comprising a chamber adapted to a particular process

Industry

CPC
H01L21/67207

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67207comprising a chamber adapted to a particular process

Industries

Patents Grantslast 30 patents

Information Patent Grant
Cluster tools, systems, and methods having one or more pressure sta...
- Patent number 11,965,241
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Saurabh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatments to enhance material structures
- Patent number 11,961,734
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,961,746
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Sho Kumakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolated volume seals and method of forming an isolated volume with...
- Patent number 11,955,355
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-operation tool for photovoltaic cell processing
- Patent number 11,955,577
- Issue date Apr 9, 2024
- Maxeon Solar Pte. Ltd.
- Nathan Phillips Beckett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatments to enhance material structures
- Patent number 11,955,332
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reverse selective etch stop layer
- Patent number 11,955,382
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kevin Kashefi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for forming dual metal interconnects
- Patent number 11,948,885
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Suketu A Parikh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 11,915,951
- Issue date Feb 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 11,854,840
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Yuji Takimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
- Patent number 11,848,204
- Issue date Dec 19, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser-assisted metal-organic chemical vapor deposition devices and...
- Patent number 11,846,024
- Issue date Dec 19, 2023
- OHIO STATE INNOVATION FOUNDATION
- Hongping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus, and method of manufacturing...
- Patent number 11,823,924
- Issue date Nov 21, 2023
- Kioxia Corporation
- Aoi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,823,928
- Issue date Nov 21, 2023
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Miniaturized semiconductor manufacturing system
- Patent number 11,817,333
- Issue date Nov 14, 2023
- Syskey Technology Co., Ltd.
- Hsueh-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step pre-clean for selective metal gap fill
- Patent number 11,776,806
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing tool with integrated metrology and method of u...
- Patent number 11,769,677
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Kandabara Tapily
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus for in-situ deposition of film stacks
- Patent number 11,746,420
- Issue date Sep 5, 2023
- Novellus Systems, Inc.
- Pramod Subramonium
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preparing self-assembled monolayers
- Patent number 11,749,523
- Issue date Sep 5, 2023
- ASM IP Holding B.V.
- Elina Färm
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
- Patent number 11,735,420
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Chang Ke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated cluster tool for selective area deposition
- Patent number 11,725,274
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Tobin Kaufman-Osborn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Designer atomic layer etching
- Patent number 11,721,558
- Issue date Aug 8, 2023
- Lam Research Corporation
- Keren Jacobs Kanarik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hyperbaric clean method and apparatus for cleaning semiconductor ch...
- Patent number 11,710,647
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Richard Wells Plavidal
- B08 - CLEANING
Information Patent Grant
Methods, systems, and apparatus for processing substrates using one...
- Patent number 11,694,902
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Krishna Nittala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming apparatus, film-forming system, and film-forming method
- Patent number 11,664,207
- Issue date May 30, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bonding apparatus, bonding system, bonding method, and recording me...
- Patent number 11,658,146
- Issue date May 23, 2023
- Tokyo Electron Limited
- Takashi Nakamitsu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20240145272
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...
- Publication number 20240136207
- Publication date Apr 25, 2024
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
- Publication number 20240136211
- Publication date Apr 25, 2024
- Pragmatic Printing Ltd.
- Richard David PRICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM TREATMENT APPARATUS AND METHODS FOR MANUFACTURING VACUUM TRE...
- Publication number 20240128099
- Publication date Apr 18, 2024
- Evatec AG
- Marco STUPAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL
- Publication number 20240096664
- Publication date Mar 21, 2024
- Ruiping WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR FORMING MANDRELS AND SPACERS, RELATED STRUCTURES, AND S...
- Publication number 20240087893
- Publication date Mar 14, 2024
- ASM IP HOLDING, B.V.
- Daniele Piumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
- Publication number 20240071754
- Publication date Feb 29, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Stephen E. Savas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT METHODS FOR SILICON NANOSHEET SURFACES
- Publication number 20240055265
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Pradeep SAMPATH KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20240055285
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHODS AND CLUSTER TOOLS FOR FORMING SEMICONDUCTOR DEVICES
- Publication number 20240038553
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Benjamin Colombeau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
- Publication number 20240030021
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Yohei YAMASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER LINER FOR SEMICONDUCTOR PROCESSING
- Publication number 20240006203
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chien-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Warm Wafer After Ion Cryo-Implantation
- Publication number 20230377913
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
- Publication number 20230366094
- Publication date Nov 16, 2023
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...
- Publication number 20230317463
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Krishna NITTALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING TASK START METHOD AND DEVICE IN SEMICONDUCTOR PROCESSING...
- Publication number 20230307272
- Publication date Sep 28, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Fangna WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...
- Publication number 20230253222
- Publication date Aug 10, 2023
- Kokusai Electric Corporation
- Kenta Kasamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230238244
- Publication date Jul 27, 2023
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230207355
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Kun Hee PARK
- B08 - CLEANING
Information Patent Application
WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH
- Publication number 20230207393
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Wei-Sheng Lei
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Etching
- Publication number 20230197457
- Publication date Jun 22, 2023
- SPTS TECHNOLOGIES LIMITED
- ALEX WOOD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMU...
- Publication number 20230185255
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Jeong Jin Hong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230170247
- Publication date Jun 1, 2023
- WONIK IPS CO., LTD.
- Kwang Ha CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEVEL ETCHER USING ATMOSPHERIC PLASMA
- Publication number 20230129291
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHAMBER COMPONENTS WITH HIGH-PERFORMANCE COATING
- Publication number 20230093478
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Laksheswar Kalita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING OF MOLYBDENUM
- Publication number 20230093011
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Andreas Fischer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...
- Publication number 20230075715
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Saurabh CHOPRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

