Depositing an anti-stiction or passivation coating

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CPC
B81C2201/112

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/112Depositing an anti-stiction or passivation coating

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
- Patent number 12,139,397
- Issue date Nov 12, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 12,054,382
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device having a rugged package and fabrication process thereof
- Patent number 11,873,215
- Issue date Jan 16, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 11,655,138
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,533,565
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 11,192,775
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor
- Patent number 11,111,137
- Issue date Sep 7, 2021
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 11,097,941
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,051,109
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlled deposition of metal and metal cluster ions by surface fi...
- Patent number 10,876,202
- Issue date Dec 29, 2020
- University of North Texas
- Guido Fridolin Verbeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 10,689,247
- Issue date Jun 23, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,633,247
- Issue date Apr 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a eutectic bond between a wafer having an anti-stiction coa...
- Patent number 10,427,929
- Issue date Oct 1, 2019
- NXP USA, INC.
- Ruben B. Montez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,351,421
- Issue date Jul 16, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
- Patent number 10,273,140
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 10,273,141
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20230264945
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT
- Publication number 20220289566
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- James D. HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
- Publication number 20220185661
- Publication date Jun 16, 2022
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20220135397
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20210314707
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...
- Publication number 20210107785
- Publication date Apr 15, 2021
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20200317506
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
- Publication number 20200115224
- Publication date Apr 16, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20200107130
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION
- Publication number 20200024125
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
- Publication number 20190284044
- Publication date Sep 19, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE
- Publication number 20190256347
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Hsien CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Comb MEMS Device and Method of Making a Comb MEMS Device
- Publication number 20190185315
- Publication date Jun 20, 2019
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20190161347
- Publication date May 30, 2019
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20190031503
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20190002273
- Publication date Jan 3, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
- Publication number 20180265352
- Publication date Sep 20, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing Method of Micro-Electro-Mechanical System Device
- Publication number 20180201496
- Publication date Jul 19, 2018
- SensorTek technology Corp.
- Hsin-Hung Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20180118560
- Publication date May 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR MEMS STRUCTURE
- Publication number 20180099865
- Publication date Apr 12, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Structure with Graphene Component
- Publication number 20180057351
- Publication date Mar 1, 2018
- ROBERT BOSCH GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROLLED DEPOSITION OF METAL AND METAL CLUSTER IONS BY SURFACE FI...
- Publication number 20180002806
- Publication date Jan 4, 2018
- University of North Texas
- Guido Fridolin Verbeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Depositing an anti-stiction or passivation coating

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for fabricating a MEMS device

Anti-stiction enhancement of ruthenium contact

Anti-stiction process for MEMS device

Selective self-assembled monolayer patterning with sacrificial laye...

Method and structure for CMOS-MEMS thin film encapsulation

Roughness selectivity for MEMS movement stiction reduction

Mems device having a rugged package and fabrication process thereof

MEMS device and method for making the same

Method and structure for CMOS-MEMS thin film encapsulation

Roughness selectivity for MEMS movement stiction reduction

MEMS apparatus with anti-stiction layer

Dual back-plate and diaphragm microphone

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Fence structure to prevent stiction in a MEMS motion sensor

Rough layer for better anti-stiction deposition

Method for manufacturing a micromechanical sensor

Method of fabricating semiconductor structure

Dual back-plate and diaphragm microphone

Controlled deposition of metal and metal cluster ions by surface fi...

Method of stiction prevention by patterned anti-stiction layer

Method and structure for CMOS-MEMS thin film encapsulation

Method of stiction prevention by patterned anti-stiction layer

Semiconductor device and manufacture thereof

Fence structure to prevent stiction in a MEMS motion sensor

Anti-stiction process for MEMS device

Forming a eutectic bond between a wafer having an anti-stiction coa...

Semiconductor device and manufacture thereof

Substrate structure, semiconductor structure and method for fabrica...

Rough layer for better anti-stiction deposition

Patents Applicationslast 30 patents

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MEMS DEVICE AND METHOD FOR MAKING THE SAME

ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...

MEMS APPARATUS WITH ANTI-STICTION LAYER

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE

Comb MEMS Device and Method of Making a Comb MEMS Device

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

ANTI-STICTION PROCESS FOR MEMS DEVICE

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

Manufacturing Method of Micro-Electro-Mechanical System Device

Method and Structure for CMOS-MEMS Thin Film Encapsulation

SEMICONDUCTOR MEMS STRUCTURE

MEMS Structure with Graphene Component

CONTROLLED DEPOSITION OF METAL AND METAL CLUSTER IONS BY SURFACE FI...