Comb drives

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B81B2201/033

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/033Comb drives

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Compact line scan MEMS time of flight system with actuated lens
- Patent number 12,164,103
- Issue date Dec 10, 2024
- STMicroelectronics (Research &Develoment) Limited
- Christopher Townsend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-drive device used in micro electro mechanical system
- Patent number 12,151,933
- Issue date Nov 26, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical actuator on insulating substrate
- Patent number 12,030,771
- Issue date Jul 9, 2024
- MICROGLASS LLC
- John Wasserbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a dual hinge structure
- Patent number 12,007,555
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator element and MEMS actuator array with a plurality of M...
- Patent number 11,987,491
- Issue date May 21, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Peter Dürr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,927,741
- Issue date Mar 12, 2024
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar staggered comb drive for bidirectional MEMS actuation
- Patent number 11,909,332
- Issue date Feb 20, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a three-layer comb actuator structure and a two-la...
- Patent number 11,892,619
- Issue date Feb 6, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modeling the emission intensity of an IR emitter by varying the emi...
- Patent number 11,879,784
- Issue date Jan 23, 2024
- Hahn-Schickard-Gesellschaft fur Angewandte Forschung e.V.
- Alfons Dehé
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly with asymmetric structure
- Patent number 11,822,069
- Issue date Nov 21, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,740,452
- Issue date Aug 29, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,680
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices comprising spring element and comb drive and associate...
- Patent number 11,703,681
- Issue date Jul 18, 2023
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb drive for microelectromechanical system
- Patent number 11,677,337
- Issue date Jun 13, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Anup Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for closed loop operation of capacitive accelerometers
- Patent number 11,662,361
- Issue date May 30, 2023
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system package having movable platform
- Patent number 11,643,325
- Issue date May 9, 2023
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,635,613
- Issue date Apr 25, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems micromirrors and micromirror arrays
- Patent number 11,567,312
- Issue date Jan 31, 2023
- PRECISELEY MICROTECHNOLOGY CORP.
- Tiansheng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...
- Patent number 11,566,898
- Issue date Jan 31, 2023
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly with asymmetric structure
- Patent number 11,543,651
- Issue date Jan 3, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback actuator for a MEMS transducer
- Patent number 11,516,597
- Issue date Nov 29, 2022
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 11,465,901
- Issue date Oct 11, 2022
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Device and Method for Adapting Measuring Range and Sensitivity of M...
- Publication number 20240400379
- Publication date Dec 5, 2024
- RUHR-UNIVERSITÄT BOCHUM
- Philip SCHMITT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
- Publication number 20240250620
- Publication date Jul 25, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System for Moving a Mechanical Part in Two O...
- Publication number 20240243672
- Publication date Jul 18, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Element and Vibration-Driven Energy Harvesting Device
- Publication number 20240083740
- Publication date Mar 14, 2024
- Saginomiya Seisakusho, Inc.
- Hisayuki Ashizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC MEMS MICROMIRROR
- Publication number 20240019687
- Publication date Jan 18, 2024
- Huawei Technologies Co., Ltd
- Xiaoshi Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...
- Publication number 20230358975
- Publication date Nov 9, 2023
- NIHARIKA KOHLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...
- Publication number 20230253895
- Publication date Aug 10, 2023
- STMicroelectronics S.r.l.
- Andrea OPRENI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Spacer Assembly
- Publication number 20230192474
- Publication date Jun 22, 2023
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20230126293
- Publication date Apr 27, 2023
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE
- Publication number 20230122065
- Publication date Apr 20, 2023
- MICROGLASS LLC
- John WASSERBAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY WITH ASYMMETRIC STRUCTURE
- Publication number 20230106000
- Publication date Apr 6, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS FOR HIGHLY EFFICIENT INTERACTION WITH A VOLUME FLOW
- Publication number 20230091340
- Publication date Mar 23, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Anton MELNIKOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB DRIVE FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20230047220
- Publication date Feb 16, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Anup Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM
- Publication number 20230002214
- Publication date Jan 5, 2023
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVE DEVICE USED IN MICRO ELECTRO MECHANICAL SYSTEM
- Publication number 20220298004
- Publication date Sep 22, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20220194783
- Publication date Jun 23, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT LINE SCAN MEMS TIME OF FLIGHT SYSTEM WITH ACTUATED LENS
- Publication number 20220187591
- Publication date Jun 16, 2022
- STMicroelectronics (Research and Development) Limited
- Christopher TOWNSEND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
- Publication number 20220171341
- Publication date Jun 2, 2022
- TIMEX GROUP USA, INC.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3-AXIS ANGULAR ACCELEROMETER
- Publication number 20220155336
- Publication date May 19, 2022
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF MEMS ACTU...
- Publication number 20220127136
- Publication date Apr 28, 2022
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Peter DÜRR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR ELEMENT AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF M...
- Publication number 20220119243
- Publication date Apr 21, 2022
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Peter DÜRR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE
- Publication number 20220002143
- Publication date Jan 6, 2022
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...
- Publication number 20210396518
- Publication date Dec 23, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH A DUAL HINGE STRUCTURE
- Publication number 20210396993
- Publication date Dec 23, 2021
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME
- Publication number 20210387851
- Publication date Dec 16, 2021
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Christian DRABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Comb drives

