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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/02057
Cleaning during device manufacture
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,972,982
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun Hsiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for cleaning semiconductor wafers
Patent number
11,967,497
Issue date
Apr 23, 2024
ACM Research (Shanghai) Inc.
Jun Wang
B08 - CLEANING
Information
Patent Grant
Apparatus and method for wafer cleaning
Patent number
11,958,090
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Bo Chen Chen
B08 - CLEANING
Information
Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
Patent number
11,948,812
Issue date
Apr 2, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Pad carrier for horizontal pre-clean module
Patent number
11,942,319
Issue date
Mar 26, 2024
Applied Materials, Inc.
Edward Golubovsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,935,736
Issue date
Mar 19, 2024
Tokyo Electron Limited
Rintaro Higuchi
B08 - CLEANING
Information
Patent Grant
Method and apparatus for cleaning substrates using high temperature...
Patent number
11,925,881
Issue date
Mar 12, 2024
ACM Research (Shanghai) Inc.
Fuping Chen
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate heating unit, substrate processing apparatus, and substra...
Patent number
11,923,213
Issue date
Mar 5, 2024
Semes Co., Ltd.
Tae Shin Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for in-situ Marangoni cleaning
Patent number
11,923,210
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Chun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method and apparatus
Patent number
11,923,187
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Min-Cheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,919,049
Issue date
Mar 5, 2024
SCREEN Holdings Co., Ltd.
Linh da Ho
B08 - CLEANING
Information
Patent Grant
Substrate cleaning apparatus and substrate cleaning method
Patent number
11,919,051
Issue date
Mar 5, 2024
SCREEN Holdings Co., Ltd.
Yukifumi Yoshida
B08 - CLEANING
Information
Patent Grant
Method and apparatus for cleaning substrates
Patent number
11,911,807
Issue date
Feb 27, 2024
ACM RESEARCH (SHANGHAI), INC.
Hui Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,915,947
Issue date
Feb 27, 2024
Tokyo Electron Limited
Takumi Honda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having doped epitaxial region and its methods...
Patent number
11,908,934
Issue date
Feb 20, 2024
Intel Corporation
Anand S. Murthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic oxygen and ozone device for cleaning and surface treatment
Patent number
11,908,679
Issue date
Feb 20, 2024
Applied Materials, Inc.
Banqiu Wu
B08 - CLEANING
Information
Patent Grant
Display device having polycrystalline silicon layer
Patent number
11,903,247
Issue date
Feb 13, 2024
Samsung Display Co., Ltd.
Dong-Sung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solar cell
Patent number
11,901,467
Issue date
Feb 13, 2024
ZHEJIANG JINKO SOLAR CO., LTD.
Jingsheng Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
11,901,173
Issue date
Feb 13, 2024
SCREEN Holdings Co., Ltd.
Yukifumi Yoshida
B08 - CLEANING
Information
Patent Grant
Semiconductor device having nanosheet transistor and methods of fab...
Patent number
11,894,460
Issue date
Feb 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device with source/drain barrier
Patent number
11,894,421
Issue date
Feb 6, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.V
Feng-Ching Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,881,419
Issue date
Jan 23, 2024
SCREEN Holdings Co., Ltd.
Toru Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for diffusing magnesium in gallium nitride materi...
Patent number
11,881,404
Issue date
Jan 23, 2024
QROMIS, Inc.
Ozgur Aktas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment method and substrate treatment device
Patent number
11,875,991
Issue date
Jan 16, 2024
Tokyo Electron Limited
Koji Kagawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Back-side deep trench isolation structure for image sensor
Patent number
11,869,761
Issue date
Jan 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Hung Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning equipment and cleaning method
Patent number
11,869,779
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Sukai Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,869,777
Issue date
Jan 9, 2024
Tokyo Electron Limited
Fumihiro Kamimura
B08 - CLEANING
Information
Patent Grant
Semiconductor structure and method for forming same
Patent number
11,869,952
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Kang You
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning agent composition and cleaning method
Patent number
11,866,676
Issue date
Jan 9, 2024
NISSAN CHEMICAL CORPORATION
Hiroshi Ogino
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING DOPED EPITAXIAL REGION AND ITS METHODS...
Publication number
20240145592
Publication date
May 2, 2024
Intel Corporation
Anand S. MURTHY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURI...
