Construction of guns or parts thereof

Industry

CPC
H01J37/065

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/065Construction of guns or parts thereof

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Cathode mechanism of electron emission source, and method for manuf...
- Patent number 12,106,928
- Issue date Oct 1, 2024
- NuFlare Technology, Inc.
- Ryoei Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode assembly for electron gun
- Patent number 12,062,518
- Issue date Aug 13, 2024
- FREEMELT AB
- Ulric Ljungblad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 12,014,894
- Issue date Jun 18, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun in which same is used, electronic device in w...
- Patent number 11,984,294
- Issue date May 14, 2024
- National Institute for Materials Science
- Jie Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing same, and device provided...
- Patent number 11,984,291
- Issue date May 14, 2024
- DENKA COMPANY LIMITED
- Hiromitsu Chatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conical heat shield for electron emitting cathode
- Patent number 11,901,154
- Issue date Feb 13, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broad-energy spectrum electron gun
- Patent number 11,848,174
- Issue date Dec 19, 2023
- The Regents of the University of Colorado, a Body Corporate
- Kieran Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, scanning electron microscope, and...
- Patent number 11,469,072
- Issue date Oct 11, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing electron source
- Patent number 11,373,836
- Issue date Jun 28, 2022
- 38th Research Institute, China Electronics Technology Group Corporation
- Xuehui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration correction in charged particle system
- Patent number 11,348,756
- Issue date May 31, 2022
- ASML Netherlands B.V.
- Alexander Hendrik Vincent Van Veen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system for inspection and review of 3D devices
- Patent number 11,335,608
- Issue date May 17, 2022
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source, method for manufacturing the same, and electron be...
- Patent number 11,322,329
- Issue date May 3, 2022
- HITACHI HIGH-TECH CORPORATION
- Toshiaki Kusunoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Space charge insensitive electron gun designs
- Patent number 11,302,510
- Issue date Apr 12, 2022
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun device
- Patent number 11,295,925
- Issue date Apr 5, 2022
- Param Corporation
- Hiroshi Yasuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool, lithographic apparatus, electron beam source and a...
- Patent number 11,243,179
- Issue date Feb 8, 2022
- ASML Netherlands B.V.
- Erwin Paul Smakman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,201,032
- Issue date Dec 14, 2021
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source and electron gun
- Patent number 11,189,453
- Issue date Nov 30, 2021
- 38th Research Institute, China Electronics Technology Group Corporation
- Huarong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multibeam inspection apparatus
- Patent number 11,189,459
- Issue date Nov 30, 2021
- NuFlare Technology, Inc.
- Hideaki Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 11,075,053
- Issue date Jul 27, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additive manufacturing of three-dimensional articles
- Patent number 10,987,752
- Issue date Apr 27, 2021
- Arcam AB
- Christian Ekberg
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Charged-particle source and method for cleaning a charged-particle...
- Patent number 10,840,054
- Issue date Nov 17, 2020
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerator system for mineral component analysis, system and metho...
- Patent number 10,825,643
- Issue date Nov 3, 2020
- Nuctech Company Limited
- Yaohong Liu
- G01 - MEASURING TESTING
Information Patent Grant
Low work function electron beam filament assembly
- Patent number 10,796,876
- Issue date Oct 6, 2020
- Colorado State University Research Foundation
- Bao Gia Nguyen
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 10,784,071
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for providing a clean environment in an electron-...
- Patent number 10,692,692
- Issue date Jun 23, 2020
- KLA-Tencor Corporation
- William G. Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Axial electron gun
- Patent number 10,636,617
- Issue date Apr 28, 2020
- PATON TURBINE TECHNOLOGIES LLC
- Victor Alexandrovich Timashov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature, high-brightness, cathode
- Patent number 10,593,505
- Issue date Mar 17, 2020
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron-beam spot optimization
- Patent number 10,529,529
- Issue date Jan 7, 2020
- Moxtek, Inc.
- Dustin Peterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source
- Patent number 10,468,227
- Issue date Nov 5, 2019
- Hermes-Microvision, Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CATHODE ASSEMBLY FOR ELECTRON GUN
- Publication number 20240363303
- Publication date Oct 31, 2024
