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Controlling physical properties of the material
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CPC
B81C2201/0161
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Current Industry
B81C2201/0161
Controlling physical properties of the material
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Patents Grants
last 30 patents
Information
Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
Patent number
12,157,665
Issue date
Dec 3, 2024
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for producing a micromechanica...
Patent number
11,940,618
Issue date
Mar 26, 2024
Robert Bosch GmbH
Alexander Eberspaecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for coating microstructured components
Patent number
11,701,478
Issue date
Jul 18, 2023
Boehringer Ingelheim International GmbH
Daniel Frache
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS capacitive pressure sensors in fully depleted semiconductor on...
Patent number
10,466,126
Issue date
Nov 5, 2019
GLOBALFOUNDRIES Inc.
Juergen Faul
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cavity pressure modification using local heating with a laser
Patent number
9,878,902
Issue date
Jan 30, 2018
Invensense, Inc.
Michael Dueweke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabrication of a micro-channel based integrated sensor fo...
Patent number
6,933,164
Issue date
Aug 23, 2005
HRL Laboratories, LLC
Randall L Kubena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
Publication number
20210271073
Publication date
Sep 2, 2021
ROBERT BOSCH GmbH
Alexander Eberspaecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSORS
Publication number
20190265117
Publication date
Aug 29, 2019
GLOBALFOUNDRIES INC.
Juergen FAUL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAVITY PRESSURE MODIFICATION USING LOCAL HEATING WITH A LASER
Publication number
20170096330
Publication date
Apr 6, 2017
InvenSense, Inc.
Michael DUEWEKE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
Publication number
20170044010
Publication date
Feb 16, 2017
MITSUBISHI ELECTRIC CORPORATION
Tomoya HIRATA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DISPLAY INCORPORATING EXTENDED HEIGHT ACTUATORS
Publication number
20150055205
Publication date
Feb 26, 2015
Pixtronix, Inc.
Tyler A. Dunn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical structures, devices including the structures...
Publication number
20050225413
Publication date
Oct 13, 2005
Michael N. Kozicki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of fabrication of a micro-channel based integrated sensor fo...
Publication number
20030045019
Publication date
Mar 6, 2003
HRL Laboratories, LLC
Randall L. Kubena
B81 - MICRO-STRUCTURAL TECHNOLOGY