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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming an enhanced unexposed photoresist layer
Patent number
12,222,644
Issue date
Feb 11, 2025
ASM IP Holding B.V.
Jan Willem Maes
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Stage apparatus and electron beam lithography system
Patent number
12,222,658
Issue date
Feb 11, 2025
Jeol Ltd.
Hirofumi Miyao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interferometer systems and methods for real time etch process compe...
Patent number
12,218,015
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus with parallel first and second parts o...
Patent number
12,217,986
Issue date
Feb 4, 2025
Screen Semiconductor Solutions Co., Ltd.
Hiroyuki Ogura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for submicron additive manufacturing
Patent number
12,208,569
Issue date
Jan 28, 2025
Lawrence Livermore National Security, LLC
Sourabh Kumar Saha
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
EUV microscope
Patent number
12,203,874
Issue date
Jan 21, 2025
EUV TECH, INC.
Chami N Perera
G01 - MEASURING TESTING
Information
Patent Grant
Substrate processing apparatus
Patent number
12,204,256
Issue date
Jan 21, 2025
Tokyo Electron Limited
Kouichi Mizunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ lithography pattern enhancement with localized stress treat...
Patent number
12,204,253
Issue date
Jan 21, 2025
Tokyo Electron Limited
Andrew Weloth
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
12,204,255
Issue date
Jan 21, 2025
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
Patent number
12,197,140
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Marco Koert Stavenga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clamp assembly
Patent number
12,189,309
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Ronald Van Der Wilk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scanning interference lithographic system
Patent number
12,189,300
Issue date
Jan 7, 2025
Tsinghua University; Beijing U-Precision Tech Co., Ltd.
Leijie Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration system for an extreme ultraviolet light source
Patent number
12,174,550
Issue date
Dec 24, 2024
ASML Netherlands B.V.
Daniel Jason Riggs
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Storage environment monitoring system and methods of operation
Patent number
12,174,528
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Wei Lu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Support unit, bake apparatus and substrate treating apparatus inclu...
Patent number
12,174,553
Issue date
Dec 24, 2024
Semes Co., Ltd.
Tae Hoon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Storage for extreme ultraviolet light lithography
Patent number
12,169,369
Issue date
Dec 17, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Guancyun Li
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System for monitoring a plasma
Patent number
12,171,053
Issue date
Dec 17, 2024
ASML Netherlands B.V.
Michael Anthony Purvis
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,164,235
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Hua Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for generating a mathematical model for positioning individu...
Patent number
12,164,102
Issue date
Dec 10, 2024
Carl Zeiss SMT GmbH
Norman Kretzschmar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator device and method for aligning an optical element, optical...
Patent number
12,164,234
Issue date
Dec 10, 2024
Carl Zeiss SMT GmbH
Boaz Pnini-Mittler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
End-of-life monitoring of dynamic gas lock membranes and pupil face...
Patent number
12,158,705
Issue date
Dec 3, 2024
ASML Holding N.V. & ASML Netherlands B.V.
Joseph Harry Lyons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method with improved contaminant particl...
Patent number
12,158,706
Issue date
Dec 3, 2024
ASML Netherlands B.V.
Marcus Adrianus Van de Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for reducing particulate deposition on photomask
Patent number
12,158,707
Issue date
Dec 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jui-Chieh Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of using a dual stage lithographic apparatus and lithographi...
Patent number
12,153,354
Issue date
Nov 26, 2024
ASML Netherlands B.V.
Wouter Jan Cornelis Vijselaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Drive device, optical system and lithography apparatus
Patent number
12,153,353
Issue date
Nov 26, 2024
Carl Zeiss SMT GmbH
Oliver Herbst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint lithography
Patent number
12,147,162
Issue date
Nov 19, 2024
ASML Netherlands B.V.
Catharinus De Schiffart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology measurement method and apparatus
Patent number
12,140,875
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Ilse Van Weperen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for avoiding a degradation of an optical element, projection...
Patent number
12,140,877
Issue date
Nov 12, 2024
Carl Zeiss SMT GmbH
Dirk Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Driving apparatus, exposure apparatus, and article manufacturing me...
Patent number
12,140,874
Issue date
Nov 12, 2024
Canon Kabushiki Kaisha
Tomohiro Okamoto
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Processing apparatus and article manufacturing method
Patent number
12,140,876
Issue date
Nov 12, 2024
Canon Kabushiki Kaisha
Tsutomu Terao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20250053103
Publication date
Feb 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Shao-Hua WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR REDUCING PARTICULATE DEPOSITION ON PHOTOMASK
Publication number
20250053104
Publication date
Feb 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Chieh Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20250053080
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIGITAL PHOTOLITHOGRAPHY SYSTEM, COMPONENTS THEREOF AND RELATED MET...