- Freemelt AB
- Ulric LJUNGBLAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...
- Publication number 20240347311
- Publication date Oct 17, 2024
- ASML NETHERLANDS B.V.
- Bruno LA FONTAINE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...
- Publication number 20240312758
- Publication date Sep 19, 2024
- ASML NETHERLANDS B.V.
- Zheng FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-Voltage Insulating Structure, Charged Particle Gun, and Charge...
- Publication number 20240242917
- Publication date Jul 18, 2024
- Hitachi High-Tech Corporation
- Yasuchika SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN ELECTRON GUN CATHODE MOUNT
- Publication number 20240128042
- Publication date Apr 18, 2024
- TWI LIMITED
- Colin RIBTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...
- Publication number 20240079198
- Publication date Mar 7, 2024
- NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Jie TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...
- Publication number 20240029989
- Publication date Jan 25, 2024
- Denka Company Limited
- Hiromitsu CHATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230352262
- Publication date Nov 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM
- Publication number 20230335368
- Publication date Oct 19, 2023
- NuFlare Technology, Inc.
- Munehiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE MECHANISM OF ELECTRON EMISSION SOURCE, AND METHOD FOR MANUF...
- Publication number 20230132046
- Publication date Apr 27, 2023
- NuFlare Technology, Inc.
- Ryoei KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
- Publication number 20220285124
- Publication date Sep 8, 2022
- ASML NETHERLANDS B.V.
- Alexander Hendrik Vincent VAN VEEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, SCANNING ELECTRON MICROSCOPE, AND...
- Publication number 20220262592
- Publication date Aug 18, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
- Publication number 20220189725
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Juying DOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20220068589
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN DEVICE
- Publication number 20220051866
- Publication date Feb 17, 2022
- PARAM CORPORATION
- Hiroshi YASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES
- Publication number 20210327770
- Publication date Oct 21, 2021
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRON BE...
- Publication number 20210327674
- Publication date Oct 21, 2021
- HITACHI HIGH-TECH CORPORATION
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broad-Energy Spectrum Electron Gun
- Publication number 20210272771
- Publication date Sep 2, 2021
- The Regents of the University of Colorado, a Body Corporate
- Kieran Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON EMITTER AND METHOD OF FABRICATING SAME
- Publication number 20210142975
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE ASSEMBLY FOR ELECTRON GUN
- Publication number 20210050174
- Publication date Feb 18, 2021
- Freemelt AB
- Ulric LJUNGBLAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE AND ELECTRON GUN
- Publication number 20210050175
- Publication date Feb 18, 2021
- 38th Research Institute, China Electronics Technology Group Corporation
- Huarong LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING ELECTRON SOURCE
- Publication number 20210050176
- Publication date Feb 18, 2021
- 38th Research Institute, China Electronics Technology Group Corporation
- Xuehui WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIBEAM INSPECTION APPARATUS
- Publication number 20200395191
- Publication date Dec 17, 2020
- NuFlare Technology, Inc.
- Hideaki HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION TOOL, LITHOGRAPHIC APPARATUS, ELECTRON BEAM SOURCE AND A...
- Publication number 20200249181
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Erwin Paul SMAKMAN
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT
- Publication number 20200161086
- Publication date May 21, 2020
- EMCRAFTS CO., LTD.
- Jung Bum CHUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SOURCE
- Publication number 20200126753
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Shuai LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Space Charge Insensitive Electron Gun Designs
- Publication number 20190371564
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-Particle Source and Method for Cleaning a Charged-Particle...
- Publication number 20190237288
- Publication date Aug 1, 2019
- IMS Nanofabrication GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AXIAL ELECTRON GUN
- Publication number 20190214220
- Publication date Jul 11, 2019
- PATON TURBINE TECHNOLOGIES LLC
- Victor Alexandrovich TIMASHOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCELERATOR SYSTEM FOR MINERAL COMPONENT ANALYSIS, SYSTEM AND METHO...
- Publication number 20190198285
- Publication date Jun 27, 2019
- Nuctech Company Limited
- Yaohong LIU
- H01 - BASIC ELECTRIC ELEMENTS

Construction of guns or parts thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Cathode mechanism of electron emission source, and method for manuf...

