Controlled atmosphere

Industry

CPC
Y10S438/909

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/909Controlled atmosphere

Industries

Patents Grantslast 30 patents

Information Patent Grant
E-chuck with automated clamped force adjustment and calibration
- Patent number 8,685,759
- Issue date Apr 1, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Capacitive element fabrication method
- Patent number 8,216,950
- Issue date Jul 10, 2012
- Eudyna Devices Inc.
- Norikazu Iwagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Addition of ballast hydrocarbon gas to doped polysilicon etch maske...
- Patent number 8,198,103
- Issue date Jun 12, 2012
- International Business Machines Corporation
- Timothy J. Dalton
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device i...
- Patent number 8,119,547
- Issue date Feb 21, 2012
- Renesas Electronics Corporation
- Yoshiaki Kobayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Leadframe treatment for enhancing adhesion of encapsulant thereto
- Patent number 8,012,886
- Issue date Sep 6, 2011
- ASM Assembly Materials Ltd.
- Yiu Fai Kwan
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Pattern manufacturing equipments, organic thin-film transistors and...
- Patent number 7,993,820
- Issue date Aug 9, 2011
- Hitachi, Ltd.
- Tomohiro Inoue
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
E-chuck for automated clamped force adjustment and calibration
- Patent number 7,851,233
- Issue date Dec 14, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Pressure sensors and methods of making the same
- Patent number 7,622,782
- Issue date Nov 24, 2009
- General Electric Company
- Stanley Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for synthesis of extended length nanostructures
- Patent number 7,611,579
- Issue date Nov 3, 2009
- Nanocomp Technologies, Inc.
- David Lashmore
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Plasma and electron beam etching device and method
- Patent number 7,569,484
- Issue date Aug 4, 2009
- Micron Technology, Inc.
- Neal R. Rueger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of creating a turbulent flow of fluid between a mold and a s...
- Patent number 7,531,025
- Issue date May 12, 2009
- Molecular Imprints, Inc.
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,514,306
- Issue date Apr 7, 2009
- Seiko Epson Corporation
- Sumio Utsunomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device w...
- Patent number 7,390,758
- Issue date Jun 24, 2008
- Renesas Technology Corp.
- Yoshiaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air handling and chemical filtration system and method
- Patent number 7,329,308
- Issue date Feb 12, 2008
- Entegris, Inc.
- William M. Goodwin
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Plasma reaction chamber liner consisting essentially of osmium
- Patent number 7,293,526
- Issue date Nov 13, 2007
- Micron Technology, Inc.
- Max F. Hineman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for creating a turbulent flow of fluid between a mold and a...
- Patent number 7,270,533
- Issue date Sep 18, 2007
- University of Texas System, Board of Regents
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chemical vapor deposition of titanium from titanium tetrachloride a...
- Patent number 7,268,078
- Issue date Sep 11, 2007
- Micron Technology, Inc.
- Ravi Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor integrated circuit device manufacturing method includ...
- Patent number 7,172,981
- Issue date Feb 6, 2007
- Renesas Technology Corp.
- Yoshiaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabrication method of semiconductor integrated circuit device
- Patent number 7,163,849
- Issue date Jan 16, 2007
- Renesas Technology Corp.
- Hiroaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Determining method of thermal processing condition
- Patent number 7,138,607
- Issue date Nov 21, 2006
- Tokyo Electron Limited
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimal operation of conformal silica deposition reactors
- Patent number 7,135,418
- Issue date Nov 14, 2006
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma reaction chamber liner comprising ruthenium
- Patent number 7,131,391
- Issue date Nov 7, 2006
- Micron Technology, Inc.
- Max F. Hineman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of etching silicon-oxide-containing compositions
- Patent number 7,118,683
- Issue date Oct 10, 2006
- Micron Technology, Inc.
- Max F. Hineman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimal operation of conformal silica deposition reactors
- Patent number 7,109,129
- Issue date Sep 19, 2006
- Novellus Systems, Inc.
- George D. Papasouliotis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single phase fluid imprint lithography method
- Patent number 7,090,716
- Issue date Aug 15, 2006
- Molecular Imprints, Inc.
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Oxide film forming method
- Patent number 7,064,084
- Issue date Jun 20, 2006
- Tokyo Electron Limited
- Shingo Hishiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing diode subassemblies used in rectifier asse...
- Patent number 7,060,533
- Issue date Jun 13, 2006
- Wetherill Associates, Inc.
- Bahman Roozrokh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Vapor phase growth method by controlling the heat output in the gas...
- Patent number 7,049,154
- Issue date May 23, 2006
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Kashino
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Chemical vapor deposition of titanium from titanium tetrachloride a...
- Patent number 6,977,225
- Issue date Dec 20, 2005
- Micron Technology, Inc.
- Ravi Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High pressure anneals of integrated circuit structures
- Patent number 6,974,773
- Issue date Dec 13, 2005
- Micron Technology, Inc.
