Creating layers of material on a substrate

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B81C1/00349

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00349Creating layers of material on a substrate

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
IC die, probe and ultrasound system
- Patent number 12,128,443
- Issue date Oct 29, 2024
- Koninklijke Philips N.V.
- Wojtek Sudol
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Wafer level packaging of MEMS
- Patent number 12,091,311
- Issue date Sep 17, 2024
- Texas Instruments Incorporated
- Stuart M. Jacobsen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,964,866
- Issue date Apr 23, 2024
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,915,924
- Issue date Feb 27, 2024
- Denso Corporation
- Megumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pizoelectric MEMS device with electrodes having low surface roughness
- Patent number 11,812,664
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for manufacturing mems device
- Patent number 11,753,296
- Issue date Sep 12, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stable landing above RF conductor in MEMS device
- Patent number 11,746,002
- Issue date Sep 5, 2023
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanosheet MEMs sensor device and method of manufacture
- Patent number 11,685,647
- Issue date Jun 27, 2023
- NXP B.V.
- Mark Douglas Hall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having uniform contacts
- Patent number 11,667,516
- Issue date Jun 6, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transfer system for microelements
- Patent number 11,618,673
- Issue date Apr 4, 2023
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 11,414,320
- Issue date Aug 16, 2022
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a flexible MEMS device
- Patent number 11,261,084
- Issue date Mar 1, 2022
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly having reflective layers on both sides
- Patent number 11,209,641
- Issue date Dec 28, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
IC die, probe and ultrasound system
- Patent number 11,161,146
- Issue date Nov 2, 2021
- Koninklijke Philips N.V.
- Wojtek Sudol
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress compensation for piezoelectric optical MEMS devices
- Patent number 11,148,939
- Issue date Oct 19, 2021
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transfer system and transfer method for microelements, manufacturin...
- Patent number 11,142,452
- Issue date Oct 12, 2021
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate with sliding dielectric film and method of manufacturing...
- Patent number 11,119,046
- Issue date Sep 14, 2021
- KOREA INSTITUTE OF MACHINERY & MATERIALS
- Sung-Gyu Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to protect electrodes from oxidation in a MEMS device
- Patent number 11,050,012
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 11,046,577
- Issue date Jun 29, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 10,913,652
- Issue date Feb 9, 2021
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 10,889,492
- Issue date Jan 12, 2021
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device including a capacitive pressure sensor and manufacturin...
- Patent number 10,689,251
- Issue date Jun 23, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a monocrystalline substrate and micromechanic...
- Patent number 10,611,630
- Issue date Apr 7, 2020
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device including a capacitive pressure sensor and manufacturin...
- Patent number 10,407,301
- Issue date Sep 10, 2019
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF
- Publication number 20240351859
- Publication date Oct 24, 2024
- WUHAN NEURACOM TECHNOLOGY DEVELOPMENT CO., LTD.
- Li HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION OF PIGMENTS HAVING A DEFINED SIZE AND SHAPE
- Publication number 20240026159
- Publication date Jan 25, 2024
- GIESECKE+DEVRIENT CURRENCY TECHNOLOGY GMBH
- Maik Rudolf Johann SCHERER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE
- Publication number 20230371383
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
- Publication number 20230249959
- Publication date Aug 10, 2023
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin film getter structure having miniature heater and manufacturin...
- Publication number 20220340412
- Publication date Oct 27, 2022
- SHANGHAI INDUSTRIAL µTECHNOLOGY RESEARCH INSTITUTE
- Shinan WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nanosheet MEMS Sensor Device and Method of Manufacture
- Publication number 20220274828
- Publication date Sep 1, 2022
- NXP B.V.
- Mark Douglas Hall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IC DIE, PROBE AND ULTRASOUND SYSTEM
- Publication number 20220048071
- Publication date Feb 17, 2022
- Koninklijke Philips N.V.
- Wojtek SUDOL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Transfer system for microelements
- Publication number 20220002146
- Publication date Jan 6, 2022
- Xiamen San'An Optoelectronics Co., Ltd.
- Chenke HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20210405347
- Publication date Dec 30, 2021
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARTIFICIAL RETINAL NERVE FLEXIBLE MICROELECTRODE DEVICE AND FABRICA...
- Publication number 20210290947
- Publication date Sep 23, 2021
- Wuhan China Star Optoelectronics Technology Co., Ltd.
- Chengzhi LUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE
- Publication number 20210265557
- Publication date Aug 26, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210035799
- Publication date Feb 4, 2021
- DENSO CORPORATION
- Megumi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for Producing Thin-Film Layers and Microsystems Having Thin...
- Publication number 20210017019
- Publication date Jan 21, 2021
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING UNIFORM CONTACTS
- Publication number 20200407214
- Publication date Dec 31, 2020
- Qorvo US, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING A FLEXIBLE MEMS DEVICE
- Publication number 20200399121
- Publication date Dec 24, 2020
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STABLE LANDING ABOVE RF CONDUCTOR IN MEMS DEVICE
- Publication number 20200399115
- Publication date Dec 24, 2020
- Qorvo US, Inc.
- Robertus Petrus Van Kampen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
- Publication number 20200391999
- Publication date Dec 17, 2020
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE
- Publication number 20200313073
- Publication date Oct 1, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20200209615
- Publication date Jul 2, 2020
- DiDi Research America, LLC
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...
- Publication number 20200198963
- Publication date Jun 25, 2020
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...
- Publication number 20190345028
- Publication date Nov 14, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...
- Publication number 20190241431
- Publication date Aug 8, 2019
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20190135613
- Publication date May 9, 2019
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...
- Publication number 20180282152
- Publication date Oct 4, 2018
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IC DIE, PROBE AND ULTRASOUND SYSTEM
- Publication number 20180264519
- Publication date Sep 20, 2018
- Koninklijke Philips N.V.
- Wojtek Sudol
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FORMING A MASKING LAYER
- Publication number 20180229454
- Publication date Aug 16, 2018
- Agency for Science, Technology and Research
- Yau Yen Ooi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES
- Publication number 20180179054
- Publication date Jun 28, 2018
- TEXAS INSTRUMENTS INCORPORATED
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Creating layers of material on a substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Process for producing a base of an analysis cell for analyzing a bi...

Anti-stiction process for MEMS device

IC die, probe and ultrasound system

Wafer level packaging of MEMS

MEMS device having uniform contacts

Semiconductor device and method for manufacturing the same

Pizoelectric MEMS device with electrodes having low surface roughness

MEMS device and method for manufacturing mems device

Stable landing above RF conductor in MEMS device

Method for coating microstructured components

Nanosheet MEMs sensor device and method of manufacture

MEMS device having uniform contacts

Transfer system for microelements

Methods for producing thin-film layers and microsystems having thin...

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Method of forming a flexible MEMS device

Micromachined mirror assembly having reflective layers on both sides

IC die, probe and ultrasound system

Stress compensation for piezoelectric optical MEMS devices

Transfer system and transfer method for microelements, manufacturin...

Substrate with sliding dielectric film and method of manufacturing...

Method to protect electrodes from oxidation in a MEMS device

Method for processing a monocrystalline substrate and micromechanic...

Micromechanical z-inertial sensor

Methods for producing thin-film layers and microsystems having thin...

MEMS device including a capacitive pressure sensor and manufacturin...

Method for processing a monocrystalline substrate and micromechanic...

Anti-stiction process for MEMS device

MEMS device including a capacitive pressure sensor and manufacturin...

Patents Applicationslast 30 patents

MULTI-LEVEL MEMS PROCESS

CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF

PRODUCTION OF PIGMENTS HAVING A DEFINED SIZE AND SHAPE

METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE

MEMS DEVICE HAVING UNIFORM CONTACTS

Thin film getter structure having miniature heater and manufacturin...

Nanosheet MEMS Sensor Device and Method of Manufacture

ANTI-STICTION PROCESS FOR MEMS DEVICE

IC DIE, PROBE AND ULTRASOUND SYSTEM

Transfer system for microelements

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

ARTIFICIAL RETINAL NERVE FLEXIBLE MICROELECTRODE DEVICE AND FABRICA...

METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Methods for Producing Thin-Film Layers and Microsystems Having Thin...

MEMS DEVICE HAVING UNIFORM CONTACTS

METHOD OF FORMING A FLEXIBLE MEMS DEVICE

STABLE LANDING ABOVE RF CONDUCTOR IN MEMS DEVICE

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

METHOD FOR PROCESSING A MONOCRYSTALLINE SUBSTRATE AND MICROMECHANIC...

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...

METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...

MICROMECHANICAL Z-INERTIAL SENSOR

MEMS DEVICE INCLUDING A CAPACITIVE PRESSURE SENSOR AND MANUFACTURIN...

IC DIE, PROBE AND ULTRASOUND SYSTEM

METHOD AND SYSTEM FOR FORMING A MASKING LAYER

STRESS COMPENSATION FOR PIEZOELECTRIC OPTICAL MEMS DEVICES