Cathode assembly for electron gun

Electron source, method for manufacturing same, and device provided...

Emitter, electron gun in which same is used, electronic device in w...

Electron source, method for manufacturing same, and device provided...

Conical heat shield for electron emitting cathode

Broad-energy spectrum electron gun

Electron emitter and method of fabricating same

Charged particle beam apparatus, scanning electron microscope, and...

Method of manufacturing electron source

Aberration correction in charged particle system

Electron beam system for inspection and review of 3D devices

Electron source, method for manufacturing the same, and electron be...

Space charge insensitive electron gun designs

Electron gun device

Inspection tool, lithographic apparatus, electron beam source and a...

Electron emitter and method of fabricating same

Electron source and electron gun

Multibeam inspection apparatus

Charged particle source

Additive manufacturing of three-dimensional articles

Charged-particle source and method for cleaning a charged-particle...

Accelerator system for mineral component analysis, system and metho...

Low work function electron beam filament assembly

Electron emitter and method of fabricating same

System and method for providing a clean environment in an electron-...

Axial electron gun

Low temperature, high-brightness, cathode

Electron-beam spot optimization

Charged particle source

Patents Applicationslast 30 patents

CATHODE ASSEMBLY FOR ELECTRON GUN

SYSTEM AND APPARATUS FOR STABILIZING ELECTRON SOURCES IN CHARGED PA...

SYSTEM AND METHOD FOR ADJUSTING BEAM CURRENT USING A FEEDBACK LOOP...

High-Voltage Insulating Structure, Charged Particle Gun, and Charge...

AN ELECTRON GUN CATHODE MOUNT

EMITTER, ELECTRON GUN IN WHICH SAME IS USED, ELECTRONIC DEVICE IN W...

ELECTRON SOURCE, METHOD FOR MANUFACTURING SAME, AND DEVICE PROVIDED...

ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE

ELECTROMAGNETIC LENS AND ELECTRON SOURCE MECHANISM

CATHODE MECHANISM OF ELECTRON EMISSION SOURCE, AND METHOD FOR MANUF...

ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM

CHARGED PARTICLE BEAM APPARATUS, SCANNING ELECTRON MICROSCOPE, AND...

ELECTRON EMITTER AND METHOD OF FABRICATING SAME

CHARGED PARTICLE SOURCE

ELECTRON GUN DEVICE

ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES

ELECTRON SOURCE, METHOD FOR MANUFACTURING THE SAME, AND ELECTRON BE...

Broad-Energy Spectrum Electron Gun

ELECTRON EMITTER AND METHOD OF FABRICATING SAME

CATHODE ASSEMBLY FOR ELECTRON GUN

ELECTRON SOURCE AND ELECTRON GUN

METHOD OF MANUFACTURING ELECTRON SOURCE

MULTIBEAM INSPECTION APPARATUS

INSPECTION TOOL, LITHOGRAPHIC APPARATUS, ELECTRON BEAM SOURCE AND A...

ELECTRON MICROSCOPE EQUIPPED WITH AUTOMATIC BEAM ALIGNMENT

CHARGED PARTICLE SOURCE

Space Charge Insensitive Electron Gun Designs

Charged-Particle Source and Method for Cleaning a Charged-Particle...

AXIAL ELECTRON GUN

ACCELERATOR SYSTEM FOR MINERAL COMPONENT ANALYSIS, SYSTEM AND METHO...