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CVD [Chemical Vapor Deposition]
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H01J2237/3321
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/3321
CVD [Chemical Vapor Deposition]
Industries
Overview
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for processing a semiconductor substrate
Patent number
11,972,935
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Hsiang Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
Patent number
11,972,944
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Timothee Julien Vincent Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas transport system
Patent number
11,971,057
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jheng-Syun Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for chemical vapour deposition
Patent number
11,970,765
Issue date
Apr 30, 2024
Ionautics AB
Henrik Pedersen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support for chucking of mask for deposition processes
Patent number
11,967,516
Issue date
Apr 23, 2024
Applied Materials, Inc.
Jrjyan Jerry Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic susceptor
Patent number
11,955,320
Issue date
Apr 9, 2024
MiCo Ceramics Ltd.
Ju Sung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method
Patent number
11,952,661
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radio frequency match strap assembly
Patent number
11,955,317
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Sze Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-zone heater
Patent number
11,956,863
Issue date
Apr 9, 2024
NGK Insulators, Ltd.
Yutaka Unno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,955,333
Issue date
Apr 9, 2024
Applied Materials, Inc.
Jethro Tannos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
Patent number
11,948,783
Issue date
Apr 2, 2024
Applied Materials, Inc.
Hari Ponnekanti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Temperature measurement for substrate carrier using a heater elemen...
Patent number
11,929,241
Issue date
Mar 12, 2024
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
11,923,179
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company Limited
Pei-Yu Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,915,927
Issue date
Feb 27, 2024
Kokusai Electric Corporation
Kazuyuki Okuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic susceptor
Patent number
11,908,667
Issue date
Feb 20, 2024
MiCo Ceramics Ltd.
Ju Sung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Device and method for tuning plasma distribution using phase control
Patent number
11,908,662
Issue date
Feb 20, 2024
Applied Materials, Inc.
Xiaopu Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,901,175
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-step process for flowable gap-fill film
Patent number
11,901,222
Issue date
Feb 13, 2024
Applied Materials, Inc.
Maximillian Clemons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma-enhanced chemical vapor deposition method of forming lithium...
Patent number
11,898,244
Issue date
Feb 13, 2024
Samsung Electronics Co., Ltd.
Jooho Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlling a processing reactor
Patent number
11,894,220
Issue date
Feb 6, 2024
Applied Materials, Inc.
Michael Nichols
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monolithic modular microwave source with integrated process gas dis...
Patent number
11,881,384
Issue date
Jan 23, 2024
Applied Materials, Inc.
James Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma source utilizing a macro-particle reduction coating and meth...
Patent number
11,875,976
Issue date
Jan 16, 2024
AGC FLAT GLASS NORTH AMERICA, INC.
John Chambers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas supply apparatus and gas supply method
Patent number
11,866,825
Issue date
Jan 9, 2024
Tokyo Electron Limited
Hiroyuki Hayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mesa height modulation for thickness correction
Patent number
11,869,795
Issue date
Jan 9, 2024
Applied Materials, Inc.
Saketh Pemmasani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
Patent number
11,859,286
Issue date
Jan 2, 2024
Kioxia Corporation
Yuya Matsubara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus, calculation method, and calculation pr...
Patent number
11,862,438
Issue date
Jan 2, 2024
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ closed-loop management of radio frequency power generator
Patent number
11,854,768
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wei Ting Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Faceplate having a curved surface
Patent number
11,851,759
Issue date
Dec 26, 2023
Applied Materials, Inc.
Shailendra Srivastava
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
Patent number
11,854,771
Issue date
Dec 26, 2023
Applied Materials, Inc.
Chien-Teh Kao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-plate electrostatic chucks with ceramic baseplates
Patent number
11,848,177
Issue date
Dec 19, 2023
Lam Research Corporation
Feng Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHAMBER LINER FOR SUBSTRATE PROCESSING APPARATUS
Publication number
20240150898
Publication date
May 9, 2024
ASM IP HOLDING B.V.