comprising a chamber adapted to a particular process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cluster tools, systems, and methods having one or more pressure sta...

Treatments to enhance material structures

Substrate processing method and substrate processing apparatus

Isolated volume seals and method of forming an isolated volume with...

Multi-operation tool for photovoltaic cell processing

Treatments to enhance material structures

Reverse selective etch stop layer

Methods and apparatus for forming dual metal interconnects

Modular mainframe layout for supporting multiple semiconductor proc...

Plasma processing method

Multi-chamber substrate processing platform

Substrate processing system and substrate processing method

Substrate processing apparatus and substrate processing method

Enhanced ignition in inductively coupled plasmas for workpiece proc...

Laser-assisted metal-organic chemical vapor deposition devices and...

Semiconductor manufacturing apparatus, and method of manufacturing...

Control of wafer bow in multiple stations

Miniaturized semiconductor manufacturing system

Substrate transfer mechanism to reduce back-side substrate contact

Multi-step pre-clean for selective metal gap fill

Substrate processing tool with integrated metrology and method of u...

PECVD apparatus for in-situ deposition of film stacks

Methods for preparing self-assembled monolayers

Wafer treatment for achieving defect-free self-assembled monolayers

Integrated cluster tool for selective area deposition

Designer atomic layer etching

Hyperbaric clean method and apparatus for cleaning semiconductor ch...

Methods, systems, and apparatus for processing substrates using one...

Film-forming apparatus, film-forming system, and film-forming method

Bonding apparatus, bonding system, bonding method, and recording me...

Patents Applicationslast 30 patents

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

HEAT SOURCE ARRANGEMENTS, PROCESSING CHAMBERS, AND RELATED METHODS...

SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS

VACUUM TREATMENT APPARATUS AND METHODS FOR MANUFACTURING VACUUM TRE...

ON-BOARD CLEANING OF TOOLING PARTS IN HYBRID BONDING TOOL

METHODS FOR FORMING MANDRELS AND SPACERS, RELATED STRUCTURES, AND S...

Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...

TREATMENT METHODS FOR SILICON NANOSHEET SURFACES

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

PROCESSING METHODS AND CLUSTER TOOLS FOR FORMING SEMICONDUCTOR DEVICES

LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

CHAMBER LINER FOR SEMICONDUCTOR PROCESSING

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

Warm Wafer After Ion Cryo-Implantation

PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS

METHODS, SYSTEMS, AND APPARATUS FOR PROCESSING SUBSTRATES USING ONE...

PROCESSING TASK START METHOD AND DEVICE IN SEMICONDUCTOR PROCESSING...

GAS SUPPLIER, PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEM...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

WAFER DICING USING FEMTOSECOND-BASED LASER AND PLASMA ETCH

Plasma Etching

POST PREVENTATIVE MAINTENANCE CHAMBER CONDITION MONITORING AND SIMU...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SUBSTRATE PROCESSING APPARATUS

BEVEL ETCHER USING ATMOSPHERIC PLASMA

SEMICONDUCTOR CHAMBER COMPONENTS WITH HIGH-PERFORMANCE COATING

ATOMIC LAYER ETCHING OF MOLYBDENUM

CLUSTER TOOLS, SYSTEMS, AND METHODS HAVING ONE OR MORE PRESSURE STA...