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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0271
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Patents Grants
last 30 patents
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Patent Grant
Production method of template, template blank, and template substra...
Patent number
12,169,358
Issue date
Dec 17, 2024
Dai Nippon Printing Co., Ltd.
Takaharu Nagai
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Chemical amplification methods and techniques for developable botto...
Patent number
12,165,870
Issue date
Dec 10, 2024
Tokyo Electron Limited
Steven Scheer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-assembled monolayer deposition from low vapor pressure organic...
Patent number
12,142,467
Issue date
Nov 12, 2024
Applied Materials, Inc.
Qiwei Liang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Formation of antireflective surfaces
Patent number
12,122,668
Issue date
Oct 22, 2024
Brookhaven Science Associates, LLC
Charles T. Black
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing of imprint mold-forming substrate
Patent number
12,109,734
Issue date
Oct 8, 2024
Shin-Etsu Chemical Co., Ltd.
Hiroyuki Yamazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint apparatuses and article manufacturing methods applying visc...
Patent number
12,099,295
Issue date
Sep 24, 2024
Canon Kabushiki Kaisha
Hiroyuki Koide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composition for forming underlayer film for imprinting, method for...
Patent number
12,091,497
Issue date
Sep 17, 2024
FUJIFILM Corporation
Yuichiro Goto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Template, method of forming a template, apparatus and method of man...
Patent number
12,085,852
Issue date
Sep 10, 2024
Canon Kabushiki Kaisha
Amir Tavakkoli Kermani Ghariehali
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pressure sensor manifold with increased photocurable resistance
Patent number
12,085,851
Issue date
Sep 10, 2024
Canon Kabushiki Kaisha
John D. Williamson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist developer and method of developing photoresist
Patent number
12,074,025
Issue date
Aug 27, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ming-Hui Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
Patent number
12,051,589
Issue date
Jul 30, 2024
Lam Research Corporation
David Charles Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming apparatus, forming method, and article manufacturing method
Patent number
12,044,962
Issue date
Jul 23, 2024
Canon Kabushiki Kaisha
Satoshi Iwatani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Photosensitive material and method of lithography
Patent number
12,019,375
Issue date
Jun 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Random copolymer and pinning composition comprising the same
Patent number
12,006,384
Issue date
Jun 11, 2024
LG Chem, Ltd.
Se Jin Ku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for spin processing
Patent number
12,007,689
Issue date
Jun 11, 2024
Tokyo Electron Limited
Mirko Vukovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of forming the same
Patent number
11,973,149
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Hsing Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photocurable composition, method for producing concave-convex struc...
Patent number
11,958,971
Issue date
Apr 16, 2024
Mitsui Chemicals, Inc.
Takashi Oda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of manufacturing template and method of forming pattern
Patent number
11,931,923
Issue date
Mar 19, 2024
Kioxia Corporation
Takeharu Motokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Bismaleimide compound, composition containing same, polybenzoxazole...
Patent number
11,905,356
Issue date
Feb 20, 2024
Nippon Kayaku Kabushiki Kaisha
Naoki Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprinting method and imprinting apparatus
Patent number
11,899,360
Issue date
Feb 13, 2024
Kioxia Corporation
Masaki Mitsuyasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Storage container storing treatment liquid for manufacturing semico...
Patent number
11,892,775
Issue date
Feb 6, 2024
FUJIFILM Corporation
Tetsuya Shimizu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,879,067
Issue date
Jan 23, 2024
Tokyo Electron Limited
Takashi Fuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices having dipole-inducing elements
Patent number
11,855,098
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Yen Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Topcoat compositions and photolithographic methods
Patent number
11,846,885
Issue date
Dec 19, 2023
Rohm and Haas Electronic Materials, LLC
Cong Liu
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Metal-Insulator-Metal structure
Patent number
11,842,959
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yuan-Yang Hsiao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Imprint device, imprint method, and semiconductor device manufactur...
Patent number
11,835,854
Issue date
Dec 5, 2023
Kioxia Corporation
Kasumi Okabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprint method, and method of manufacturing semi...
Patent number
11,837,469
Issue date
Dec 5, 2023
Kioxia Corporation
Kazuya Fukuhara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Compound, polymer, pattern forming material, and manufacturing meth...
Patent number
11,820,840
Issue date
Nov 21, 2023
Kioxia Corporation
Norikatsu Sasao
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND SYSTEMS FOR TOPOGRAPHY-SELECTIVE DEPOSITIONS
Publication number
20250014908
Publication date
Jan 9, 2025
ASM IP HOLDING, B.V.
