Controlling or regulating

Industry

CPC
C30B31/18

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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

Current Industry

C30B31/18Controlling or regulating

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing substrate for solar cell and substrate for...
- Patent number 11,901,475
- Issue date Feb 13, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki Otsuka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for depositing low temperature phosphorous-doped silicon
- Patent number 11,781,243
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Rami Khazaka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for manufacturing transition metal chalcogenide and transiti...
- Patent number 11,268,210
- Issue date Mar 8, 2022
- Korea Advanced Institute of Science and Technology
- Sung-Yool Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device
- Patent number 9,716,006
- Issue date Jul 25, 2017
- Mitsubishi Electric Corporation
- Kenji Hamada
- C30 - CRYSTAL GROWTH
Information Patent Grant
System for improved pressure control in horizontal diffusion furnac...
- Patent number 8,662,886
- Issue date Mar 4, 2014
- Micrel, Inc.
- Miles Dudman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gallium nitride light emitting devices on diamond
- Patent number 8,435,833
- Issue date May 7, 2013
- Apollo Diamond, Inc
- Robert C. Linares
- C30 - CRYSTAL GROWTH
Information Patent Grant
Laser media with controlled concentration profile of active laser i...
- Patent number 8,175,131
- Issue date May 8, 2012
- Raytheon Company
- Kevin W. Kirby
- C30 - CRYSTAL GROWTH
Information Patent Grant
Gallium nitride light emitting devices on diamond
- Patent number 8,129,733
- Issue date Mar 6, 2012
- Apollo Diamond, Inc
- Robert C. Linares
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment method that includes a low negative pressure
- Patent number 6,852,601
- Issue date Feb 8, 2005
- Tokyo Electron Limited
- Seiichi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and controller for heat treatment apparatu...
- Patent number 6,847,015
- Issue date Jan 25, 2005
- Tokyo Electron Limited
- Wenling Wang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Batch-type heat treatment apparatus and control method for the batc...
- Patent number 6,803,548
- Issue date Oct 12, 2004
- Tokyo Electron Limited
- Wenling Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlling method, thermal treating apparatus, and met...
- Patent number 6,746,908
- Issue date Jun 8, 2004
- Hitachi Kokusai Electric, Inc.
- Kazuo Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RTA chamber with in situ reflective index monitor
- Patent number 6,740,196
- Issue date May 25, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Fu-Su Lee
- G01 - MEASURING TESTING
Information Patent Grant
System and method for controlling movement of a workpiece in a ther...
- Patent number 6,610,968
- Issue date Aug 26, 2003
- Axcelis Technologies
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correction of wafer temperature drift in a plasma reactor based upo...
- Patent number 6,575,622
- Issue date Jun 10, 2003
- Applied Materials Inc.
- Hamid Norrbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling rise and fall of temperature i...
- Patent number 6,461,428
- Issue date Oct 8, 2002
- Toshiba Ceramics Co., Ltd.
- Shyuji Tobashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Temperature control system for a thermal reactor
- Patent number 6,441,350
- Issue date Aug 27, 2002
- Brooks Automation Inc.
- Kevin Stoddard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid thermal heating apparatus and method including an infrared ca...
- Patent number 6,434,327
- Issue date Aug 13, 2002
- Applied Materials, Inc.
- Christian M. Gronet
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment method and heat treatment apparatus
- Patent number 6,409,503
- Issue date Jun 25, 2002
- Tokyo Electron Limited
- Seiichi Yoshida
- C30 - CRYSTAL GROWTH
Information Patent Grant
Correction of wafer temperature drift in a plasma reactor based upo...
- Patent number 6,353,210
- Issue date Mar 5, 2002
- Applied Materials Inc.
- Hamid Norrbakhsh
- C30 - CRYSTAL GROWTH
Information Patent Grant
Temperature control system for a thermal reactor
- Patent number 6,222,164
- Issue date Apr 24, 2001
- Semitool, Inc.
- Kevin Stoddard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Temperature control system for a thermal reactor
- Patent number 6,211,495
- Issue date Apr 3, 2001
- Semitool, Inc.
- Kevin Stoddard
- C30 - CRYSTAL GROWTH
Information Patent Grant
Temperature control system for a thermal reactor
- Patent number 6,207,937
- Issue date Mar 27, 2001
- Semitool, Inc.
- Kevin Stoddard
- C30 - CRYSTAL GROWTH
Information Patent Grant
System for measuring the temperature of a semiconductor wafer durin...
- Patent number 6,204,484
- Issue date Mar 20, 2001
- Steag RTP Systems, Inc.
- Sing Pin Tay
- C30 - CRYSTAL GROWTH
Information Patent Grant
Model based method for wafer temperature control in a thermal proce...
- Patent number 6,169,271
- Issue date Jan 2, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
System and apparatus for in situ monitoring and control of annealin...
- Patent number 6,166,354
- Issue date Dec 26, 2000
- Advanced Micro Devices, Inc.
- Frederick N. Hause
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid thermal heating apparatus and method
- Patent number 6,122,439
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Christian M. Gronet
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating method and radiant heating device
- Patent number 6,072,164
- Issue date Jun 6, 2000
- Shin-Estu Handotai Co., Ltd.
- Naoto Tate
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid thermal heating apparatus and method including an infrared ca...
- Patent number 6,016,383
- Issue date Jan 18, 2000
- Applied Materials, Inc.
- Christian M. Gronet
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid thermal heating apparatus including a substrate support and a...
- Patent number 5,840,125
- Issue date Nov 24, 1998
- Applied Materials, Inc.
- Christian M. Gronet
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...
- Publication number 20240136464
- Publication date Apr 25, 2024
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki OTSUKA
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
STRUCTURES WITH BORON- AND GALLIUM-DOPED SILICON GERMANIUM LAYERS A...
- Publication number 20230349069
- Publication date Nov 2, 2023
- ASM IP HOLDING, B.V.
- Wonjong Kim
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR MANUFACTURING TRANSITION METAL CHALCOGENIDE AND TRANSITI...
- Publication number 20220010456
- Publication date Jan 13, 2022
- Korea Advanced Institute of Science and Technology
- Sung-Yool Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON
- Publication number 20210254238
- Publication date Aug 19, 2021
- ASM IP HOLDING B.V.
- Rami Khazaka
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON CARBIDE CRYSTAL GROWING APPARATUS AND CRYSTAL GROWING METHO...
- Publication number 20210246573
- Publication date Aug 12, 2021
- Winsheng Material Technology (WMT) Co., Ltd.
- Yun-Fu Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...
- Publication number 20200144441
- Publication date May 7, 2020
- Shin-Etsu Chemical Co., Ltd.
- Hiroyuki OTSUKA
- C30 - CRYSTAL GROWTH
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20170140934
- Publication date May 18, 2017
- MITSUBISHI ELECTRIC CORPORATION
- Kenji HAMADA
- C30 - CRYSTAL GROWTH
Information Patent Application
GALLIUM NITRIDE LIGHT EMITTING DEVICES ON DIAMOND
- Publication number 20120164786
- Publication date Jun 28, 2012
- Apollo Diamond, Inc.
- Robert C. Linares
- C30 - CRYSTAL GROWTH
Information Patent Application
LASER MEDIA WITH CONTROLLED CONCENTRATION PROFILE OF ACTIVE LASER I...
- Publication number 20100226407
- Publication date Sep 9, 2010
- Raytheon Company
- Kevin W. Kirby
- C30 - CRYSTAL GROWTH
Information Patent Application
SYSTEM AND METHOD OF IMPROVED PRESSURE CONTROL IN HORIZONTAL DIFFUS...
- Publication number 20090176181
- Publication date Jul 9, 2009
- MICREL, INC.
- Miles DUDMAN
- C30 - CRYSTAL GROWTH
Information Patent Application
Dopant material for manufacturing solar cells
- Publication number 20090092745
- Publication date Apr 9, 2009
- Luca Pavani
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods of assessing the temperature of semiconductor wafer substra...
- Publication number 20070012241
- Publication date Jan 18, 2007
- Eric R. Blomiley
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition apparatuses
- Publication number 20060231016
- Publication date Oct 19, 2006
- Eric R. Blomiley
- C30 - CRYSTAL GROWTH
Information Patent Application
GALLIUM NITRIDE LIGHT EMITTING DEVICES ON DIAMOND
- Publication number 20060211222
- Publication date Sep 21, 2006
- Robert C. Linares
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition apparatuses, methods of assessing the temperature of sem...
- Publication number 20050223985
- Publication date Oct 13, 2005
- Eric R. Blomiley
- C30 - CRYSTAL GROWTH
Information Patent Application
RTA chamber with in situ reflective index monitor
- Publication number 20030155072
- Publication date Aug 21, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Su Lee
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treatment method and heat treatment apparatus
- Publication number 20020110769
- Publication date Aug 15, 2002
- Seiichi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and controller for heat treatment apparatu...
- Publication number 20020074324
- Publication date Jun 20, 2002
- Wenling Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
Temperature controlling method, thermal treating apparatus, and met...
- Publication number 20020055080
- Publication date May 9, 2002
- Kazuo Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Correction of wafer temperature drift in a plasma reactor based upo...
- Publication number 20020048311
- Publication date Apr 25, 2002
- APPLIED MATERIALS, INC.
- Hamid Norrbakhsh
- C30 - CRYSTAL GROWTH
Information Patent Application
Batch-type heat treatment apparatus and control method for the batc...
- Publication number 20020045146
- Publication date Apr 18, 2002
- Wenling Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for controlling rise and fall of temperature i...
- Publication number 20010020439
- Publication date Sep 13, 2001
- Shyuji Tobashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Controlling or regulating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing substrate for solar cell and substrate for...

