH-TECH CORPORATION
Shuntaro Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High resolution light valve detector for detecting x-ray
Patent number
12,130,392
Issue date
Oct 29, 2024
Carl Zeiss X-ray Microscopy Inc.
Xiaochao Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for generating particle wave carrying electric...
Patent number
12,125,666
Issue date
Oct 22, 2024
Yanbing Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,125,667
Issue date
Oct 22, 2024
HITACHI HIGH-TECH CORPORATION
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
Patent number
12,125,669
Issue date
Oct 22, 2024
ASML Netherlands B.V.
Ning Ye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
12,125,672
Issue date
Oct 22, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
Patent number
12,100,574
Issue date
Sep 24, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a multi-beam particle beam microscope
Patent number
12,094,683
Issue date
Sep 17, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method
Patent number
12,094,682
Issue date
Sep 17, 2024
Kioxia Corporation
Takeshi Owaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
Patent number
12,087,543
Issue date
Sep 10, 2024
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and method for controlling vacuum proce...
Patent number
12,080,523
Issue date
Sep 3, 2024
Tokyo Electron Limited
Kiyoshi Mori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arbitrary electron dose waveforms for electron microscopy
Patent number
12,080,514
Issue date
Sep 3, 2024
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Ruth Shewmon Bloom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
Patent number
12,080,513
Issue date
Sep 3, 2024
ASML Netherlands B.V.
Wei Fang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and prediction method of the condition...
Patent number
12,080,529
Issue date
Sep 3, 2024
HITACHI HIGH-TECH CORPORATION
Yoshito Kamaji
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,074,076
Issue date
Aug 27, 2024
HITACHI HIGH-TECH CORPORATION
Soichiro Eto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam system
Patent number
12,068,128
Issue date
Aug 20, 2024
HITACHI HIGH-TECH CORPORATION
Yusuke Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for monitoring substrate processing apparatus
Patent number
12,068,140
Issue date
Aug 20, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Packaging design for a flow sensor and methods of manufacturing the...
Patent number
12,061,103
Issue date
Aug 13, 2024
Applied Materials, Inc.
Srikanth Krishnamurthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Booster circuit and voltage generator
Patent number
12,062,993
Issue date
Aug 13, 2024
Mitsubishi Electric Corporation
Masato Moriwaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arcing protection method, processing tool and fabrication system
Patent number
12,057,301
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wun-Kai Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and systems for aligning a multi-beam system
Patent number
12,057,287
Issue date
Aug 6, 2024
Jan Stopka
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON BEAM SPOT SHAPE RECONSTRUCTION UNIT
Publication number
20240386589
Publication date
Nov 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Mor Baram
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MULTIPLE ELECTRON BEAM OPTICS
Publication number
20240387140
Publication date
Nov 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Alon Litman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CONFIRMING AND FINDING AN IONIZATION EDGE WITHIN A MEASU...
Publication number
20240379324
Publication date
Nov 14, 2024
FEI Company
Wouter Rene J. VAN DEN BROEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUSED ION BEAM SYSTEM
Publication number
20240371598
Publication date
Nov 7, 2024
V TECHNOLOGY CO., LTD.
Michinobu MIZUMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
Publication number
20240371600
Publication date
Nov 7, 2024
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20240371601
Publication date
Nov 7, 2024
HITACHI HIGH-TECH CORPORATION
Yusuke NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PACKAGING DESIGN FOR A FLOW SENSOR AND METHODS OF MANUFACTURING THE...
Publication number
20240369389
Publication date
Nov 7, 2024
Applied Materials, Inc.
Srikanth Krishnamurthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND SYSTEM FOR MONITORING SUBSTRATE PROCESSING APPARATUS
Publication number
20240371611
Publication date
Nov 7, 2024
Samsung Electronics Co., Ltd.
SEJIN OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE
Publication number
20240363306
Publication date
Oct 31, 2024
HITACHI HIGH-TECH CORPORATION
Minami SHOUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
Publication number
20240363318
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Wun-Kai TSAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEW-SHOT LEARNING FOR PROCESSING MICROSCOPY IMAGES
Publication number
20240354924
Publication date
Oct 24, 2024
FEI Company
John Flanagan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
Publication number
20240355581
Publication date
Oct 24, 2024
Integrated Dynamic Electron Solutions, Inc.
Bryan Walter REED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
Publication number
20240347314
Publication date
Oct 17, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
Publication number
20240339294
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Marijke SCOTUZZI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTOR INSPECTION DEVICE, DETECTOR ASSEMBLY, DETECTOR ARRAY, APPA...
Publication number
20240339291
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Herre Tjerk STEENSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE DEVICE, CHARGED PARTICLE ASSESSMENT APPARATUS, MEA...
Publication number
20240339292
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
Publication number
20240339293
Publication date
Oct 10, 2024
Oxford Instruments Nanotechnology Tools Limited
Peter Statham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
Publication number
20240339295
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Tzu-Chao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING...
Publication number
20240331968
Publication date
Oct 3, 2024
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
Publication number
20240331971
Publication date
Oct 3, 2024
ASML NETHERLANDS B.V.
Jurgen VAN SOEST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240321543
Publication date
Sep 26, 2024
Hitachi High-Tech Corporation
Hideyuki Kotsuji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
Publication number
20240321547
Publication date
Sep 26, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...
Publication number
20240312758
Publication date
Sep 19, 2024
ASML NETHERLANDS B.V.
Zheng FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE
Publication number
20240312760
Publication date
Sep 19, 2024
CARL ZEISS MICROSCOPY GMBH
Bjoern Gamm
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
Publication number
20240312759
Publication date
Sep 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM MICROSCOPE
Publication number
20240304409
Publication date
Sep 12, 2024
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and Method for Calibrating a Charged-Particle Beam
Publication number
20240304407
Publication date
Sep 12, 2024
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM MICROSCOPE
Publication number
20240304410
Publication date
Sep 12, 2024
CARL ZEISS MICROSCOPY GMBH
Erik Essers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND INSPECTION DEVICE
Publication number
20240297012
Publication date
Sep 5, 2024
Hitachi High-Tech Corporation
Atsuko Shintani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESS MONITORING APPARATUS USING TERAHERTZ WAVES AND MONIT...
Publication number
20240297014
Publication date
Sep 5, 2024
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
Hak Sung KIM
H01 - BASIC ELECTRIC ELEMENTS