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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70991
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,977,339
Issue date
May 7, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithography mask and photolithography system comprising said p...
Patent number
11,934,091
Issue date
Mar 19, 2024
TECHNOLOGIES DIGITHO INC.
Richard Beaudry
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,921,436
Issue date
Mar 5, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,899,379
Issue date
Feb 13, 2024
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control device and temperature control method
Patent number
11,874,609
Issue date
Jan 16, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Enhao Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,854,846
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Dynamic generation of layout adaptive packaging
Patent number
11,599,032
Issue date
Mar 7, 2023
Applied Materials, Inc.
Uwe Hollerbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for lithographically forming wafer identification marks a...
Patent number
11,562,968
Issue date
Jan 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hu-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
RE49297
Issue date
Nov 15, 2022
ASML Netherlands B.V.
Hrishikesh Patel
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,442,371
Issue date
Sep 13, 2022
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,380,566
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for treating substrate
Patent number
11,282,720
Issue date
Mar 22, 2022
Semes Co., Ltd.
Jong Seok Seo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High refractive index gratings for waveguide displays manufactured...
Patent number
11,249,242
Issue date
Feb 15, 2022
Facebook Technologies, LLC
Matthew E. Colburn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,226,568
Issue date
Jan 18, 2022
ASML Netherlands B.V.
Paul Van Dongen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating and developing apparatus and coating and developing method
Patent number
11,199,785
Issue date
Dec 14, 2021
Tokyo Electron Limited
Tsuyoshi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Movable body apparatus, exposure apparatus, and device manufacturin...
Patent number
11,181,832
Issue date
Nov 23, 2021
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image exposure device and image exposure method
Patent number
11,169,451
Issue date
Nov 9, 2021
FUJIFILM Corporation
Yoshihisa Usami
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for switching between an EUV pellicle and an opti...
Patent number
11,156,927
Issue date
Oct 26, 2021
KLA Corporation
Mohammad Mehdi Daneshpanah
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
Patent number
11,143,968
Issue date
Oct 12, 2021
ASML Netherlands B.V.
Daniel Jozef Maria Direcks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam splitting apparatus
Patent number
11,112,618
Issue date
Sep 7, 2021
ASML Netherlands B.V.
Gosse Charles De Vries
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure system and lithography system
Patent number
11,106,145
Issue date
Aug 31, 2021
Nikon Corporation
Kenichiro Murata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating and developing apparatus and coating and developing method
Patent number
11,079,691
Issue date
Aug 3, 2021
Tokyo Electron Limited
Tsuyoshi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Extreme ultraviolet light generation apparatus and maintenance method
Patent number
11,036,150
Issue date
Jun 15, 2021
Gigaphoton Inc.
Katsuhiko Wakana
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for removing airborne molecular contaminants from...
Patent number
11,020,704
Issue date
Jun 1, 2021
Entegris, Inc.
Marc Venet
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
System and method for performing lithography process in semiconduct...
Patent number
10,976,672
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Ching Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system
Patent number
10,932,350
Issue date
Feb 23, 2021
Gigaphoton Inc.
Tatsuya Yanagida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating method
Patent number
10,915,025
Issue date
Feb 9, 2021
SCREEN Holdings Co., Ltd.
Yasuhiro Fukumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, method of transferring a substrate and devi...
Patent number
10,916,453
Issue date
Feb 9, 2021
ASML Netherlands B.V.
Aart Adrianus Van Beuzekom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical liquid, chemical liquid storage body, manufacturing method...
Patent number
10,884,338
Issue date
Jan 5, 2021
FUJIFILM Corporation
Tetsuya Kamimura
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method and apparatus for predicting performance of a metrology system
Patent number
10,884,342
Issue date
Jan 5, 2021
ASML Netherlands B.V.
Martinus Gerardus Maria Johannes Maassen
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
Publication number
20240134295
Publication date
Apr 25, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20240094648
Publication date
Mar 21, 2024
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOLITHOGRAPHY MASK AND PHOTOLITHOGRAPHY SYSTEM COMPRISING SAID P...
Publication number
20240085776
Publication date
Mar 14, 2024
TECHNOLOGIES DIGITHO INC.