- Randhir P. S. Thakur
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
E-CHUCK WITH AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION
- Publication number 20110042006
- Publication date Feb 24, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-CHUCK FOR AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION
- Publication number 20100248398
- Publication date Sep 30, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jo Fei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Synthesis of Extended Length Nanostructures
- Publication number 20100099319
- Publication date Apr 22, 2010
- Nanocomp Technologies, Inc.
- David Lashmore
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR, CAPACITIVE EL...
- Publication number 20100081241
- Publication date Apr 1, 2010
- EUDYNA DEVICES INC.
- Norikazu Iwagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
- Publication number 20090288603
- Publication date Nov 26, 2009
- Neal R. Rueger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
- Publication number 20090023303
- Publication date Jan 22, 2009
- Yoshiaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKE...
- Publication number 20080286972
- Publication date Nov 20, 2008
- International Business Machines Corporation
- Timothy J. Dalton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air handling and chemical filtration system and method
- Publication number 20080257159
- Publication date Oct 23, 2008
- Entegris, Inc.
- William M. Goodwin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LEADFRAME TREATMENT FOR ENHANCING ADHESION OF ENCAPSULANT THERETO
- Publication number 20080216921
- Publication date Sep 11, 2008
- Yiu Fai KWAN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Plasma and electron beam etching device and method
- Publication number 20080038933
- Publication date Feb 14, 2008
- Micron Technology, Inc.
- Neal R. Rueger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...
- Publication number 20080012013
- Publication date Jan 17, 2008
- Tomohiro Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods of synthesis of extended length nanostructures
- Publication number 20080014431
- Publication date Jan 17, 2008
- Nanocomp Technologies, Inc.
- David S. Lashmore
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20070232034
- Publication date Oct 4, 2007
- SEIKO EPSON CORPORATION
- Sumio Utsunomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing a semiconductor integrated circuit device
- Publication number 20070123063
- Publication date May 31, 2007
- Yoshiaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma reaction chamber assemblies
- Publication number 20070113975
- Publication date May 24, 2007
- Max F. Hineman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure sensors and methods of making the same
- Publication number 20070052046
- Publication date Mar 8, 2007
- Stanley Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and fabrication method therefor, capacitive el...
- Publication number 20060214270
- Publication date Sep 28, 2006
- EUDYNA DEVICES INC.
- Norikazu Iwagami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor phase growth method by controlling the heat output in the gas...
- Publication number 20060185596
- Publication date Aug 24, 2006
- Shin-Etsu Handotai Co., Ltd.
- Hisashi Kashino
- C30 - CRYSTAL GROWTH
Information Patent Application
ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKE...
- Publication number 20060166416
- Publication date Jul 27, 2006
- International Business Machines Corporation
- Timothy J. Dalton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical vapor deposition of titanium from titanium tetrachloride a...
- Publication number 20060134912
- Publication date Jun 22, 2006
- Ravi Iyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and methods for synthesis of extended length nanostructures
- Publication number 20050170089
- Publication date Aug 4, 2005
- David Lashmore
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods of enhancing selectivity of etching silicon dioxide relativ...
- Publication number 20050101150
- Publication date May 12, 2005
- Max F. Hineman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air handling and chemical filtration system and method
- Publication number 20050081715
- Publication date Apr 21, 2005
- Extraction Systems, Inc.
- William M. Goodwin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Single phase fluid imprint lithography method
- Publication number 20050072755
- Publication date Apr 7, 2005
- University of Texas System Board of Regents
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of creating a turbulent flow of fluid between a mold and a s...
- Publication number 20050072757
- Publication date Apr 7, 2005
- University of Texas System Board of Regents
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Application
System for creating a turbulent flow of fluid between a mold and a...
- Publication number 20050074512
- Publication date Apr 7, 2005
- University of Texas System Board of Regents
- Ian M. McMackin
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of manufacturing a semiconductor integrated circuit device
- Publication number 20050022840
- Publication date Feb 3, 2005
- Yoshiaki Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor integrated circuit device manufacturing method
- Publication number 20050020039
- Publication date Jan 27, 2005
- Hiroaki Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Determining method of thermal processing condition
- Publication number 20040226933
- Publication date Nov 18, 2004
- Wenling Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to reduce photoresist mask line dimensions
- Publication number 20040209480
- Publication date Oct 21, 2004
- Yih-Chen Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Controlled atmosphere

