Cleaning during or after manufacture

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B81C1/00841

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00841Cleaning during or after manufacture

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Patents Grantslast 30 patents

Information Patent Grant
Scanning probe microscope for cleaning nanostructures
- Patent number 11,130,159
- Issue date Sep 28, 2021
- International Business Machines Corporation
- Pio Peter Niraj Nirmalraj
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of selectively removing an anti-stiction layer on a eutectic...
- Patent number 10,053,361
- Issue date Aug 21, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for cleaning and/or treating a substrate usin...
- Patent number 6,782,900
- Issue date Aug 31, 2004
- MiCell Technologies, Inc.
- James DeYoung
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CLEANING OF NANOSTRUCTURES
- Publication number 20200094295
- Publication date Mar 26, 2020
- International Business Machines Corporation
- Pio Peter Niraj Nirmalraj
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fine structure composite and drying method of fine structure using...
- Publication number 20050051930
- Publication date Mar 10, 2005
- Kabushiki Kaisha Kobe Seiko Sho.
- Nobuyuki Kawakami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Fine structure composite and drying method of fine structure using...
- Publication number 20040038060
- Publication date Feb 26, 2004
- Kabushiki Kaisha Kobe Seiko Sho.
- Nobuyuki Kawakami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process and apparatus for contacting a precision surface with liqui...
- Publication number 20030196679
- Publication date Oct 23, 2003
- International Business Machines Corporation
- John Michael Cotte
- B08 - CLEANING
Information Patent Application
Methods and apparatus for cleaning and/or treating a substrate usin...
- Publication number 20030047195
- Publication date Mar 13, 2003
- James DeYoung
- B81 - MICRO-STRUCTURAL TECHNOLOGY