Constitution or structural means for improving or controlling physical properties not provided for in B81B3/0067 - B81B3/0091

Industry

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B81B3/0094

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0094Constitution or structural means for improving or controlling physical properties not provided for in B81B3/0067 - B81B3/0091

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Actively controlled surfaces
- Patent number 12,091,160
- Issue date Sep 17, 2024
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actively-controlled superhydrophobic surfaces
- Patent number 11,447,237
- Issue date Sep 20, 2022
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor encapsulated in elastomeric material, and system in...
- Patent number 11,254,561
- Issue date Feb 22, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure having a copper circuit trace
- Patent number 10,549,983
- Issue date Feb 4, 2020
- Robert Bosch GmbH
- Christoph Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor encapsulated in elastomeric material, and system in...
- Patent number 10,549,982
- Issue date Feb 4, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer with enlarged back volume
- Patent number 10,399,850
- Issue date Sep 3, 2019
- Invensense, Inc.
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone and method of manufacturing the same
- Patent number 10,341,783
- Issue date Jul 2, 2019
- Hyundai Motor Company
- Ilseon Yoo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone and manufacturing method thereof
- Patent number 10,149,066
- Issue date Dec 4, 2018
- Hyundai Motor Company
- Ilseon Yoo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit comprising multi-layer micromechanical structure...
- Patent number 10,065,855
- Issue date Sep 4, 2018
- UNIVERISTAT POLITECNICA DE CATALUNYA
- Piotr Jozef Michalik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level micromechanical structure
- Patent number 9,764,942
- Issue date Sep 19, 2017
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs device with outgassing shield
- Patent number 9,764,946
- Issue date Sep 19, 2017
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process and device
- Patent number 9,756,430
- Issue date Sep 5, 2017
- Cirrus Logic, Inc.
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer with enlarged back volume
- Patent number 9,738,515
- Issue date Aug 22, 2017
- Invensense, Inc.
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing a cavity within a semiconductor substrate
- Patent number 9,708,182
- Issue date Jul 18, 2017
- Infineon Technologies AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level packaging of integrated devices, and manufacturing meth...
- Patent number 9,446,943
- Issue date Sep 20, 2016
- STMicroelectronics S.r.l.
- Kevin Formosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with dynamically variable reference capacitance
- Patent number 9,410,981
- Issue date Aug 9, 2016
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical sensor with out-of-plane sensing and process...
- Patent number 9,383,382
- Issue date Jul 5, 2016
- STMicroelectronics S.r.l.
- Barbara Simoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process and device
- Patent number 9,363,610
- Issue date Jun 7, 2016
- Cirrus Logic, Inc.
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaging concept to improve performance of a micro-electro mechani...
- Patent number 9,351,084
- Issue date May 24, 2016
- Invensense, Inc.
- Jia Gao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing a cavity within a semiconductor substrate
- Patent number 9,139,427
- Issue date Sep 22, 2015
- Infineon Technologies AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device with MEMS structure and ventilation path in support structure
- Patent number 9,024,396
- Issue date May 5, 2015
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process and device
- Patent number 8,698,256
- Issue date Apr 15, 2014
- Wolfson Microelectronics plc
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure sensor device and manufacturing method thereof
- Patent number 8,590,389
- Issue date Nov 26, 2013
- Metrodyne Microsystems Corporation, R.O.C.
- Chin-Fu Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process and device
- Patent number 8,546,170
- Issue date Oct 1, 2013
- Wolfson Microelectronics plc
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active materials-based compliant mechanisms
- Patent number 8,301,272
- Issue date Oct 30, 2012
- GM Global Technology Operations LLC
- Nilesh D. Mankame
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Catalyst for microelectromechanical systems microreactors
- Patent number 8,057,988
- Issue date Nov 15, 2011
- Lawrence Livermore National Security, LLC
- Jeffrey D. Morse
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Catalyst for microelectromechanical systems microreactors
- Patent number 7,744,830
- Issue date Jun 29, 2010
- Lawrence Livermore National Security, LLC
- Jeffrey D. Morse
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS suspension and anchoring design
- Patent number 7,637,160
- Issue date Dec 29, 2009
- FREESCALE SEMICONDUCTOR, INC.
- Daniel N. Koury, Jr.
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant optical scanner using vibrating body with optimized resona...
- Patent number 7,639,413
- Issue date Dec 29, 2009
- Brother Kogyo Kabushiki Kaisha
