Control methods for avoiding stiction

Industry

CPC
B81C1/00976

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00976Control methods for avoiding stiction

Industries

Patents Grantslast 30 patents

Information Patent Grant
Physical quantity sensor and inertial measurement unit
- Patent number 11,846,649
- Issue date Dec 19, 2023
- Seiko Epson Corporation
- Yoshinao Yanagisawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration device and method for controlling the same
- Patent number 11,092,440
- Issue date Aug 17, 2021
- Kabushikikaisha Toshiba
- Ryunosuke Gando
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with stiction recover and methods
- Patent number 10,961,119
- Issue date Mar 30, 2021
- MCube, Inc.
- Shih-Wei Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,882,735
- Issue date Jan 5, 2021
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,239,746
- Issue date Mar 26, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough MEMS surface
- Patent number 9,988,260
- Issue date Jun 5, 2018
- NXP USA, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for stiction reduction in MEMS sensors
- Patent number 9,926,192
- Issue date Mar 27, 2018
- Invensense, Inc.
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods to determine stiction failures in MEMS devices
- Patent number 9,733,268
- Issue date Aug 15, 2017
- Hanking Electronics Ltd.
- Giorgio Massamiliano Membretti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS device structure, bonding mesa structure and associated m...
- Patent number 9,656,852
- Issue date May 23, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch
- Patent number 9,634,231
- Issue date Apr 25, 2017
- Fujitsu Limited
- Osamu Toyoda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for preventing stiction of MEMS devices encaps...
- Patent number 9,556,017
- Issue date Jan 31, 2017
- Analog Devices, Inc.
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction resistant mems device and method of operation
- Patent number 9,190,937
- Issue date Nov 17, 2015
- FREESCALE SEMICONDUCTOR, INC.
- Yizhen Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Variable capacitance device
- Patent number 9,087,929
- Issue date Jul 21, 2015
- Murata Manufacturing Co., Ltd.
- Yoshihiro Konaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction for MEMS devices
- Patent number 8,948,706
- Issue date Feb 3, 2015
- Google Technology Holdings LLC
- Adrian Napoles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator element, method of driving actuator element, method of man...
- Patent number 8,450,912
- Issue date May 28, 2013
- FUJIFILM Corporation
- Takamichi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction electrode
- Patent number 8,115,989
- Issue date Feb 14, 2012
- QUALCOMM MEMS Technologies, Inc.
- Manish Kothari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuit and method for snapdown prevention in voltage controlled ME...
- Patent number 7,529,017
- Issue date May 5, 2009
- Silicon Light Machines Corporation
- Andrew Walker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically charged microstructures
- Patent number 6,597,048
- Issue date Jul 22, 2003
- Cornell Research Foundation
- Edwin C. Kan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for non-contacting edge-coupled o...
- Patent number 6,583,921
- Issue date Jun 24, 2003
- Texas Instruments Incorporated
- William E. Nelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of anodically bonding a multilayer device with a free mass
- Patent number 6,548,321
- Issue date Apr 15, 2003
- The Charles Stark Draper Laboratory, Inc.
- William David Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Elimination of sticking of micro-mechanical devices
- Patent number 5,412,186
- Issue date May 2, 1995
- Texas Instruments Incorporated
- Richard O. Gale
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
VIBRATION DEVICE AND METHOD FOR CONTROLLING THE SAME
- Publication number 20190204081
- Publication date Jul 4, 2019
- Kabushiki Kaisha Toshiba
- Ryunosuke Gando
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20190152766
- Publication date May 23, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20180134543
- Publication date May 17, 2018
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH MEMS SURFACE
- Publication number 20170313573
- Publication date Nov 2, 2017
- FREESCALE SEMICONDUCTOR, INC.
- RUBEN B. MONTEZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS DEVICE STRUCTURE, BONDING MESA STRUCTURE AND ASSOCIATED M...
- Publication number 20170008757
- Publication date Jan 12, 2017
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUN-WEN CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...
- Publication number 20140374856
- Publication date Dec 25, 2014
- Li Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR STICTION REDUCTION IN MEMS SENSORS
- Publication number 20140353774
- Publication date Dec 4, 2014
- Cerina Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION RESISTANT MEMS DEVICE AND METHOD OF OPERATION
- Publication number 20140217929
- Publication date Aug 7, 2014
- Yizhen Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VARIABLE CAPACITANCE DEVICE
- Publication number 20140217552
- Publication date Aug 7, 2014
- MURATA MANUFACTURING CO., LTD.
- Yoshihiro KONAKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH
- Publication number 20140191616
- Publication date Jul 10, 2014
- Fujitsu Limited
- OSAMU TOYODA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION FOR MEMS DEVICES
- Publication number 20140159779
- Publication date Jun 12, 2014
- Motorola Mobility LLC
- Adrian Napoles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHUNT SWITCH AT COMMON PORT TO REDUCE HOT SWITCHING
- Publication number 20130207714
- Publication date Aug 15, 2013
- RF Micro Devices, Inc.
- Ruediger Bauder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND MANUFACTURING METHOD THEREOF
- Publication number 20110311081
- Publication date Dec 22, 2011
- BSE CO., LTD.
- Yong-Kook Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR ELEMENT, METHOD OF DRIVING ACTUATOR ELEMENT, METHOD OF MAN...
- Publication number 20110156537
- Publication date Jun 30, 2011
- Takamichi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODE
- Publication number 20110063713
- Publication date Mar 17, 2011
- QUALCOMM MEMS Technologies, Inc.
- Manish Kothari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ANODICALLY BONDING A MULTILAYER DEVICE WITH A FREE MASS
- Publication number 20030077876
- Publication date Apr 24, 2003
- William David Sawyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Digital micromirror device and method for non-contacting, edge-coup...
- Publication number 20010053016
- Publication date Dec 20, 2001
- William E. Nelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Control methods for avoiding stiction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Physical quantity sensor and inertial measurement unit