Method for depositing low temperature phosphorous-doped silicon

Method for manufacturing transition metal chalcogenide and transiti...

Semiconductor device manufacturing method and semiconductor device

System for improved pressure control in horizontal diffusion furnac...

Gallium nitride light emitting devices on diamond

Laser media with controlled concentration profile of active laser i...

Gallium nitride light emitting devices on diamond

Heat treatment method that includes a low negative pressure

Heat treatment apparatus and controller for heat treatment apparatu...

Batch-type heat treatment apparatus and control method for the batc...

Temperature controlling method, thermal treating apparatus, and met...

RTA chamber with in situ reflective index monitor

System and method for controlling movement of a workpiece in a ther...

Correction of wafer temperature drift in a plasma reactor based upo...

Method and apparatus for controlling rise and fall of temperature i...

Temperature control system for a thermal reactor

Rapid thermal heating apparatus and method including an infrared ca...

Heat treatment method and heat treatment apparatus

Correction of wafer temperature drift in a plasma reactor based upo...

Temperature control system for a thermal reactor

Temperature control system for a thermal reactor

Temperature control system for a thermal reactor

System for measuring the temperature of a semiconductor wafer durin...

Model based method for wafer temperature control in a thermal proce...

System and apparatus for in situ monitoring and control of annealin...

Rapid thermal heating apparatus and method

Heat-treating method and radiant heating device

Rapid thermal heating apparatus and method including an infrared ca...

Rapid thermal heating apparatus including a substrate support and a...

Patents Applicationslast 30 patents

METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...

STRUCTURES WITH BORON- AND GALLIUM-DOPED SILICON GERMANIUM LAYERS A...

METHOD FOR MANUFACTURING TRANSITION METAL CHALCOGENIDE AND TRANSITI...

METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON

SILICON CARBIDE CRYSTAL GROWING APPARATUS AND CRYSTAL GROWING METHO...

METHOD FOR MANUFACTURING SUBSTRATE FOR SOLAR CELL AND SUBSTRATE FOR...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE

GALLIUM NITRIDE LIGHT EMITTING DEVICES ON DIAMOND

LASER MEDIA WITH CONTROLLED CONCENTRATION PROFILE OF ACTIVE LASER I...

SYSTEM AND METHOD OF IMPROVED PRESSURE CONTROL IN HORIZONTAL DIFFUS...

Dopant material for manufacturing solar cells

Methods of assessing the temperature of semiconductor wafer substra...

Deposition apparatuses

GALLIUM NITRIDE LIGHT EMITTING DEVICES ON DIAMOND

Deposition apparatuses, methods of assessing the temperature of sem...

RTA chamber with in situ reflective index monitor

Heat treatment method and heat treatment apparatus

Heat treatment apparatus and controller for heat treatment apparatu...

Temperature controlling method, thermal treating apparatus, and met...

Correction of wafer temperature drift in a plasma reactor based upo...

Batch-type heat treatment apparatus and control method for the batc...

Method and apparatus for controlling rise and fall of temperature i...