Membership
Tour
Register
Log in
control
Follow
Industry
CPC
G03F7/70725
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/70725
control
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus lithographic apparatus measurement method
Patent number
11,914,307
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Bas Johannes Petrus Roset
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,914,308
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Nanoscale positioning apparatus with large stroke and multiple degr...
Patent number
11,911,896
Issue date
Feb 27, 2024
WUXI FRIEDRICH MEASUREMENT AND CONTROL INSTRUMENTS CO., LTD
Fengwei Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object table, a stage apparatus and a lithographic apparatus
Patent number
11,880,144
Issue date
Jan 23, 2024
ASML Netherlands B.V.
Sander Jeroen Hermanussen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling a manufacturing apparatus and associated app...
Patent number
11,860,549
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Wolter Siemons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage system, lithographic apparatus, method for positioning and de...
Patent number
11,860,552
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Stef Marten Johan Janssens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of unloading an object from a support table
Patent number
11,846,879
Issue date
Dec 19, 2023
ASML Netherland B.V.
Giovanna De Simone
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
Patent number
11,835,869
Issue date
Dec 5, 2023
Canon Kabushiki Kaisha
Kazuki Ota
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus and device manufacturing method
Patent number
11,774,857
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of controlling a position of a first object relative to a se...
Patent number
11,774,865
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Thijs Adriaan Cornelis Van Keulen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,762,299
Issue date
Sep 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate stage, substrate processing system using the same, and me...
Patent number
11,747,741
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for industrial scale continuous holographic litho...
Patent number
11,687,004
Issue date
Jun 27, 2023
Photia Incorporated
Joseph Bernhardt Geddes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure machine
Patent number
11,662,667
Issue date
May 30, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-field control of a lithographic process and associated apparatus
Patent number
11,662,666
Issue date
May 30, 2023
ASML Netherlands B.V.
Rowin Meijerink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control apparatus, exposure apparatus, and method of manufacturing...
Patent number
11,630,398
Issue date
Apr 18, 2023
Canon Kabushiki Kaisha
Takashi Kurihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,609,503
Issue date
Mar 21, 2023
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,609,504
Issue date
Mar 21, 2023
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser processing method and laser processing system
Patent number
11,604,416
Issue date
Mar 14, 2023
Gigaphoton Inc.
Koji Kakizaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic process and apparatus and inspection process and appar...
Patent number
11,599,027
Issue date
Mar 7, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage apparatus and method for calibrating an object loading process
Patent number
11,556,064
Issue date
Jan 17, 2023
ASML Netherlands B.V.
Gijs Kramer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wafer stage and method thereof
Patent number
11,556,065
Issue date
Jan 17, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,543,755
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Takehiro Toyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compensation of creep effects in an imaging device
Patent number
11,526,089
Issue date
Dec 13, 2022
Carl Zeiss SMT GmbH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wavelength tracking system, method to calibrate a wavelength tracki...
Patent number
11,525,737
Issue date
Dec 13, 2022
ASML Netherland B.V.
Maarten Jozef Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of unloading an object from a support table
Patent number
11,500,296
Issue date
Nov 15, 2022
ASML Netherlands B.V.
Giovanna De Simone
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning system and a method for positioning a substage or a sta...
Patent number
11,460,786
Issue date
Oct 4, 2022
ASML Netherlands B.V.
Yang-Shan Huang
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
EUV exposure apparatus, and overlay correction method and semicondu...
Patent number
11,422,455
Issue date
Aug 23, 2022
Samsung Electronics Co., Ltd.
Doogyu Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and an object positioning system
Patent number
RE49142
Issue date
Jul 19, 2022
ASML Netherlands B.V.
Adrianus Hendrik Koevoets
Patents Applications
last 30 patents
Information
Patent Application
OBJECT TABLE, A STAGE APPARATUS AND A LITHOGRAPHIC APPARATUS
Publication number
20240142885
Publication date
May 2, 2024
ASML NETHERLANDS B.V.
