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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Micro-structural systems or auxiliary parts thereof
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B81B2207/093
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Patents Grants
last 30 patents
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Patent Grant
Resonance device and resonance device manufacturing method
Patent number
12,252,393
Issue date
Mar 18, 2025
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical microphone with reduced overall size
Patent number
12,215,022
Issue date
Feb 4, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Samer Dagher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level package for device
Patent number
12,209,012
Issue date
Jan 28, 2025
Teknologian tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
11,784,110
Issue date
Oct 10, 2023
Advanced Semiconductor Engineering, Inc.
Chung Hao Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with perimeter barometric relief pierce
Patent number
11,772,961
Issue date
Oct 3, 2023
Knowles Electronics, LLC
Michael Kuntzman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging method and associated packaging structure
Patent number
11,713,241
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with signal routing through a protect...
Patent number
11,274,036
Issue date
Mar 15, 2022
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging method and associated packaging structure
Patent number
11,078,075
Issue date
Aug 3, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging method and associated packaging structure
Patent number
10,865,103
Issue date
Dec 15, 2020
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package and method for manufacturing the same
Patent number
10,854,533
Issue date
Dec 1, 2020
Advanced Semiconductor Engineering, Inc.
Chung Hao Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Trench-based microelectromechanical transducer and method for manuf...
Patent number
10,737,929
Issue date
Aug 11, 2020
STMicroelectronics S.r.l.
Mohammad Abbasi Gavarti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with signal routing through a protect...
Patent number
10,611,629
Issue date
Apr 7, 2020
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Assembly and packaging of MEMS device
Patent number
10,472,231
Issue date
Nov 12, 2019
Invensense, Inc.
Brian H. Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low temperature self-sealing vacuum packaging
Patent number
10,407,194
Issue date
Sep 10, 2019
United States of America as represented by the Secretary of the Navy
Paul D. Swanson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding pad structure, bonding ring structure, and MEMS device pack...
Patent number
10,134,698
Issue date
Nov 20, 2018
Semiconductor Manufacturing International (Beijing) Corporation
Fucheng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a lid for an electronic device package, a...
Patent number
9,822,001
Issue date
Nov 21, 2017
STMicroelectronics S.r.l.
Alex Gritti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with signal routing through a protect...
Patent number
9,718,675
Issue date
Aug 1, 2017
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stacked chip package including substrate with recess adjoining side...
Patent number
9,633,935
Issue date
Apr 25, 2017
Xintec Inc.
Yen-Shih Ho
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pre-molded MEMS device package having conductive column coupled to...
Patent number
9,573,800
Issue date
Feb 21, 2017
Invensense, Inc.
Thomas M. Goida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Assembly and packaging of MEMS device
Patent number
9,508,663
Issue date
Nov 29, 2016
Invensense, Inc.
Brian H. Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Molded package structure with glue bleed stopper for sealing a MEMs...
Patent number
9,475,691
Issue date
Oct 25, 2016
Infineon Technologies AG
Kok Yau Chua
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device with signal routing through a protect...
Patent number
9,452,922
Issue date
Sep 27, 2016
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Component and method for producing a component
Patent number
9,382,110
Issue date
Jul 5, 2016
EPCOS AG
Christian Bauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device using silicon substrate to glass substrate anodic...
Patent number
9,156,679
Issue date
Oct 13, 2015
Innovative Micro Technology
Benedikt Zeyen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure and fabrication method of a sensing device
Patent number
9,133,018
Issue date
Sep 15, 2015
Industrial Technology Research Institute
Lung-Tai Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packages and methods for packaging MEMS microphone devices
Patent number
9,002,040
Issue date
Apr 7, 2015
Invensense, Inc.
Jicheng Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical transducer and corresponding assembly process
Patent number
8,837,754
Issue date
Sep 16, 2014
STMicroelectronics S.r.l.
Kevin Formosa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level package and a method of forming a wafer level package
Patent number
8,729,695
Issue date
May 20, 2014
Agency for Science, Technology and Research
Chirayarikathu Veedu Sankarapillai Premachandran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packages and methods for packaging MEMS microphone devices
Patent number
8,577,063
Issue date
Nov 5, 2013
Analog Devices, Inc.
Jicheng Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for conductive pillars
Patent number
8,502,327
Issue date
Aug 6, 2013
Honeywell International Inc.
Mark Eskridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230314197
Publication date
Oct 5, 2023
Applied Materials, Inc.
Arvinder Manmohan Singh Chadha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH PERIMETER BAROMETRIC RELIEF PIERCE
Publication number
20230062556
Publication date
Mar 2, 2023
KNOWLES ELECTRONICS, LLC
Michael Kuntzman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer level package for device
Publication number
20230050181
Publication date
Feb 16, 2023
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20210403316
Publication date
Dec 30, 2021
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20210371273
Publication date
Dec 2, 2021
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH REDUCED OVERALL SIZE
Publication number
20210292158
Publication date
Sep 23, 2021
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20210082788
Publication date
Mar 18, 2021
Advanced Semiconductor Engineering, Inc.
Chung Hao CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE OF MICRO-ELECTRO-MECHANICAL-SYSTEM (MEMS) MICROPH...
Publication number
20200385263
Publication date
Dec 10, 2020
SOLID STATE SYSTEM CO., LTD.
Chien-Hsing Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE WITH SIGNAL ROUTING THROUGH A PROTECT...
Publication number
20200385260
Publication date
Dec 10, 2020
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20190295926
Publication date
Sep 26, 2019
Advanced Semiconductor Engineering, Inc.
Chung Hao CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE
Publication number
20190100431
Publication date
Apr 4, 2019
Taiwan Semiconductor Manufacturing company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING STRUCTURE AND PACKAGING METHOD OF MEMS CHIP AND ASIC CHIP
Publication number
20190010046
Publication date
Jan 10, 2019
China Wafer Level CSP Co., Ltd.
Zhiqi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRENCH-BASED MICROELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUF...
Publication number
20180312393
Publication date
Nov 1, 2018
STMicroelectronic S.r.l.
Mohammad ABBASI GAVARTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Low Temperature Self-Sealing Vacuum Packaging
Publication number
20170361963
Publication date
Dec 21, 2017
United States of America as represented by Secretary of the Navy
Paul D. Swanson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE WITH SIGNAL ROUTING THROUGH A PROTECT...
Publication number
20170297906
Publication date
Oct 19, 2017
STMicroelectronics S.r.l.
Giorgio ALLEGATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING METHOD AND ASSOCIATED PACKAGING STRUCTURE
Publication number
20170225947
Publication date
Aug 10, 2017
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-MING CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRE-MOLDED MEMS DEVICE PACKAGE HAVING CONDUCTIVE COLUMN COUPLED TO...
Publication number
20160130134
Publication date
May 12, 2016
InvenSense, Inc.
Thomas M. Goida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
GLASS WAFER ASSEMBLY
Publication number
20150353348
Publication date
Dec 10, 2015
RF Micro Devices, Inc.
Jan Edward Vandemeer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND MICROPHONE
Publication number
20140367808
Publication date
Dec 18, 2014
Omron Corporation
Naoto Kuratani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TECHNIQUES FOR THE CANCELLATION OF CHIP SCALE PACKAGING PARASITIC L...
Publication number
20140339688
Publication date
Nov 20, 2014
CAVENDISH KINETICS, INC.
Roberto GADDI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE WITH SIGNAL ROUTING THROUGH A PROTECT...
Publication number
20140230546
Publication date
Aug 21, 2014
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Component and Method for Producing a Component
Publication number
20140226285
Publication date
Aug 14, 2014
EPCOS AG
Christian Bauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGES AND METHODS FOR PACKAGING MEMS MICROPHONE DEVICES
Publication number
20140225203
Publication date
Aug 14, 2014
Analog Devices, Inc.
Jicheng Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A LID FOR AN ELECTRONIC DEVICE PACKAGE, A...
Publication number
20140131819
Publication date
May 15, 2014
STMicroelectronics S.r.l.
Alex Gritti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONDUCTIVE INTERCONNECT INCLUDING AN INORGANIC COLLAR
Publication number
20140124877
Publication date
May 8, 2014
QUALCOMM Incorporated
Yangyang Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TSV-MEMS COMBINATION
Publication number
20140117469
Publication date
May 1, 2014
TEXAS INSTRUMENTS INCORPORATED
YOSHIMI TAKAHASHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pre-Molded MEMS Device Package
Publication number
20140070382
Publication date
Mar 13, 2014
Analog Devices, Inc.
Thomas M. Goida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pre-Molded MEMS Device Package with Conductive Shell
Publication number
20140070383
Publication date
Mar 13, 2014
Analog Devices, Inc.
Thomas M. Goida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Component and Method for Producing a Component
Publication number
20130214405
Publication date
Aug 22, 2013
EPCOS AG
Christian Bauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR CONDUCTIVE PILLARS
Publication number
20130193528
Publication date
Aug 1, 2013
Honeywell International Inc.
Mark Eskridge
B81 - MICRO-STRUCTURAL TECHNOLOGY