Timothee Blanquart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINGLE-MASK STACK ETCHING METHODS FOR FORMING STAIRCASE STRUCTURES
Publication number
20250006506
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Julien LADROUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF MANUFACTURING DEPOSITION MASK
Publication number
20250008831
Publication date
Jan 2, 2025
SAMSUNG DISPLAY CO., LTD.
Kyongho Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SOLUTION FOR SEMICONDUCTOR DEVICE, METHOD FOR PROCESSING...
Publication number
20240417648
Publication date
Dec 19, 2024
Tokyo Ohka Kogyo Co., Ltd.
Kenta Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR REMOVING EDGE BEADS FROM METAL CONTAINING RESISTS,...
Publication number
20240385522
Publication date
Nov 21, 2024
Samsung SDI Co., Ltd.
Taeksoo KWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
Publication number
20240377747
Publication date
Nov 14, 2024
Samsung SDI Co., Ltd.
Seil CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST
Publication number
20240371638
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYERS VIA SPIN-COATING METHOD FOR USE...
Publication number
20240368410
Publication date
Nov 7, 2024
Merck Patent GmbH
Sachin BOBADE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240355637
Publication date
Oct 24, 2024
Samsung Electronics Co., Ltd.
John Soo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20240345478
Publication date
Oct 17, 2024
Samsung SDI Co., Ltd.
Soobin LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
Publication number
20240343938
Publication date
Oct 17, 2024
Samsung SDI Co., Ltd.
Sunghwan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING APPARATUS, FORMING METHOD, AND ARTICLE MANUFACTURING METHOD
Publication number
20240337923
Publication date
Oct 10, 2024
Canon Kabushiki Kaisha
Satoshi Iwatani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
Publication number
20240309238
Publication date
Sep 19, 2024
Samsung SDI Co., Ltd.
Yunju Chae
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20240234592
Publication date
Jul 11, 2024
Taiwan Semiconductor Manufacturing company Ltd.
YU-HSING CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ETCHING METHODS AND ETCHING ASSEMBLIES
Publication number
20240213033
Publication date
Jun 27, 2024
ASM IP HOLDING B.V.
YongGyu Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-PITCH PATTERNING THROUGH ONE-STEP FLOW
Publication number
20240194672
Publication date
Jun 13, 2024
Intel Corporation
Bharath Bangalore Rajeeva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR TUNING PHOTORESIST ADHESION LAYER PROPERTIES
Publication number
20240170282
Publication date
May 23, 2024
ASM IP HOLDING B.V.
Jerome Samuel Nicolas
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTOMASK STRUCTURE, SEMICONDUCTOR STRUCTURE AND MANUFACTURING METH...
Publication number
20240162038
Publication date
May 16, 2024
United Microelectronics Corp.
Chien Heng Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE AND COMPOSITION
Publication number
20240153768
Publication date
May 9, 2024
JSR Corporation
Hiroki NAKATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Profile Control for Semiconductor Manufacturing
Publication number
20240153770
Publication date
May 9, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20240134273
Publication date
Apr 25, 2024
Samsung SDI Co., Ltd.
Kyungsoo MOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
Publication number
20240111217
Publication date
Apr 4, 2024
Arkema France
Xavier Chevalier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID FOR MANUFACTURING SEMICONDUCTOR, PATTERN FORMING M...
Publication number
20240103374
Publication date
Mar 28, 2024
FUJIFILM CORPORATION
Tetsuya SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20240030031
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOUND, POLYMER, PATTERN FORMING MATERIAL, PATTERN FORMING METHOD...
Publication number
20240004298
Publication date
Jan 4, 2024
KIOXIA Corporation
Norikatsu SASAO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PATTERN FORMING METHOD, TEMPLATE MANUFACTURING METHOD, AND SEMICOND...
Publication number
20230420291
Publication date
Dec 28, 2023
KIOXIA Corporation
Masatoshi TERAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES INCLUDING A REPEATIN...
Publication number
20230411157
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Seungkyo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20230384667
Publication date
Nov 30, 2023
Samsung SDI Co., Ltd.
Seol Hee LIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER
Publication number
20230386833
Publication date
Nov 30, 2023
Applied Materials, Inc.
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR DIRECTED SELF-ASSEMBLY WITH HIGH BOILING POIN...
Publication number
20230377883
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Ling CHANG CHIEN
H01 - BASIC ELECTRIC ELEMENTS