Deposition of Al2O3

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CPC
H01L21/31616

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31616Deposition of Al2O3

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,881,379
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,272
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,271
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,879,066
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,191,378
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,176,992
- Issue date Jan 8, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,141,187
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post deposition plasma cleaning system and method
- Patent number 8,974,868
- Issue date Mar 10, 2015
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of fabricating integrated circuit capacitors having u-shape...
- Patent number 8,941,165
- Issue date Jan 27, 2015
- Samsung Electronics Co., Ltd.
- Sung-IL Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectrics containing at least one of a refractory metal or a non-...
- Patent number 8,772,851
- Issue date Jul 8, 2014
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,741,731
- Issue date Jun 3, 2014
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming dielectric film and capacitor manufacturing metho...
- Patent number 8,586,430
- Issue date Nov 19, 2013
- Elpida Memory, Inc.
- Kenji Komeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dielectrics containing at least one of a refractory metal or a non-...
- Patent number 8,557,672
- Issue date Oct 15, 2013
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 8,426,117
- Issue date Apr 23, 2013
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,420,552
- Issue date Apr 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,404,603
- Issue date Mar 26, 2013
- Hitachi Kokusai Electric Inc.
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for forming metal oxide layers
- Patent number 8,394,725
- Issue date Mar 12, 2013
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light emitting device, semiconductor device, and method of fabricat...
- Patent number 8,390,019
- Issue date Mar 5, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Grant
Glass material for radio-frequency applications
- Patent number 8,273,671
- Issue date Sep 25, 2012
- Schott AG
- Jürgen Leib
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method and semiconductor device formed by t...
- Patent number 8,273,639
- Issue date Sep 25, 2012
- Semiconductor Manufacturing International (Shanghai) Corporation
- Hua Ji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transistor device and methods of manufacture thereof
- Patent number 8,269,289
- Issue date Sep 18, 2012
- Infineon Technologies AG
- Hongfa Luan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 8,257,497
- Issue date Sep 4, 2012
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus having a lanthanum-metal oxide semiconductor device
- Patent number 8,237,216
- Issue date Aug 7, 2012
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric, capacitor using dielectric, semiconductor device using...
- Patent number 8,203,176
- Issue date Jun 19, 2012
- Renesas Electronics Corporation
- Takashi Nakagawa
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method of forming an aluminum oxide layer
- Patent number 8,163,343
- Issue date Apr 24, 2012
- Applied Materials, Inc.
- Shreyas S. Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device having oxidized metal film and manufacture met...
- Patent number 8,148,274
- Issue date Apr 3, 2012
- Kabushiki Kaisha Toshiba
- Junichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing oxide film having high dielectric constant...
- Patent number 8,143,660
- Issue date Mar 27, 2012
- Samsung Electronics Co., Ltd.
- Jung-hyun Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxide alloy layer, method of forming the metal oxide alloy la...
- Patent number 8,138,057
- Issue date Mar 20, 2012
- Samsung Electronics Co., Ltd.
- Jung-Ho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for forming metal oxide layers
- Patent number 8,114,219
- Issue date Feb 14, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tantalum aluminum oxynitride high-K dielectric
- Patent number 8,114,763
- Issue date Feb 14, 2012
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190041756
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140322923
- Publication date Oct 30, 2014
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR OPTOELECTRONICS DEVICES
- Publication number 20140217539
- Publication date Aug 7, 2014
- SILECS OY
- Juha T. Rantala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140035101
- Publication date Feb 6, 2014
- Micron Technology, Inc.
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20130213301
- Publication date Aug 22, 2013
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR OPTOELECTRONICS DEVICES
- Publication number 20130193543
- Publication date Aug 1, 2013
- SILECS OY
- Juha T. Rantala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20130122720
- Publication date May 16, 2013
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE HAVING OXIDIZED METAL FILM AND MANUFACTURE MET...
- Publication number 20120152168
- Publication date Jun 21, 2012
- Kabushiki Kaisha Toshiba
- Atsuko Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20120133428
- Publication date May 31, 2012
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120067283
- Publication date Mar 22, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120021587
- Publication date Jan 26, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS
- Publication number 20110318915
- Publication date Dec 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Liang-Gi Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transistor Device and Methods of Manufacture Thereof
- Publication number 20110284970
- Publication date Nov 24, 2011
- INFINEON TECHNOLOGIES AG
- Hongfa Luan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LANTHANUM-METAL OXIDE DIELECTRIC APPARATUS, METHODS, AND SYSTEMS
- Publication number 20110037117
- Publication date Feb 17, 2011
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
- Publication number 20110024875
- Publication date Feb 3, 2011
- Hitachi Kokusai Electric Inc.
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING DIELECTRIC FILM AND METHOD FOR FORMING CAPACITOR...
- Publication number 20110027465
- Publication date Feb 3, 2011
- Hynix Semiconductor Inc.
- Deok-Sin KIL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20110003482
- Publication date Jan 6, 2011
- Hitachi Kokusai Electric Inc.
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC, CAPACITOR USING DIELECTRIC, SEMICONDUCTOR DEVICE USING...
- Publication number 20100320520
- Publication date Dec 23, 2010
- Takashi Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Process
- Publication number 20100297474
- Publication date Nov 25, 2010
- HCF Partners, L.P.
- Arrelaine A. Dameron
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TANTALUM ALUMINUM OXYNITRIDE HIGH-K DIELECTRIC
- Publication number 20100283537
- Publication date Nov 11, 2010
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE HAVING CAPACITOR
- Publication number 20100270647
- Publication date Oct 28, 2010
- SUNG-IL CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FORMING METAL OXIDE LAYERS
- Publication number 20100147218
- Publication date Jun 17, 2010
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITOR WITH ZIRCONIUM OXIDE AND METHOD FOR FABRICATING THE SAME
- Publication number 20100084740
- Publication date Apr 8, 2010
- Kee-jeung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor epitaxial crystal substrate
- Publication number 20100084742
- Publication date Apr 8, 2010
- Sumitomo Chemical Company Limited
- Hiroyuki Sazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20100081094
- Publication date Apr 1, 2010
- TOKYO ELECTRON LIMITED
- KAZUHIDE HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING AN ALUMINUM OXIDE LAYER
- Publication number 20100055905
- Publication date Mar 4, 2010
- Applied Materials, Inc.
- SHREYAS S. KHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPACITOR WITH ZIRCONIUM OXIDE AND METHOD FOR FABRICATING THE SAME
- Publication number 20100047989
- Publication date Feb 25, 2010
- Kee-jeung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BI-AXIAL TEXTURING OF HIGH-K DIELECTRIC FILMS TO REDUCE LEAKAGE CUR...
- Publication number 20100022060
- Publication date Jan 28, 2010
- LSI Corporation
- Wai LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Light Emitting Device, Semiconductor Device, and Method of Fabricat...
- Publication number 20090302339
- Publication date Dec 10, 2009
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR STRUCTURE COMBINATION FOR THIN-FILM SOLAR CELL AND MA...
- Publication number 20090283139
- Publication date Nov 19, 2009
- Miin-Jang CHEN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Deposition of Al2O3

