Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056

Industry

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B81B3/0059

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0059Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Controlling one or more electrostatic comb structures of a micro-el...
- Patent number 12,116,267
- Issue date Oct 15, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and package with integrated passive acoustic filter...
- Patent number 11,910,154
- Issue date Feb 20, 2024
- Infineon Technologies AG
- Daniel Neumaier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback compensated absolute pressure sensor
- Patent number 11,827,511
- Issue date Nov 28, 2023
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sealing two spaces filled with different fluids in a MEM...
- Patent number 11,796,060
- Issue date Oct 24, 2023
- Robert Bosch GmbH
- Egon Stratmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 11,448,506
- Issue date Sep 20, 2022
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Linearized micromechanical sensor
- Patent number 11,326,969
- Issue date May 10, 2022
- Robert Bosch GmbH
- Stefan Zehringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevice comprising at least two movable elements
- Patent number 11,312,618
- Issue date Apr 26, 2022
- COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES SAFRAN
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensing devices, sensors, and methods for monitoring environmental...
- Patent number 11,011,323
- Issue date May 18, 2021
- BelluTech LLC
- Weibin Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 10,955,242
- Issue date Mar 23, 2021
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,882,735
- Issue date Jan 5, 2021
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensors with selectively adjusted damping of suspension
- Patent number 10,822,225
- Issue date Nov 3, 2020
- Honeywell International Inc.
- Mikulas Jandak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator, system having a plurality of MEMS actuators, and met...
- Patent number 10,807,859
- Issue date Oct 20, 2020
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometers
- Patent number 10,670,623
- Issue date Jun 2, 2020
- Atlantic Inertial Systems Limited
- Kiran Mysore Harish
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchoring structure for a sensor insensitive to anchor movement
- Patent number 10,655,963
- Issue date May 19, 2020
- Invensense, Inc.
- Jaakko Ruohio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a rolled-up electrical or electronic component
- Patent number 10,280,071
- Issue date May 7, 2019
- LEIBNIZ-INSTITUT FUER FESTKOERPER-UND WRKSTOFFFORSCHUNG DRESDEN E.V
- Daniel Grimm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,239,746
- Issue date Mar 26, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cavity with silicon on insulator MEMS pressure sensing device with...
- Patent number 10,221,062
- Issue date Mar 5, 2019
- Continental Automotive Systems, Inc.
- Jen-Huang Albert Chiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor having spring force compensation
- Patent number 10,168,351
- Issue date Jan 1, 2019
- Northrop Grumman Litef GmbH
- Stefan Koenig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system with spring for magnet placement
- Patent number 10,125,013
- Issue date Nov 13, 2018
- Intel Corporation
- Robert Starkston
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuit for detection of failure of movable MEMS mirror
- Patent number 10,048,488
- Issue date Aug 14, 2018
- STMicroelectronics Ltd.
- Elik Haran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitive pressure sensors
- Patent number 9,738,508
- Issue date Aug 22, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhongshan Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical system substrate attachment for reduced thermal d...
- Patent number 9,663,347
- Issue date May 30, 2017
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force feedback loop for pressure sensors
- Patent number 9,645,029
- Issue date May 9, 2017
- Infineon Technology AG
- Dirk Hammerschmidt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a differential comb drive MEMS
- Patent number 9,611,135
- Issue date Apr 4, 2017
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a micro-electro-mechanical system (MEMS) structure
- Patent number 9,593,007
- Issue date Mar 14, 2017
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for preventing stiction of MEMS devices encaps...
- Patent number 9,556,017
- Issue date Jan 31, 2017
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for MEMS devices with increased sensitivity
- Patent number 9,505,605
- Issue date Nov 29, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a microphone structure, and method for the produ...
- Patent number 9,403,670
- Issue date Aug 2, 2016
- Robert Bosch GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanisms for forming micro-electro mechanical system device
- Patent number 9,352,953
- Issue date May 31, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ren Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS multi-axis gyroscope Z-axis electrode structure
- Patent number 9,278,845
- Issue date Mar 8, 2016