- Yasuo Nishikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator element and production method therefor
- Patent number 7,315,106
- Issue date Jan 1, 2008
- Japan Science and Technology Agency
- Kinji Asaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS MICROPHONE
- Publication number 20230192472
- Publication date Jun 22, 2023
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Kaijie Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVELY CONTROLLED SURFACES
- Publication number 20220388632
- Publication date Dec 8, 2022
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR ENCAPSULATED IN ELASTOMERIC MATERIAL, AND SYSTEM IN...
- Publication number 20200148530
- Publication date May 14, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
POSITION SENSING CIRCUIT FOR AN ELECTRONICALLY DRIVEN MEMS DEVICE
- Publication number 20190352174
- Publication date Nov 21, 2019
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Steven L. HUNTER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES
- Publication number 20190329872
- Publication date Oct 31, 2019
- The Boeing Company
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE HAVING A COPPER CIRCUIT TRACE
- Publication number 20190177156
- Publication date Jun 13, 2019
- ROBERT BOSCH GmbH
- Christoph Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR ENCAPSULATED IN ELASTOMERIC MATERIAL, AND SYSTEM IN...
- Publication number 20180148316
- Publication date May 31, 2018
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...
- Publication number 20180148329
- Publication date May 31, 2018
- UNIVERSITAT POLITECNICA DE CATALUNYA
- Piotr Jozef MICHALIK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE AND MANUFACTURING METHOD THEREOF
- Publication number 20180103324
- Publication date Apr 12, 2018
- Hyundai Motor Company
- Ilseon YOO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSDUCER WITH ENLARGED BACK VOLUME
- Publication number 20170334715
- Publication date Nov 23, 2017
- InvenSense, Inc.
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS AND DEVICE
- Publication number 20170332178
- Publication date Nov 16, 2017
- Cirrus Logic International Semiconductor Ltd.
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20170029268
- Publication date Feb 2, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES
- Publication number 20160114883
- Publication date Apr 28, 2016
- THE BOEING COMPANY
- Joshua Benjamin Guerry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Sensor With Dynamically Variable Reference Capacitance
- Publication number 20150355222
- Publication date Dec 10, 2015
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
- Publication number 20150137276
- Publication date May 21, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Outgassing Shield
- Publication number 20150115376
- Publication date Apr 30, 2015
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROACTIVE POLYMER STRUCTURES PRINTED WITH VARYING COMPOSITIONS...
- Publication number 20150048714
- Publication date Feb 19, 2015
- Palo Alto Research Center Incorporated
- Tse Nga Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device with MEMS Structure and Ventilation Path in Support Structure
- Publication number 20150014796
- Publication date Jan 15, 2015
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME
- Publication number 20150001987
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yuichi Masaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER-LEVEL PACKAGING OF INTEGRATED DEVICES, AND MANUFACTURING METH...
- Publication number 20140353775
- Publication date Dec 4, 2014
- STMicroelectronics S.r.l.
- Kevin Formosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS AND DEVICE
- Publication number 20140341402
- Publication date Nov 20, 2014
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS AND DEVICE
- Publication number 20140191344
- Publication date Jul 10, 2014
- WOLFSON MICROELECTRONICS PLC
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Transducer with Enlarged Back Volume
- Publication number 20140001580
- Publication date Jan 2, 2014
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR PRODUCING A CAVITY WITHIN A SEMICONDUCTOR SUBSTRATE
- Publication number 20130270658
- Publication date Oct 17, 2013
- INFINEON TECHNOLOGIES AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS AND DEVICE
- Publication number 20130256816
- Publication date Oct 3, 2013
- WOLFSON MICROELECTRONICS PLC
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SENSOR WITH OUT-OF-PLANE SENSING AND PROCESS...
- Publication number 20130220016
- Publication date Aug 29, 2013
- STMicroelectronics S.r.l.
- Barbara Simoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20130205908
- Publication date Aug 15, 2013
- Metrodyne Microsystem Corporation, R.O.C.
- Chin-Fu Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS
- Publication number 20130062104
- Publication date Mar 14, 2013
- Cornell University; Cornell Center for Technology Enterprise and Commercializ...
- Harold G. Craighead
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME
- Publication number 20110260576
- Publication date Oct 27, 2011
- Canon Kabushiki Kaisha
- Yuichi Masaki
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
MEMS PROCESS AND DEVICE
- Publication number 20110089504
- Publication date Apr 21, 2011
- Anthony Bernard Traynor
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Constitution or structural means for improving or controlling physical properties not provided for in B81B3/0067 - B81B3/0091