Publication number
20240132806
Publication date
Apr 25, 2024
NISSAN CHEMICAL CORPORATION
Masafumi YAGYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS AND SUBSTRA...
Publication number
20240120212
Publication date
Apr 11, 2024
SCREEN Holdings Co., Ltd.
Shogo KUNIEDA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240096654
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Fumihiro KAMIMURA
B08 - CLEANING
Information
Patent Application
SPACE FILLING DEVICE FOR WET BENCH
Publication number
20240087917
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Ji Chen
B08 - CLEANING
Information
Patent Application
SEMICONDUCTOR WAFER CLEANING APPARATUS
Publication number
20240087878
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Lun CHEN
B08 - CLEANING
Information
Patent Application
WAFER TRANSFER CARRIER AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20240087931
Publication date
Mar 14, 2024
KIOXIA Corporation
Satoshi NAKAOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BULK ACOUSTIC WAVE RESONATOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20240072752
Publication date
Feb 29, 2024
Shenzhen Newsonic Technologies Co., Ltd.
Guojun WENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUPPLY SYSTEM, SUBSTRATE PROCESSING...
Publication number
20240047234
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Yosuke HACHIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240021445
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Hiroki SAKURAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESS APPARATUS AND SUBSTRATE PROCESS METHOD USING THE...
Publication number
20240021413
Publication date
Jan 18, 2024
Samsung Electronics Co., Ltd.
JAEHYUN PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING EQUIPMENT
Publication number
20240006195
Publication date
Jan 4, 2024
Samsung Electronics Co., Ltd.
YUNSEOK Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
Publication number
20230418267
Publication date
Dec 28, 2023
SCREEN Holdings Co., Ltd.
Koji HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SINGLE WAFER PROCESSING SYSTEM FOR PROCESSING OF SEMICON...
Publication number
20230405642
Publication date
Dec 21, 2023
TOKYO ELECTRON LIMITED
Shan Hu
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
Publication number
20230400252
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
SANGJINE PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ETCHING METHOD AND SEMICONDUCTOR STRUCTURE MANUFACTURED U...
Publication number
20230402287
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Da HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
Publication number
20230386802
Publication date
Nov 30, 2023
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS KITS AND RELATED METHODS FOR PROCESSING CHAMBERS TO FACILIT...
Publication number
20230386803
Publication date
Nov 30, 2023
Applied Materials, Inc.
Zhepeng CONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING NANOSHEET TRANSISTOR AND METHODS OF FAB...
Publication number
20230378352
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD ASSEMBLY AND METHOD OF SERVICING ASSEMBLY FOR SEMICONDUC...
Publication number
20230377871
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Wei WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20230378361
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Che-Yu LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TREATING A SUBSTRATE
Publication number
20230364656
Publication date
Nov 16, 2023
SEMES CO., LTD.
Tae-Keun KIM
B08 - CLEANING
Information
Patent Application
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
Publication number
20230369056
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOPING PROFILE FOR STRAINED SOURCE/DRAIN REGION
Publication number
20230369491
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsueh-Chang Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED SEMICONDUCTOR DIE VESSEL PROCESSING WORKSTATIONS
Publication number
20230360939
Publication date
Nov 9, 2023
Tsung-Sheng KUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230352328
Publication date
Nov 2, 2023
TOKYO ELECTRON LIMITED
Yoshinori IKEDA
B08 - CLEANING
Information
Patent Application
FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFAC...
Publication number
20230347390
Publication date
Nov 2, 2023
Canon Kabushiki Kaisha
Hisanobu Azuma
B08 - CLEANING
Information
Patent Application
STEAM-ASSISTED SINGLE SUBSTRATE CLEANING PROCESS AND APPARATUS
Publication number
20230335418
Publication date
Oct 19, 2023
Applied Materials, Inc.
Jianshe TANG
B08 - CLEANING
Information
Patent Application
SURFACE TREATMENT COMPOSITION
Publication number
20230313080
Publication date
Oct 5, 2023
Fujimi Incorporated
HIDEYUKI TOKUSHIMA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
PROCESSING TASK START METHOD AND DEVICE IN SEMICONDUCTOR PROCESSING...
Publication number
20230307272
Publication date
Sep 28, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Fangna WU
H01 - BASIC ELECTRIC ELEMENTS