Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industry

CPC
G03F1/66

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof

Current Industry

G03F1/66Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of lithography process and transferring a reticle
- Patent number 11,982,944
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Reticle pod provided with optically identifiable marks and method f...
- Patent number 11,982,937
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 11,971,656
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Johan Hendrik Klootwijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,940,727
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask protective module, pellicle having the same, and lithography a...
- Patent number 11,940,726
- Issue date Mar 26, 2024
- Industry-University Cooperation Foundation Hanyang University
- Jinho Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Advanced load port for photolithography mask inspection tool
- Patent number 11,921,431
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tung-Jung Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Container for holding and transporting reticles having a transparen...
- Patent number 11,914,287
- Issue date Feb 27, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece container system
- Patent number 11,874,596
- Issue date Jan 16, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image pickup apparatus and focus adjustment method using bending co...
- Patent number 11,822,233
- Issue date Nov 21, 2023
- Lasertec Corporation
- Hiroki Miyai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and method of reticle pod having inspection window
- Patent number 11,796,909
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wang Cheng Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod and wear parts thereof
- Patent number 11,787,621
- Issue date Oct 17, 2023
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 11,703,754
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of lithography process using reticle container with discharg...
- Patent number 11,703,763
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod for preventing haze contamination and reticle stocker h...
- Patent number 11,693,307
- Issue date Jul 4, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jiyong Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask assembly and associated methods
- Patent number 11,635,681
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Derk Servatius Gertruda Brouns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 11,624,980
- Issue date Apr 11, 2023
- ASML Netherlands B.V.
- Johan Hendrik Klootwijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,614,683
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput and high position accurate method for particle insp...
- Patent number 11,614,691
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Jui Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Advanced load port for photolithography mask inspection tool
- Patent number 11,592,754
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Jung Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing liquid supply system, processing liquid supply apparatus...
- Patent number 11,521,854
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Kazuya Hashimoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Sealed reticle storage device with soft contact
- Patent number 11,511,920
- Issue date Nov 29, 2022
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus and method of operating the same for preven...
- Patent number 11,506,985
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jui-Chieh Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle retaining system
- Patent number 11,508,592
- Issue date Nov 22, 2022
- Gudeng Precision Industrial Co., Ltd.
- Shu-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for automatically handling die carriers
- Patent number 11,508,596
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle adhesive residue removal system and methods
- Patent number 11,467,508
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Banqiu Wu
- B08 - CLEANING
Information Patent Grant
Article storage facility
- Patent number 11,460,766
- Issue date Oct 4, 2022
- Taiwan Daifuku Co., Ltd.
- Isamu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle transfer apparatus and method
- Patent number 11,448,957
- Issue date Sep 20, 2022
- Samsung Electronics Co., Ltd.
- Mun Ja Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod and gripping unit thereof
- Patent number 11,430,682
- Issue date Aug 30, 2022
- Gudeng Precision Industrial Co., Ltd.
- Yung-Chin Pan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RETICLE CONTAINER WITH DIRECTED PURGE FLOW
- Publication number 20240160098
- Publication date May 16, 2024
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD
- Publication number 20240061326
- Publication date Feb 22, 2024
- Entegris, Inc.
- Russ V. Raschke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MASK POD BOX AND MASK TRANSFER DEVICE
- Publication number 20240036481
- Publication date Feb 1, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang SHAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSERTS FOR SPACING IN RETICLE CONTAINERS
- Publication number 20230418152
- Publication date Dec 28, 2023
- Entegris, Inc.
- Russ V. Raschke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230418169
- Publication date Dec 28, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE
- Publication number 20230384695
- Publication date Nov 30, 2023
- Entegris, Inc.
- Lesa Lindgren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRAL SEAL FOR CONTAINER
- Publication number 20230377923
- Publication date Nov 23, 2023
- Entegris, Inc.
- William J. Shaner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW
- Publication number 20230367207
- Publication date Nov 16, 2023
- WANG CHENG SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING MAGNETIC LATCHING
- Publication number 20230333463
- Publication date Oct 19, 2023
- Entegris, Inc.
- Huaping Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING
- Publication number 20230333464
- Publication date Oct 19, 2023
- Entegris, Inc.
- Russ V. Raschke
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
- Publication number 20230314931
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Boris KOGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE
- Publication number 20230305404
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEV...
- Publication number 20230251568
- Publication date Aug 10, 2023
- IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
- Jin Ho AHN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
- Publication number 20230251581
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Jui HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230236498
- Publication date Jul 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD INNER POD HAVING DISSIMILAR MATERIAL AT CONTACT SURFACE...
- Publication number 20230194978
- Publication date Jun 22, 2023
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POD FOR CONTAINING A PHOTOMASK
- Publication number 20230176473
- Publication date Jun 8, 2023
- CHI-CHUNG CHEN
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC METHOD BY USING A PHOTOMASK CONTAINED IN A TRANSPARENT...
- Publication number 20230176472
- Publication date Jun 8, 2023
- CHI-CHUNG CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR INSPECTING A PHOTOMASK CONTAINED IN A TRANSPARENT POD
- Publication number 20230176474
- Publication date Jun 8, 2023
- CHI-CHUNG CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL
- Publication number 20230176488
- Publication date Jun 8, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Jung CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...
- Publication number 20230148165
- Publication date May 11, 2023
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET INNER POD SEAL GAP
- Publication number 20230129336
- Publication date Apr 27, 2023
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPERATING METHOD FOR PREVENTING PHOTOMASK PARTICULATE CONTAMINATION
- Publication number 20230073062
- Publication date Mar 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chieh CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230066653
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230064383
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING DEPOSITION MASK FRAME ASSEMBLY FOR DISPLAY...
- Publication number 20230062020
- Publication date Mar 2, 2023
- KPS CORPORATION
- Jung Ho KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS
- Publication number 20230063707
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Sheng Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
- Publication number 20230067973
- Publication date Mar 2, 2023
- SEMES CO., LTD.
- Tae Hee KIM
- B08 - CLEANING
Information Patent Application
QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...
- Publication number 20230065892
- Publication date Mar 2, 2023
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS

Containers specially adapted for masks, mask blanks or pellicles Preparation thereof

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of lithography process and transferring a reticle

Quick-release valve module, reticle pod provided with quick-release...

Reticle pod provided with optically identifiable marks and method f...

Method for manufacturing a membrane assembly

Reticle enclosure for lithography systems

Mask protective module, pellicle having the same, and lithography a...

Advanced load port for photolithography mask inspection tool

Container for holding and transporting reticles having a transparen...

Workpiece container system

Reticle transportation container

Image pickup apparatus and focus adjustment method using bending co...

Structure and method of reticle pod having inspection window

Reticle pod and wear parts thereof

Particle prevention method in reticle pod

Method of lithography process using reticle container with discharg...

Reticle pod for preventing haze contamination and reticle stocker h...

Mask assembly and associated methods

Method for manufacturing a membrane assembly

Reticle enclosure for lithography systems

High throughput and high position accurate method for particle insp...

Advanced load port for photolithography mask inspection tool

Processing liquid supply system, processing liquid supply apparatus...

Sealed reticle storage device with soft contact

Semiconductor apparatus and method of operating the same for preven...

Reticle retaining system

Apparatus and methods for automatically handling die carriers

Pellicle adhesive residue removal system and methods

Article storage facility

Pellicle transfer apparatus and method

Reticle pod and gripping unit thereof

Patents Applicationslast 30 patents

RETICLE CONTAINER WITH DIRECTED PURGE FLOW

RETICLE CONTAINER HAVING PLATING WITH REDUCED EDGE BUILD

MASK POD BOX AND MASK TRANSFER DEVICE

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

INSERTS FOR SPACING IN RETICLE CONTAINERS

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

RETICLE CONTAINER HAVING MAGNETIC PARTICLE CAPTURE

INTEGRAL SEAL FOR CONTAINER

STRUCTURE AND METHOD OF RETICLE POD HAVING INSPECTION WINDOW

RETICLE CONTAINER HAVING MAGNETIC LATCHING

RETICLE CONTAINER HAVING ROTATING CONNECTOR WITH SPRING FORCE LATCHING

POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE

METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE

PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEV...

HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

RETICLE POD INNER POD HAVING DISSIMILAR MATERIAL AT CONTACT SURFACE...

POD FOR CONTAINING A PHOTOMASK

LITHOGRAPHIC METHOD BY USING A PHOTOMASK CONTAINED IN A TRANSPARENT...

METHOD FOR INSPECTING A PHOTOMASK CONTAINED IN A TRANSPARENT POD

ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL

RETICLE POD INCLUDING MOTION LIMITING FEATURES AND METHOD OF ASSEMB...

EXTREME ULTRAVIOLET INNER POD SEAL GAP

OPERATING METHOD FOR PREVENTING PHOTOMASK PARTICULATE CONTAMINATION

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

METHOD OF MANUFACTURING DEPOSITION MASK FRAME ASSEMBLY FOR DISPLAY...

APPARATUS AND METHODS FOR AUTOMATICALLY HANDLING DIE CARRIERS

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE

QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...