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Actively controlled surfaces

Actively-controlled superhydrophobic surfaces

Pressure sensor encapsulated in elastomeric material, and system in...

Micromechanical structure having a copper circuit trace

Pressure sensor encapsulated in elastomeric material, and system in...

Transducer with enlarged back volume

Microphone and method of manufacturing the same

Microphone and manufacturing method thereof

Integrated circuit comprising multi-layer micromechanical structure...

Multi-level micromechanical structure

MEMs device with outgassing shield

MEMS process and device

Transducer with enlarged back volume

Methods for producing a cavity within a semiconductor substrate

Wafer-level packaging of integrated devices, and manufacturing meth...

MEMS sensor with dynamically variable reference capacitance

Microelectromechanical sensor with out-of-plane sensing and process...

MEMS process and device

Packaging concept to improve performance of a micro-electro mechani...

Methods for producing a cavity within a semiconductor substrate

Device with MEMS structure and ventilation path in support structure

MEMS process and device

MEMS pressure sensor device and manufacturing method thereof

MEMS process and device

Active materials-based compliant mechanisms

Catalyst for microelectromechanical systems microreactors

Catalyst for microelectromechanical systems microreactors

MEMS suspension and anchoring design

Resonant optical scanner using vibrating body with optimized resona...

Actuator element and production method therefor

Patents Applicationslast 30 patents

MEMS MICROPHONE

ACTIVELY CONTROLLED SURFACES

PRESSURE SENSOR ENCAPSULATED IN ELASTOMERIC MATERIAL, AND SYSTEM IN...

POSITION SENSING CIRCUIT FOR AN ELECTRONICALLY DRIVEN MEMS DEVICE

ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES

MICROMECHANICAL STRUCTURE HAVING A COPPER CIRCUIT TRACE

PRESSURE SENSOR ENCAPSULATED IN ELASTOMERIC MATERIAL, AND SYSTEM IN...

INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...

MICROPHONE AND MANUFACTURING METHOD THEREOF

TRANSDUCER WITH ENLARGED BACK VOLUME

MEMS PROCESS AND DEVICE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

ACTIVELY-CONTROLLED SUPERHYDROPHOBIC SURFACES

MEMS Sensor With Dynamically Variable Reference Capacitance

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

MEMS Device with Outgassing Shield

ELECTROACTIVE POLYMER STRUCTURES PRINTED WITH VARYING COMPOSITIONS...

Device with MEMS Structure and Ventilation Path in Support Structure

ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME

WAFER-LEVEL PACKAGING OF INTEGRATED DEVICES, AND MANUFACTURING METH...

MEMS PROCESS AND DEVICE

MEMS PROCESS AND DEVICE

Transducer with Enlarged Back Volume

METHODS FOR PRODUCING A CAVITY WITHIN A SEMICONDUCTOR SUBSTRATE

MEMS PROCESS AND DEVICE

MICROELECTROMECHANICAL SENSOR WITH OUT-OF-PLANE SENSING AND PROCESS...

MEMS PRESSURE SENSOR DEVICE AND MANUFACTURING METHOD THEREOF

RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS

ELECTROMECHANICAL TRANSDUCER AND METHOD FOR FABRICATING THE SAME

MEMS PROCESS AND DEVICE