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PHYSICS
G03
Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
Current Industry
G03F7/70925
Cleaning
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Patents Grants
last 30 patents
Information
Patent Grant
Debris removal from high aspect structures
Patent number
11,964,310
Issue date
Apr 23, 2024
Bruker Nano, Inc.
Tod Evan Robinson
B08 - CLEANING
Information
Patent Grant
Lithography support cleaning with cleaning substrate having control...
Patent number
11,953,838
Issue date
Apr 9, 2024
ASML Holding N.V.
Keane Michael Levy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Highly efficient automatic particle cleaner method for EUV systems
Patent number
11,953,839
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yu Tu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Information
Patent Grant
Mask cleaning
Patent number
11,921,434
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Hao Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for removing a particle from a photolithograph...
Patent number
11,899,359
Issue date
Feb 13, 2024
Carl Zeiss SMT GmbH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for contact immersion lithography
Patent number
11,892,777
Issue date
Feb 6, 2024
Waymo LLC
Hongqin Shi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for removing a single particulate from a subst...
Patent number
11,886,126
Issue date
Jan 30, 2024
Carl Zeiss SMT GmbH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Solution treatment apparatus and cleaning method
Patent number
11,868,057
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kenta Shibasaki
B08 - CLEANING
Information
Patent Grant
Exposure machine and exposure method
Patent number
11,852,976
Issue date
Dec 26, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bin Zou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Polyimide profile control
Patent number
11,855,015
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Chi Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prolonging optical element lifetime in an EUV lithography system
Patent number
11,846,887
Issue date
Dec 19, 2023
ASML Netherlands B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for lithography process
Patent number
11,829,082
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Ying Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for removing residue of EUV light source vessel
Patent number
11,822,260
Issue date
Nov 21, 2023
Samsung Electronics Co., Ltd.
Jongbin Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Module vessel with scrubber gutters sized to prevent overflow
Patent number
11,815,821
Issue date
Nov 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Kai Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
Patent number
11,809,076
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Wu-Hung Ko
B08 - CLEANING
Information
Patent Grant
Method for removing a particle from a mask system
Patent number
11,774,870
Issue date
Oct 3, 2023
Carl Zeiss SMT GmbH
Sergey Oshemkov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for removing photoresist layer from alignment...
Patent number
11,747,742
Issue date
Sep 5, 2023
VisEra Technologies Company Limited
Yuan-Chun Chao
B08 - CLEANING
Information
Patent Grant
Mask cleaning
Patent number
11,740,563
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Hao Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Developing treatment method, computer storage medium and developing...
Patent number
11,720,026
Issue date
Aug 8, 2023
Tokyo Electron Limited
Akiko Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mitigating long-term energy decay of laser devices
Patent number
11,720,035
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Ping Yen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Collector mirror and apparatus for creating extreme ultraviolet lig...
Patent number
11,698,590
Issue date
Jul 11, 2023
Samsung Electronics Co., Ltd.
Hoseok Song
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Particle removing assembly and method of cleaning mask for lithography
Patent number
11,698,592
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Yang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for detecting debris in a photolithography system
Patent number
11,693,324
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Yu Tu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reduce mask defect impact by contamination decompose
Patent number
11,687,012
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Hung Liao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for cleaning an EUV mask
Patent number
11,681,235
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yen-Hui Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask for attracting charged particles and method for using the same
Patent number
11,681,234
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-An Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning method and apparatus for particles on reticle, storage...
Patent number
11,675,275
Issue date
Jun 13, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shuang Xia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography contamination control
Patent number
11,662,668
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chieh Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reticle cleaning device and method of use
Patent number
11,650,512
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Che-Chang Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
Publication number
20240094644
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Makoto OGATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING APPARATUS, CLEANING METHOD, IMPRINT APPARATUS, AND METHOD...
Publication number
20240091825
Publication date
Mar 21, 2024
Canon Kabushiki Kaisha
HIROYUKI MARUYAMA
B08 - CLEANING
Information
Patent Application
EXPOSURE APPARATUS AND DECONTAMINATION APPARATUS
Publication number
20240094646
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Katsunobu NISHIHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
Publication number
20240085812
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Kyuhee Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
Publication number
20240085813
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kenta SHIBASAKI
B08 - CLEANING
Information
Patent Application
METHOD AND APPARATUS FOR REMOVING A PARTICLE FROM A PHOTOLITHOGRAPH...
Publication number
20240077800
Publication date
Mar 7, 2024
Carl Zeiss SMT GMBH
Christof Baur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHARGE DISSIPATIVE RETICLE TABLE CLEANING RETICLE
Publication number
20240045346
Publication date
Feb 8, 2024
ASML NETHERLANDS B.V.
Pedro Julian RIZO DIAGO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS TOOL FOR DRY REMOVAL OF PHOTORESIST
Publication number
20240036483
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Dries DICTUS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPONENT FOR USE IN A LITHOGRAPHIC APPARATUS, METHOD OF PROTECTING...
Publication number
20240027925
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS
Publication number
20230418167
Publication date
Dec 28, 2023
Yun Xie
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
Publication number
20230400787
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE
Publication number
20230384695
Publication date
Nov 30, 2023
Entegris, Inc.
Lesa Lindgren
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW
Publication number
20230384697
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Kai CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POLYIMIDE PROFILE CONTROL
Publication number
20230387050
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Chi HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR REMOVING CONTAMINATION
Publication number
20230375952
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chih HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV WAFER DEFECT IMPROVEMENT AND METHOD OF COLLECTING NONCONDUCTIVE...
Publication number
20230375951
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Tao-Hsin CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF CLEANING A LITHOGRAPHY SYSTEM
Publication number
20230375949
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing company Ltd.
Cho-Ying LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD THEREOF
Publication number
20230367233
Publication date
Nov 16, 2023
SEMES CO., LTD.
Ick Kyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
Publication number
20230367206
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing company Ltd.
WU-HUNG KO
B08 - CLEANING
Information
Patent Application
FOREIGN PARTICLE REMOVING METHOD, FORMATION METHOD, ARTICLE MANUFAC...
Publication number
20230347390
Publication date
Nov 2, 2023
Canon Kabushiki Kaisha
Hisanobu Azuma
B08 - CLEANING
Information
Patent Application
PARTICLE REMOVING ASSEMBLY AND METHOD OF CLEANING MASK FOR LITHOGRAPHY
Publication number
20230314963
Publication date
Oct 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Yang LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PREPARING JOSEPHSON JUNCTION AND PRODUCTION LINE DEVICE
Publication number
20230320234
Publication date
Oct 5, 2023
TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
Kunliang BU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230309194
Publication date
Sep 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Chun YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEBRIS IN A PHOTOLITHOGRAPHY SYSTEM
Publication number
20230296992
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Yu TU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR MACHINE CLEANING SYSTEM AND SEMICONDUCTOR MACHINE CLE...
Publication number
20230286024
Publication date
Sep 14, 2023
WenHao HSU
B08 - CLEANING
Information
Patent Application
REDUCE MASK DEFECT IMPACT BY CONTAMINATION DECOMPOSE
Publication number
20230280665
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi-Hung LIAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK
Publication number
20230280666
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Hui LI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LITHOGRAPHY CONTAMINATION CONTROL
Publication number
20230273534
Publication date
Aug 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chieh HSIEH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
RETICLE CLEANING DEVICE AND METHOD OF USE
Publication number
20230266680
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Che-Chang HSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
Publication number
20230251581
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Jui HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY