Cooled nozzles

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CPC
C23C16/45572

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45572Cooled nozzles

Industries

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Patents Grantslast 30 patents

Information Patent Grant
In-situ semiconductor processing chamber temperature apparatus
- Patent number 12,183,605
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for using shield plate in a CVD reactor
- Patent number 12,084,768
- Issue date Sep 10, 2024
- Aixtron SE
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,000,047
- Issue date Jun 4, 2024
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,993,843
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Seung Wook Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 11,848,206
- Issue date Dec 19, 2023
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing apparatus
- Patent number 11,840,761
- Issue date Dec 12, 2023
- ASM IP Holding B.V.
- HyungChul Moon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber injector
- Patent number 11,807,931
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield plate for a CVD reactor
- Patent number 11,746,419
- Issue date Sep 5, 2023
- Aixtron SE
- Adam Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 11,608,559
- Issue date Mar 21, 2023
- Lam Research Corporation
- Rachel Batzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber injector
- Patent number 11,492,704
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of making graphene structures and devices
- Patent number 11,472,708
- Issue date Oct 18, 2022
- Paragraf Limited
- Simon Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 11,456,172
- Issue date Sep 27, 2022
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Internally cooled multi-hole injectors for delivery of process chem...
- Patent number 11,225,716
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 11,217,447
- Issue date Jan 4, 2022
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 11,133,155
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus including a heat dissipation member
- Patent number 11,078,571
- Issue date Aug 3, 2021
- Samsung Display Co., Ltd.
- Jongho Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, vapor phase growth apparatus, and vapor phase growth m...
- Patent number 11,047,047
- Issue date Jun 29, 2021
- NUFLARE TECHNOLOGY, INC.
- Takumi Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and temperature control method
- Patent number 11,041,241
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Akihiro Yokota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, vapor phase growth apparatus and vapor phase growth me...
- Patent number 10,920,317
- Issue date Feb 16, 2021
- NUFLARE TECHNOLOGY, INC.
- Takumi Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Horizontal heat choke faceplate design
- Patent number 10,907,252
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Yuxing Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor and method for cleaning a CVD reactor
- Patent number 10,883,171
- Issue date Jan 5, 2021
- Aixtron SE
- Marcel Kollberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process feed management for semiconductor substrate processing
- Patent number 10,832,903
- Issue date Nov 10, 2020
- ASM IP Holding B.V.
- Fred Pettinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for controlling temperature uniformity of a showerhead
- Patent number 10,780,447
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Richard Fovell
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas injector used for semiconductor equipment
- Patent number 10,731,253
- Issue date Aug 4, 2020
- Hermes-Epitek Corporation
- Tsan-Hua Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating device and coating method
- Patent number 10,734,584
- Issue date Aug 4, 2020
- Aixtron SE
- Markus Gersdorff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two zone flow cooling plate design with concentric or spiral channe...
- Patent number 10,697,061
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas jetting apparatus for film formation apparatus
- Patent number 10,676,825
- Issue date Jun 9, 2020
- Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Yoichiro Tabata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooled gas feed block with baffle and nozzle for HDP-CVD
- Patent number 10,662,529
- Issue date May 26, 2020
- Applied Materials, Inc.
- Govinda Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 10,604,841
- Issue date Mar 31, 2020
- Lam Research Corporation
- Rachel Batzer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of producing a two-dimensional material
- Patent number 10,593,546
- Issue date Mar 17, 2020
- Paragraf Ltd.
- Simon Charles Stewart Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
- Publication number 20240417854
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Troy GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20240318312
- Publication date Sep 26, 2024
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GAS-INLET ELEMENT FOR A CVD REACTOR
- Publication number 20240263310
- Publication date Aug 8, 2024
- AIXTRON SE
- Adam BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240263304
- Publication date Aug 8, 2024
- ASM IP HOLDING B.V.
- Seung Wook Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND PROCESSING METHOD
- Publication number 20240209508
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR
- Publication number 20240167157
- Publication date May 23, 2024
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CVD REACTOR COMPRISING A PROCESS CHAMBER FLOOR RISING IN A FEEDER ZONE
- Publication number 20240102164
- Publication date Mar 28, 2024
- AIXTRON SE
- Levin David Richard Johannes BEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR USING SHIELD PLATE IN A CVD REACTOR
- Publication number 20230357928
- Publication date Nov 9, 2023
- AIXTRON SE
- Adam BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPLIT SHOWERHEAD COOLING PLATE
- Publication number 20230203658
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Andrew BORTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20230175134
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SHOWERHEAD THERMAL MANAGEMENT USING GAS COOLING
- Publication number 20230131502
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS
- Publication number 20230097346
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER INJECTOR
- Publication number 20230027683
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD AND PLASMA PROCESSING APPARATUS
- Publication number 20220403518
- Publication date Dec 22, 2022
- TOKYO ELECTRON LIMITED
- Hisashi HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WALL-COOLED GAS-INLET ELEMENT FOR A CVD REACTOR
- Publication number 20220396877
- Publication date Dec 15, 2022
- AIXTRON SE
- Marcel KOLLBERG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL
- Publication number 20220399201
- Publication date Dec 15, 2022
- Paragraf Ltd.
- Simon Charles Stewart THOMAS
- C01 - INORGANIC CHEMISTRY
Information Patent Application
THERMALLY CONTROLLED CHANDELIER SHOWERHEAD
- Publication number 20220282377
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Bin Luo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING A SEMICONDUCTOR LAYER SYSTEM, WHICH CONTAINS...
- Publication number 20220205086
- Publication date Jun 30, 2022
- AIXTRON SE
- Adam BOYD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL
- Publication number 20220028683
- Publication date Jan 27, 2022
- Paragraf Ltd.
- Simon Charles Stewart THOMAS
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SHIELD PLATE FOR A CVD REACTOR
- Publication number 20220002872
- Publication date Jan 6, 2022
- AIXTRON SE
- Adam BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20210371982
- Publication date Dec 2, 2021
- LAM RESEARCH CORPORATION
- Rachel BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210172064
- Publication date Jun 10, 2021
- ASM IP HOLDING B.V.
- HyungChul Moon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERNALLY COOLED MULTI-HOLE INJECTORS FOR DELIVERY OF PROCESS CHE...
- Publication number 20210156029
- Publication date May 27, 2021
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD OF MAKING GRAPHENE STRUCTURES AND DEVICES
- Publication number 20200361775
- Publication date Nov 19, 2020
- Paragraf Limited
- Simon Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT
- Publication number 20200291523
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- David M. ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL
- Publication number 20200194255
- Publication date Jun 18, 2020
- Paragraf Ltd.
- Simon Charles Stewart THOMAS
- C01 - INORGANIC CHEMISTRY
Information Patent Application
DEPOSITION APPARATUS INCLUDING A HEAT DISSIPATION MEMBER
- Publication number 20200190668
- Publication date Jun 18, 2020
- SAMSUNG DISPLAY CO., LTD.
- Jongho PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD, VAPOR PHASE GROWTH APPARATUS, AND VAPOR PHASE GROWTH M...
- Publication number 20200131639
- Publication date Apr 30, 2020
- NUFLARE TECHNOLOGY, INC.
- Takumi YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER INJECTOR
- Publication number 20200071832
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD, VAPOR PHASE GROWTH APPARATUS, AND VAPOR PHASE GROWTH M...
- Publication number 20190330739
- Publication date Oct 31, 2019
- NUFLARE TECHNOLOGY, INC.
- Takumi YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cooled nozzles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

In-situ semiconductor processing chamber temperature apparatus

Method for using shield plate in a CVD reactor

Integrated showerhead with thermal control for delivering radical a...

Substrate processing apparatus

Method of producing a two-dimensional material

Substrate processing apparatus

Chamber injector

Shield plate for a CVD reactor

Integrated showerhead with thermal control for delivering radical a...

Chamber injector

Method of making graphene structures and devices

Method of producing a two-dimensional material

Internally cooled multi-hole injectors for delivery of process chem...

Method of producing a two-dimensional material

Apparatus for depositing metal films with plasma treatment

Deposition apparatus including a heat dissipation member

Shower head, vapor phase growth apparatus, and vapor phase growth m...

Plasma processing apparatus and temperature control method

Shower head, vapor phase growth apparatus and vapor phase growth me...

Horizontal heat choke faceplate design

CVD reactor and method for cleaning a CVD reactor

Process feed management for semiconductor substrate processing

Apparatus for controlling temperature uniformity of a showerhead

Gas injector used for semiconductor equipment

Coating device and coating method

Two zone flow cooling plate design with concentric or spiral channe...

Gas jetting apparatus for film formation apparatus

Cooled gas feed block with baffle and nozzle for HDP-CVD

Integrated showerhead with thermal control for delivering radical a...

Method of producing a two-dimensional material

Patents Applicationslast 30 patents

MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

GAS-INLET ELEMENT FOR A CVD REACTOR

SUBSTRATE PROCESSING APPARATUS

DEPOSITION APPARATUS AND PROCESSING METHOD

GAS INJECTOR

CVD REACTOR COMPRISING A PROCESS CHAMBER FLOOR RISING IN A FEEDER ZONE

METHOD FOR USING SHIELD PLATE IN A CVD REACTOR

SPLIT SHOWERHEAD COOLING PLATE

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SHOWERHEAD THERMAL MANAGEMENT USING GAS COOLING

FLOW GUIDE APPARATUSES FOR FLOW UNIFORMITY CONTROL IN PROCESS CHAMBERS

CHAMBER INJECTOR

SHOWER HEAD AND PLASMA PROCESSING APPARATUS

WALL-COOLED GAS-INLET ELEMENT FOR A CVD REACTOR

A METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL

THERMALLY CONTROLLED CHANDELIER SHOWERHEAD

METHOD FOR DEPOSITING A SEMICONDUCTOR LAYER SYSTEM, WHICH CONTAINS...

METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL

SHIELD PLATE FOR A CVD REACTOR

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

SUBSTRATE PROCESSING APPARATUS

INTERNALLY COOLED MULTI-HOLE INJECTORS FOR DELIVERY OF PROCESS CHE...

A METHOD OF MAKING GRAPHENE STRUCTURES AND DEVICES

CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT

METHOD OF PRODUCING A TWO-DIMENSIONAL MATERIAL

DEPOSITION APPARATUS INCLUDING A HEAT DISSIPATION MEMBER

SHOWER HEAD, VAPOR PHASE GROWTH APPARATUS, AND VAPOR PHASE GROWTH M...

CHAMBER INJECTOR

SHOWER HEAD, VAPOR PHASE GROWTH APPARATUS, AND VAPOR PHASE GROWTH M...