Sander Jeroen HERMANUSSEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS AND APPARATUS FOR FEEDING A FLEXOGRAPHIC PRINTING PLATE PRO...
Publication number
20240118623
Publication date
Apr 11, 2024
ESKO-GRAPHICS IMAGING GMBH
Thomas Klein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE CONDITIONING SYSTEM AND METHOD
Publication number
20240094647
Publication date
Mar 21, 2024
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20240085806
Publication date
Mar 14, 2024
Canon Kabushiki Kaisha
YUICHI OZAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20240061350
Publication date
Feb 22, 2024
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND ARTICLE MANUFACTURING METHOD
Publication number
20240053686
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
MASAKI IMAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTIVE LINEAR MOTOR PARASITIC FORCE COMPENSATION
Publication number
20240045345
Publication date
Feb 8, 2024
Applied Materials, Inc.
Ulrich MUELLER
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE
Publication number
20240036477
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Erik Henricus Egidius Catharina EUMMELEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK INSPECTION APPARATUS
Publication number
20240027895
Publication date
Jan 25, 2024
STEK CO., LTD.
Ming-Sheng Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240021457
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM FOR A LITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20240012333
Publication date
Jan 11, 2024
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHOD INCLUDING THERMAL MANAGEMENT
Publication number
20240004316
Publication date
Jan 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Wei WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF USING WAFER STAGE
Publication number
20230400775
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Yao LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230393486
Publication date
Dec 7, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE LEVEL SENSING IN A LITHOGRAPHIC APPARATUS
Publication number
20230384698
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Martin Jules Marie-Emile DE NIVELLE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VERTICAL MOTION PROTECTION METHOD AND DEVICE BASED ON DUAL-STAGE MO...
Publication number
20230359132
Publication date
Nov 9, 2023
TSINGHUA UNIVERSITY
Kaiming YANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
Publication number
20230359133
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CALIBRATION METHOD, DETECTION SYSTEM, EXPOSURE APPARATUS, ARTICLE M...
Publication number
20230341786
Publication date
Oct 26, 2023
Canon Kabushiki Kaisha
HIRONOBU FUJISHIMA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF MANUFACTURING OPTICAL ELEMENT AND OPTICAL EXPOSURE SYSTEM
Publication number
20230324593
Publication date
Oct 12, 2023
HTC CORPORATION
Qing-Long Deng
G02 - OPTICS
Information
Patent Application
METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOG...
Publication number
20230288812
Publication date
Sep 14, 2023
Applied Materials, Inc.
Chi-Ming TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20230288817
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20230266678
Publication date
Aug 24, 2023
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT FOR AN OPTICAL ELEMENT
Publication number
20230236516
Publication date
Jul 27, 2023
Carl Zeiss SMT GMBH
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MACHINE MEASUREMENT METROLOGY FRAME FOR A LITHOGRAPHY SYSTEM
Publication number
20230221658
Publication date
Jul 13, 2023
Applied Materials, Inc.
Ulrich MUELLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR USE IN A METROLOGY PROCESS OR LITHOGRAPHIC PROCESS
Publication number
20230205101
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Luuc KEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING AR...
Publication number
20230185205
Publication date
Jun 15, 2023
Canon Kabushiki Kaisha
KAZUKI OTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
Publication number
20230119136
Publication date
Apr 20, 2023
Canon Kabushiki Kaisha
YUICHIRO MORIKUNI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING ME...
Publication number
20230110011
Publication date
Apr 13, 2023
Canon Kabushiki Kaisha
Takahiro Sumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANAGEMENT APPARATUS, LITHOGRAPHY APPARATUS, MANAGEMENT METHOD, AND...
Publication number
20230106601
Publication date
Apr 6, 2023
Canon Kabushiki Kaisha
Satoru ITOH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE MACHINE
Publication number
20230064171
Publication date
Mar 2, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Bo LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY