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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0271
comprising organic layers
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last 30 patents
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Patent Grant
Photocurable composition, method for producing concave-convex struc...
Patent number
11,958,971
Issue date
Apr 16, 2024
Mitsui Chemicals, Inc.
Takashi Oda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing template and method of forming pattern
Patent number
11,931,923
Issue date
Mar 19, 2024
Kioxia Corporation
Takeharu Motokawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bismaleimide compound, composition containing same, polybenzoxazole...
Patent number
11,905,356
Issue date
Feb 20, 2024
Nippon Kayaku Kabushiki Kaisha
Naoki Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprinting method and imprinting apparatus
Patent number
11,899,360
Issue date
Feb 13, 2024
Kioxia Corporation
Masaki Mitsuyasu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Storage container storing treatment liquid for manufacturing semico...
Patent number
11,892,775
Issue date
Feb 6, 2024
FUJIFILM Corporation
Tetsuya Shimizu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,879,067
Issue date
Jan 23, 2024
Tokyo Electron Limited
Takashi Fuse
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices having dipole-inducing elements
Patent number
11,855,098
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Yen Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Topcoat compositions and photolithographic methods
Patent number
11,846,885
Issue date
Dec 19, 2023
Rohm and Haas Electronic Materials, LLC
Cong Liu
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Metal-Insulator-Metal structure
Patent number
11,842,959
Issue date
Dec 12, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yuan-Yang Hsiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Imprint device, imprint method, and semiconductor device manufactur...
Patent number
11,835,854
Issue date
Dec 5, 2023
Kioxia Corporation
Kasumi Okabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Imprint apparatus, imprint method, and method of manufacturing semi...
Patent number
11,837,469
Issue date
Dec 5, 2023
Kioxia Corporation
Kazuya Fukuhara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Compound, polymer, pattern forming material, and manufacturing meth...
Patent number
11,820,840
Issue date
Nov 21, 2023
Kioxia Corporation
Norikatsu Sasao
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
Patent number
11,822,234
Issue date
Nov 21, 2023
Canon Kabushiki Kaisha
Shinichi Shudo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method for solvent vapour annealing of a block copolymer
Patent number
11,823,902
Issue date
Nov 21, 2023
Nokia Technologies Oy
Ross Lundy
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
High-silicon-content wet-removable planarizing layer
Patent number
11,817,317
Issue date
Nov 14, 2023
Brewer Science, Inc.
Ming Luo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Compound, polymer, pattern forming material, pattern forming method...
Patent number
11,796,915
Issue date
Oct 24, 2023
Kioxia Corporation
Norikatsu Sasao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organic light emitting diode display and method for manufacturing t...
Patent number
11,793,028
Issue date
Oct 17, 2023
Samsung Display Co., Ltd.
Jin-Kwang Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,789,365
Issue date
Oct 17, 2023
Kioxia Corporation
Ryu Komatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide thin film spacers in semiconductor device manufacturing
Patent number
11,784,047
Issue date
Oct 10, 2023
Lam Research Corporation
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Template, method for producing template, and method for producing s...
Patent number
11,769,667
Issue date
Sep 26, 2023
Kioxia Corporation
Takeshi Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of patterning a semiconductor device
Patent number
11,762,296
Issue date
Sep 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren Zi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Surface inspection apparatus, processing system, and method of manu...
Patent number
11,749,546
Issue date
Sep 5, 2023
Canon Kabushiki Kaisha
Kohei Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer treatment for achieving defect-free self-assembled monolayers
Patent number
11,735,420
Issue date
Aug 22, 2023
Applied Materials, Inc.
Chang Ke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment method
Patent number
11,728,176
Issue date
Aug 15, 2023
Tokyo Electron Limited
Kiyohito Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Priming material for substrate coating
Patent number
11,708,495
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chen-Yu Liu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Method and composition for selectively modifying base material surface
Patent number
11,705,331
Issue date
Jul 18, 2023
JSR Corporation
Hiroyuki Komatsu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Treatment liquid for manufacturing semiconductor, storage container...
Patent number
11,693,321
Issue date
Jul 4, 2023
FUJIFILM Corporation
Tetsuya Shimizu
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Photoresist developer and method of developing photoresist
Patent number
11,694,896
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Hui Weng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20240134273
Publication date
Apr 25, 2024
Samsung SDI Co., Ltd.
Kyungsoo MOON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
Publication number
20240111217
Publication date
Apr 4, 2024
Arkema France
Xavier Chevalier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT LIQUID FOR MANUFACTURING SEMICONDUCTOR, PATTERN FORMING M...
Publication number
20240103374
Publication date
Mar 28, 2024
FUJIFILM CORPORATION
Tetsuya SHIMIZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20240030031
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
David Charles Smith
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOUND, POLYMER, PATTERN FORMING MATERIAL, PATTERN FORMING METHOD...
Publication number
20240004298
Publication date
Jan 4, 2024
KIOXIA Corporation
Norikatsu SASAO
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PATTERN FORMING METHOD, TEMPLATE MANUFACTURING METHOD, AND SEMICOND...
Publication number
20230420291
Publication date
Dec 28, 2023
KIOXIA Corporation
Masatoshi TERAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES INCLUDING A REPEATIN...
Publication number
20230411157
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Seungkyo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PHOTORESIST COMPOSITION AND METHOD OF FORMING PATTERN...
Publication number
20230384667
Publication date
Nov 30, 2023
Samsung SDI Co., Ltd.
Seol Hee LIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER
Publication number
20230386833
Publication date
Nov 30, 2023
Applied Materials, Inc.
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR DIRECTED SELF-ASSEMBLY WITH HIGH BOILING POIN...
Publication number
20230377883
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Ling CHANG CHIEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE AND METHOD OF MANUFACTURING SEMI...
Publication number
20230326753
Publication date
Oct 12, 2023
KIOXIA Corporation
Satoshi NAGAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD,...
Publication number
20230298888
Publication date
Sep 21, 2023
KIOXIA Corporation
Satoshi MITSUGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230290858
Publication date
Sep 14, 2023
Sumitomo Electric Industries, Ltd.
Yukihiro TSUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST
Publication number
20230282477
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ETCHING GAS MIXTURE AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT...
Publication number
20230274943
Publication date
Aug 31, 2023
Samsung Electronics Co., Ltd.
Changgil SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Photoresist and Method of Formation and Use
Publication number
20230251571
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Keng-Chu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING COMPOSITION FOR FORMING INTERLAYER FOR NANOIMP...
Publication number
20230250311
Publication date
Aug 10, 2023
FUJIFILM CORPORATION
Naoya SHIMOJU
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
TEMPLATE, METHOD OF FORMING A TEMPLATE, APPARATUS AND METHOD OF MAN...
Publication number
20230205080
Publication date
Jun 29, 2023
Canon Kabushiki Kaisha
Amir Tavakkoli Kermani Ghariehali
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
Publication number
20230187563
Publication date
Jun 15, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YU-HSING CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
Publication number
20230187219
Publication date
Jun 15, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Meng ZHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAM FORMULATIONS AND CLEANING TO PROMOTE QUICK DEPOSITIONS
Publication number
20230178370
Publication date
Jun 8, 2023
International Business Machines Corporation
Rudy J. Wojtecki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOUND FOR FORMING HARDMASK, HARDMASK COMPOSITION INCLUDING THE C...
Publication number
20230151159
Publication date
May 18, 2023
Samsung Electronics Co., Ltd.
Inoue NAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM-FORMING METHOD
Publication number
20230148162
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Shuji AZUMO
B82 - NANO-TECHNOLOGY
Information
Patent Application
Semiconductor Devices Having Dipole-Inducing Elements
Publication number
20230073400
Publication date
Mar 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Yen Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PATTERNED FEATURES
Publication number
20230054940
Publication date
Feb 23, 2023
ASM IP HOLDING, B.V.
Yoann Tomczak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION, METHOD OF FORMING RESIST UNDERLAYER FILM, AND METHOD O...
Publication number
20230041656
Publication date
Feb 9, 2023
JSR Corporation
Yugaku TAKAGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLOCK COPOLYMER SELF-ALIGNMENT ON ISOLATED CHEMICAL STRIPES
Publication number
20230036175
Publication date
Feb 2, 2023
Wisconsin Alumni Research Foundation
Michael Arnold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230018151
Publication date
Jan 19, 2023
TOKYO ELECTRON LIMITED
Shinya ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Spin Processing
Publication number
20230004088
Publication date
Jan 5, 2023
TOKYO ELECTRON LIMITED
Mirko Vukovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
Publication number
20220402754
Publication date
Dec 22, 2022
Brookhaven Science Associates. LLC
Charles T. BLACK
B81 - MICRO-STRUCTURAL TECHNOLOGY