Richard BEAUDRY
G01 - MEASURING TESTING
Information
Patent Application
IMMERSION FLUID RECOVERY SYSTEM AND IMMERSION FLUID RECOVERY METHOD...
Publication number
20230400774
Publication date
Dec 14, 2023
ZHEJIANG CHEER TECHNOLOGY CO., LTD.
XIN FU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK PROCESSING METHOD AND APPARATUS
Publication number
20230314966
Publication date
Oct 5, 2023
TES CO., LTD.
Hong-Jae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPORARY STORAGE AND REFLOW FRAME SUBSTRATE SYSTEM
Publication number
20230209794
Publication date
Jun 29, 2023
ECLAT FOREVER MACHINERY CO., LTD.
KUN-LIN CHOU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20230161274
Publication date
May 25, 2023
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS, SUBSTRATE TREATING EQUIPMENT, AND SUB...
Publication number
20230074991
Publication date
Mar 9, 2023
SEMES CO., LTD.
Sung Chul JUNG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
Publication number
20230069707
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
Publication number
20220328331
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
Publication number
20220326629
Publication date
Oct 13, 2022
Nikon Corporation
Yuichi Shibazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SHUTTER APPARATUS AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Publication number
20220075281
Publication date
Mar 10, 2022
SEMES CO., LTD.
Wan Ho DO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20210341849
Publication date
Nov 4, 2021
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROTECTION DEVICE FOR LINES IN A PROJECTION PRINTING INSTALLATION F...
Publication number
20210336429
Publication date
Oct 28, 2021
Carl Zeiss SMT GMBH
Tobias Hegele
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
Publication number
20210118709
Publication date
Apr 22, 2021
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
B66 - HOISTING LIFTING HAULING
Information
Patent Application
SYSTEM AND METHOD FOR REMOVING AIRBORNE MOLECULAR CONTAMINANTS FROM...
Publication number
20210031141
Publication date
Feb 4, 2021
Entegris, Inc.
Marc VENET
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
Publication number
20200401056
Publication date
Dec 24, 2020
Nikon Corporation
Yuichi Shibazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
Publication number
20200363738
Publication date
Nov 19, 2020
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMAGE EXPOSURE DEVICE AND IMAGE EXPOSURE METHOD
Publication number
20200241432
Publication date
Jul 30, 2020
FUJIFILM CORPORATION
Yoshihisa USAMI
G02 - OPTICS
Information
Patent Application
DYNAMIC GENERATION OF LAYOUT ADAPTIVE PACKAGING
Publication number
20200159132
Publication date
May 21, 2020
Applied Materials, Inc.
Uwe HOLLERBACH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20200150543
Publication date
May 14, 2020
Gigaphoton Inc.
Tatsuya YANAGIDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION SYSTEM
Publication number
20200152345
Publication date
May 14, 2020
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM FOR A SEMICONDUCTOR FABRICATION FACILITY AND METHOD FOR OPER...
Publication number
20200105556
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing company Ltd.
FU-HSIEN LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD OF TRANSFERRING A SUBSTRATE AND DEVI...
Publication number
20190391499
Publication date
Dec 26, 2019
ASML NETHERLANDS B.V.
Aart Adrianus VAN BEUZEKOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING AND DEVELOPING METHOD AND COATING AND DEVELOPING APPARATUS
Publication number
20190332013
Publication date
Oct 31, 2019
TOKYO ELECTRON LIMITED
Shinichiro KAWAKAMI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURIN...
Publication number
20190310560
Publication date
Oct 10, 2019
Nikon Corporation
Yuichi Shibazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR PERFORMING LITHOGRAPHY PROCESS IN SEMICONDUCT...
Publication number
20190250522
Publication date
Aug 15, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Ching Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICAL LIQUID, CHEMICAL LIQUID STORAGE BODY, MANUFACTURING METHOD...
Publication number
20190219924
Publication date
Jul 18, 2019
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20190221455
Publication date
Jul 18, 2019
SEMES CO., LTD.
Jong Seok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPACT INSTRUMENT WITH EXCHANGEABLE MODULES FOR MULTIPLE MICROFABR...
Publication number
20190193325
Publication date
Jun 27, 2019
Nabil A. AMRO
B33 - ADDITIVE MANUFACTURING TECHNOLOGY