Vibration device and method for controlling the same

MEMS device with stiction recover and methods

Vertical stopper for capping MEMS devices

Vertical stopper for capping MEMS devices

Rough MEMS surface

Methods for stiction reduction in MEMS sensors

Systems and methods to determine stiction failures in MEMS devices

CMOS-MEMS device structure, bonding mesa structure and associated m...

MEMS switch

Apparatus and method for preventing stiction of MEMS devices encaps...

Stiction resistant mems device and method of operation

Variable capacitance device

Stiction reduction for MEMS devices

Actuator element, method of driving actuator element, method of man...

Anti-stiction electrode

Circuit and method for snapdown prevention in voltage controlled ME...

Electrostatically charged microstructures

Micromechanical device and method for non-contacting edge-coupled o...

Method of anodically bonding a multilayer device with a free mass

Elimination of sticking of micro-mechanical devices

Patents Applicationslast 30 patents

VIBRATION DEVICE AND METHOD FOR CONTROLLING THE SAME

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

ROUGH MEMS SURFACE

CMOS-MEMS DEVICE STRUCTURE, BONDING MESA STRUCTURE AND ASSOCIATED M...

Apparatus and Method for Preventing Stiction of MEMS Devices Encaps...

METHODS FOR STICTION REDUCTION IN MEMS SENSORS

STICTION RESISTANT MEMS DEVICE AND METHOD OF OPERATION

VARIABLE CAPACITANCE DEVICE

MEMS SWITCH

STICTION REDUCTION FOR MEMS DEVICES

SHUNT SWITCH AT COMMON PORT TO REDUCE HOT SWITCHING

MEMS MICROPHONE AND MANUFACTURING METHOD THEREOF

ACTUATOR ELEMENT, METHOD OF DRIVING ACTUATOR ELEMENT, METHOD OF MAN...

ANTI-STICTION ELECTRODE

METHOD OF ANODICALLY BONDING A MULTILAYER DEVICE WITH A FREE MASS

Digital micromirror device and method for non-contacting, edge-coup...