- Fairchild Semiconductor Corporation
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FORCE SENSOR WITH AN INCREASED OPERATING RANGE
- Publication number 20240377431
- Publication date Nov 14, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Theo MIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROLLING ONE OR MORE ELECTROSTATIC COMB STRUCTURES OF A MICRO-EL...
- Publication number 20230113224
- Publication date Apr 13, 2023
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SPEAKER AND MANUFACTURING METHOD FOR SAME
- Publication number 20230007406
- Publication date Jan 5, 2023
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shiyang Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Speaker
- Publication number 20220417668
- Publication date Dec 29, 2022
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Qiang Dan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND PACKAGE WITH INTEGRATED PASSIVE ACOUSTIC FILTER...
- Publication number 20220369025
- Publication date Nov 17, 2022
- INFINEON TECHNOLOGIES AG
- Daniel Neumaier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE FEEDBACK COMPENSATED ABSOLUTE PRESSURE SENSOR
- Publication number 20210340006
- Publication date Nov 4, 2021
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial...
- Publication number 20210164781
- Publication date Jun 3, 2021
- SEIKO EPSON CORPORATION
- Koichiro KOMIZO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20210155471
- Publication date May 27, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS
- Publication number 20210130158
- Publication date May 6, 2021
- SAFRAN
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20210130160
- Publication date May 6, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20210130159
- Publication date May 6, 2021
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR SEALING TWO SPACES FILLED WITH DIFFERENT FLUIDS IN A MEM...
- Publication number 20210018096
- Publication date Jan 21, 2021
- ROBERT BOSCH GmbH
- Egon Stratmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUT-OF-PLANE HINGE FOR MICRO AND NANOELECTROMECHANICAL SYSTEMS WITH...
- Publication number 20200199923
- Publication date Jun 25, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LINEARIZED MICROMECHANICAL SENSOR
- Publication number 20200088598
- Publication date Mar 19, 2020
- ROBERT BOSCH GmbH
- Stefan Zehringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSING DEVICES, SENSORS, AND METHODS FOR MONITORING ENVIRONMENTAL...
- Publication number 20190172657
- Publication date Jun 6, 2019
- BelluTech LLC
- Weibin Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20190152766
- Publication date May 23, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20190120625
- Publication date Apr 25, 2019
- RICHTEK TECHNOLOGY CORPORATION
- Chiung-Cheng Lo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20180134543
- Publication date May 17, 2018
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CIRCUIT FOR DETECTION OF FAILURE OF MOVABLE MEMS MIRROR
- Publication number 20180129036
- Publication date May 10, 2018
- STMICROELECTRONICS LTD.
- Elik Haran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY WITH SILICON ON INSULATOR MEMS PRESSURE SENSING DEVICE WITH...
- Publication number 20180093881
- Publication date Apr 5, 2018
- CONTINENTAL AUTOMOTIVE SYSTEMS, INC.
- Jen-Huang Albert Chiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A THREE-DIMENSIONAL MICROSTRUCTURE HAVING A FIRST DIELECTRIC ELEMEN...
- Publication number 20160336635
- Publication date Nov 17, 2016
- NUVOTRONICS, LLC
- William D. Houck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL SYSTEM SUBSTRATE ATTACHMENT FOR REDUCED THERMAL D...
- Publication number 20160257558
- Publication date Sep 8, 2016
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CAPACITIVE PRESSURE SENSORS
- Publication number 20160152465
- Publication date Jun 2, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- ZHONGSHAN HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUI...
- Publication number 20160079003
- Publication date Mar 17, 2016
- Kabushiki Kaisha Toshiba
- Tsuyoshi Hirayu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE FEEDBACK LOOP FOR PRESSURE SENSORS
- Publication number 20150285701
- Publication date Oct 8, 2015
- INFINEON TECHNOLOGIES AG
- Dirk Hammerschmidt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
- Publication number 20150175405
- Publication date Jun 25, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Ren CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS,...
- Publication number 20150054100
- Publication date Feb 26, 2015
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A MICROPHONE STRUCTURE, AND METHOD FOR THE PRODU...
- Publication number 20150014797
- Publication date Jan 15, 2015
- ROBERT BOSCH GmbH
- Christoph SCHELLING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...
- Publication number 20140374856
- Publication date Dec 25, 2014
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL SYSTEMS DEVICE WITH SEGMENTED ELECTRODES
- Publication number 20140267443
- Publication date Sep 18, 2014
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Edward K. Chan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Controlling one or more electrostatic comb structures of a micro-el...

