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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/708
Construction of apparatus
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,977,339
Issue date
May 7, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a membrane assembly
Patent number
11,971,656
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Johan Hendrik Klootwijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement apparatus and a method for determining a substrate grid
Patent number
11,966,166
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for producing overlay results with absolute reference for se...
Patent number
11,966,171
Issue date
Apr 23, 2024
Tokyo Electron Limited
Anton J. deVilliers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
Patent number
11,966,169
Issue date
Apr 23, 2024
ASML Holding N.V.
Mohamed Swillam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation filter for a radiation sensor
Patent number
11,960,215
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Vahid Mohammadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
Patent number
11,960,213
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Lithographic systems and methods of operating the same
Patent number
11,947,271
Issue date
Apr 2, 2024
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mirror calibrating method, a position measuring method, a lithograp...
Patent number
11,940,264
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Johannes Mathias Theodorus Antonius Adriaens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle beam inspection apparatus
Patent number
11,942,340
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Jeroen Gerard Gosen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Information
Patent Grant
Intermediate layer for mechanical interface
Patent number
11,927,889
Issue date
Mar 12, 2024
ASML Holding N.V.
Kushal Sandeep Doshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask cleaning
Patent number
11,921,434
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Hao Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic systems and methods of operating the same
Patent number
11,921,435
Issue date
Mar 5, 2024
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device for bubble removal from viscous fluid
Patent number
11,918,938
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chian-Niang Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,921,436
Issue date
Mar 5, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System of measuring image of pattern in scanning type EUV mask
Patent number
11,914,282
Issue date
Feb 27, 2024
Samsung Electronics Co., Ltd.
Donggun Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,914,308
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for determining a condition associated with a...
Patent number
11,906,907
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Derk Servatius Gertruda Brouns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image based learning correction for mitigating thermal ghosting in...
Patent number
11,900,588
Issue date
Feb 13, 2024
Xerox Corporation
Joseph C. Sheflin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Support table for a lithographic apparatus, method of loading a sub...
Patent number
11,898,601
Issue date
Feb 13, 2024
ASML Netherlands B.V.
Siegfried Alexander Tromp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for thermal management of reticle in semiconducto...
Patent number
11,899,377
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical component and clamp used in lithographic apparatus
Patent number
11,892,779
Issue date
Feb 6, 2024
ASML Holding N.V.
Victor Antonio Perez-Falcon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for removing a single particulate from a subst...
Patent number
11,886,126
Issue date
Jan 30, 2024
Carl Zeiss SMT GmbH
Klaus Edinger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for measuring a substrate for semiconductor lithography
Patent number
11,880,145
Issue date
Jan 23, 2024
Carl Zeiss SMT GmbH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature control device and temperature control method
Patent number
11,874,609
Issue date
Jan 16, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Enhao Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element and lithography system
Patent number
11,874,525
Issue date
Jan 16, 2024
Carl Zeiss SMT GmbH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus for and method of reducing contamination from source mate...
Patent number
11,874,608
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Yue Ma
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
MASK EXPOSURE SYSTEM AND MASK EXPOSURE METHOD
Publication number
20240152062
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Sukjong Bae
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMMERSION LITHOGRAPHIC SYSTEM
Publication number
20240152058
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Wonki LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND MEASUREMENT SYSTEM
Publication number
20240142877
Publication date
May 2, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING A SUBSTRATE AND METHOD FOR IMPROVING COOLING...
Publication number
20240134292
Publication date
Apr 25, 2024
SEMES CO., LTD.
Minhee CHO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
Publication number
20240134293
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
Publication number
20240134295
Publication date
Apr 25, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEAR...
Publication number
20240126184
Publication date
Apr 18, 2024
Carl Zeiss SMT GMBH
Radhakrishna RAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PRINTING PLATE EXPOSURE METHOD AND APPARATUS WITH REDUCED THERMAL P...
Publication number
20240118624
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Jörg Wolterink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS AND APPARATUS FOR FEEDING A FLEXOGRAPHIC PRINTING PLATE PRO...
Publication number
20240118623
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Thomas Klein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
Publication number
20240118626
Publication date
Apr 11, 2024
Canon Kabushiki Kaisha
SHUJI SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20240111223
Publication date
Apr 4, 2024
Carl Zeiss SMT GMBH
Klaus Rief
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
Publication number
20240103386
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Derk Servatius Gertruda BROUNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTO TREATMENT DEVICE
Publication number
20240103371
Publication date
Mar 28, 2024
Ushio Denki Kabushiki Kaisha
Akihiro Shimamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL APPARATUS, METHOD FOR SETTING A TARGET DEFORMATION, AND LIT...
Publication number
20240103381
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Klaus Gwosch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Frequency and Amplitude Modulation of Implant Dose for Stress Manag...
Publication number
20240103385
Publication date
Mar 28, 2024
Applied Materials, Inc.
Pradeep K. SUBRAHMANYAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR AND METHOD OF REDUCING CONTAMINATION FROM SOURCE MATE...
Publication number
20240103387
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEATING UNIT, APPARATUS AND FACILITY FOR PROCESSING SUBSTRATES WITH...
Publication number
20240103388
Publication date
Mar 28, 2024
SEMES CO., LTD.
Jong Seok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
Publication number
20240094644
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Makoto OGATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240094645
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kouichi Mizunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD
Publication number
20240094647
Publication date
Mar 21, 2024
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM BAKE FOR EUV LITHOGRAPHY
Publication number
20240085810
Publication date
Mar 14, 2024
Applied Materials, Inc.
Huixiong DAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Microelectromechanical Apparatus with Heating Element
Publication number
20240085661
Publication date
Mar 14, 2024
ROBERT BOSCH GmbH
Ralf Noltemeyer
G02 - OPTICS
Information
Patent Application
MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING
Publication number
20240077803
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM
Publication number
20240077380
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marinus Maria Johannes VAN DE WAL
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240077807
Publication date
Mar 7, 2024
SCREEN Holdings Co., Ltd.
Jun KOMORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...
Publication number
20240069451
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Sangjine PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PNEUMATIC CONTROLLED FLEXURE SYSTEM FOR STABILIZING A PROJECTION DE...
Publication number
20240069452
Publication date
Feb 29, 2024
Applied Materials, Inc.
Assaf KIDRON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEATING ARRANGEMENT AND METHOD FOR HEATING AN OPTICAL ELEMENT
Publication number
20240069453
Publication date
Feb 29, 2024
Carl Zeiss SMT GMBH
Susanne Beder
G02 - OPTICS
Information
Patent Application
EXPOSURE LIGHT BEAM PHASE MEASUREMENT METHOD IN LASER INTERFERENCE...
Publication number
20240061352
Publication date
Feb 22, 2024
TSINGHUA UNIVERSITY
Leijie WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METROLOGY APPARATUS AND A METROLOGY METHOD
Publication number
20240061348
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Jeroen Arnoldus Leonardus Johannes RAAYMAKERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY