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Cleaning of wafer backside
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H01L21/0209
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/0209
Cleaning of wafer backside
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,967,509
Issue date
Apr 23, 2024
Tokyo Electron Limited
Osamu Miyahara
B08 - CLEANING
Information
Patent Grant
Laminate of aluminum nitride single-crystal substrate
Patent number
11,952,677
Issue date
Apr 9, 2024
Tokuyama Corporation
Masao Ariyuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor fabricating system having hybrid brush assembly
Patent number
11,908,681
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Ying Mai
B08 - CLEANING
Information
Patent Grant
Polishing apparatus
Patent number
11,865,665
Issue date
Jan 9, 2024
Ebara Corporation
Kenichi Kobayashi
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and system for treating substrate
Patent number
11,869,763
Issue date
Jan 9, 2024
Semes Co., Ltd.
Jun Keon Ahn
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Subnanometer-level light-based substrate cleaning mechanism
Patent number
11,830,726
Issue date
Nov 28, 2023
Planar Semiconductor Corporation Pte. Ltd.
Rubinder S. Randhawa
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method and substrate cleaning apparatus
Patent number
11,817,311
Issue date
Nov 14, 2023
Ebara Corporation
Tomoatsu Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning equipment, substrate treatment system including...
Patent number
11,791,173
Issue date
Oct 17, 2023
Samsung Electronics Co., Ltd.
Seung Hoon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
11,764,055
Issue date
Sep 19, 2023
SCREEN Holdings Co., Ltd.
Nobuyuki Shibayama
B08 - CLEANING
Information
Patent Grant
Treating a silicon on insulator wafer in preparation for manufactur...
Patent number
11,749,558
Issue date
Sep 5, 2023
QUANTUM SILICON INC.
Bruno Vieira Da Cunha Martins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry cleaning apparatus and dry cleaning method
Patent number
11,742,221
Issue date
Aug 29, 2023
Samsung Electronics Co., Ltd.
Seung-Min Shin
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer cleaning system and method
Patent number
11,742,227
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Shu Tseng
B08 - CLEANING
Information
Patent Grant
Brush cleaning apparatus, chemical-mechanical polishing (CMP) syste...
Patent number
11,694,909
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Sheng Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid material post-CMP brushes and methods for forming the same
Patent number
11,684,144
Issue date
Jun 27, 2023
Illinois Tool Works Inc.
Bradley Scott Withers
B08 - CLEANING
Information
Patent Grant
Metal-compound-removing solvent and method in lithography
Patent number
11,681,226
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning device, substrate processing apparatus, substrat...
Patent number
11,676,811
Issue date
Jun 13, 2023
SCREEN Holdings Co., Ltd.
Koji Nishiyama
B08 - CLEANING
Information
Patent Grant
Device and method for cleaning a printing device
Patent number
11,575,064
Issue date
Feb 7, 2023
Applied Materials Italia S.R.L.
Davide Colla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a display apparatus
Patent number
11,569,087
Issue date
Jan 31, 2023
Samsung Display Co., Ltd.
Horyun Chung
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Substrate support with edge seal
Patent number
11,508,610
Issue date
Nov 22, 2022
Applied Materials, Inc.
Chang Ke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Optimal exposure of a bottom surface of a substrate material and/or...
Patent number
11,495,451
Issue date
Nov 8, 2022
Thanh Truong
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus, and substrate processing method
Patent number
11,469,117
Issue date
Oct 11, 2022
SCREEN Holdings Co. Ltd.
Yasunori Kanematsu
B08 - CLEANING
Information
Patent Grant
Dual side de-bonding in component carriers using photoablation
Patent number
11,462,432
Issue date
Oct 4, 2022
Intel Corporation
Frank Truong
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Method for cleaning semiconductor wafer backside surface by hybrid...
Patent number
11,417,512
Issue date
Aug 16, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Hsuan-Ying Mai
B08 - CLEANING
Information
Patent Grant
Treatment liquid for semiconductor wafers, which contains hypochlor...
Patent number
11,390,829
Issue date
Jul 19, 2022
Tokuyama Corporation
Takafumi Shimoda
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Substrate warehouse, substrate processing system, and substrate ins...
Patent number
11,387,129
Issue date
Jul 12, 2022
Tokyo Electron Limited
Takuya Mori
B08 - CLEANING
Information
Patent Grant
Method of manufacturing a silicon carbide device and wafer composit...
Patent number
11,373,863
Issue date
Jun 28, 2022
Infineon Technologies AG
Roland Rupp
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Cleaning apparatus of cleaning tool, substrate processing apparatus...
Patent number
11,367,629
Issue date
Jun 21, 2022
Ebara Corporation
Hideaki Tanaka
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,342,190
Issue date
May 24, 2022
SCREEN Holdings Co., Ltd.
Tomonori Fujiwara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of producing a component of a device, and the resulting comp...
Patent number
11,335,551
Issue date
May 17, 2022
3M Innovative Properties Company
William R. Dudley
B08 - CLEANING
Information
Patent Grant
Substrate processing method
Patent number
11,264,236
Issue date
Mar 1, 2022
Tokyo Electron Limited
Toru Hisamatsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Laminates for Cleaning Substrate Surfaces and Methods of Use Thereof
Publication number
20240110084
Publication date
Apr 4, 2024
3M Innovative Properties Company
Uma Rames Krishna Lagudu
B08 - CLEANING
Information
Patent Application
BRUSHES, SYSTEMS, AND METHODS FOR DISPENSING MULTIPLE FLUIDS DURING...