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Compact line scan MEMS time of flight system with actuated lens

Comb-drive device used in micro electro mechanical system

3-axis angular accelerometer

Micromechanical structure, micromechanical system and method of pro...

MEMS actuator package architecture

Micromechanical structure and method of providing the same

MEMS comprising a movable structural element, and MEMS array

Microelectromechanical actuator on insulating substrate

MEMS device with a dual hinge structure

Self-aligned vertical comb drive assembly

Dual micro-electro mechanical system and manufacturing method thereof

MEMS actuator element and MEMS actuator array with a plurality of M...

Micro-electro-mechanical systems micromirrors and micromirror arrays

Bipolar staggered comb drive for bidirectional MEMS actuation

MEMS device with a three-layer comb actuator structure and a two-la...

Modeling the emission intensity of an IR emitter by varying the emi...

Micromachined mirror assembly with asymmetric structure

Optical device

Cellular array electrostatic actuator

Optical device

MEMS devices comprising spring element and comb drive and associate...

Comb drive for microelectromechanical system

Methods for closed loop operation of capacitive accelerometers

Micro-electromechanical system package having movable platform

Optical device

Micro-electro-mechanical systems micromirrors and micromirror arrays

Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...

Micromachined mirror assembly with asymmetric structure

Force feedback actuator for a MEMS transducer

Sensor package having a movable sensor

Patents Applicationslast 30 patents

Device and Method for Adapting Measuring Range and Sensitivity of M...

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Electromechanical Microsystem for Moving a Mechanical Part in Two O...

Microelectromechanical System for Moving a Mechanical Part in Two O...

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

MEMS Element and Vibration-Driven Energy Harvesting Device

ELECTROSTATIC MEMS MICROMIRROR

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...

A SCANNING MEMS MIRROR DEVICE

LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...

MEMS Spacer Assembly

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE

MICROMACHINED MIRROR ASSEMBLY WITH ASYMMETRIC STRUCTURE

MEMS FOR HIGHLY EFFICIENT INTERACTION WITH A VOLUME FLOW

COMB DRIVE FOR MICROELECTROMECHANICAL SYSTEM

MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM

COMB-DRIVE DEVICE USED IN MICRO ELECTRO MECHANICAL SYSTEM

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

COMPACT LINE SCAN MEMS TIME OF FLIGHT SYSTEM WITH ACTUATED LENS

BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM

3-AXIS ANGULAR ACCELEROMETER

MEMS ACTUATOR AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF MEMS ACTU...

MEMS ACTUATOR ELEMENT AND MEMS ACTUATOR ARRAY WITH A PLURALITY OF M...

MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE

COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...

MEMS DEVICE WITH A DUAL HINGE STRUCTURE

MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME