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G03F7/70991

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70991Connection with other apparatus

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Fluid handling system and lithographic apparatus
- Patent number 12,072,636
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Protection device for lines in a projection printing installation f...
- Patent number 12,038,695
- Issue date Jul 16, 2024
- Carl Zeiss SMT GmbH
- Tobias Hegele
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
System and method for removing airborne molecular contaminants from...
- Patent number 11,980,847
- Issue date May 14, 2024
- Entegris, Inc.
- Marc Venet
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Radiation system
- Patent number 11,984,236
- Issue date May 14, 2024
- ASML Netherlands B.V.
- Han-Kwang Nienhuys
- G02 - OPTICS
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,977,339
- Issue date May 7, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photolithography mask and photolithography system comprising said p...
- Patent number 11,934,091
- Issue date Mar 19, 2024
- TECHNOLOGIES DIGITHO INC.
- Richard Beaudry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,921,436
- Issue date Mar 5, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 11,899,379
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control device and temperature control method
- Patent number 11,874,609
- Issue date Jan 16, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Enhao Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,854,846
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 11,599,032
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for lithographically forming wafer identification marks a...
- Patent number 11,562,968
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number RE49297
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Hrishikesh Patel
Information Patent Grant
Substrate processing system and substrate processing method, and de...
- Patent number 11,442,371
- Issue date Sep 13, 2022
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for a semiconductor fabrication facility and method for oper...
- Patent number 11,380,566
- Issue date Jul 5, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Fu-Hsien Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate
- Patent number 11,282,720
- Issue date Mar 22, 2022
- Semes Co., Ltd.
- Jong Seok Seo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High refractive index gratings for waveguide displays manufactured...
- Patent number 11,249,242
- Issue date Feb 15, 2022
- Facebook Technologies, LLC
- Matthew E. Colburn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,226,568
- Issue date Jan 18, 2022
- ASML Netherlands B.V.
- Paul Van Dongen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 11,199,785
- Issue date Dec 14, 2021
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
- Patent number 11,181,832
- Issue date Nov 23, 2021
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image exposure device and image exposure method
- Patent number 11,169,451
- Issue date Nov 9, 2021
- FUJIFILM Corporation
- Yoshihisa Usami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for switching between an EUV pellicle and an opti...
- Patent number 11,156,927
- Issue date Oct 26, 2021
- KLA Corporation
- Mohammad Mehdi Daneshpanah
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 11,143,968
- Issue date Oct 12, 2021
- ASML Netherlands B.V.
- Daniel Jozef Maria Direcks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam splitting apparatus
- Patent number 11,112,618
- Issue date Sep 7, 2021
- ASML Netherlands B.V.
- Gosse Charles De Vries
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure system and lithography system
- Patent number 11,106,145
- Issue date Aug 31, 2021
- Nikon Corporation
- Kenichiro Murata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 11,079,691
- Issue date Aug 3, 2021
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus and maintenance method
- Patent number 11,036,150
- Issue date Jun 15, 2021
- Gigaphoton Inc.
- Katsuhiko Wakana
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for removing airborne molecular contaminants from...
- Patent number 11,020,704
- Issue date Jun 1, 2021
- Entegris, Inc.
- Marc Venet
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
System and method for performing lithography process in semiconduct...
- Patent number 10,976,672
- Issue date Apr 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Ching Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 10,932,350
- Issue date Feb 23, 2021
- Gigaphoton Inc.
- Tatsuya Yanagida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250044713
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki Odaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESS APPARATUS
- Publication number 20250028257
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Kyoungwhan Oh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH RESOLUTION PHOTOLITHOGRAPHY
- Publication number 20240411229
- Publication date Dec 12, 2024
- TERA-PRINT LLC
- Andrey IVANKIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING ME...
- Publication number 20240402609
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Kenji IIZUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240396284
- Publication date Nov 28, 2024
- Gigaphoton Inc.
- Takeshi UEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY APPARATUS AND PROCESSING LIQUID SUPPLY METHOD
- Publication number 20240393706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Kazuya HASHIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS
- Publication number 20240353764
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Kyung Chin YI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20240310740
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240288777
- Publication date Aug 29, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20240272562
- Publication date Aug 15, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Xiaosong LIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20240192607
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240176256
- Publication date May 30, 2024
- ECLAT FOREVER MACHINERY CO., LTD.
- KUN-LIN CHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
- Publication number 20240134295
- Publication date Apr 25, 2024
- Nikon Corporation
- Yuichi Shibazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20240094648
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID P...
- Publication number 20240085776
- Publication date Mar 14, 2024
- TECHNOLOGIES DIGITHO INC.
- Richard BEAUDRY
- G01 - MEASURING TESTING
Information Patent Application
IMMERSION FLUID RECOVERY SYSTEM AND IMMERSION FLUID RECOVERY METHOD...
- Publication number 20230400774
- Publication date Dec 14, 2023
- ZHEJIANG CHEER TECHNOLOGY CO., LTD.
- XIN FU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK PROCESSING METHOD AND APPARATUS
- Publication number 20230314966
- Publication date Oct 5, 2023
- TES CO., LTD.
- Hong-Jae LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPORARY STORAGE AND REFLOW FRAME SUBSTRATE SYSTEM
- Publication number 20230209794
- Publication date Jun 29, 2023
- ECLAT FOREVER MACHINERY CO., LTD.
- KUN-LIN CHOU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20230161274
- Publication date May 25, 2023
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING EQUIPMENT, AND SUB...
- Publication number 20230074991
- Publication date Mar 9, 2023
- SEMES CO., LTD.
- Sung Chul JUNG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20230069707
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20220328331
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
- Publication number 20220326629
- Publication date Oct 13, 2022
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHUTTER APPARATUS AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
- Publication number 20220075281
- Publication date Mar 10, 2022
- SEMES CO., LTD.
- Wan Ho DO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
- Publication number 20210341849
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Uwe HOLLERBACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION DEVICE FOR LINES IN A PROJECTION PRINTING INSTALLATION F...
- Publication number 20210336429
- Publication date Oct 28, 2021
- Carl Zeiss SMT GMBH
- Tobias Hegele
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
- Publication number 20210118709
- Publication date Apr 22, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- FU-HSIEN LI
- B66 - HOISTING LIFTING HAULING
Information Patent Application
SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM...
- Publication number 20210031141
- Publication date Feb 4, 2021
- Entegris, Inc.
- Marc VENET
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
- Publication number 20200401056
- Publication date Dec 24, 2020
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Connection with other apparatus