Publication number
20250053101
Publication date
Feb 13, 2025
Applied Materials, Inc.
Assaf Kidron
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF REDUCING CYCLIC ERROR EFFECTS IN A LITHOGRAPHIC PROCESS,...
Publication number
20250053102
Publication date
Feb 13, 2025
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SHUTTER DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING ME...
Publication number
20250053094
Publication date
Feb 13, 2025
Canon Kabushiki Kaisha
KENTAROU USHIKU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PERFORMANCE QUALIFICATION AND ASSOCIATED APPARATUSES
Publication number
20250044707
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Alina Nicoleta TARAU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TEMPERATURE-INSENSITIVE ACTUATOR AND DEFORMATION MIRROR
Publication number
20250044711
Publication date
Feb 6, 2025
Carl Zeiss SMT GMBH
Andreas Raba
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL COMPONENT FOR A LITHOGRAPHY APPARATUS
Publication number
20250044712
Publication date
Feb 6, 2025
Carl Zeiss SMT GMBH
Thomas IRTENKAUF
G02 - OPTICS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20250044713
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Toshiaki Odaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FA...
Publication number
20250028250
Publication date
Jan 23, 2025
Carl Zeiss SMT GMBH
Florian Baumer
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
Publication number
20250028256
Publication date
Jan 23, 2025
TOKYO ELECTRON LIMITED
Keiichi YAHATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APERTURE AND METHOD
Publication number
20250031294
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Roger Anton Marie TIMMERMANS
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR SUPPLYING LIQUID TARGET MATERIAL TO A RADIATION SOURCE
Publication number
20250021026
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
William Peter VAN DRENT
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS
Publication number
20250021017
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
Raaja Ganapathy SUBRAMANIAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPH APPARATUS, METHOD FOR INSPECTING PARTICLES AND SEMI...
Publication number
20250020570
Publication date
Jan 16, 2025
National Tsing-Hua University
Tsai-Sheng Gau
G01 - MEASURING TESTING
Information
Patent Application
UTILITY STAGE FOR PHOTOLITHOGRAPHIC APPARATUS AND METHOD
Publication number
20250021024
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
Keane Michael Levy
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME
Publication number
20250021008
Publication date
Jan 16, 2025
Samsung Electronics Co., Ltd.
Yebin Nam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE AND METHOD FOR ALIGNING TWO COMPONENTS
Publication number
20250021010
Publication date
Jan 16, 2025
Carl Zeiss SMT GMBH
Eduard Schweigert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS USIN...
Publication number
20250021025
Publication date
Jan 16, 2025
Samsung Electronics Co., Ltd.
Youngho HWANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND METHOD OF MANUFACTURING ART...
Publication number
20250004388
Publication date
Jan 2, 2025
Canon Kabushiki Kaisha
HIRONOBU FUJISHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXHAUST DISCHARGING DEVICE WITH TEMPERATURE CONTROL AND HEAT RETENT...
Publication number
20250004389
Publication date
Jan 2, 2025
CHYI DING TECHNOLOGIES CO., LTD.
Shih-Chia CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL DEVICE, METHOD FOR MEASURING AN ACTUAL TILT OF AN OPTICAL S...
Publication number
20240426603
Publication date
Dec 26, 2024
Carl Zeiss SMT GMBH
Heiner ZWICKEL
G01 - MEASURING TESTING
Information
Patent Application
PARTICLE TRANSFER BLOCKING DEVICE AND LITHOGRAPHY DEVICE USING ELEC...
Publication number
20240429015
Publication date
Dec 26, 2024
DERKWOO SEMITECH CO., LTD.
Ki Bum KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INCORPORATING TEMPERATURE-REGULATING HOLLOW STRUCTURES I...
Publication number
20240419066
Publication date
Dec 19, 2024
Carl Zeiss SMT GMBH
Uwe BIELKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
Publication number
20240419090
Publication date
Dec 19, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION PHOTOLITHOGRAPHY
Publication number
20240411229
Publication date
Dec 12, 2024
TERA-PRINT LLC
Andrey IVANKIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS
Publication number
20240411233
Publication date
Dec 12, 2024
ASML NETHERLANDS B.V.
Gosse Charles DE VRIES
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MACHINING A WORKPIECE
Publication number
20240411234
Publication date
Dec 12, 2024
Carl Zeiss SMT GMBH
Tobias MEISCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20240411235
Publication date
Dec 12, 2024
Samsung Electronics Co., Ltd.
Dae Geun YOON
H01 - BASIC ELECTRIC ELEMENTS