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Post deposition plasma cleaning system and method

Methods of fabricating integrated circuit capacitors having u-shape...

Dielectrics containing at least one of a refractory metal or a non-...

Method of manufacturing a semiconductor device

Method of forming dielectric film and capacitor manufacturing metho...

Dielectrics containing at least one of a refractory metal or a non-...

Mask pattern forming method, fine pattern forming method, and film...

Method of manufacturing a semiconductor device

Method of manufacturing semiconductor device and substrate processi...

Systems and methods for forming metal oxide layers

Light emitting device, semiconductor device, and method of fabricat...

Glass material for radio-frequency applications

Atomic layer deposition method and semiconductor device formed by t...

Transistor device and methods of manufacture thereof

Insitu post atomic layer deposition destruction of active species

Apparatus having a lanthanum-metal oxide semiconductor device

Dielectric, capacitor using dielectric, semiconductor device using...

Method of forming an aluminum oxide layer

Semiconductor device having oxidized metal film and manufacture met...

Method for manufacturing oxide film having high dielectric constant...

Metal oxide alloy layer, method of forming the metal oxide alloy la...

Systems and methods for forming metal oxide layers

Tantalum aluminum oxynitride high-K dielectric

Patents Applicationslast 30 patents

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

SEMICONDUCTOR OPTOELECTRONICS DEVICES

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

SEMICONDUCTOR OPTOELECTRONICS DEVICES

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE HAVING OXIDIZED METAL FILM AND MANUFACTURE MET...

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

Systems and Methods for Forming Metal Oxide Layers

Systems and Methods for Forming Metal Oxide Layers

PROCESS TO MAKE HIGH-K TRANSISTOR DIELECTRICS

Transistor Device and Methods of Manufacture Thereof

LANTHANUM-METAL OXIDE DIELECTRIC APPARATUS, METHODS, AND SYSTEMS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...

METHOD FOR FORMING DIELECTRIC FILM AND METHOD FOR FORMING CAPACITOR...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

DIELECTRIC, CAPACITOR USING DIELECTRIC, SEMICONDUCTOR DEVICE USING...

Atomic Layer Deposition Process

TANTALUM ALUMINUM OXYNITRIDE HIGH-K DIELECTRIC

METHOD OF FABRICATING SEMICONDUCTOR DEVICE HAVING CAPACITOR

SYSTEMS AND METHODS FOR FORMING METAL OXIDE LAYERS

CAPACITOR WITH ZIRCONIUM OXIDE AND METHOD FOR FABRICATING THE SAME

Method for manufacturing semiconductor epitaxial crystal substrate

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

METHOD OF FORMING AN ALUMINUM OXIDE LAYER

CAPACITOR WITH ZIRCONIUM OXIDE AND METHOD FOR FABRICATING THE SAME

BI-AXIAL TEXTURING OF HIGH-K DIELECTRIC FILMS TO REDUCE LEAKAGE CUR...

Light Emitting Device, Semiconductor Device, and Method of Fabricat...

SEMICONDUCTOR STRUCTURE COMBINATION FOR THIN-FILM SOLAR CELL AND MA...