Publication number
20240112925
Publication date
Apr 4, 2024
Illinois Tool Works Inc.
Bradley Scott Withers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NO-LEAD INTEGRATED CIRCUIT HAVING AN ABLATED MOLD COMPOUND AND EXTR...
Publication number
20240105557
Publication date
Mar 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Laura May Antoinette Clemente
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING APPARATUS
Publication number
20240091899
Publication date
Mar 21, 2024
EBARA CORPORATION
Kenichi KOBAYASHI
B24 - GRINDING POLISHING
Information
Patent Application
METHODS OF SEPARATING SEMICONDUCTOR DIES
Publication number
20240071828
Publication date
Feb 29, 2024
TEXAS INSTRUMENTS INCORPORATED
Michael Todd Wyant
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL WAFER CLEANING METHOD
Publication number
20230411143
Publication date
Dec 21, 2023
Shin-Etsu Handotai Co., Ltd.
Norimichi TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT REMOVAL DEVICE, DEFECT REMOVAL METHOD, PATTERN FORMING METHO...
Publication number
20230395366
Publication date
Dec 7, 2023
FUJIFILM CORPORATION
Akihiko OHTSU
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MANUFACTURING WAFER HAVING FUNCTIONAL FILM
Publication number
20230369037
Publication date
Nov 16, 2023
NISSAN CHEMICAL CORPORATION
Tomoya OHASHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
WAFER CLEANING METHOD
Publication number
20230360938
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuo-Shu TSENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230326770
Publication date
Oct 12, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
Metal-Compound-Removing Solvent And Method In Lithography
Publication number
20230324806
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Co., LTD
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20230307259
Publication date
Sep 28, 2023
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING METHOD AND SUBSTRATE PROCESSING METHOD
Publication number
20230268174
Publication date
Aug 24, 2023
SCREEN Holdings Co., Ltd.
Koji NISHIYAMA
B08 - CLEANING
Information
Patent Application
Semiconductor Device and Method of Coating a Semiconductor Wafer wi...
Publication number
20220365436
Publication date
Nov 17, 2022
STATS ChipPAC Pte Ltd.
Giwoong Nam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR FABRICATING SYSTEM HAVIND HYBRID BURSH ASSEMBLY
Publication number
20220351957
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsuan-Ying MAI
B08 - CLEANING
Information
Patent Application
MACHINE LEARNING DEVICE, SUBSTRATE PROCESSING DEVICE, TRAINED MODEL...
Publication number
20220344164
Publication date
Oct 27, 2022
EBARA CORPORATION
Akira NAKAMURA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Treatment Liquid for Semiconductor Wafers, Which Contains Hypochlor...
Publication number
20220325205
Publication date
Oct 13, 2022
Tokuyama Corporation
Takafumi Shimoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION AND METHOD FOR TREATING SUBSTRATE
Publication number
20220282156
Publication date
Sep 8, 2022
FUJIFILM CORPORATION
Moe NARITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220189782
Publication date
Jun 16, 2022
SCREEN Holdings Co, Ltd.
Tomonori FUJIWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS SOLUTION FOR POLYMER PROCESSING
Publication number
20220189760
Publication date
Jun 16, 2022
DONGWOO FINE-CHEM CO., LTD.
Soon-Hong Pang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20220139699
Publication date
May 5, 2022
SCREEN Holdings Co., Ltd.
Hiroaki ISHII
B08 - CLEANING
Information
Patent Application
TREATING A SILICON ON INSULATOR WAFER IN PREPARATION FOR MANUFACTUR...
Publication number
20220102197
Publication date
Mar 31, 2022
Quantum Silicon Inc.
Bruno Vieira Da Cunha Martins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING CONTACT ELEMENTS AND SUPPORT HARDWAR...
Publication number
20220093394
Publication date
Mar 24, 2022
INTERNATIONAL TEST SOLUTIONS, LLC
Alan E. Humphrey
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
Publication number
20220037149
Publication date
Feb 3, 2022
SHIBAURA MECHATRONICS CORPORATION
Yuji NAGASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
Publication number
20220020610
Publication date
Jan 20, 2022
EBARA CORPORATION
Haiyang Xu
B08 - CLEANING
Information
Patent Application
DRY CLEANING APPARATUS AND DRY CLEANING METHOD
Publication number
20210343552
Publication date
Nov 4, 2021
Samsung Electronics Co., Ltd.
Seung-Min SHIN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM
Publication number
20210313173
Publication date
Oct 7, 2021
Planar Semiconductor Corporation Pte. Ltd.
Rubinder S. Randhawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
Publication number
20210296119
Publication date
Sep 23, 2021
TOKYO ELECTRON LIMITED
Hayato TANOUE
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR WAFER AND METHOD OF WAFER THINNING
Publication number
20210257208
Publication date
Aug 19, 2021
Semiconductor Components Industries, LLC
Michael J. SEDDON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR WAFER BACKSIDE SURFACE BY HYBRID...
Publication number
20210249253
Publication date
Aug 12, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsuan-Ying MAI
B08 - CLEANING