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Fluid handling system and lithographic apparatus

Protection device for lines in a projection printing installation f...

System and method for removing airborne molecular contaminants from...

Radiation system

Substrate processing system and substrate processing method, and de...

Photolithography mask and photolithography system comprising said p...

Substrate processing system and substrate processing method, and de...

Dynamic generation of layout adaptive packaging

Temperature control device and temperature control method

System for a semiconductor fabrication facility and method for oper...

Dynamic generation of layout adaptive packaging

Apparatus for lithographically forming wafer identification marks a...

Lithographic apparatus and a device manufacturing method

Substrate processing system and substrate processing method, and de...

System for a semiconductor fabrication facility and method for oper...

Apparatus for treating substrate

High refractive index gratings for waveguide displays manufactured...

Lithographic apparatus and method

Coating and developing apparatus and coating and developing method

Movable body apparatus, exposure apparatus, and device manufacturin...

Image exposure device and image exposure method

System and method for switching between an EUV pellicle and an opti...

Fluid handling structure, lithographic apparatus and device manufac...

Beam splitting apparatus

Exposure system and lithography system

Coating and developing apparatus and coating and developing method

Extreme ultraviolet light generation apparatus and maintenance method

System and method for removing airborne molecular contaminants from...

System and method for performing lithography process in semiconduct...

Extreme ultraviolet light generation system

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR PROCESS APPARATUS

HIGH RESOLUTION PHOTOLITHOGRAPHY

DEVELOPING APPARATUS, SUBSTRATE TREATMENT SYSTEM, AND DEVELOPING ME...

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

PROCESSING LIQUID SUPPLY APPARATUS AND PROCESSING LIQUID SUPPLY METHOD

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

LITHOGRAPHY APPARATUS

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD

SUBSTRATE TREATMENT APPARATUS

FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID P...

IMMERSION FLUID RECOVERY SYSTEM AND IMMERSION FLUID RECOVERY METHOD...

MASK PROCESSING METHOD AND APPARATUS

TEMPORARY STORAGE AND REFLOW FRAME SUBSTRATE SYSTEM

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING EQUIPMENT, AND SUB...

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...

SHUTTER APPARATUS AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING

PROTECTION DEVICE FOR LINES IN A PROJECTION PRINTING INSTALLATION F...

SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...

SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM...

MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...