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

E-chuck with automated clamped force adjustment and calibration

Capacitive element fabrication method

Addition of ballast hydrocarbon gas to doped polysilicon etch maske...

Method of manufacturing a semiconductor integrated circuit device i...

Leadframe treatment for enhancing adhesion of encapsulant thereto

Pattern manufacturing equipments, organic thin-film transistors and...

E-chuck for automated clamped force adjustment and calibration

Pressure sensors and methods of making the same

Systems and methods for synthesis of extended length nanostructures

Plasma and electron beam etching device and method

Method of creating a turbulent flow of fluid between a mold and a s...

Method for manufacturing semiconductor device

Method of manufacturing a semiconductor integrated circuit device w...

Air handling and chemical filtration system and method

Plasma reaction chamber liner consisting essentially of osmium

System for creating a turbulent flow of fluid between a mold and a...

Chemical vapor deposition of titanium from titanium tetrachloride a...

Semiconductor integrated circuit device manufacturing method includ...

Fabrication method of semiconductor integrated circuit device

Determining method of thermal processing condition

Optimal operation of conformal silica deposition reactors

Plasma reaction chamber liner comprising ruthenium

Methods of etching silicon-oxide-containing compositions

Optimal operation of conformal silica deposition reactors

Single phase fluid imprint lithography method

Oxide film forming method

Method for manufacturing diode subassemblies used in rectifier asse...

Vapor phase growth method by controlling the heat output in the gas...

Chemical vapor deposition of titanium from titanium tetrachloride a...

High pressure anneals of integrated circuit structures

Patents Applicationslast 30 patents

E-CHUCK WITH AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION

E-CHUCK FOR AUTOMATED CLAMPED FORCE ADJUSTMENT AND CALIBRATION

Systems and Methods for Synthesis of Extended Length Nanostructures

SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREFOR, CAPACITIVE EL...

PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD

METHOD OF MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE

ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKE...

Air handling and chemical filtration system and method

LEADFRAME TREATMENT FOR ENHANCING ADHESION OF ENCAPSULANT THERETO

Plasma and electron beam etching device and method

PATTERN MANUFACTURING EQUIPMENTS, ORGANIC THIN-FILM TRANSISTORS AND...

Systems and methods of synthesis of extended length nanostructures

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Method of manufacturing a semiconductor integrated circuit device

Plasma reaction chamber assemblies

Pressure sensors and methods of making the same

Semiconductor device and fabrication method therefor, capacitive el...

Vapor phase growth method by controlling the heat output in the gas...

ADDITION OF BALLAST HYDROCARBON GAS TO DOPED POLYSILICON ETCH MASKE...

Chemical vapor deposition of titanium from titanium tetrachloride a...

Systems and methods for synthesis of extended length nanostructures

Methods of enhancing selectivity of etching silicon dioxide relativ...

Air handling and chemical filtration system and method

Single phase fluid imprint lithography method

Method of creating a turbulent flow of fluid between a mold and a s...

System for creating a turbulent flow of fluid between a mold and a...

Method of manufacturing a semiconductor integrated circuit device

Semiconductor integrated circuit device manufacturing method

Determining method of thermal processing condition

Method to reduce photoresist mask line dimensions