Yoshiyuki Kikuchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240153760
Publication date
May 9, 2024
Kokusai Electric Corporation
Kazuyuki OKUDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR MANUFACTURING DISPLAY DEVICE
Publication number
20240145219
Publication date
May 2, 2024
SAMSUNG DISPLAY CO., LTD.
Min Gyu PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
Publication number
20240133031
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
Publication number
20240136153
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Matthew Scott Weimer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-STEP PROCESS FOR FLOWABLE GAP-FILL FILM
Publication number
20240128121
Publication date
Apr 18, 2024
Applied Materials, Inc.
Maximillian CLEMONS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONOLITHIC ANISOTROPIC SUBSTRATE SUPPORTS
Publication number
20240128062
Publication date
Apr 18, 2024
LAM RESEARCH CORPORATION
Joel HOLLINGSWORTH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
Publication number
20240112893
Publication date
Apr 4, 2024
LAM RESEARCH CORPORATION
Feng WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BROADBAND SUPPLY CIRCUITRY FOR A PLASMA PROCESSING SYSTEM
Publication number
20240112886
Publication date
Apr 4, 2024
Applied Materials, Inc.
Tiefeng SHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective Deposition of Thin Films with Improved Stability
Publication number
20240110284
Publication date
Apr 4, 2024
Applied Materials, Inc.
Lulu XIONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Publication number
20240105427
Publication date
Mar 28, 2024
Applied Materials, Inc.
Chien-Teh KAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240093372
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Tadashi TAKASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition of Thick Layers of Silicon Dioxide
Publication number
20240096616
Publication date
Mar 21, 2024
SPTS TECHNOLOGIES LIMITED
Matt Edmonds
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYMMETRIC ANTENNA ARRAYS FOR HIGH DENSITY PLASMA ENHANCED PROCESS C...
Publication number
20240087847
Publication date
Mar 14, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS, CALCULATION METHOD, AND CALCULATION PR...
Publication number
20240087855
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240084455
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Che Wei YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU CLOSED-LOOP MANAGEMENT OF RADIO FREQUENCY POWER GENERATOR
Publication number
20240087851
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei Ting LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPACT REMOTE PLASMA SOURCE FOR HDP CVD CHAMBERS
Publication number
20240087852
Publication date
Mar 14, 2024
Advanced Refurbishment Technologies LLC d/b/a ARTSemi LLC
Christopher William Lewis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING TH...
Publication number
20240087856
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Jiwon Son
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
END POINT DETECTION METHOD AND APPARATUS FOR ANISOTROPIC ETCHING US...
Publication number
20240087860
Publication date
Mar 14, 2024
SANDISK TECHNOLOGIES LLC
Shoichi MURAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240079218
Publication date
Mar 7, 2024
NGK Insulators, Ltd.
Tatsuya KUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240071748
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
SangHeon Yong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PIPING, SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR MANUF...
Publication number
20240068094
Publication date
Feb 29, 2024
KIOXIA Corporation
Yuya MATSUBARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD OF CLEANING PROCESS CHAMBER COMPONENTS
Publication number
20240055230
Publication date
Feb 15, 2024
Applied Materials, Inc.
Jong Yun KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
Publication number
20240055285
Publication date
Feb 15, 2024
LAM RESEARCH CORPORATION
Edward Augustyniak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20240055233
Publication date
Feb 15, 2024
JUSUNG ENGINEERING CO., LTD.
Chul-Joo HWANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FACEPLATE HAVING A CURVED SURFACE
Publication number
20240044000
Publication date
Feb 8, 2024
Applied Materials, Inc.
Shailendra SRIVASTAVA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240044006
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Hiroki ARAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDI...
Publication number
20240038492
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
HYUNGJOON KIM
H01 - BASIC ELECTRIC ELEMENTS