MEMS microphone and package with integrated passive acoustic filter...

Force feedback compensated absolute pressure sensor

Device for sealing two spaces filled with different fluids in a MEM...

Inertial sensor, method for manufacturing inertial sensor, inertial...

Linearized micromechanical sensor

Microdevice comprising at least two movable elements

Sensing devices, sensors, and methods for monitoring environmental...

Inertial sensor, method for manufacturing inertial sensor, inertial...

Vertical stopper for capping MEMS devices

MEMS sensors with selectively adjusted damping of suspension

MEMS actuator, system having a plurality of MEMS actuators, and met...

Accelerometers

Anchoring structure for a sensor insensitive to anchor movement

Method for producing a rolled-up electrical or electronic component

Vertical stopper for capping MEMS devices

Cavity with silicon on insulator MEMS pressure sensing device with...

Acceleration sensor having spring force compensation

Microelectromechanical system with spring for magnet placement

Circuit for detection of failure of movable MEMS mirror

MEMS capacitive pressure sensors

Electromechanical system substrate attachment for reduced thermal d...

Force feedback loop for pressure sensors

System and method for a differential comb drive MEMS

Method of forming a micro-electro-mechanical system (MEMS) structure

Apparatus and method for preventing stiction of MEMS devices encaps...

Methods and apparatus for MEMS devices with increased sensitivity

MEMS device having a microphone structure, and method for the produ...

Mechanisms for forming micro-electro mechanical system device

MEMS multi-axis gyroscope Z-axis electrode structure

Patents Applicationslast 30 patents

FORCE SENSOR WITH AN INCREASED OPERATING RANGE

CONTROLLING ONE OR MORE ELECTROSTATIC COMB STRUCTURES OF A MICRO-EL...

MEMS SPEAKER AND MANUFACTURING METHOD FOR SAME

MEMS Speaker

MEMS MICROPHONE AND PACKAGE WITH INTEGRATED PASSIVE ACOUSTIC FILTER...

FORCE FEEDBACK COMPENSATED ABSOLUTE PRESSURE SENSOR

Inertial Sensor, Method For Manufacturing Inertial Sensor, Inertial...

OPTICAL DEVICE

MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS

OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME

OPTICAL DEVICE

DEVICE FOR SEALING TWO SPACES FILLED WITH DIFFERENT FLUIDS IN A MEM...

OUT-OF-PLANE HINGE FOR MICRO AND NANOELECTROMECHANICAL SYSTEMS WITH...

LINEARIZED MICROMECHANICAL SENSOR

SENSING DEVICES, SENSORS, AND METHODS FOR MONITORING ENVIRONMENTAL...

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

MEMS DEVICE

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

CIRCUIT FOR DETECTION OF FAILURE OF MOVABLE MEMS MIRROR

CAVITY WITH SILICON ON INSULATOR MEMS PRESSURE SENSING DEVICE WITH...

A THREE-DIMENSIONAL MICROSTRUCTURE HAVING A FIRST DIELECTRIC ELEMEN...

ELECTROMECHANICAL SYSTEM SUBSTRATE ATTACHMENT FOR REDUCED THERMAL D...

MEMS CAPACITIVE PRESSURE SENSORS

METHOD OF CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUI...

FORCE FEEDBACK LOOP FOR PRESSURE SENSORS

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) AND RELATED ACTUATOR BUMPS,...

MEMS DEVICE HAVING A MICROPHONE STRUCTURE, AND METHOD FOR THE PRODU...

Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...

ELECTROMECHANICAL SYSTEMS DEVICE WITH SEGMENTED ELECTRODES